• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1098-1102
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• 2003

Vacuum vessel of the KSTAR(Korea Superconducting Tokamak Advanced Research) tokamak is a fully welded structure with D-shaped cross-section. According to the requirements of the physics design, sixteen horizontal ports, sixteen slanted ports, sixteen baking and cooling ports, and twenty-four top and bottom vertical ports are designed for the diagnostics, plasma heating, vacuum pumping, and baking and cooling. Bellows on these ports are used for flexible components to absorb the relative displacement due to the vacuum vessel thermal expansion and the electromagnetic force between the vacuum vessel and the cryostat ports. Fatigue strength evaluation was performed to decide the dimension of the bellows. In order to assure the quality of the bellows, a prototype bellows for the neutral beam injection port has been fabricated and tested prior to main fabrication. It was conformed that the prototype bellows has sufficient fatigue strength and vacuum reliability in the expected load conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.49-49
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• 2000

당사는 1991년 6월에 설립된 후 반도체 장비의 국산화 개발에 주력하고 있다. Thermoelectric module typer Chiller 및 Dry gas scrubber를 국산화 하였으며 THC(Temperature & Humidity Controller)를 개발하여 국내 및 미국에 특허를 출원중에 있으며 기업 부설연구소를 통해 계속하여 각종 제품을 연구 개발하고 있다. 이외 다수의 제품을 보유하고 있으며 기업 부설연구소를 통해 계속하여 각종 제품을 연구 개발하고 있다. 이외 다수의 제품을 보유하고 있으며 진공관련 제품으로는 미국 MDC사 Vacuum components, e-beam vaporation system. ISI사 electrical and optical components, US Inc. 사 Sputter system, SBC사 Bellows. 일본 IKC사 Bellows, Vacuum components, Vacuum system을 취급하고 있다. 1998년에 경기도 및 중소기업청으로부터 유망중소기업 및 벤처기업 인증을 획득하였으며 1999년 12월에 경기도 및 중소기업청으로부터 유망중소기업 및 벤쳐기업 인증을 획득하였으며 1999년 12월 KOSDAQ에 등록하였다. 중소기업 수출기업화 사업 대상기업으로 선정되었으며 1999년 12월 KOSDAQ에 등록하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.306-307
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• 2014

진공용 장비의 sealing 방법으로 Cu gasket을 이용한 CF type과 O-ring을 이용한 NW type이 있다. 이중 O-ring을 이용한 sealing 방법에는 clamp를 사용하게 되는데 Al 합금으로 제작된 clamp에 bellows의 수축 시 받는 전단응력과 전단응력한계 이상의 힘을 받았을 때의 clamp 파손에 따른 역압에 의한 TMP 손상 분석.

• Progress in Superconductivity and Cryogenics
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• v.25 no.4
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• pp.32-39
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• 2023

One of the main problems faced in developing India's first HTS power cable was that of shrinkage in length of the double-walled vacuum-insulated cryostat. The shrinkage was due to the evacuation of the annular vacuum space which results in a shorter working cable length. This work reports experimentally observed contraction during evacuation and analyses corrugated pipes/bellows which house the cable core of HTS cables. The effect of corrugation geometry including length, corrugation pitch and depth, diameters of corrugated pipes and thicknesses of pipes is studied numerically to realize the degree of shrinkage due to vacuum as well as chill down. Finally, necessary length compensation and associated cost is determined to tackle the shrinkage issue.

• Journal of Welding and Joining
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• v.35 no.2
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• pp.43-51
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• 2017

The automatic welding systems, have received much attention in recent years, because they are highly suitable not only to increase the quality and productivity, but also to decrease manufacturing time and cost for a given product. Automatic welding work in semiconductor or space industry to be carried out in pipe line and butt joint mostly and plasma arc welding(PAW) is actively applied. To get the desired quality welds in automated welding system is challenging, a mathematical model is needed that has complete control over the relevant process parameters in order to obtain the required mechanical properties. However, In various industries the welding process mathematical model is not fully formulated for the process parameter and on the welding conditions, therefore only partial variables can be predicted. Therefore, this paper investigates the interaction between the welding parameters and mechanical properties for predicting the weld bead geometry by analyzing the S/N ratio.

• Journal of the Korean Institute of Gas
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• v.21 no.6
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• pp.52-60
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• 2017

In diffusion process exhaust line during semiconductor manufacturing process, In order to improve the transportation efficiency in the piping by removing "The reaction by-product, $ZrO_2$ and The unreacted material, TEMAZ, TMA, $O_3$, etc" and "Powder being deposited", the piping temperature was raised to $80^{\circ}C$ or more by using the heater jacket, and the bellows at the rear end of the vacuum pump ruptured. So conducted a case study and try to prevent the similar accidents from occurring through case studies. The causes of the accident were analyzed as follows: the inflow of outside air due to the generation of a gap on the suction side of the vacuum pump and heating the pipe with the heater jacket resulted in the overpressure in the pipe due to the volumetric expansion of the gas generated by decomposition of the unreacted TEMAZ, It can be assumed that the most vulnerable bellows of the piping has been ruptured. In order to prevent such accidents, This study is aimed to identify the cause of pipeline rupture accident and to establish safety measures for the prevention of similar accidents by evaluating physical hazards of TEMAZ, which is assumed to be the cause of pipe rupture accident.