The Study on the Precursor Adsorption using in-situ Nanoparticle-assisted Attenuated Total Reflectance Infrared Spectroscopy |
Shin, Jae-Soo
(Department of Advanced Materials Engineering, Daejeon University)
Park, Myung-Su (Quality Management Group, Duksan Techopia Co. Ltd.) Jung, Won-Jun (Department of Advanced Materials Engineering, Daejeon University) Park, Hee-Jung (Department of Advanced Materials Engineering, Daejeon University) Yun, Ju-Young (Center for Vacuum, Korea Research Institute of Standards and Science) Kim, TaeWan (Center for Vacuum, Korea Research Institute of Standards and Science) Kang, Sang-Woo (Center for Vacuum, Korea Research Institute of Standards and Science) |
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