• Title/Summary/Keyword: Vacuum Evaluation

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The Evaluation of Thermal Performance of Vacuum Glazing by Composition and the Pillar Arrangement through Test Method of Thermal Resistance (단열성 시험 방법을 통한 진공유리의 구성 및 필러 배치에 따른 열 성능 평가)

  • Cho, Soo;Kim, Seok-Hyun;Eom, Jae-Yong
    • Journal of the Korean Solar Energy Society
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    • v.35 no.1
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    • pp.61-68
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    • 2015
  • The advanced counties effort to the supplement of the zero energy buildings for the global building energy saving. In the middle of the development of passive technology, the government has to effort to the energy saving of buildings by enhanced performance of the window thermal insulation. By the method of enhanced performance of window thermal insulation, the use of vacuum double glazing saves the energy consumption in building. This glazing has low U-value(heat transmission coefficient) than normal double glazing. The vacuum glazing enhanced thermal insulation performance by vacuum space of between the glass and glass. For this vacuum glazing, pillar maintain the space between glass and glass. But this structure cause the raising the heat transmission coefficient in pillar approaching glass. This study confirmed the U-value by the test method of thermal resistance for windows and doors. Also this study confirmed the variation of heat transmission coefficient by the structure of vacuum glazing. And this study measured the surface temperature of the vacuum glazing about pillar approaching glass and vacuum space in cool chamber and hot box. That result, this study confirmed U-value of $0.422W/m^2{\cdot}K$ of vacuum glazing. Also this study confirmed U-value of $0.300{\sim}0.422W/m^2{\cdot}K$ by various the structure of vacuum glazing. And this study confirmed the heat flow in pillar approaching glass.

A study of acoustic and vibration character of High volume dry vacuum pumps (대용량 건식 진공펌프의 음향.진동 특성 연구)

  • Shin, Yun-Sang;Cheung, Wan-Sup;Hong, Dong-Pyo;Lim, Jong-Yeon;Kim, Se-Hwan
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2006.05a
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    • pp.1313-1316
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    • 2006
  • Demands of high volume dry vacuum pumps on the domestic semiconductor and LCD industries are rapidly increasing as the size of wafers and LCD is increasing. This study introduces a new experimental setup for testing the reliability of vacuum pumps. The test system was designed to measure the acoustic pressure and mechanical vibration levels simultaneously. It is shown that the test system enables the analysis and evaluation of the performance of dry pumps under the different gas-load conditions. Detailed experimental result are shown to enable us to examine the characteristics and performance of dry pumps.

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Dynamic Response of the System for Vacuum Pump Performance Evaluation (진공 펌프 성능 평가 계통의 동적 응답)

  • Sim, Woo-Gun;Lim, Jong-Yeon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.28 no.11
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    • pp.1359-1367
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    • 2004
  • The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

Comparative Evaluation of Physicochemical Properties of Pine Needle Powders Prepared by Different Drying Methods

  • Chung, Ha-Sook;Lee, Jun Ho
    • Preventive Nutrition and Food Science
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    • v.20 no.2
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    • pp.143-147
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    • 2015
  • Systematic study of how different drying methods, namely hot-air drying, vacuum-drying, and freeze-drying, affect color, browning index, degree of rehydration, water solubility, and vitamin C content is critical for utilizing pine needle powders (PNP) as a novel ingredient in functional foods. Samples prepared by vacuum-drying showed a significantly higher $L^*$-value, whereas higher $a^*$- and $b^*$-values were detected in the hot-air dried samples (P<0.05). The browning index was significantly higher in samples prepared by vacuum-drying compared to samples prepared by freeze-drying (P<0.05). Freeze-dried PNP exhibited a significantly higher degree of rehydration than hot-air dried samples (P<0.05). Water solubilities of freeze-dried and hot-air dried samples were significantly higher than that of vacuum-dried sample (P<0.05). Vitamin C was less destroyed during freeze-drying compared to hot-air or vacuum-drying (P<0.05). Freeze-dried samples displayed a clear porous structure and appeared to have a bigger space, whereas hot-air dried samples showed lower porosity than vacuum and freeze-dried samples.

