• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1283-1288
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• 2003

The friction heat generated by the CMP process hasinfluence on removal rate and WIWNU(Within Wafer Non-Uniformity). Therefore, the object of this study is to find the distribution of temperature on pad surface during CMP process. To do this, the authors analyse the kinematics of CMP equipment to verify the sources of friction heat and compare the analysis result with the experimental results. Through the analysis and experiment conducted in this paper, we can predict the distribution of polishing temperature across the pad surface. Furthermore the result could help to predict the process conditions which could enhance the polishing results, such as WIWNU and removal rate of thin film to achieve more efficient process.

• 한국정밀공학회지
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• 제19권10호
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• pp.156-162
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• 2002

There are many factors affecting the results of CMP (Chemical Mechanical Polishing). Among them, the temperature is related to the removal rate and WIWNU (Within Wafer Non-Uniformity). In other words, the removal rate is proportional to the temperature and the variation of temperature distribution on a pad affects the non-uniformity within a wafer. In the former case, the active chemistry improves the rate of chemical reaction and the removal rate becomes better. But, there are not many advanced studies. In the latter case, a kinematical analysis between work-piece and pad can be obtained. And such result analysed from the mechanical aspect can be directly related to the temperature distribution on a pad affecting WIWNU. Meanwhile, the temperature change affects the quantities of both slurry and pad. The change of a pH value of the slurry chemistry due to a temperature variation affects the surface state of an abrasive particle and hence the agglomeration of abrasives happens above the certain temperature. And the pH alteration also affects the zeta potential of a pad surface and therefore the electrical force between pad and abrasive changes. Such results could affect the removal rate and etc. Moreover, the temperature changes the 1st and 2nd elastic moduli of a pad which are closely related to the removal rate and the WIWNU.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.499-502
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• 2004

The temperature distribution of a glass plate heated in the infrared heating chamber has been investigated. Temperature of the glass panel is measured using a set of thermocouples and the optical pyrometer. Temperatures measured by thermocouples have good agreement with those by the pyrometer. The temperature uniformity of the panel is improved with wall reflectivity, which is one of the important factors to uniformly heat the panel

• 전기학회논문지
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• 제59권1호
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• pp.134-137
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• 2010

An LED sensor luminaire for visual function improvement necessitates the control algorithm for light level adjustment and the appropriate lens design. The control algorithm adapts to surround lighting condition, and thus has the advantages of energy saving and glare reduction. The multi-cell lens design improves color temperature uniformity and spatial light distribution of the luminaire. Experimental and simulated results show that this approach contributes noticeably to energy saving and color temperature uniformity of the LED sensor luminaire.

• 설비공학논문집
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• 제23권3호
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• pp.216-222
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• 2011

Recently, hybrid air-conditioning system has been proposed and applied to achieve building energy saving. One example is a system combining radiation panel with natural wind-induced cross-ventilation. However, few research works have been conducted on the non-uniformity of thermal comfort in such hybrid air-conditioning system. In this paper, both thermal environment and non-uniform thermal comfort of human thermal model under various air-conditioning system, including hybrid system, were evaluated in a typical office room using coupled simulation of computation fluid dynamics, radiation model and a human thermal model. The non-uniformity of thermal comfort was evaluated from the deviation of surface temperature of human thermal model. Flow fields and temperature distribution in each case were represented.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.58-58
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• 2009

Uniformity related issues in chemical mechanical polishing (CMP) are within wafer non-uniformity (WIWNU), wafer to wafer non-uniformity (WTWNU), planarity and dishing/erosion. Here, the WIWNU that originates from spatial distribution of independent variables such as temperature, sliding distance, down force and material removal rate (MRR) during CMP, relies to spatial dependency. Among various sources of spatial irregularity, hardness and modulus of pad and surface roughness in sources for pad uniformity are great, especially. So, we investigated the spatial variation of pad surface characteristics using pad measuring system (PMS) and roughness measuring system. Reduced peak height ($R_{pk}$) of roughness parameter shows a strong correlation with the removal rate, and the distribution of relative sliding distance onwafer during polishing has an effect on the variation of $R_{pk}$ and WIWNU. Also, the results of pad wear profile thorough developed pad profiler well coincides with the kinematical simulation of conditioning, and it can contribute for the enhancement of WIWNU in CMP process.

