• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.7
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• pp.791-798
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• 1988

Films of Cr, Cu, and Al were deposited by the evaporation technique at the high vacuum level-high evaporation rate and the low vacuum level-low evaporation rate. We measured sheet resistance and light transmittance, and observed microstructure and diffraction pattern by TEM, and investigated oxygen content in thin film by AES. We discussed the relations among microstructure, sheet resistance, and light transmittance with AES data. We found that the films deposited at the high vacuum level-high evaporation rate have small oxygen content in thin film comparing to the films deposited at the low vacuum level-low vacuum level-low evaporation rate, and that the films having crystalline structure and larger grain size were formed in the case of the high vacuum level-high evaporation rate and they showed lower sheet resistance and lower light transmittance.

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.35-40
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• 2008

In OLED vacuum evaporation process, the essential requirements include good uniformity of the film thickness over a glass substrate. And, it is commercially significant to improve the consuming efficiency of material of the evaporant which is deposited on the substrate because of high price of organic materials. In this paper, to achieve the better thickness uniformity and the better organic material consuming rate, a process optimization algorithm was developed by understanding vacuum evaporation process parameters that affect the material consuming efficiency and the uniformity of film thickness. Based on the method developed in this study, the vacuum evaporation process of OLED was successfully controlled. The developed method allowed the manufacture of high quality OLED displays with cheaper fabrication cost.

• Journal of Energy Engineering
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• v.12 no.3
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• pp.216-222
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• 2003

An experimental study on the characteristics of a dewatering due to vacuum evaporation in the waste lubrication oil were performed using a lab scale system. Evaporation characteristics were investigated for various performance factors. Results of evaporation characteristics as a function of vacuum pressure, oil temperature, initial water concentration, and nozzle type were obtained. Increasing the oil temperature and altering the nozzle type were found to increase the evaporation rate without increasing vacuum pressure requirement. The best performance is achieved for the nozzle which made porous material.

• Journal of the Korean Vacuum Society
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• v.9 no.3
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• pp.207-215
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• 2000

Al films on cold-rolled steel sheet have been prepared by vacuum evaporation and arc-induced ion plating, respectively, and the evaporation rate and vapor distribution (thickness distribution over the substrate) have been investigated according to deposition conditions. The arc-induced ion plating (AIIP) method have been employed, which makes use of arc-like discharge current induced by ionization electrode located near the evaporation source. The AIIP takes advantage of high ionization rate compared with conventional ion plating, and can be carried out at low pressure of less than $10^{-4}$ torr. Very high evaporation rate of more than 2.0 mu\textrm{m}$/min could be achieved for Al evaporation using alumina liner by electron beam evaporation. The geometry factor n for the $cos^{n/\phi}$ vapor distribution, which affects the thickness distribution of films at the substrate turned out to be around 1 for vacuum evaporation, while it features around 2 or higher for ion plating. For the ion plated films, it has been found that the ionization condition and substrate bias are the main parameters to affect the thickness distribution of the films.

• Current Photovoltaic Research
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• v.10 no.1
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• pp.23-27
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• 2022

In this study, we investigate organic-inorganic halide perovskite solar cells with a vacuum thermal evaporated hole transporting layer (NPB/MoO_3-x). By replacing solution process based Spiro-MeOTAD with vacuum thermal evaporation based NPB/MoO_3-x, a thin hole transporting layer was implemented. In addition, parasitic absorption that may occur during the doping process was eliminated by excluding solution process doping. In a solar cell with a thin vacuum thermal evaporated hole transporting layer, the short-circuit current density (Jsc) increased to 23.93 mA/cm², resulting in the highest power converstion efficiency (PCE) at 18.76%. Considering these results, it is essential to control the thickness of hole transporting layer located at the top in solar cell configuration.

