• 대한전자공학회논문지
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• 제25권7호
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• pp.791-798
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• 1988

Films of Cr, Cu, and Al were deposited by the evaporation technique at the high vacuum level-high evaporation rate and the low vacuum level-low evaporation rate. We measured sheet resistance and light transmittance, and observed microstructure and diffraction pattern by TEM, and investigated oxygen content in thin film by AES. We discussed the relations among microstructure, sheet resistance, and light transmittance with AES data. We found that the films deposited at the high vacuum level-high evaporation rate have small oxygen content in thin film comparing to the films deposited at the low vacuum level-low vacuum level-low evaporation rate, and that the films having crystalline structure and larger grain size were formed in the case of the high vacuum level-high evaporation rate and they showed lower sheet resistance and lower light transmittance.

• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.35-40
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• 2008

In OLED vacuum evaporation process, the essential requirements include good uniformity of the film thickness over a glass substrate. And, it is commercially significant to improve the consuming efficiency of material of the evaporant which is deposited on the substrate because of high price of organic materials. In this paper, to achieve the better thickness uniformity and the better organic material consuming rate, a process optimization algorithm was developed by understanding vacuum evaporation process parameters that affect the material consuming efficiency and the uniformity of film thickness. Based on the method developed in this study, the vacuum evaporation process of OLED was successfully controlled. The developed method allowed the manufacture of high quality OLED displays with cheaper fabrication cost.

• 에너지공학
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• 제12권3호
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• pp.216-222
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• 2003

실험실 규모의 진공 증발 수분 제거 시스템을 이용하여, 압력, 윤활유의 온도, 초기 수분농도 및 윤활유 분사 노즐의 형태 등 폐윤활유 속에 포함된 수분 제거 성능에 영향을 미치는 각각의 운전 변수들에 대한 실험적인 연구를 수행하였다. 연구의 결과 압력 및 폐윤활유 온도의 증가는 수분 제거 성능에 매우 중요한 변수임을 확인하였으며, 또한 진공 증발실로 폐윤활유를 분사하기 위한 노즐의 형태는 다공성 매질의 노즐 형상인 경우가 가장 우수한 수분 증발 성능을 나타내었다.

• 한국진공학회지
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• 제9권3호
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• pp.207-215
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• 2000

진공증착 및 이온플레이팅 방법을 이용하여 냉간 압연된 강판상에 알루미늄피막을 형성시킨 후, 증발율 및 증기분포 변화를 측정하고 각 증착방법에서의 증발율에 따른 증기분포 변화를 비교 및 검토하였다. 본 실험에서의 이온플레이팅은 증발원 근처에 이온화 전극을 설치하는 방법으로 고전류 아크방전을 유도하여 $10^{-4}$ Torr 이하에서도 기존의 이온플레이팅에 비해 높은 이온화율을 얻을 수 있는 아크방전 유도형 이온플레이팅(Arc-induced ion Plating; AIIP) 방법을 이용하였다. 전자빔을 이용하면서 알루미나 크루시블을 사용하여 알루미늄을 증발시킬 경우 분당 2.0 $\mu\textrm{m}$이상의 높은 증발율을 얻을 수 있었으며, 이온플레이팅의 경우 이온화된 증기의 상호작용에 따른 산란 효과로 증발율이 다소 낮아짐을 알 수 있었다. $cos^{n/\phi}$로 이루어지는 증기분포의 결정인자(n)의 값이 진공증착의 경우는 1에 근접하는 것으로 나타났고 AIIP의 경우는 2 또는 그보다 더 큰 값으로 이루어지는 것을 확인하였다. 이로부터 이온플레이팅의 경우 이온화율 또는 기판 바이어스 전압의 효과가 다른 조건에 비해 증기분포에 더 크게 영향을 미치는 것을 확인할 수 있었다.

• Current Photovoltaic Research
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• 제10권1호
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• pp.23-27
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• 2022

In this study, we investigate organic-inorganic halide perovskite solar cells with a vacuum thermal evaporated hole transporting layer (NPB/MoO_3-x). By replacing solution process based Spiro-MeOTAD with vacuum thermal evaporation based NPB/MoO_3-x, a thin hole transporting layer was implemented. In addition, parasitic absorption that may occur during the doping process was eliminated by excluding solution process doping. In a solar cell with a thin vacuum thermal evaporated hole transporting layer, the short-circuit current density (Jsc) increased to 23.93 mA/cm², resulting in the highest power converstion efficiency (PCE) at 18.76%. Considering these results, it is essential to control the thickness of hole transporting layer located at the top in solar cell configuration.

