• Title/Summary/Keyword: Vacuum Packaging

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Electrical and Mechanical Properties of Cu(Mg) Film for ULSI Interconnect (고집적 반도체 배선용 Cu(Mg) 박막의 전기적, 기계적 특성 평가)

  • 안재수;안정욱;주영창;이제훈
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.3
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    • pp.89-98
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    • 2003
  • The electrical and mechanical properties of sputtered Cu(Mg) films are investigated for highly reliable interconnects. The roughness, adhesion, hardness and resistance to thermal stress of Cu(Mg) film annealed in vacuum at $400^{\circ}C$ for 30min were improved than those of pure Cu film. Moreover, the flat band voltage(V$_{F}$ ) shift in the Capacitance-Voltage(C-V) curve upon bias temperature stressing(BTS) was not observed and leakage currents of Cu(Mg) into $SiO_2$ were three times less than those of pure Cu. Because Mg was easy to react with oxide than Cu and Si after annealing, the Mg Oxide which formed at surface and interface served as a passivation layer as well.

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Property Variation of Diamond-like Carbon Thin Film According to the Annealing Temperature (열처리에 따른 Diamond-like Carbon (DLC) 박막의 특성변화)

  • Park, Ch.S.;Koo, K.H.;Park, H.H.
    • Journal of the Microelectronics and Packaging Society
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    • v.18 no.1
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    • pp.49-53
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    • 2011
  • Diamond-like carbon (DLC) films is a metastable form of amorphous carbon containing a significant fraction of Sp3 bond. DLC films have been characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. In this study DLC films were prepared by the RF magnetron sputter system on $SiO_2$ substrates using graphite target. The effects of the post annealing temperature on the Property variation of the DLC films were examined. The DLC films were annealed at temperatures ranging from 300 to $500^{\circ}C$ using rapid thermal process equipment in vacuum. The variation of electrical property and surface morphology as a function of annealing treatment was investigated by using a Hall Effect measurement and atomic force microscopy. Raman and X-ray photoelectron spectroscopy analyses revealed a structural change in the DLC films.

Effects of Antioxidants and Packaging Methods on the repression of Lipid Oxidation in Plain Dried Large Anchovy (소건 대멸치 지질의 산화억제에 미치는 항산화제와 포장의 병행효과)

  • CHO Young-Je;KIM Tae-Jin;SHIM Kil-Bo;CHOI Young-Jun
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.33 no.3
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    • pp.238-242
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    • 2000
  • The antioxidants and packaging methods affecting on lipid oxidation of the plain dried large anchovy were investigated. Antioxidants resulted in decrease of lipid oxidation of dried large anchovy. The addition of BHT remarkably repressed lipid oxidation during storage of the dried large anchovy at $37^{\circ}C$, followed by ${\alpha}-tocopherol$, rosemary extract and sage extract. The addition of rosemary extract mixed with 0.1{\%} {\alpha}-tocopherol$ showed similar effect to BHT during storaBe at $25^{\circ}C\;in\;0.1{\%}$ rosemary extract mixed with $0.1{\%}\;{\alpha}-tocopherol$. When the dried anchovy were packed in polyethylene film after treatment with antioxidants, the vacuum package increased the antioxidative effect in repression of lipid oxidation during storage of dried large anchovy.

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Fabrication and Characterization of Yellow OLED using GDI602:Rubrene(10%) Material (GDI 602/Rubrene을 이용한 황색 OLED의 제작과 특성 분석)

  • Jang, Ji-Geun;Kim, Hee-Won
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.4
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    • pp.71-75
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    • 2006
  • The yellow emitting OLED using GDI602:Rubrene(10%) material has been fabricated and characterized. In the device fabrication, 2-TNATA [4,4',4'-tris(2-naphthylphenyl-phenylamino)-triphenyl-amine] as a hole injection material and NPB[N,N'-bis(1-naphthyl)-N,N'-diphenyl-1,1'-biphenyl -4,4'-diamine] as a hole transport material were deposited on the ITO(indium thin oxide)/glass substrate by vacuum evaporation. And then, yellow emission material was deposited using GDI602 as a host material and Rubrene(10%) as a dopant. Finally, small molecular OLED with the structure of $ITO/2-TNATA/NPB/GDI602:Rubrene(10%)/Alq_{3}/LiF/Al$ was obtained by in-situ successive deposition of $Alq_{3}$, LiF and Al as the electron transport material, electron injection material and cathode. The yellow OLED fabricated in our experiments showed the color coordinate of CIE(0.50, 0.49), the luminance of $2300\;Cd/m^{2}$ and the power efficiency of 0.7 lm/W at 10 V with the peak emission wavelength of 562 nm.

