• Title/Summary/Keyword: Vacuum Level

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Reliability Assessment and Improvement of MEMS Vacuum Package with Accelerated Degradation Test (ADT) (가속열화시험을 적용한 MEMS 진공패키지의 신뢰성 분석 및 개선)

  • 최민석;김운배;정병길;좌성훈;송기무
    • Journal of Applied Reliability
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    • v.3 no.2
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    • pp.103-116
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    • 2003
  • We carry out reliability tests and investigate the failure mechanisms. of the wafer level vacuum packaged MEMS gyroscope sensor using an accelerated degradation test. The accelerated degradation test (ADT) is used to evaluate reliability (and/or life) of the MEMS vacuum package and to select the accelerated test conditions, which reduce the reliability testing time. Using the failure distribution model and stress-life model, we are able to estimate the average life time of the vacuum package, which is well agreed with the measured data. After improving several package reliability issues such as prevention of gas diffusion through package, we carry out another set of accelerated tests at the chosen acceleration level. The results show that reliability of the vacuum packaged gyroscope has been greatly improved and can survive without degradation of performance, which is the Q-factor in gyroscope sensor, during environmental stress reliability tests.

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Low Noise Vacuum Cleaner Design (저소음 청소기 개발)

  • Joo, Jae-Man;Lee, Jun-Hwa;Hong, Seun-Gee;Oh, Jang-Keun;Song, Hwa-Gyu
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.11a
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    • pp.939-942
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    • 2007
  • Vacuum cleaner is a close life product that can remove various dusts from our surroundings. However well vacuum cleaner clean our environments, many people are looking away from it, due to its loud noise. Its noise causes a big trouble in the usual life, for example, catch calls, TV watching and discussing etc. To reduce these inconveniences, noise reduction methods and systematic design of low noise vacuum cleaner are studied in this paper. At first, sound quality investigation is performed to get the noise level and quality that make people TV watching and catch calls available. Based on the European and domestic customer SQ survey result, sound power, peak noise level and target sound spectrum guideline are studied and introduced. As a second, precise product sound spectrums are designed into each part based on the sound quality result. Fan-motor, brush, mainbody, cyclone spectrums are decided to get the final target sound based on the contribution level. Fan-motor is the major noise source of vacuum cleaner. Specially, its peak sound, RPM peak and BPF Peak, cause the people nervous. To reduce these peak sounds, high rotating impeller and diffuser are focused due to its interaction. A lot of experimental and numerical tests, operation points are investigated and optimization of flow path area between diffusers is performed. As a bagless device, cyclones are one of the major noise sources of vacuum cleaner. To reduce its noise, previous research is used and adopted well. Brush is the most difficult part to reduce noise. Its noise sources are all comes from aero-acoustic phenomena. Numerical analysis helps the understanding of flow structure and pattern, and a lot of experimental test are performed to reduce the noise. Gaps between the carpet and brush are optimized and flow paths are re-designed to lower the noise. Reduction is performed with keeping the cleaning efficiency and handling power together and much reduction of noise is acquired. With all above parts, main-body design is studied. To do a systematic design, configuration design developments technique is introduced from airplane design and evolved with each component design. As a first configuration, fan-motor installation position is investigated and 10 configuration ideas are developed and tested. As a second step, reduced size and compressed configuration candidates are tested and evaluated by a lot of major factor. Noise, power, mass production availability, size, flow path are evaluated together. If noise reduction configuration results in other performance degrade, the noise reduction configuration is ineffective. As a third configuration, cyclones are introduced and the size is reduced one more time and fourth, fifth, sixth, seventh configuration are evolved with size and design image with noise and other performance indexes. Finally we can get a overall much noise level reduction configuration. All above investigations are adopted into vacuum cleaner design and final customer satisfaction tests in Europe are performed. 1st grade sound quality and lowest noise level of bagless vacuum cleaner are achieved.

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Behavior of Plasma-doped Graphene upon High Temperature Vacuum Annealing

  • Lee, Byeong-Joo;Jo, Sung-Il;Jeong, Goo-Hwan
    • Applied Science and Convergence Technology
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    • v.27 no.5
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    • pp.100-104
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    • 2018
  • Herein, we present the behavior of plasma-doped graphene upon high-temperature vacuum annealing. An ammonia plasma-treated graphene sample underwent vacuum annealing for 1 h at temperatures ranging from 100 to $500^{\circ}C$. According to Raman analysis, the structural healing of the plasma-treated sample is more pronounced at elevated annealing temperatures. The crystallite size of the plasma-treated sample increases from 13.87 to 29.15 nm after vacuum annealing. In addition, the doping level by plasma treatment reaches $2.2{\times}10^{12}cm^{-2}$ and maintains a value of $1.6{\times}10^{12}cm^{-2}$, even after annealing at $500^{\circ}C$, indicating high doping stability. A relatively large decrease in the pyrrolic bonding components is observed by X-ray photoelectron spectroscopy as compared to other configurations, such as pyridinic and amino bindings, after the annealing. This study indicates that high-vacuum annealing at elevated temperatures provides a method for the structural reorganization of plasma-treated graphene without a subsequent decrease in doping level.