• 동력기계공학회지
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• 제10권2호
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• pp.41-46
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• 2006

This study shows a water cooling system by using a steam ejector and jet condenser to drop the temperature of the water by about $5^{\circ}C\;from\;25^{\circ}C$ or higher. In this research, to replace the present water cooling system, we focused on a water cooling system by latent heat of evaporation, thus this system needs a vacuum pressure to evaporate the water in enclosed tank. The water cooling effects are depended on the vacuum pressure in the enclosed tank, and the cooling water is generated by latent head of evaporation. As the experimental results, the absolute vacuum pressure obtained was about $5{\sim}8$ mmHg using a steam driven ejector with jet condenser.

• 대한금속재료학회지
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• 제48권3호
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• pp.241-247
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• 2010

In order to develop the vacuum distillation process of magnesium alloy scrap, a fundamental study on the evaporation behavior of magnesium alloy (AM50) scrap melt was carried out. Melt temperature, pressure, reaction time, and initial specific surface area of melt were considered as experimental variables. The evaporation rate of magnesium increased with the increase of melt temperature and initial specific surface area of melt, and with the decrease of the pressure. The activation energy of magnesium evaporation reaction calculated by an Arrhenius plot decreased with the decrease of the pressure and with the increase of the initial specific surface area of melt. An empirical equation was derived for the evaporation rate of magnesium from AM50 alloy melt.

• 한국진공학회지
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• 제12권1호
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• pp.1-6
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• 2003

50 kW급 출력의 전자빔을 발생시킬 수 있는 축선 방식 전자총 (axial electron beam gun)과 전원장치를 제작하였다. 전자총은 전자빔 발생장치와 전자빔 궤적제어장치로 이루어졌다. 전자빔 발생장치는 필라멘트와 음극(cathode), 양극(anode)으로 구성되었고 전자빔의 최대전류는 2A, 가속전압은 평균 25kV이다. 전자빔 궤적제어장치는 전자빔의 크기를 조절하는 초점 (focusing) 코일과 전자빔의 방향을 조절하는 편향(deflection) 코일 및 주사 (scanning) 코일로 구성되었다. 전자총과 별개로 진공용기 내부에 Helmholtz 코일을 설치하여 시료의 표면에 입사되는 전자빔의 입사각도를 최적화시켰다. 각 부분의 동작 특성을 측정한 결과와 제작된 전자총으로 고융점 원소인 지르코늄 (zirconium, Zr)과 가돌리늄(gadolinium, Gd) 금속을 증발시킨 결과를 정리하였다.

• Journal of Advanced Marine Engineering and Technology
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• 제21권1호
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• pp.26-36
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• 1997

Recently, the new refrigerating system, using non - fluorinated hydrocarbon refrigerants has to be developed for the agricultural fields. One of that kinds of systems is the cooling system using the water vapor and vacuum, in which the water evaporate at the low temperature under vacuum and absorb the large amount of the latent heat. If vapor with large amount of latent heat is removed from the system, the system is cooled accordingly. The characteristics of cooling under the vacuum was observed and measured using experimental apparatus, which is consisted of vacuum chamber, the ejectors, the pumps and the measurement apparatus. As the results of experiments, we know that the evaporation in the vacuum occurs vigorously when the materials to be cooled has more amounts of heat before cooling, and by which effects the materials can be cooled. The cooling vacuum system is more efficient than other methods when the agricultural products is chilled or dried.

• 반도체디스플레이기술학회지
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• 제12권2호
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• pp.45-50
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• 2013

This paper focuses on the fundamental issues for improving the efficiency and throughput of the AC PDP (Plasma Display Panel) manufacturing. The properties of the MgO protective layer affect the PDP efficiency. Especially, the secondary electron emission efficiency was affected on the deposition rate of MgO during the evaporation. In this study, the deposition rate of 5 $\AA$/s has given the maximum efficiency value of 0.05 It is demonstrated that the impurity gases such as $H_2O$, $CO_2$, CO or $N_2$, and $O_2$ can be remained inside the PDP panel before sealing and the amount of the impurity gases decreased rapidly as the base vacuum level increased, especially near $10^{-5}$ torr. The fundamental solution in order to overcome these problems is the vacuum in-line sealing process from the MgO evaporation to the final sealing of the panel without breaking the vacuum. We have demonstrated this fundamental process technology and shown the feasibility. The firing voltage was reduced down to 285 V at the base vacuum value of $10^{-6}$ torr, whreras it was about 328 V at the base vacuum value of $10^{-3}$ torr.