• 전력전자학회논문지
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• 제22권3호
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• pp.193-198
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• 2017

This paper discusses the design and control of a switched reluctance motor (SRM) drive system for a built-in car vacuum cleaner. The growing popularity of outdoor activities and recreation has led the automobile industry to expand technologies that increase the convenience of vehicles, and thus, a built-in car vacuum cleaner was introduced. However, the existing DC motor of a vacuum cleaning system has several disadvantages, such as maintenance cost and lifespan issues of its commutator-brush structure. An SRM can be a good alternative to the existing DC motor because of its high-speed capability, long lifespan, low maintenance cost, and high efficiency, among other advantages. A prototype SRM drive is designed and manufactured to verify its feasibility for use in a built-in car vacuum cleaning system. Dynamic simulation is conducted to determine the optimal switching angle for maximum efficiency and minimum torque ripple. Load test, noise measurement, and suction-power tests are also carried out.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.327-333
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• 2001

DLC films due to their extreme properties have attracted a lot of attention. In this study, the films were prepared on High Speed Steel (SKH2) by microwave plasma assisted CVD method using CH4. Every friction test under the normal load 2,5N and sliding velocity of 20,25mm/s in high vacuum (5${\times}$10$\^$-5/ Torr). The films were analyzed with Raman spectroscopy. The films failed immediately in vacuum due to high friction. Wear volume of DLC coated disks decreased more than that of non-DLC coated disks. Also, hardness of the films is about 600HV.

• 상하수도학회지
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• 제26권6호
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• pp.851-860
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• 2012

In this study, to evaluate the abatement of runoff pollution loads by the road sweeping(cleaning), various investigations are implemented at the sample area of the highway. As the results of evaluating the removal efficiency of pollutants along road cleaning, TSS showed about 78 % of the removal efficiency and COD showed 49 % of removal efficiency through the operation of cleaning vehicle of vacuum suction method. In case of TN and TP, they showed the relatively-lower removal efficiency by 30~35 %. TSS removal efficiency along the number of cleaning appeared about 60 % in case of one time of cleaning and the additional removal effect did not appear though the number of cleaning increased to two times. With running speed of cleaning vehicle, TSS removal ratio is lessened from 60 % to 20 % when cleaning vehicle speed up to 20 km/hr from 6 km/hr. It seems that the reasons why the removal efficiencies are inversely proportional to its speed are related to the lower vacuum efficiencies and the disturbed particles on the road. In the pollutant build-up analysis, it is showed that it takes more time to the critical pollutant build-up in the shoulder than the center of the road. It is also showed that the proper cleaning cycle is recommended as 4~6 dry weather days without rainfall events.

• 한국진공학회지
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• 제10권1호
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• pp.1-9
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• 2001

터보분자펌프의 배기성능은 회전자가 돌고 있을 때 순방향과 역방향으로의 배기속도(통과확률$\times$입구컨덕턴스) 및 두 방향으로의 기체 유량(배기속도$\times$입구 압력)의 상호관계에 의해 영향을 받는다. 펌프의 성능을 나타내는 가장 중요한 항목인 배기속도는 순유량, 즉 반대 방향으로의 유량의 차이를 흡기구 압력으로 나누어준 것이며, 최대압축비는 순방향 배기속도를 역방향 배기속도로 나누어준 것이다. 이들 방향성 고유특성은 서로 영향을 미치고 있으며 양쪽 입구 압력 모두의 함수이므로 관련 요소들을 서로 구분하기가 힘들지만 배기속도와 최대압축비의 측정결과를 잘 분석하면 준정량적인 해석이 가능하다.

• 한국정밀공학회지
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• 제31권1호
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• pp.21-28
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• 2014

Recently, several researchers made their endeavor to manufacture the photobioreactor(PBR) with characteristic shapes form vacuum and blow forming process. Hence, behaviors of the transparent polycarbonate(PC) plate in the high temperature region should be examined to obtain the desired PBR case via vacuum and blow forming processes. The aim of this paper is to investigate tensile behavior of PC plate in the high temperature. Various tensile tests were performed using high temperature tensile testing machine. The influence of tensile speed, thickness and ambient temperature on tensile behavior in the high temperature was examined. The flow stress and tensile strength augmented when the tensile speed increased. In order to obtain proper flow curves with strain rate effects for different temperature of specimen, G'sell-Jonas model was adopted. The material constants of the G'sell-Jonas model were estimated. The flow curves of the PC plate considering the tensile speed, specimen thickness and temperature were obtained.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.226-226
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• 2010