Development of the Welded Bellows for KSTAR Vacuum Vessel (KSTAR 진공용기용 용접 Bellows 개발)

  • Her, N.I.;Kim, B.C.;Kim, G.H.;Hong, G.H.;Sa, J.W.;Kim, H.K.;Kim, K.M.;Bak, J.S.
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.1098-1102
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    • 2003
  • Vacuum vessel of the KSTAR(Korea Superconducting Tokamak Advanced Research) tokamak is a fully welded structure with D-shaped cross-section. According to the requirements of the physics design, sixteen horizontal ports, sixteen slanted ports, sixteen baking and cooling ports, and twenty-four top and bottom vertical ports are designed for the diagnostics, plasma heating, vacuum pumping, and baking and cooling. Bellows on these ports are used for flexible components to absorb the relative displacement due to the vacuum vessel thermal expansion and the electromagnetic force between the vacuum vessel and the cryostat ports. Fatigue strength evaluation was performed to decide the dimension of the bellows. In order to assure the quality of the bellows, a prototype bellows for the neutral beam injection port has been fabricated and tested prior to main fabrication. It was conformed that the prototype bellows has sufficient fatigue strength and vacuum reliability in the expected load conditions.

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Design and Evaluation of a Rotation Table using Air Bearings for Electron Beam Mastering (전자빔 마스터링을 위한 공기베어링 응용 고진공 회전테이블의 설계 및 진공특성 평가)

  • Khim, Gyung-Ho;Song, Chang-Kyu;Park, Chun-Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.12
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    • pp.132-138
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    • 2008
  • Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.

The Effect of Far Infrared Ray-Vacuum Drying on the Quality Changes of Pimpinella bracycarpa (원적외선건조와 원적외선-진공건조를 이용한 참나물의 품질변화 특성)

  • 이명기;김상헌;함승시;이상영;정차권;강일준;오덕환
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.29 no.4
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    • pp.561-567
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    • 2000
  • This study was conducted to determine the effect of far infrared-vacuum drying on the quality changes of Pimpinella bracycarpa, such as drying efficiency (weight loss), color differences, browning degrees, rehydration and sensory evaluation. Wehn Pimpinella bracycarpa was dried for designated time at 5$0^{\circ}C$, 6$0^{\circ}C$ and 7$0^{\circ}C$, drying time of far infrared-vacuum drying was decreased more than 17% compared to that of infrared drying. The color changes increased as drying temperature increased and far infrared-vacuum drying made less color changes than infrared drying. Also, the total microbial counts and the number of yeast and mold were gradually reduced as drying temperature increased and drying time was longer, but there was no significant differences in microbial changes among drying methods. The rehydration rates of Pimpinella bracycarpa increased as drying temperature increased and was better at far infrared-vacuum drying than infrared drying. Also, according to the sensory evaluation after rehydration of Pimpinella bracycarpa, the hihger scores were obtained at lower temperature and far infrared-vacuum drying, especially the color was obtained much hihger score in the far infrared-vacuum drying than infrared drying. Thus, the results showed that drying efficiency and stability of rehydration and color changes was increased and the quality deterioration of Pimpinella bracycarpa could be minimized by using far infrared-vacuum drying.

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A Study of a Method to Evaluate the Corrosion Resistance of Al2O3 Coated Vacuum Components for Semiconductor Equipment (반도체 장비용 Al2O3 코팅 진공부품의 내부식성 평가 연구)

  • You, S.M.;Yun, J.Y.;Kang, S.W.;Shin, J.S.;Seong, D.J.;Shin, Y.H.
    • Journal of the Korean Vacuum Society
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    • v.17 no.3
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    • pp.175-182
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    • 2008
  • This study is concerned with the evaluation of the corrosion resistance of coated semiconductor equipment parts with various processes. To select the appropriate basis for evaluation, replacement parts were observed during the semiconductor manufacturing process. This study also ran a dry corrosion test using $Al_2O_3$, which is mostly used as a coating material. This test quantitatively measured the efficiency of coated parts. Surface morphology, leakage current and breakdown voltage were also evaluated. This study showed that a dry corrosion process led to the drop of electrical properties, for example, the leakage current increase and the dielectric strength decrease. The surface morphology test displayed that surface damage is largely dependent on the exposure time to corrosive environments. By using the values that changed during the corrosion process, it may be possible to contrive a method to evaluate the efficiency of coated parts with various processes.

Design of mixed noise reduction algorithm for SEM image (전자 현미경 영상의 혼합 잡음제거 알고리즘에 관한 연구)

  • 최재혁;박선우
    • Journal of the Korean Vacuum Society
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    • v.8 no.3B
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    • pp.315-321
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    • 1999
  • In this paper, the SEM image processing system based on PC is designed, and a new noise reduction filtering algorithm is proposed. The SEM image obtained in semiconductor processing line is sensitive to noise, the weighted-D filter can remove uniform and Gaussian noise effectively, but can not remove impulse noise properly, A new improved filtering algorithm is proposed to reduce mixed-noise. The performance of the proposed filter is quantitatively evaluated by use of the normalized mean square errors (NMSE). The experimental results show that the performance of the proposed filter is obtained between 0.96 and 2.5 times better than that of weighted-D filter in NMSE evaluation.

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