• 한국자동차공학회논문집
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• 제17권2호
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• pp.10-19
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• 2009

The working of diesel particulate filters(DPF) needs to periodically burn soot that has been accumulated during loading of the DPF. The prediction of the relation between an uniformity of gas velocity and soot regeneration efficiency with simulations helps to make design decisions and to shorten the development process. This work presents a comprehensive combined 'DOC+CDPF' model approach. All relevant behaviors of flow fluid are studied in a 3D model. The obtained flow fields in the front of DPF is used for 1D simulation for the prediction of the thermal behavior and regeneration efficiency of CDPF. Validation of the present simulation are performed for the axial and radial direction temperature profile and shows goods agreement with experimental data. The coupled simulation of 3D and 1D shows their impact on the overall regeneration efficiency. It is found that the flow non-uniformity may cause severe radial temperature gradient, resulting in degrading regeneration efficiency.

• 한국수소및신에너지학회논문집
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• 제33권1호
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• pp.47-54
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• 2022

In this study, we performed numerical analysis for 1 kWe SOFC stack of internal manifold types according to the different manifold sizes to verify the influence of the flow uniformity into each cell. To simulate the flow phenomena in the stack, the continuity and momentum conservation equations including the standard k-𝜺 turbulent model for the steady-state conditions were applied. From the calculation results, we verified that the pressure drop from inlet pipes to outlet pipes decreased to a log scale as the manifold size increased in the internal manifold types. Also, we found that the flow uniformity increased on an exponential scale as the manifold size increased. In addition, the calculation results showed that the flow uniformity gradually improved as the fuel and oxygen utilization increased.

• Journal of Mechanical Science and Technology
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• 제20권7호
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• pp.1089-1097
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• 2006

The market demand of display devices is drastically increasing in the information technology age. The research on OLED (Organic Light Emitting Diodes) display with the luminescence in itself is being more paid attention than LCD (Liquid Crystal display) with the light source from the back. The vapor deposition process is most essential in manufacturing OLED display. The temperature distribution of the linear cell in this process is closely related to securing the uniformity of organic materials on the substrate. This work analyzed the temperature distribution depending on the intervals between the crucible and the heating band as well as on the amount of the heat flux from the heating band. Moreover, the roles of the water jacket and the configuration of the cover within the linear cell were examined through the temperature analysis for six configurations of the linear cell. Under the above temperature analysis, the variations in the intervals and the amount of the heat flux were considered to have an effect on building the uniform temperature distribution within the crucible. It is predicted that the water jacket and the adequate configuration of the cover will prevent the blowout and clogging phenomena, respectively. The results can be used as the fundamental data for designing the optimal linear cell.

• 산업식품공학
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• 제23권2호
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• pp.87-93
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• 2019

공기 주입식 스팀-에어 레토르트 내에서 스팀온도, 내부가압, CUT 등의 공정변수가 레토르트 내부의 온도 균일성에 미치는 영향을 평가하였다. 고온살균(121℃)이 저온살균(82℃) 보다 공정구간동안 온도분포가 더 균일하고 안정적이었다. 내부 가압이 클수록 저온살균조건의 공정에서는 온도분포가 안정적이었고, 이와 반대로 고온살균조건의 공정에서 온도분포가 더 불균일한 것으로 나타났다. 승온구간을 조절한 경우에는 레토르트 내의 온도분포에는 유의적인 차이를 나타내지 않았다. 공정구간동안 레토르트 내부에서 냉점은 수직방향 1층의 위로 확인되었고, 수평방향에서는 맨 뒤쪽 중앙 부분이 가장 높은 온도를 유지하여 공정 동안 이 위치들을 주의를 할 필요가 있었다. 또한 레토르트 내부의 양 옆 위치가 다른 위치에 비해 특히 온도분포가 불안정한 것으로 확인되었으므로 레토르트 가공 공정에서 주의해야 할 것으로 판단되었다.