Boron Nitride (BN) doped GeSbTe films were grown by the ion beam sputtering deposition (IBSD). The in-situ sheet resistance data and the x-ray diffraction patterns showed the crystallization is suppressed due to the BN incorporation. The phase change speed in BN doped GeSbTe films were investigated using the static tester equipped with nanosecond pulsed laser. The phase change speed for BN doped GST films become faster than the corresponding values for an undoped GST film. The Johnson-Mehl-Avrami(JMA) plot and Avrami coefficient for laser crystallization showed that the change in growth mode during the laser crystallization is a most important factor for the phase change speed in the BN doped GST films. The JMA results and the atomic force microscopy (AFM) images indicate that the origin of the change in the crystalline growth mode is due to an increase in the number of initial nucleation sites which is produced by the incorporated BN. In addition, the retension properties for the laser writing/erasing are remarkably improved in BN doped GeSbTe films owing to the stability of the incorporated BN.

• 한국진공학회지
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• 제12권2호
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• pp.79-85
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• 2003

다단 원판형 드래그펌프의 배기특성을 출구측 압력변화에 따른 입구측의 압력을 측정함으로써 파악하였다. 압력측정범위는 유량이 없을 때 출구측에서 0.13∼533 Pa로 하였다. 펌프 로터의 회전 속도는 24,000rpm이며, 질소가스를 사용하여 유량에 대한 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 드래그 펌프의 성능을 측정하였다. 3단, 2단, 단단형으로 원판형 드래그펌프를 구성하여 성능 실험하였으며, 최대도달진공도, 최대압축비, 배기속도등을 각각 측정하여 상호 성능을 비교·고찰하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.392-392
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• 2010

In this study, high-speed chemical dry thinning process of Si wafer and evolution of surface roughness were investigated. Direct injection of NO gas into the reactor during the supply of F radicals from $NF_3$ remote plasmas was very effective in increasing the Si thinning rate due to the NO-induced enhancement of surface reaction but thinned Si surface became roughened significantly. Addition of Ar gas, together with NO gas, decreased root mean square (RMS) surface roughness of thinned Si wafer significantly. The process regime for the thinning rate enhancement with reduced surface roughness was extended at higher Ar gas flow rate. Si wafer thinning rate as high as $22.8\;{\mu}m/min$ and root-mean-squared (RMS) surface roughness as small as 0.75 nm could be obtained. It is expected that high-speed chemical dry thinning process has possibility of application to ultra-thin Si wafer thinning with no mechanical damage.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.398-398
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• 2010

To determine the molecular directionality of PI chains depending on rubbing condition, we measured the angle resolved near edge X-ray absorption fine structure (NEXAFS) spectra at C K-edge of the rubbed PI films. Twisted nematic mode PI (PI-TN) and in plane switching mode PI (PI-IPS) were introduced to examine the effect of rubbing conditions on the chain directionality. The average tilt angle a of the PI molecules was estimated through the measured intensity change of $C=C\;{\pi}^*$ in NEXAFS C K-edge spectrum by controlling the stage speed and the pile contact depth. After rubbing, the irregular molecular direction changed to a regular direction with a molecular tilt angle of $51.2^{\circ}$ for PI-TN and $49.6^{\circ}$ for PI-IPS at the rubbing condition of the roll speed of 1000 rpm, stage speed of 50 mm/sec, and file contact depth of 0.3 mm. The molecular tilt angle $\alpha$ was linearly decreased in the PI-TN and PI-IPS samples with increasing depth of the pile contact.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.8-13
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• 2023

High bandwidth memory a core technology of the future memory semiconductor industry, is attracting attention. Temporary bonding and debonding process technology, which plays an important role in high bandwidth memory process technology, is also being studied. In this process, total thickness variation is a major factor determining wafer performance. In this study, the reliability of the equipment measuring total thickness variation is identified, and the servo motor settling, and wafer total thickness variation measurement accuracy are analyzed. As for the experimental variables, vacuum, acceleration time, and speed are changed to find the most efficient value by comparing the stabilization time. The smaller the vacuum and the larger the radius, the longer the settling time. If the radius is small, high-speed rotation performance is good, and if the radius is large, low-speed rotation performance is good. In the future, we plan to conduct an experiment to measure the entire of the wafer.