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The effect of initial Pd catalyst oxidation stale on CH$_4$sensitivity of SnO$_2$thin film sensor (Pd 촉매의 부분 산화 조절을 이용한 SnO$_2$박막 센서의 CH$_4$감도 변화 연구)

  • Choi, W. K.;Cho, J.;Cho, J. S.;Song, J. H.;Jung, H. J.;Koh, S. K.
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.2
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    • pp.45-49
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    • 1999
  • A flammable gas sensor based on the $SnO_2$thin film deposited by the reactive ion assisted deposition was fabricated and ultra-thin Pd layer as catalyst was adsorbed at surface by ion beam sputtering. The initial oxidation states of Pd catalyst were controlled to investigate the role of Pd in the sensing process of inflammale gas sensor through annealing in air and vacuum respectively. The Pd catalyst existing in pure metallic state showed the sensitivity higher than that of PdO. The result might be closely related to the fact that PdO as a surface acceptor would receive electrons via Pd sub-channel from $SnO_2$, and thus which reduces the sensitivity and delay the response time.

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The Effects of ZnO Sub-layer Thickness on the Room Temperature Ferromagnetism of (ZnO/Co) Multilayer ((ZnO/Co) 다층 박막에서 ZnO층의 두께가 상온강자성 특성에 미치는 영향)

  • Kang, Sung-geun;Kim, Sungdong
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.4
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    • pp.137-142
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    • 2018
  • Room temperature ferromagnetism of Co doped ZnO was studied using (ZnO/Co) multilayer structure, and the effects of ZnO sub-layer thickness on the RT ferromagnetism was investigated. As for the as-deposited state, the diamagnetism was observed for ($ZnO\;20{\AA}/Co\;x{\AA}$) while the ferromagnetism was observed for ($ZnO\;40{\AA}/Co\;x{\AA}$). After vacuum-annealed, both showed the RT ferromagnetism and ($ZnO\;40{\AA}/Co\;x{\AA}$) structure interestingly showed negative remanence magnetization behavior. UV-Vis spectrometer revealed that Co atoms were substituted with Zn in ZnO and Co cluster was not found in XPS and HRTEM EDS analysis.

Effects of Aging Methods and Periods on Quality Characteristics of Beef

  • Kim, SolJi;Kim, GwangHeun;Moon, Chan;Ko, KyoungBo;Choi, YoungMin;Choe, JeeHwan;Ryu, YounChul
    • Food Science of Animal Resources
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    • v.42 no.6
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    • pp.953-967
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    • 2022
  • The objective of this study was to determine effects of aging methods (wet-aged, dry-aged, and packaged dry-aged) during 60 d on quality traits and microbial characteristics of beef. Wet-aged beef was packed by vacuum packaging and stored in a 4℃ refrigerator. Dry-aged beef was used without packaging. Packaged dry-aged beef was packaged in commercial bags. Dry-aged and packaged dry-aged samples were stored in a meat ager at 2℃-4℃ with 85%-90% relative humidity. Meat color, crust thickness, aging loss, cooking loss, Warner-Bratzler shear force (WBSF), texture profile analysis, Torrymeter, meat pH, water activity, volatile basic nitrogen (VBN), thiobarbituric acid reactant substances (TBARS), and microbial analysis were measured or performed every 15 d until 60 d of aging time. Meat color changed significantly with increasing aging time. Differences in meat color among aging methods were observed. Aging losses of dry-aged and packaged dry-aged samples were higher than those of wet-aged samples. Wet-aged beef showed higher cooking loss, but lower WBSF than dry-aged and packaged dry-aged beef. VBN and TBARS showed an increasing tendency with increasing aging time. Differences of VBN and TBARS among aging methods were found. Regarding microbial analysis, counts of yeasts and molds were different among aging methods at the initial aging time. Packaged dry-aged and dry-aged beef showed similar values or tendency. Significant changes occurred during aging in all aging methods. Packaged dry aging and dry aging could result in similar quality traits and microbial characteristics of beef.

