Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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The Study on the Precursor Adsorption using in-situ Nanoparticle-assisted Attenuated Total Reflectance Infrared Spectroscopy

  • Shin, Jae-Soo (Department of Advanced Materials Engineering, Daejeon University) ;
  • Park, Myung-Su (Quality Management Group, Duksan Techopia Co. Ltd.) ;
  • Jung, Won-Jun (Department of Advanced Materials Engineering, Daejeon University) ;
  • Park, Hee-Jung (Department of Advanced Materials Engineering, Daejeon University) ;
  • Yun, Ju-Young (Center for Vacuum, Korea Research Institute of Standards and Science) ;
  • Kim, TaeWan (Center for Vacuum, Korea Research Institute of Standards and Science) ;
  • Kang, Sang-Woo (Center for Vacuum, Korea Research Institute of Standards and Science)
  • Received : 2015.07.23
  • Accepted : 2015.07.29
  • Published : 2015.07.30
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Abstract

The adsorption behavior of tris (dimethylamino)-cyclopentadienyl-zirconium (Cp-Zr) precursor using an in-situ attenuated total reflectance-Fourier transform infrared spectroscopy (ATR-FT-IR) was studied. In attempt to improve the detection intensity of an adsorbed precursor, nanoparticles were uniformly distributed on the Ge ATR crystal surface employing the spray method. The absorption characteristics studies were carried out over the Ge crystal temperature in the range of $30{\sim}50^{\circ}C$. Upon increasing the temperature, a reduction of absorption was observed. Based on the peak intensities of ATR-FT-IR spectroscopy, higher-$ZrO_2$ absorption efficiency occurs when the nano-particles are utilized compared to pure Ge crystal.

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References

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  1. Improving precursor adsorption characteristics in ATR-FTIR spectroscopy with a ZrO2 nanoparticle coating vol.19, pp.2, 2017, https://doi.org/10.1007/s11051-017-3767-0