• Journal of Power System Engineering
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• v.10 no.2
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• pp.41-46
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• 2006

This study shows a water cooling system by using a steam ejector and jet condenser to drop the temperature of the water by about $5^{\circ}C\;from\;25^{\circ}C$ or higher. In this research, to replace the present water cooling system, we focused on a water cooling system by latent heat of evaporation, thus this system needs a vacuum pressure to evaporate the water in enclosed tank. The water cooling effects are depended on the vacuum pressure in the enclosed tank, and the cooling water is generated by latent head of evaporation. As the experimental results, the absolute vacuum pressure obtained was about $5{\sim}8$ mmHg using a steam driven ejector with jet condenser.

• Korean Journal of Metals and Materials
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• v.48 no.3
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• pp.241-247
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• 2010

In order to develop the vacuum distillation process of magnesium alloy scrap, a fundamental study on the evaporation behavior of magnesium alloy (AM50) scrap melt was carried out. Melt temperature, pressure, reaction time, and initial specific surface area of melt were considered as experimental variables. The evaporation rate of magnesium increased with the increase of melt temperature and initial specific surface area of melt, and with the decrease of the pressure. The activation energy of magnesium evaporation reaction calculated by an Arrhenius plot decreased with the decrease of the pressure and with the increase of the initial specific surface area of melt. An empirical equation was derived for the evaporation rate of magnesium from AM50 alloy melt.

• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.1-6
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• 2003

An axial electron beam gun system, which emits the electron beam power of 50 kW, has been manufactured. The electron beam gun consists of two parts. One is the electron beam generation part. including the filament, cathode, and anode. The maximum beam current is 2 A and the acceleration voltage is 25 kV. The other part includes the focusing-, deflection-, and scanning coils. The beam diameter and ham trajectory can be controlled by these coils. The characteristic of each part is measured ior the optimum condition of evaporation process. Moreover, Helmholtz coil is installed inside the vacuum chamber to adjust the incident angel of the beam to the melting surface for the maximum evaporation. We report on the evaporation rates for zirconium(Zr) and gadolinium(Gd) metals which have the high melting temperatures.

• Journal of Advanced Marine Engineering and Technology
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• v.21 no.1
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• pp.26-36
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• 1997

Recently, the new refrigerating system, using non - fluorinated hydrocarbon refrigerants has to be developed for the agricultural fields. One of that kinds of systems is the cooling system using the water vapor and vacuum, in which the water evaporate at the low temperature under vacuum and absorb the large amount of the latent heat. If vapor with large amount of latent heat is removed from the system, the system is cooled accordingly. The characteristics of cooling under the vacuum was observed and measured using experimental apparatus, which is consisted of vacuum chamber, the ejectors, the pumps and the measurement apparatus. As the results of experiments, we know that the evaporation in the vacuum occurs vigorously when the materials to be cooled has more amounts of heat before cooling, and by which effects the materials can be cooled. The cooling vacuum system is more efficient than other methods when the agricultural products is chilled or dried.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.45-50
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• 2013

This paper focuses on the fundamental issues for improving the efficiency and throughput of the AC PDP (Plasma Display Panel) manufacturing. The properties of the MgO protective layer affect the PDP efficiency. Especially, the secondary electron emission efficiency was affected on the deposition rate of MgO during the evaporation. In this study, the deposition rate of 5 $\AA$/s has given the maximum efficiency value of 0.05 It is demonstrated that the impurity gases such as $H_2O$, $CO_2$, CO or $N_2$, and $O_2$ can be remained inside the PDP panel before sealing and the amount of the impurity gases decreased rapidly as the base vacuum level increased, especially near $10^{-5}$ torr. The fundamental solution in order to overcome these problems is the vacuum in-line sealing process from the MgO evaporation to the final sealing of the panel without breaking the vacuum. We have demonstrated this fundamental process technology and shown the feasibility. The firing voltage was reduced down to 285 V at the base vacuum value of $10^{-6}$ torr, whreras it was about 328 V at the base vacuum value of $10^{-3}$ torr.