• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.210-210
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• 2011

The effects of CH2F2 and N2 gas flow rates on the etch selectivity of silicon nitride (Si3N4) layers to extreme ultra-violet (EUV) resist and the variation of the line edge roughness (LER) of the EUV resist and Si3N4 pattern were investigated during etching of a Si3N4/EUV resist structure in dual-frequency superimposed CH2F2/N2/Ar capacitive coupled plasmas (DFS-CCP). The flow rates of CH2F2 and N2 gases played a critical role in determining the process window for ultra-high etch selectivity of Si3N4/EUV resist due to disproportionate changes in the degree of polymerization on the Si3N4 and EUV resist surfaces. Increasing the CH2F2 flow rate resulted in a smaller steady state CHxFy thickness on the Si3N4 and, in turn, enhanced the Si3N4 etch rate due to enhanced SiF4 formation, while a CHxFy layer was deposited on the EUV resist surface protecting the resist under certain N2 flow conditions. The LER values of the etched resist tended to increase at higher CH2F2 flow rates compared to the lower CH2F2 flow rates that resulted from the increased degree of polymerization.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.281-285
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• 2007

추력기의 성능 등을 예측하려면 기하학적 모양과 압력비를 고려한 노즐 유동 특성을 해석해야 한다. 이 논문에서는 연속체 역학 역학의 가정이 성립하는 한계를 파악하기 위해서 인공위성 자세 제어용으로 사용되는 실제 축대칭 노즐에서의 유동을 계산하였다. 유동은 정상 상태의 비반응 압축성 유동이고 비정렬 격자계를 사용하였다. 추력기의 면적비는 56이고 주위 압력의 진공도를 변경하면서 해석하였는데 그 압력이 $10^{-3}$ 기압 이하가 되면 연속체 역학은 더 이상 타당하지 않게 된다.

• 한국진공학회지
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• 제17권6호
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• pp.481-486
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• 2008

나트륨(Na) 함유량이 다른 세 종류의 유리관인 Borosilicate($Na_2O$ 4%), Soda-Lime($Na_2O$ 14%), 그리고 Aluminosilicate($Na_2O$ 0.06%) 유리관의 방전 실험을 통하여 유리관 내벽의 흑화를 관측하였다. 수은 혼합기체(Ne+Ar+Hg)의 방전에서 나트륨 함유량이 많은 유리관일수록 흑화가 심하게 나타난다. 무수은 가스(Ne+Ar)의 방전에서는 흑화가 나타나지 않는다. 나트륨 함유량이 많은 수은 방전 램프에서 봉입 기체의 압력이 작을수록 흑화의 정도가 커진다. 흑화 방지재를 도포한 유리관은 흑화가 미약하게 나타난다. 이 실험을 통하여 흑화는 유리재의 나트륨 성분과 수은 이온의 결합에 의한 아말감($NaHg_2$)이 유리관 내벽에 형성된 것으로 분석된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• 수산해양기술연구
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• 제50권3호
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• pp.274-283
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• 2014

Swelling of the heat-treated netting for gillnet was estimated through the netting height in square acrylic tank. Experimental Nylon netting and PBSAT netting were heat-treated by using the high-degree vacuum method in hot water after net making. Heat-treatment temperatures were conducted with Nylon netting $105^{\circ}C$ and PBSAT netting $62^{\circ}C$, $65^{\circ}C$, $66^{\circ}C$, $67^{\circ}C$. The swelling measurement method of a netting using the square tank was capable of the reduction measurement errors comparing with measurement methods of a mesh inner angle and the shortening rate of a mesh size. In addition, this method was available to comparison evaluation for each netting more easily. Wet type heat-treatment apparatus with high-degree vacuum was shown higher $7{\sim}8^{\circ}C$ inner side temperature than a setting temperature. The tensile strength and elongation of Nylon netting and PBSAT netting were shown higher wet condition than dry condition. The tensile strengths of PBSAT monofilaments in dry and wet condition were sharply decreased at heat-treatment temp. $75^{\circ}C$ than heat-treatment temp. $74^{\circ}C$.

• 한국방사선학회논문지
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• 제18권1호
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• pp.45-52
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• 2024

