• 한국표면공학회지
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• 제31권1호
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• pp.3-11
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• 1998

Molten Carbonate Fuel cell is a promising new type electric power generation system which can achieve high efficiency, lower matrrial cost and high operating temperature Making internal reforming possible. Although the development of the MCEC is progressing rapidly toward commercialization, two important tchological problems such as dissolution of NiO cathode and not corrosion of metallic separator plate must be resolved. Because MCFC is operated at $650^{\circ}C$ and the electrolyte is very corrosive, corrosion-resistance of separator plated against oxidation abd molten carbonate is required. Al-coating on separator material for corrosion-resistance was carried out by painting, thermal spraying. hot dipping and vacuum vapour deposition. The corrosion of Al-coated STS 316S and 316L in molten carbonate at $700^{\circ}C$was studied. Vacuum vapour deposition and thermal spraing for Al-coating on STS 310S and 316L were the most effective methods for protecting thestainless steel corrosion in molten carbonate.

• 한국공작기계학회논문집
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• 제17권3호
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• pp.53-58
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• 2008

This study was conducted to evaluate the flatness of the porous type of dicing chuck. Two measurement systems for a vacuum chuck with a porous type of ceramic plate were prepared using a digital indicator and a laser interferometer. 6 inch of silicon and glass wafer were also used. Vacuum pressure from 100mmHg to 700mmHg by 100mmHg was increased. From experiments, chucked-wafer flatness was converged to the dicing chuck flatness itself even though the repeatability of contact method using indicator was unstable. Finally, the chuck flatness was estimated below $2{\mu}m$ with peak-to valley value.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.258-258
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• 2011

최근 유연 기판을 이용한 태양전지 및 TFT 등 전자소자 개발에 관한 연구가 주목받고 있다. 본 연구에서는 공정 시 유리한 유리기판상 전자소자 제작 후 폴리이미드막 박리를 통한 유연전자 소자 구현을 목적으로 한다. 폴리이미드막 박리를 목적으로 희생층으로서 a-Si:H을 사용하였다. 유리기판상에 60 nm 두께의 a-Si : H을 ICP (Induced coupled plasma) 공정으로 증착한 후 a-Si : H층 상부에 30 ${\mu}m$ 두께로 폴리이미드를 코팅하여 Hot plate와 furnace에서 열처리를 거쳤다. 이후 각기 다른 파장을 갖는 레이저의 파워를 가변하며 유리 기판 후면에 조사하였다. 실험 결과 355 nm UV 레이저로 가공한 경우 희생층으로 사용 된 a-Si : H층 내에 존재하는 수소가 레이저 빛 에너지에 의해 결합이 끊어지면서 유리기판과 폴리이미드막이 분리됨을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.458-458
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• 2012

Fuel Cell is used stacking metal or polymer substrate. This hydro property of substrate surface is very important. Usually, surface property is hydrophilic. The surface oxidation of SUS is investigated through plasma treatments with an atmospheric-pressure dielectric barrier discharge (DBD) for increasing hydrophilic property. The plasma process makes an experiment under various operating conditions of the DBD, which operating conditions are treatment time, plasma gas mixture ratio, the plasma source supply frequency. Two kinds of SUS substrate, SUS-304 and SUS 316L, were used. Discharge frequency has a crucial impact on equipment performance and gas treatment. After the plasma treatment of a SUS plate, highly improved wettability was noted. But, when high oxygen supply, the substrate damaged seriously.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.279-279
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• 2011

본 연구는 LED 등기구에서 방열코팅소재에 따른 방열 효과를 연구하여 LED 등기구를 안정적으로 유지 제어 할 수 있는 방법을 찾고자 한다. 그에 따라 동일한 기구물에서 방열코팅만 변화하여 LED chip 온도의 Steady State 온도를 비교 측정하였다. 방열코팅은 동일한 알루미늄 Heat Sink에 일반분체코팅, Anodizing 처리, 알루미나 방열도료, Graphene이 섞인 알루미나도료, Graphene 잉크 등의 방열코팅소재를 아무 처리를 하지 않은 알루미늄 Heat Sink 와 비교 하였다. 온도는 LED chip, LED base plate, 코팅이 된 표면, 코팅 내부 2 mm 부분의 온도를 각각 Steady State가 될 때까지 측정하였다. 또한 LED의 power를 7 watt에서 13 watt 변화하면서 방열 원리를 분석하였다. 본 연구를 통하여 각 코팅소재에 따른 방열효과와 그 방열 원리를 연구 분석하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.295-295
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• 2011

