• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.235-235
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
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• pp.83-83
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• 2002

• Proceedings of the Korean Vacuum Society Conference
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• 2005.08a
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• pp.51-51
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2007.08a
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• pp.155-155
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• 2007

• Proceedings of the Korean Vacuum Society Conference
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• 2007.08a
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• pp.159-159
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• 2007

• Proceedings of the Korean Vacuum Society Conference
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• 2005.08a
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• pp.85-85
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2004.02a
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• pp.47-47
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• 2004

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.90-95
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• 2015

The adsorption behavior of tris (dimethylamino)-cyclopentadienyl-zirconium (Cp-Zr) precursor using an in-situ attenuated total reflectance-Fourier transform infrared spectroscopy (ATR-FT-IR) was studied. In attempt to improve the detection intensity of an adsorbed precursor, nanoparticles were uniformly distributed on the Ge ATR crystal surface employing the spray method. The absorption characteristics studies were carried out over the Ge crystal temperature in the range of $30{\sim}50^{\circ}C$. Upon increasing the temperature, a reduction of absorption was observed. Based on the peak intensities of ATR-FT-IR spectroscopy, higher-$ZrO_2$ absorption efficiency occurs when the nano-particles are utilized compared to pure Ge crystal.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• Carbon letters
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• v.12 no.2
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• pp.81-84
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• 2011

A novel experimental set-up allowing quantitative determination of the adsorption capacity of gas molecules on a surface under high-vacuum conditions is introduced. Using this system, the toluene adsorption capacities of various carbon nanostructures were determined. We found that for a give surface area, the adsorption capacities of toluene of multi-walled carbon nanotubes and nanodiamonds were higher than that of activated carbon, which is widely used as an adsorbent of volatile organic compounds. The adsorption of toluene was reversible at room temperature.