• 제목/요약/키워드: Vacuum Evaporation

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진공석영 전기로에서 열처리한 $CuInS_2$ 박막특성연구

  • 양현훈;이석호;김영준;나길주;백수웅;한창준;김한울;소순열;박계춘;이진;정해덕
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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    • pp.17-17
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    • 2010
  • Polycrystalline $CuInS_2$ thin films were performed from S/In/Cu Stacked elemental layer(SEL) method with post annealing. In thin method, the thin films were annealed in Vacuum of $10^{-3}$ torr or in S ambient. $CuInS_2$ thin films were manufctured by using the evaporation and the annealing with vacuum quartz furnace of sulfurization process was used in the vacuum chamber to the substrate temperature on the glass substrate the annealing temperature and characteristics thereof were investigated. The physical properties of the thin film were investigated under various fabrication conditions including the substrate temperature annealing time by XRD, FE-SEM, and Hall measurement system.

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Ion Beam Assisted Deposition System의 제작 및 자동화

  • 손영호
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1998년도 제14회 학술발표회 논문개요집
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    • pp.27-27
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    • 1998
  • 진공기술의 응용과 진공환경의 이용은 더 이상 논하지 않더라도 산업 전반에 그 충요성이 점점 더 커가고 있다. 이러한 여건에도 불구하고 진공율 이용하는 system 개밟의 국산화는 수 입하는 system으$\mid$ 수에 비하여 절대적으로 부족하며, 또한 개발하는 system의 자동화는 거의 이 루어지지 않고 있으며, 자동화된 진공판련 system은 거의 대부분 수입에 의흔하고 있다. 실험 실 규모에서부터 System올 하나하나 개밭하고, 이톨 자동화하는 노력과 일이 진행됨다면 산업 응용에 있어서도 자연스럽게 자동화된 system으$\mid$ 개발이 이루어 질 것이다 .. system 자동화는 상 품수명의 단축과 이에 따른 다품종 소량을 요구하는 시장수요에 대응하고, 인력절감과 고풀짙 화로 생산성 향상의 요구에 대응하기 위하여 필요하다. 본 연 구에 서 는 e-beam evaporator로 evaporation하면 서 ion beam으로 assist하여 thin film율 제 작하는 IBAD vacuum system율 싫 계 및 제 작하고[1,2], PLC[3,떼톨 이 용하여 system 자동화톨 하였다 .. thin film 제작 process는 먼저 기본 진공상태로 만뚫고 난 뒤, e-beam evaporator로 e evaporation하면서 ion beam source로 assist하여 substrate 011 thin film율 제조한다 226;. thin film올 제 조하면서 thickness monitor로 sample의 thickness rate톨 control 하고, sample의 균얼성과 밀착 성을 고려하여 substrate톨 rotation 및 heating 할 수 있도록 싫계, 제작하였다. 양질의 박막올 제조하기 위해서 진공환경이 좋은 상태로 제공되어야 한다. 이톨 위하여 oil free operation 0 I 가 능한 dry pump와 turbo molecular pump로 고진공 배기 하였다. 진공도의 흑점은 thermal effect 툴 고려하여 cold cathode ion gauge률 사용하였고, intro chamber와 main chamber 사이에는 g gate valve톨 설치하여 벌도로 운용되도록 하였다. 이러한 process를 박막의 두께, 진공도, 시 간, 온도, 공정 동의 조건올 기훈으로 자동화한 것이다. 또한 정전과 단수에 대한 interlock 기능 도 고려하였다.하였다.

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LCD 제조공정의 혼합폐산으로부터 일인산암모늄 제조 기술 (Manufacture Technology of Monoammonium phosphate from LCD Waste Acid)

  • 이하영;이상길;박성국;김주한;김주엽;김준영
    • 청정기술
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    • 제15권4호
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    • pp.253-257
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    • 2009
  • LCD 제조공정에서 배출되는 질산과 초산, 인산, 그리고 Al과 같은 금속이온을 함유한 폐에칭액으로부터 진공증발과 확산투석을 이용하여 고순도 인산을 회수하여 인산암모늄을 제조하고자 하였다. 진공증발을 이용하여 질산과 초산을 제거하였다. 진공도가 -650 mmHg인 경우에는 온도 413 K 이상에서 완전 분리되었고, 진공도가 -700 mmHg인 경우에는 온도 393 K 이상의 영역에서 완전히 분리되었다. 그리고 진공도 -730 mmHg의 경우는 온도 383 K 이상에서도 완전 분리가 가능하였다. 99%의 질산과 초산을 제거하였으며, 확산투석을 이용하여 약 97.5% 이상의 Al을 제거하였다. 이렇게 얻어진 고순도 인산과 수산화암모늄을 이용하여 일인산암모늄을 제조하는 공정에서 급격한 발열반응을 제어하고 안정된 적정조건을 도출하기 위하여 수산화암모늄의 농도, 적정 몰비, pH, 온도 등의 반응인자를 조절하여 회수율 약 90%의 일인산암모늄을 제조하였다.

The Characteristics Depending on the Annealing Conditions in the PDP Vacuum In-line Sealing

  • Kwon, Sang-Jik;Kim, Jee-Hoon;Jang, Chan-Kyu;Park, Sung-Hyun;Whang, Ki-Woong;Lee, Kyung-Wha
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.703-706
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    • 2004
  • This paper deals with the various sealing conditions in a vacuum and the discharge characteristics. The MgO thin film is prepared by e-beam evaporation method. Sealing process was performed in a vacuum at panel temperature of 430 $^{\circ}C$. We find the cracks on the MgO film surface, which results in higher discharge voltage and lower luminous efficiency. The vacuum in-line sealing technology does not require additional annealing process but induces the MgO cracks because of the high temperature sealing cycle in a vacuum. Therefore we modify the vacuum in-line sealing cycle which the MgO cracks are not found and the good characteristics of plasma displays are found in higher sealing pressure at sealing temperature of 430 $^{\circ}C$.

