• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.83.1-83.1
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• 2013

반도체 미세화, Glass 대면적화에 따른 산포관리 및 불량방지 필요(공정이격관리), 설비 데이터만으로는 Sensitivity가 낮아 공정 관리 어려움에 따른 대안 필요, 향후 추가 센서에 대한 접목이 용이한 SW Frame 필요, 양산적용을 위한 설비 및 FAB Host의 자동화 연계 개발 필요, 이종데이터의 통합를 통한 최적의 진단 및 관리가 필요합니다(SCM:툴박스). 즉, 기존의 장비 Parameter가 아닌 실제 공정시 Chamber로부터 얻을 수 있는 물리, 전기, 화학적인 데이터를 적합한 이종(異種) 센서를 직접 부착하여 이들 데이터를 통합 관리 분석 및 실시간 Monitoring을 통한 공정 진단 및 실시간 진단을 실행하는 솔루션입니다. 실 공정 시 적용이 유리한 OES 데이터를 주요 인자로 이외의 기타 데이터를 추가로 통합하여 특화된 분석환경과 공정 모니터링을 통하여 TAT (Turn Around Time)를 줄이고, MTBC (Mean Time Between Clean)를 늘림으로써 궁극적으로 칩메이커의 제품의 가격 경쟁력을 확보 할 수 있는 기능이며, 설비사 입장에서는 자사설비의 지능형 시스템을 위한 제반 기술이기도 합니다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.266.2-266.2
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• 2013

According to advanced nanotechnology, the nanostructured materials with various kinds and shape are synthesized easily or produced by process. Recently, researches about interaction between the nanostructured materials and biological system have been progressed actively. The surface topography may influence cellular responses, for example cell adhesion, cell morphology. In this work, we synthesized vertically aligned silicon nanowires (SiNWs) on the Au-covered Si(111) wafer by chemical vapor deposition (CVD) method. We accomplished to control of the SiNWs diameter by regulating thickness of Au film such as 1 nm and 10 nm. These substrates did not isolate cells and just provided surface topography for cell culture. Human Embryonic Kidney 293T cells (HEK 293T cells) were cultured on these substrates for 2 days. We studied the nanotopographical effects on cell morphology, adhesion, and growth which are evaluated on each SiNWs substrate comparing bare glass as control.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.218.2-218.2
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• 2013

In this study, CdS thin films were deposited onto glass substrates by radio frequency magnetron sputtering. The films were grown at various substrate temperatures in the range of 100 to $250^{\circ}C$. The effects of substrate temperatures on the structural and optical properties were examined. The XRD analysis revealed that CdS films were polycrystalline and retained the mixed structure of hexagonal wurtzite and cubic phase. The percentages of hexagonal structured crystallites in the films were seen to be increased by increasing substrate temperatures. The film grown at $250^{\circ}C$ showed a relatively high transmittance of 80% in the visible region, with an energy band gap of 2.45 eV. The transmittance date analysis indicated that the optical band gap was closely related to the substrate temperatures.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.759-762
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• 2005

A tray inserting machine is developed for automation of inserting plastic mold tray into a cardboard box. Plastic mold tray is used for protecting breakdown of glass bottles. In this paper, two types of processes to divide the plastic mold tray are proposed. As a result, adhesion method by vacuum pad is accepted. And also, static and modal analysis for the machine are carried out to check the machine design using the commercial software, CATIA V5.

• Journal of the Korean Magnetics Society
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• v.5 no.5
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• pp.636-640
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• 1995

FeN thin films were deposited on glass by RF diode reactive sputtering. The films were annealed in the air and in vacuum. The film annealed in the air showed sharp decrease of saturation magnetization and change of easy axis direction to hard axis direction and vice versa after $300^{\circ}C$ anneal. The coercivity decreased down to 0.5 Oe after $400^{\circ}C$ anneal. After $450^{\circ}C$ anneal, the film showed ${\varepsilon}-Fe_{2-3}N$ phase. The films annealed in vacuum showed coercivity increase after $300^{\circ}C$ anneal for the film deposited with initial substrate temperature of $35^{\circ}C$ and after $400^{\circ}C$ anneal for the film deposited with initial substrate temperatue of $170^{\circ}C$. These films showed $Fe_{16}N_{2}$ X-ray peaks after $450^{\circ}C$ anneal.

• Elastomers and Composites
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• v.57 no.3
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• pp.114-120
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• 2022

The tensile properties of the extruded PC film were measured in the extrusion direction and perpendicular to the extrusion direction. The measured properties were the elastic modulus and Poisson's ratio at the glass transition temperature of PC. The measured orthotropic properties of the film were used for the computer simulation of vacuum forming. In this simulation, three mold shapes were tested: dome, trapezoid, and cubic, and the vacuum was applied between the mold surface and the heated film. The stress, strain, thickness, and stretch ratio distributions of the film in different mold shapes were observed and compared. The thermoforming simulation method used in this study and the obtained results, considering the determined orthotropic properties, can be applied to the thermoforming of various three-dimensional shapes.

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.108-112
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• 1995

Copper and aluminum selective deposition using (hfac)Cu(VTMS) and DMEAA precursors were performed in a warm-wall low pressure chemical vapour deposition reactor. The films of Cu and AI deposited on Corning 7059 glass and quartz with pattern of Cr seed metal. Selective deposition can be achieved at a pressure range of from 10-1 to 10 torr and substrate temperature range of 150-25$0^{\circ}C$. Selective deposition of Cu and AI by CVD is one of candidate for gate material formation fo larger area and high resolution plat panel displays.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.1
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• pp.40-42
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• 2002

TiO$_2$/Fe$_2$O$_3$composite thin films were prepared on common glass substrates by sol-gel processing and dip-drawing method. The effect of Fe$_2$O$_3$content on the photocatalytic and hydrophilic properties of composite films was studied. The results indicate that the photocatalytic activities of composite TiO$_2$films are superior to that of pure TiO$_2$film, and the film containing 0.5% Fe$_2$O$_3$has the best photocatalytic activity. The hydrophilicity is difference with variant Fe$_2$O$_3$content, the films containing 0.05% ~0.1% Fe$_2$O$_3$have the best hydrophilicity and their contact angles are 0。.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.54-58
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• 1999

We deposited diamond-like carbon (DLC) films using ion beam sputtering of a graphite target on flat substrates for use as a thin film field emitter. An n-type silicon wafer, titanium-coated silicon, and indium tin oxide (ITO) coated glass were used as a substrate. All films exhibited a sudden increase in the emission after a breakdown occurred at high voltage. The morphology of the films after the breakdown depended on the substrate. On ITO and Ti substrates, the DLC film peeled off upon breakdown, but on the Si substrate the surface melting due to breakdown resulted in the formation of various structures such as a sharp point, mound, and crater. By scanning the deformed surface with a tip anode, we found that the emission was concentrated at the deformed sites, indicating that the field enhancement due to the morphology change was responsible for the increased emission.

• Journal of Korean Vacuum Science & Technology
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• v.5 no.2
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• pp.38-42
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• 2001

We investigated physical properties of ion-beam mixed Fe/si multilayerd films(MLF) prepared by rf sputtering onto glass substrates at room temperature. Such an ion-beam treatment has led to noticeable changes in the structural and physical properties of the MLF: the formation of a new phase which is characterized by a crystalline silicide with a low coercivity and Tc = 550 K. In contrast to the as-prepared state, the ion-beam mixed MLF contains two magnetic phases. One of them is a very soft (Hc < 2 Oe), but microscopically homogeneous one with M$\sub$eff/=6.7 kG.