CIGS박막을 동시 증발법(co-evaporation)으로 몰리브덴이 증착된 소다라임 유리 위에 성장시켰다. CdS 박막은 화학적 용액 성장법 (chemical bath deposition: CBD)을 이용하여 약 60 nm를 증착하였다. 열처리는 가열판 (hot-plate)을 사용하여 공기중에서 하였다. 열처리 온도는 0~350$^{\circ}C$까지 변화하였으며, 열처리 시간은 각각 5분이었다. 시료의 표면 및 계면의 변화를 SEM측정을 통하여 관측하였다. CdS/CIGS 박막의 열처리 온도 변화에 따른 photoluminescence 특성을 조사하였다. 여기 레이저는 488 nm ($Ar^+$ laser)와 632.8 nm (He-Ne laser)를 사용하여 결함의 근원을 조사하였다. 온도 의존성 실험을 통하여 CIGS 박막의 띠 간격 에너지를 확인할 수 있었으며, 결함 준위의 활성화 에너지 및 특성을 알 수 있었다. $Ar^+$ laser에서만 관측되는 신호의 근원은 CdS에 기인한 것이었다.

• 한국세라믹학회지
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• 제50권6호
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• pp.396-401
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• 2013

The size of various alumina ceramics used in the semiconductor and display industries must be increased to increase the size of wafers and panels. In this research, large alumina ceramics were fabricated by pressure-vacuum hybrid slip casting (PVHSC) employing a commercial powder, followed by sintering in a furnace. In the framework of the PVHSC method, the consolidation occurs not only by compression of the slip in the casting room but also by suction of the dispersion medium from the casting room. When sintered at $1650^{\circ}C$ for 4 h, the fabricated large-size alumina ($1,550{\times}300{\times}30mm^3$) exhibited a dense microstructure corresponding to more than 99.2% of the theoretical density and a high purity of 99.79%. The flexural and compressive strengths of the alumina plate were greater than 340 MPa and 2,600 MPa, respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1875-1878
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• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with electron beam gun head unit is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included ceramic isolation plate and main body which are essentially constructed for electron beam gun head unit are designed and manufactured. And this electron beam gun head unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

• 한국주조공학회지
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• 제15권4호
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• pp.360-367
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• 1995

Effects of metal coating treatment on SiC particle on wetting behavior and interfacial strength were studied. Experimental variables are included types of coated metallic films such as Cu and Ni-P, and temperatures of heat-treatment under vacuum. The experimental results concerning wetting phenomena of liquid Al on SiC, showed that coating treatment of metallic film on SiC particles remarkably improves the wetting behavior of liquid Al on SiC, especially in the case of Ni-P coating. The interfacial strength of Al/SiC composites made of coated SiC plate was higher than that of the composite with non-coated SiC plate although the coating treatment was not perfect.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2010년 춘계학술대회논문집
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• pp.174-180
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• 2010

Conductive and radiative thermal model configurations of an imager of a geostationary satellite are presented. A two-plane method is introduced for three dimensional conductive coupling which is not able to be treated by thin shell plate thermal modeling technique. Especially the two-plane method is applied to massive matters and PIP(Payload Interface Plate) in the imager model. Some massive matters in the thermal model are modified by adequate correction factors or equivalent thickness in order to obtain the numerical results of thermal modeling to be consistent with the analytic model. More detailed nodal breakdown is specially employed to the object which has the rapid temperature gradient expected by a rule of thumb. This detailed thermal model of the imager is supposed to be used for detailed analyses and test predictions, and be correlated with the thermal vacuum test results before final in-flight predictions.