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초정밀 자기부상 이송장치의 부상제어기 개발 (Development of Levitation Control for High Accuracy Magnetic Levitation Transport System)

  • 하창완;김창현;임재원
    • 제어로봇시스템학회논문지
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    • 제22권7호
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    • pp.557-561
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    • 2016
  • Recently, in the manufacturing process of flat panel displays, mass production methods of inline system has been emerged. In particular the next generation OLED display manufacturing process, horizontal inline evaporation process has been tried. It is important for the success of OLED inline evaporation process to develop a magnetic levitation transport system capable of transferring a carrier equipped with a mother glass with high accuracy without any physical contact along the rail under vacuum condition. In the case of existing wheel-based transfer system, it is not suitable for OLED evaporation process requiring high cleanliness. On the other hand, the magnetic levitation transport system has an advantage that it does not generate any dust and it is possible to achieve high-precision control because there are not non-linear factors such as friction force. In this paper, we introduce the high-precision magnetic levitation transport system, which is currently under development, for OLED evaporation process.

의료용 도뇨관 표면의 도선용 구리 박막 증착을 위한 스퍼터링-열증착 연속공정장비의 설계 및 개발 (Design and Development of Sputter-evaporation System for Micro-wiring on Medical Catheter)

  • 장준근;정석
    • 한국정밀공학회지
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    • 제16권3호통권96호
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    • pp.62-71
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    • 1999
  • Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

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Effect of Concentration Methods on the Quality of Single and Blended Juice Concentrates

  • Lee, Jun-Ho;Sohn, Kyoung-Suck
    • Preventive Nutrition and Food Science
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    • 제8권3호
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    • pp.225-229
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    • 2003
  • Clarified apple, carrot and orange juices were prepared using ultrafiltration and their single and blend juices were further concentrated using ultrafiltration, freeze-drying, and rotary evaporation. Effect of concentration methods on the quality of concentrated single juices and juice blends was investigated. Turbidity values of samples concentrated by evaporation were significantly higher than those prepared by ultrafiltration and vacuum freezing regardless of juice source (i.e., apple, orange or carrot) or blending (p<0.05). The highest soluble solids contents were obtained for the samples concentrated by evaporation process. Concentrated apple juice contained significantly higher amount of vitamin C and soluble solids than concentrated orange and carrot juices regardless of concentration methods (p<0.05). For blended samples, no direct relationships between blend ratio and total amount of vitamin C were found; however, samples contained more apple juice showed the highest value of soluble solids regardless of concentration methods.

열증착방법에 의해 제조된 Si(100)/X(500$\AA$)/Zn(1000$\AA$) 이중박막 성장에 관한 연구 (A Study on the growth of Si(001)/X(500$\AA$)/Zn(1000$\AA$) double layers deposited by thermal evaporation process.)

  • 신동원;정순종;이동윤;민복기;정원섭;송재성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.1026-1029
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    • 2001
  • Zinc films have been deposited onto various buffer layers, Al, Al-Cu, Ag and Ag-Al, by vacuum evaporation method in order to investigate the film microstructure and its consequence on the film growth. Zn films were grown onto Al buffer layers with faster rates than on Ag buffer layers, because of the presence of preferred growth orientation. Especially, in the Zn film formation on the Ag layers, intermetallic compounds AgZn was formed to cause the different growth orientation from Zn film obtained on the Al layers.

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액체수소 저장용기의 열해석 (Thermal Analysis of a Liquid Hydrogen Vessel)

  • 김서영;강병하
    • 한국수소및신에너지학회논문집
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    • 제8권2호
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    • pp.57-65
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    • 1997
  • Thermal analysis has been performed to design a high-performance $LH_2$ vessel with about 1% per day evaporation loss. Analysis includes the combined insulations of MLI(Multi-Layer Insulation) and VCS (Vapor-Cooled Shield) under high vacuum. Combined insulation of MLI and VCS shows the existence of optimal location of VCS to minimize evaporation loss. Comparison of parallel-type DVCS (Double Vapor-Cooled Shield) and serial-type DVCS is also made to show the effectiveness of the system. The results indicate that the serial-type DVCS vessel is better than the parallel-type DVCS vessel with respect to overall evaporation loss. The combined insulation of SVCS (Single Vapor-Cooled Shield) with a partial MLI can give a similar performance characteristics compared to that with MLI and DVCS.

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저압 증발기를 갖는 청수제조 장치에 관한 실험적 연구 (Experimental Study on Fresh Water Generation System with Low Pressure Evaporation)

  • 정한식;위보워;이경환;신용한;정효민
    • 동력기계공학회지
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    • 제15권2호
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    • pp.25-30
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    • 2011
  • A fresh water generation system is designed for converting brackish water or seawater into fresh water. In this paper fresh water generation by distillation process that evaporates feed water and subsequently condenses vapor as evaporation product to get fresh water was studied and city water was employed as feed water. The system uses the ejector to create a vacuum, under which liquid can be evaporated at lower temperature than it at normal or atmospheric condition, hence less energy consumption. The effect of various operating conditions i.e. temperature of feed water and different orifice diameters were studied experimentally to investigate the characteristic of the system. It was found that these parameters have significant effect in the performance of fresh water generation system with low pressure evaporation.