• 한국정밀공학회지
• /
• 제24권6호
• /
• pp.86-95
• /
• 2007

This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

• 대한화학회지
• /
• 제14권4호
• /
• pp.321-326
• /
• 1970

The relation between the heating temperature and the V.C.P(Vacuum Condensing Point) at different degree of vacuum through the sublimatographic separation was studied where by ; (1) Anthracene and Anthraquinone, ${\alpha}$-Naphtol and ${\beta}$-Naphthol, o-Aminobenzoicacid and p-Aminobeenzoicacid were easily separated from each of its mixtures as shown in Figure9, 10 and 11, while tailings appeared appreciably. The results were in good agreement with those expected from the $t_k$-V.C.P curves in Figures 3,4,5,6,7 and 8. (2) The relation between the degree of vacuum and the V.C.P. of ${\alpha}$-Naphthol and Anthracene at different heating temperatures appeared as follows and are shown in Figures 12 and 13.

• 대한기계학회논문집B
• /
• 제35권9호
• /
• pp.883-890
• /
• 2011

진공 펌프의 최적설계를 위해 수치해석을 수행하였다. 진공 베인 펌프 설계인자인 베인 각도 변화, 입출구 파이프의 위치와 각도 변화, 베인 개수 변화와 회전속도에 따른 진공도의 영향을 평가하였다. 베인 각도 변화는 동일한 체적의 유지로 최대 진공도 값에 큰 영향을 미치지 않았으나, 토출부의 각도 변화는 유동흐름의 간섭을 줄일 수 있고 이것으로 인한 펌프의 손실을 줄일 수 있다. 회전속도가 증가할수록 질량유량은 증가하였으나 고속 회전속도에서 최대 진공도 값을 나타내지는 않았다. 또한 베인의 개수가 증가할수록 질량유량의 변화폭은 감소하였고, 압력강하는 완화됨을 확인하였다.

• 한국정밀공학회지
• /
• 제23권10호
• /
• pp.103-112
• /
• 2006

This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.

• Geomechanics and Engineering
• /
• 제19권5호
• /
• pp.447-462
• /
• 2019

The vacuum preloading method has been used in many countries for ground improvement and land reclamation works. A sand cushion is required as a horizontal drainage channel for conventional vacuum preloading. In terms of the dredged-fill foundation soil, the treatment effect of the conventional vacuum preloading method is poor, particularly in Tianjin, China, where a shortage of sand exists. To solve this problem, straight-line vacuum preloading without sand is widely adopted in engineering practice to improve the foundation soil. Based on the engineering properties of dredged fill in Lingang City, Tianjin, this paper presents field instrumentation in five sections and analyzes the effect of a prefabricated vertical drain (PVD) layout and a vacuum pumping method on the soft soil ground treatment. Through the arrangement of pore water pressure gauges, settlement marks and vane shear tests, the settlement, pore water pressure and subsoil bearing capacity are analyzed to evaluate the effect of the ground treatment. This study demonstrates that straight-line vacuum preloading without sand can be suitable for areas with a high water content. Furthermore, the consolidation settlement and consolidation degree system is developed based on the grey model to predict the consolidation settlement and consolidation degree under vacuum preloading; the validity of the system is also verified.

• 한국수소및신에너지학회논문집
• /
• 제32권6호
• /
• pp.585-591
• /
• 2021

Liquefied hydrogen have advantage which reduces the volume by about 800 times or more compared to hydrogen gas, so it is possible to increase the storage density. However, liquefied hydrogen produced by cryogenic cooling of 20 K or less at normal pressure has a problem of maximizing the insulation effect that blocks heat introduced from the outside. Representative insulation technologies include vacuum insulation and multi-layer insulation materials and in general, heat blocking is attempted by combining insulation technologies. Therefore, in this study, the pressure of the internal vacuum layer was changed to 10^-1, 10^-2, 10^-3 and 10^-4 Torr to confirm the thermal insulation performance of the vacuum jacket valve for transporting liquefied hydrogen. As a result, it was confirmed that the insulation performance improved as the degree of vacuum increased.

• 한국건축시공학회:학술대회논문집
• /
• 한국건축시공학회 2019년도 추계 학술논문 발표대회
• /
• pp.27-28
• /
• 2019

In this study, the characteristics of compressive strength of ultra high strength concrete supplied with moisture from outside by vacuum water absorbing curing method were investigated. Specimens were prepared by replacing the binder(Silifa fume and GGBS) by 25 wt% with respect to the weight of cement at W/B 0.16. Each specimen was subjected to water Vacuum absorbing curing time 0 min, 30 min, 60 min, 90 min and 120 minutes immediately after the demolding. Curing was performed at $20^{\circ}C$ Air-dry curing, $90^{\circ}C$ steam curing, $90^{\circ}C$ steam curing and $180^{\circ}C$ autoclave curing. Experimental results showed that water absorbing degree increased with increasing water absorbing curing time, and BS25 sample had higher water absorbing degree than SF25 sample at same time. Compressive strength tended to increase up to about 40% in water absorbing degree, but compressive strength decreased again in water absorbing more than 40%.

• Preventive Nutrition and Food Science
• /
• 제20권2호
• /
• pp.143-147
• /
• 2015

Systematic study of how different drying methods, namely hot-air drying, vacuum-drying, and freeze-drying, affect color, browning index, degree of rehydration, water solubility, and vitamin C content is critical for utilizing pine needle powders (PNP) as a novel ingredient in functional foods. Samples prepared by vacuum-drying showed a significantly higher $L^*$-value, whereas higher $a^*$- and $b^*$-values were detected in the hot-air dried samples (P<0.05). The browning index was significantly higher in samples prepared by vacuum-drying compared to samples prepared by freeze-drying (P<0.05). Freeze-dried PNP exhibited a significantly higher degree of rehydration than hot-air dried samples (P<0.05). Water solubilities of freeze-dried and hot-air dried samples were significantly higher than that of vacuum-dried sample (P<0.05). Vitamin C was less destroyed during freeze-drying compared to hot-air or vacuum-drying (P<0.05). Freeze-dried samples displayed a clear porous structure and appeared to have a bigger space, whereas hot-air dried samples showed lower porosity than vacuum and freeze-dried samples.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.187-187
• /
• 2010

In this study, we investigated the effect of electrodes on resistance switching of TaOx film. Pt, Ni, TiN, Ti and Al metal electrodes having the different oxidation degree were deposited on TaOx/Pt stack. Unipolar resistance switching behavior in Pt or Ni/TaOx/Pt MIM stacks was investigated, but bipolar resistance switching behavior in TiN, Ti or Al /TaOx/Pt MIM stacks was shown. We investigated that the voltage dependence of capacitance was decreased with higher oxidation degree of metal electrodes. Through the C-V results, we expected that linearity ($\alpha$) and quadratic ($\beta$) coefficient was reduced with an increase of interface layer between top electrode and Tantalum oxide. Transmission Electron Microscope (TEM) images depicted the thickness of interface layer formed with different oxidation degree of top electrode. Unipolar resistance switching behavior shown in lower oxidation degree of top electrode was expected to be generated by the formation of the conducting path in TaOx film. But redox reaction in interface between top electrode and Tantalum oxide may play an important role on bipolar resistance switching behavior exhibited in higher oxidation degree of top electrode. We expected that the resistance switching characteristics were determined by oxidation degree of metal electrodes.

• ETRI Journal
• /
• 제38권4호
• /
• pp.685-694
• /
• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.