• Vacuum Magazine
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• v.2 no.4
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.

• The KSFM Journal of Fluid Machinery
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• v.9 no.5 s.38
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• pp.28-35
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• 2006

Orbiter mechanism has been applied to vacuum pump design for small oxygen generator where low vacuum of about 200 mmHg is required. Performance of the designed vacuum pump has been numerically investigated: calculated volumetric and adiabatic efficiencies were 69.7% and 83.9%, respectively for leakage clearance of $10{\mu}m$. Total efficiency of the orbiter vacuum pump was 77.5%. At the shaft speed of 1700 rpm suction displacement volume of 6.3cc provided discharge flow at the rate of 2.3 liter/min with power consumption of 10.1Watt. Torque variation of the orbiter pump was only about 20% of that of diaphragm pump.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1327-1333
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• 2013

Air bearings are widely used in precision stages because of low friction and high motion accuracy, however, they suffer from low stiffness in comparison with rolling bearings or hydrostatic bearings. So, several preloading methods using weight, magnet and vacuum force, and opposing pads have been used to increase the stiffness of the air bearings. In this paper, pressure distributions of the vacuum preloaded porous air bearings are calculated using the proposed method. And then, the load capacity and stiffness are analyzed. For the vacuum preloaded air bearings, the stiffness is increased owing to reduced bearing clearance by vacuum force. The simulation results indicate that variation of vacuum pressure with clearance in the vacuum pocket gives rise to low stiffness, so the vacuum pocket should be designed for pressure to be constantly maintained regardless of the bearing clearance by means of large effective pumping speed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.523-530
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• 2006

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element hearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as veil as the rotor itself. Each resultant hearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• The KSFM Journal of Fluid Machinery
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• v.10 no.3 s.42
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• pp.47-54
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.1157-1161
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• 2011

Parametric study has been conducted to calculate the capacity of vacuum pump system that will be used to maintain the pressure of the tube system under atmosphere level. Recently many railroad researchers pay attention to the tube train system as one of the super high speed transportation system. To achieve the ultra super high speed, the inside of tube system should be maintained the low pressure level. In the low pressure environment, it is well known that air resistance of train is drastically decreased. Vacuum pump system will be used to make the low pressure level of tube system, exhaust the leakage air and supplement additional vacuum pumping. Qualitative and quantitative study has been conducted to review the effects of major parameters concerned with the capacity of vacuum pump system. As a results of these studies, we get the lump capacity of vacuum pump for various parameters. These results can be used to analyse the effects of the reduction of air resistance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.657-662
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• 2004

This paper presented is a case study of a real compressor rotor of a refinery plant for high speed balancing of flexible rotor. The rotor was tested in the expert high-speed balancing facility established by KIMM at early 2004. The capability of the facility can reach 40000rpm in rotation speed and 8 ton in rotor weight for high-speed balancing. The facility performs multi-plane at-speed balancing using influence coefficient from the vibration data measured at two pedestals. The test rotor had exceeded permissible criteria of vibration at initial run. But by processing a low-speed balancing at 1000 rpm and six trial run trying to calculate influence coefficient of rotor to the range of operating speed, the final result of high-speed balancing revealed a remarkable reduce of vibration at pedestal of the rotor.

• Proceedings of the KIEE Conference
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• 2000.07b
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• pp.1362-1364
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• 2000

This paper presents the control algorithm verification process for VCB (Vacuum Circuit Breaker) of Korean High Speed Train. In order to enhance the reliability of the control algorithm, the verification process must be performed. The verification is conducted by comparing the pre-designed control algorithm with the pre-planned scenario by simulation tools such as SDL and MSC. This verification process will be applied to the other control algorithms of various control units of Korean High Speed Train.

• International Journal of Advanced Culture Technology
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• v.10 no.4
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• pp.569-575
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• 2022

This is a research thesis on the development of a monitoring and diagnosis device that prevents the risk of an accident through monitoring and diagnosis of a modular Main Circuit Breaker (MCB) using Vacuum Interrupter (VI) for Korean high-speed rolling stock. In this paper, a comprehensive MCB monitoring and diagnosis was performed by converging vacuum level diagnosis of interrupter, operating coil monitoring of MCB and environmental temperature/humidity monitoring of modular box. In addition, to develop an algorithm that is expected to have a similar data processing before the actual field test of the MCB monitoring and diagnosis device in 2023, the cluster analysis and factor analysis were performed using the WEKA data mining technique on the big data of Korean railroad transformer, which was previously researched by Tae Hee Evolution with KORAIL.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.411-417
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• 2009

The constant volume flow meter system (the chamber volume in the 22 L class) was developed to estimate the pumping speed of the dry pump used for the industry of the next generation semiconductor and display. In order to insure the validity of the system, The base pressure and the leak rate in the enclosed system were checked, which were the $6{\times}10^{-8}\;mbar$ and $1.5{\times}10^{-6}\;mbar-L/s$, respectively. Furthermore, it is also confirmed that the value of throughput limit in this system was as much as 1 order of magnitude lower than that in a previously developed system in the 875 L class. By using this developed system, the pumping speed of the new small dry pump was measured. It is believed that the new developed system can be alternating the expensive constant pressure flow meter system in the range of $1{\times}10^{-2}\;mbar-L/s{\sim}1{\times}10^{-3}\;mbar-L/s$.