Development of a Housing Component for an Auto-compressor Using Vacuum Ladling Die Casting (진공급탕식 다이캐스팅법을 이용한 자동차 콤프레서용 하우징 부품 개발)

  • Lee, H.S.;Park, J.S.
    • Transactions of Materials Processing
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    • v.21 no.3
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    • pp.195-201
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    • 2012
  • A vacuum ladling die casting system is suggested as a means to obtain a high vacuum level. A high vacuum of 17.8 mmHg is obtained by sealing the inner space of the mould. The sample product is a rear-head housing for an auto-compressor, and the die-casting with 6-cavities was conducted. The flow analysis shows that the filling speed during vacuum ladling is faster than for a non-vacuum system. The air holes in the sample product were too small to be seen with the naked eye in X-ray films. Density tests show that the high vacuum ladling system reduces the internal porosity as much as 57.8% when compared to the non-vacuum system. A defective rate of only 0.17% was found from leak testing. The results of this research prove that the high vacuum die-casting process is useful for manufacturing of aluminium components under high internal pressure.

Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope

  • Park, Sang-Joon;Jeong, Yeon-Uk;Park, Soyeun;Lee, Yong Joong
    • Applied Science and Convergence Technology
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    • v.23 no.2
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    • pp.97-102
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    • 2014
  • A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of $5{\times}10^{-3}$ torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.

Electrical and Optical Characteristics of Plasma Display Panel Fabricated by Vacuum In-line Sealing (진공 인라인 실장에 의해 제작된 플라즈마 디스플레이 패널의 전기적ㆍ광학적 특성)

  • Park, Sung-Hyun;Lee, Neung-Hun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.4
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    • pp.344-349
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    • 2005
  • The optical and electrical characteristics of plasma display panel(PDP) using the vacuum in-line sealing technology compared with the conventional sealing process in this research. This PDP consisted of MgO protecting layer by e-beam evaporation and battier rib, transparent dielectric layer, dielectric layer, and electrodes by screen printer and then sealed off on Ne-Xe(4 %) 400 Torr and 430。C. The brightness and luminous efficiency were good as the base vacuum level was higher, and it was to check the advantage of high vacuum level sealing, one of the strong points of the vacuum in-line sealing process. However, the brightness and luminous efficiency was dropped sharply because of a crack on MgO protecting layer by the difference of the expansion and contraction stress on high temperature in the vacuum states between MgO and substrate. Fortunately, the crack was prevented by MgO was deposited on higher temperature than 300。C. Finally, the PDP, was fabricated by the vacuum in-line sealing process, resulted the lower brightness than processing only the thermal annealing treatment in the vacuum chamber, but the luminous efficiency was increased by the reducing power consumption with the decreasing luminous current. The vacuum in-line sealing technology was not to need the additional thermal annealing process and could reduce the fabrication process and bring the excellent optical and electrical properties without the crack of MgO protecting layer than the conventional sealing process.

Parametric Study on the Capacity of Vacuum Pump for Tube Structure (튜브열차 구조물의 진공 펌프 용량에 관한 파라메타 연구)

  • Nam, Seong-Won
    • Journal of the Korean Society for Railway
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    • v.13 no.5
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    • pp.516-520
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    • 2010
  • Parametric study has been conducted to calculate the capacity of vacuum pump system that will be used to maintain the pressure of the tube structure under atmosphere level. Recently many railroad researchers pay attention to the tube train system as one of the super high speed transportation system. To achieve the super high speed, the inside of tube system should be maintained at low pressure level. In the low pressure environment, it is well known that air resistance of train is drastically decreased. Vacuum pump system will be used to make low pressure state for tube structure, exhaust the leakage air and supplement additional vacuum pumping. As results of these studies, we get the lump capacity of vacuum pump for various parameters. These results can be applied to analyze the effects of the reduction of air resistance.

Design and Evaluation of a Rotation Table using Air Bearings for Electron Beam Mastering (전자빔 마스터링을 위한 공기베어링 응용 고진공 회전테이블의 설계 및 진공특성 평가)

  • Khim, Gyung-Ho;Song, Chang-Kyu;Park, Chun-Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.12
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    • pp.132-138
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    • 2008
  • Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.