Application of Ultrafast Laser for Micro-packaging and Germanium Surface Processing (초고속레이저 기반 마이크로 패키징 및 게르마늄 표면 공정 기술 개발)

  • Jeoung, S.C.;Yahng, J.S.
    • Journal of the Korean Vacuum Society
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    • v.16 no.1
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    • pp.74-78
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    • 2007
  • Much interests has been drawn for noble micro-engineering processes for the continuous size reduction on bulk materials from the field of micro-electronics with much downsized IC chips. A traditional microprocessing based on mechanical blade as well as a relatively long pulsed laser usually influence the physico-chemical properties of intact materials when the techniques are applied to process materials with a spatial resolution less than 10 microns. Meanwhile, ultrafast laser pulses are known to exhibit a very small heat-affect zone(HAE) compared to the traditional laser processing and to be applicable for the new functional materials with high performance in optical and electrical properties. In this report, we will review in brief the recent research works on the enhancement of micro-cutting speed of thin silicon wafer as well as the formation of Ge nanostructures based on ultrafast laser pulses.

BST Thin Film Multi-Layer Capacitors

  • Choi, Woo Sung;Kang, Min-Gyu;Ju, Byeong-Kwon;Yoon, Seok-Jin;Kang, Chong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.319-319
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    • 2013
  • Even though the fabrication methods of metal oxide based thin film capacitor have been well established such as RF sputtering, Sol-gel, metal organic chemical vapor deposition (MOCVD), ion beam assisted deposition (IBAD) and pulsed laser deposition (PLD), an applicable capacitor of printed circuit board (PCB) has not realized yet by these methods. Barium Strontium Titanate (BST) and other high-k ceramic oxides are important materials used in integrated passive devices, multi-chip modules (MCM), high-density interconnect, and chip-scale packaging. Thin film multi-layer technology is strongly demanded for having high capacitance (120 nF/$mm^2$). In this study, we suggest novel multi-layer thin film capacitor design and fabrication technology utilized by plasma assisted deposition and photolithography processes. Ba0.6Sr0.4TiO3 (BST) was used for the dielectric material since it has high dielectric constant and low dielectric loss. 5-layered BST and Pt thin films with multi-layer sandwich structures were formed on Pt/Ti/$SiO_2$/Si substrate by RF-magnetron sputtering and DC-sputtering. Pt electrodes and BST layers were patterned to reveal internal electrodes by photolithography. SiO2 passivation layer was deposited by plasma-enhanced chemical vapor deposition (PE-CVD). The passivation layer plays an important role to prevent short connection between the electrodes. It was patterned to create holes for the connection between internal electrodes and external electrodes by reactive-ion etching (RIE). External contact pads were formed by Pt electrodes. The microstructure and dielectric characteristics of the capacitors were investigated by scanning electron microscopy (SEM) and impedance analyzer, respectively. In conclusion, the 0402 sized thin film multi-layer capacitors have been demonstrated, which have capacitance of 10 nF. They are expected to be used for decoupling purpose and have been fabricated with high yield.

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Processing and Shelf-life Stabilities of Flavoring Substances of the Smoke-Dried Oysters (훈건 굴을 이용한 분말조미소재의 가공 및 품질안전성)

  • Kong Cheong-Sik;Ji Seung-Gil;Choi Jong-Duck;Kang Jeong-Goo;Roh Tae-Hyun;Oh Kwang-Soo
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.39 no.2
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    • pp.85-93
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    • 2006
  • This study was conducted to evaluate the optimal processing conditions of smoke-dried powdered oysters and to determine their shelf-life during storage for development of a natural oyster flavoring substance. The optimal conditions for processing of smoke-dried oyster powder with freshy oyster were as follows. Raw shelled oysters were rinsed with 3% saline solution, drained, boiled for 10 minutes at $98^{\circ}C$, and then smoked for 1 hour at $50^{\circ}C$, followed by drying for 4 hours at $80^{\circ}C$ Smoke-dried oyster powder with oyster scraps were prepared as flavoring material. The smoked oyster scraps were submerged in oyster sauce far 10 minutes at room temperature and then dried with hot air for 5 hours at $50^{\circ}C$. The smoke-dried oysters and smoke-dried oyster scraps were then pulverized to 50 mesh and packed in tea bags or vacuum-packed in laminated plastic film bags (PE/PVDC/CPP, $12{\mu}m/15{\mu}m/50{\mu}m$). Compared to non smoke-dried powdered oysters, the smoking and dipping in oyster sauce enhanced the flavor and prevented lipid oxidation of the smoke-dried powdered oyster product. Shelf-life tests indicated that the vacuum-packaging method preserved the quality of smoke-dried powdered oysters stored for 150 days at room temperature.