본 연구에서는 의료기관에서 방사성동위원소를 이용하여 암을 비롯한 여러 질환을 검사하는 PET/CT 검사에서 환자의 움직임으로 인한 영상의 질 저하와 판독 오류를 발생할 수 있는 점을 보완하기 위해 AI 기반의 Algorithm을 이용하여 개발한 Mothion Free 소프트웨어를 이용하여 호흡으로 인한 움직임의 보정 정도를 확인하고 유용성을 평가하여 임상에서의 적용을 위한 연구를 하였다. 실험 방법은 RPM Phantom을 사용하여 방사성동위원소 18F-FDG를 진공 바이알과 서로 다른 크기 NEMA IEC body Phantom의 sphere에 방사성동위원소를 주입하고 이것의 움직임을 호흡 시 움직이는 병소로 연출하여 영상을 획득하였다. 진공 바이알은 서로 다른 위치에서 움직임 정도를 다르게 하였고, 서로 다른 크기 NEMA IEC body Phantom의 sphere는 서로 다른 병소의 크기를 연출 하였다. 획득한 영상을 통하여 병소의 체적, 최대 SUV, 평균 SUV를 각각 측정하여 Mothion Free가 움직임 보정 정도를 정량적 평가를 하였다. 움직임 정도를 크게 설정한 진공바이알 A의 평균 SUV는 23.36 %, 움직임 정도를 작게 설정한 진공 바이알 B는 29.3 % 오차율이 감소하였다. NEMA IEC body Phantom의 sphere 37 mm, 22 mm에서의 평균 SUV는 각각 29.3 %, 26.51 % 오차율이 감소하였다. 오차율을 산출한 네 가지 측정치의 평균 오차율 30.03 % 감소하여 보다 정확한 평균 SUV 값을 나타내었다. 이 연구에서는 2차원적인 움직임 만을 연출할 수 있었기에 보다 정확한 데이터를 얻기 위해서는 실제 인체의 호흡 운동을 구현할 수 있는 Phantom을 이용하고, 움직임의 범위의 다양성을 구성한다면 보다 정확한 유용성 평가를 할 수 있다고 연구된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.114-114
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• 2012

Even though graphene was introduced with a great hope to replace silicon in future, small (or zero) band gap and poor stability have become major challenges in graphene electronics. Especially, rectification and amplification function which are the elemental functions of silicon device, is very difficult to implement without a bandgap. However, the graphene can still be used in many other device applications if the merits of graphene are creatively utilized. For example, graphene can be applied to almost any kind of substrate. Its conductivity can be varied in some degree using electric field, charge dipole, attached molecules, and many other ways. Recently, graphene stacked with ferroelectric materials or piezoelectric materials has been actively studied for various device applications. In this talk, various device applications of graphene using hybrid stack or novel device structure will be introduced and their prospect will be discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.389.2-389.2
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• 2016

The flexible solid state device has been widely studied as portable and wearable device applications such as display, sensor and curved circuits. A zero-bias operation without any external power consumption is a highly-demanding feature of semiconductor devices, including optical communication, environment monitoring and digital imaging applications. Moreover, the flexibility of device would give the degree of freedom of transparent electronics. Functional and transparent abrupt p/n junction device has been realized by combining of p-type NiO and n-type ZnO metal oxide semiconductors. The use of a plastic polyethylene terephthalate (PET) film substrate spontaneously allows the flexible feature of the devices. The functional design of p-NiO/n-ZnO metal oxide device provides a high rectifying ratio of 189 to ensure the quality junction quality. This all transparent metal oxide device can be operated without external power supply. The flexible p-NiO/n-ZnO device exhibit substantial photodetection performances of quick response time of $68{\mu}s$. We may suggest an efficient design scheme of flexible and functional metal oxide-based transparent electronics.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.270-270
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• 2016

We fabricated an organic-inorganic nano laminated encapsulation layer using molecular layer deposition (MLD) combined with atomic layer deposition (ALD). The $Al_2O_3$ inorganic layers as an effective single encapsulation layer were deposited at 80 degree C using ALD with alternating surface-saturation reactions of TMA and $H_2O$. A self-assembled organic layers (SAOLs) were fabricated at the same temperature using MLD. MLD and ALD deposition process were performed in the same reaction chamber. The prepared SAOL-$Al_2O_3$ organic-inorganic nano laminate films exhibited good mechanical stability and excellent encapsulation property. The measurement of water vapor transmission rate (WVTR) was performed with Ca test. We controlled thickness-ratio of organic and inorganic layer, and specific ratio showed a lowest WVTR value. Also this encapsulation layer contained very few pin-holes or defects which were linked in whole area by defect test. To apply into real OLEDs panels, we controlled a film stress from tensile to compressive and flexibility defined as an elastic modulus with organic-inorganic ratio. It has shown that OLEDs panel encapsulated with nano laminate layer exhibits better properties than single layer encapsulated in acceleration conditions. These results indicate that the organic-inorganic nano laminate thin films have high potential for flexible display applications.

• 한국세라믹학회지
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• 제53권4호
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• pp.450-455
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• 2016

Color change in single-crystal, yellow, red, purple, and colorless cubic zirconias (CZs) was investigated as a function of annealing in vacuum and air atmosphere at $800-1400^{\circ}C$ for 30 min, for development of a damascene process of plugging a precious metal paste at the elevated temperature. Coloring-element contents of the CZs were evaluated using WD-XRF, and the color change determined visually by naked eye, and using a digital camera and UV-Vis-NIR color analyzer. WD-XRF showed that all of the CZs had cubic-phase stabilizer elements and coloring elements. All CZs that underwent vacuum annealing exhibited a slight color change at $<900^{\circ}C$, while their colors began to change to black at $1100^{\circ}C$, and became opaque black at $1400^{\circ}C$. After air annealing, there was almost no color change up to $1400^{\circ}C$. Since red and purple CZs showed greater color difference (CD) values than the others, the degree of CD is likely to depend on the original color of the CZ due to the different stabilities of their coloring elements during annealing. Based on our results, it is suggested that annealing in air at $<900^{\circ}C$ is advantageous, and assorted colored CZs can be used for precious metal damascene.