• International journal of advanced smart convergence
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• 제10권1호
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.355-358
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• 2003

This paper presents characteristics of vacuum preloaded porous air bearing. Pressure distribution of a porous pad and vacuum pocket are calculated. And load capacity and stiffness of the bearing are analyzed with various vacuum parameters, that is. clearance height. tube diameter, tube length. pumping speed of vacuum pump, vacuum pocket to porous pad area ratio. From the simulation results, optimum clearance for best performance can be selected adjusting these parameters, especially tube diameter which is the most dominant source.

• International Journal of Internet, Broadcasting and Communication
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• 제7권2호
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• pp.28-35
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• 2015

Thin film electronic devices which brought the current mobile environment could be fabricated only under the high quality vacuum conditions provided by high vacuum systems. Especially for the development of advanced thin film devices, constant high quality vacuum as the deposition pressure is definitely needed. For this purpose, the variable conductance throttle valves were employed to the high vacuum system. In this study, the effects of throttle valve applications on vacuum characteristics were simulated to obtain the optimum design modelling of variable conductance of high vacuum system. Commercial simulator of vacuum system, $VacSim^{(multi)}$, was used on this investigation. Reliability of employed simulator was verified by the simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure of below $10^{-3}torr$. Simulation results were plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• 동력기계공학회지
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• 제15권4호
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• pp.5-10
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• 2011

In case of using rapid vacuum-freeze drying for high quality dry flower of flowering plant, the morphological and physiological characteristics of dry rose showed as the following. The dry ratio of about 82% presented after 1 day in case of using rapid vacuum-freeze drying and it was reached that the optimum storage water content of general dry products was 18%. The dry ratio of about 89% presented after 4 days. This result indicates very short dry time comparing with natural dry time of 12 days. Also, the morphological characteristics of flowering plant in case of vacuum-freeze drying showed similar shape with real flower. The contraction decreased about 9% comparing with real flower under dry time of 72 hours. But the contraction in case of natural dry decreased 36% and showed noticeable difference. The brightness which affects physiological characteristics of dry flowering plant showed lower values according to the dry process and chromaticity was thick. After 4 days, natural dry was thick with about 2 times comparing with vacuum-freeze drying. In case of vacuum-freeze drying, the quantity of anthocyanin and chlorophyl which affect discoloration and bleaching of dry flowering plant showed the clear difference comparing with natural dry method due to the sublimation by vacuum after rapid freeze with short initial time.

• Tribology and Lubricants
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• 제35권6호
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• pp.389-395
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• 2019

In various industries, thin film coatings are used to improve friction and wear characteristics. Various types of tribotesters are used to evaluate the friction and wear characteristics of such thin film coatings. In this study, we fabricated a micro-tribotester and Tribo-scanning electron microscopy (SEM) to compare the friction and wear characteristics of copper (Cu) coatings under an atmospheric pressure and a vacuum condition, respectively. The reliability of the different types of tribotesters was evaluated by performing calibrations for the sensor to measure the friction forces and normal loads. Using the two different types of devices, the friction and wear tests are conducted at the same experimental conditions excluding environment conditions such as the atmospheric pressure and vacuum condition. The friction coefficient at the vacuum condition is lower than at the atmospheric pressure. This difference in friction characteristics is due to the fact that wear phenomena occur differently according to the atmospheric pressure and vacuum condition. At the atmospheric pressure, the abrasive wear is the main wear mechanism. At the vacuum condition, the adhesive wear is the main wear mechanism. The reason for the difference in the wear mechanism of the Cu coating at the atmospheric pressure and the vacuum condition is that the oxidation phenomenon, which does not appear at the vacuum condition, occurs at the atmospheric pressure; therefore, the characteristics of the Cu coating change accordingly.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.703-706
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• 2004

This paper deals with the various sealing conditions in a vacuum and the discharge characteristics. The MgO thin film is prepared by e-beam evaporation method. Sealing process was performed in a vacuum at panel temperature of 430 $^{\circ}C$. We find the cracks on the MgO film surface, which results in higher discharge voltage and lower luminous efficiency. The vacuum in-line sealing technology does not require additional annealing process but induces the MgO cracks because of the high temperature sealing cycle in a vacuum. Therefore we modify the vacuum in-line sealing cycle which the MgO cracks are not found and the good characteristics of plasma displays are found in higher sealing pressure at sealing temperature of 430 $^{\circ}C$.

• 한국진공학회지
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• 제9권1호
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• 청정기술
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• 제20권3호
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• pp.241-250
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• 2014

본 논문에서는 싸이클론 청소기들의 성능 및 환경성 평가를 실시하고, 결과를 분석하여 환경에 대한 영향을 최소화하기 위한 개선방안에 대하여 연구하였다. 환경성 평가에는 제품의 원재료 취득, 제조, 운송, 사용 및 폐기 과정에 대해서 제품이 환경에 미치는 영향을 정량적으로 평가하는 전과정 평가(life cycle assessment, LCA)를 간략한 형태로 이용하였다. 2가지의 싸이클론 청소기의 성능을 각 제품의 전력량, 흡입력, 소음, 온도를 관련 규정에 따라 측정하여 비교하였으며, 환경성 평가를 통해 전과정 중 사용단계의 에너지 소모가 가장 많다는 결과를 얻었다. 이를 바탕으로 사용단계의 에너지 소모를 줄이기 위해 싸이클론 청소기 내부에 배플(baffle)을 설치하고, 유지/소모품인 필터의 교환 주기를 늘려 사용단계의 에너지를 감소시키는 개선 방안을 제안하였다. 또한, 싸이클론 청소기의 불필요한 원료 물질 및 부품을 제거하고 상대적으로 재활용률이 높은 원재료 물질로 대체하는 방안을 고려하여 청소기의 중량은 줄이고, 재활용률은 높여 전과정에 대한 에너지 소비를 낮춘 친환경 청소기에 관하여 연구하였다.

• International journal of advanced smart convergence
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• 제8권4호
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• pp.200-206
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• 2019

In this study, we compared the VacCAD and VacSim^(Multi), commercial vacuum simulators, to verify the advantages of VacCAD's efficiency. It was emphasized on immediacy and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and vacuum materials. First, usability of simulation mechanism was estimated through the modeling schematics and obtained simulation results of each employed simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping characteristics of commercially available high vacuum systems. In addition, the degree of tolerances on VacCAD was also investigated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacSim^(Multi) has been presented, and it was expected that the utilization of VacCAD in vacuum applications to be increased.

• Journal of Information Display
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• 제5권4호
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• pp.7-11
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• 2004

Effects of base vacuum level on the electrical and optical characteristics of the plasma display panel (PDP) were investigated. The relationship between efficiency and base vacuum level before filling discharge gas was analyzed. For the base vacuum level of $1{\times}10^{-4}$ torr, firing voltage of a 2-inch diagonal PDP panel was 232 V at the discharge gas pressure of 400 torr and luminous efficiency was 1.5 lm/W at 180V sustaining pulse. On the other hand for $1{\times}10^{-6}$torr, the firing voltage was reduced to 215 V and luminous efficiency was improved considerably to 2.5 lm/W. We successfully demonstrated the smooth operation of tip-less PDP fabricated using vacuum in-line sealing method.