• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.2 no.4
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• pp.303-315
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• 1990

Uniformity of velocity is quite important design points of a vertical laminar flow type clean room. In the present paper, flows in a room with a bottom pannel are numerically simulated by using a low-Reynolds number $k-{\epsilon}$ model, and a new flow model of the pannel are suggested. Resistance coefficient of the pannel and size of the exhaust channel show considerable effects on flow pattern and uniformity of flow on the bottom. Reflection coefficient also has important roles. A possibility to obtain the uniform and unidirectional flow is tested by adjusting the distribution of resistance coefficient of the pannel. Such a numerical simulation of the flow will be a good method to get optimun design parameters.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.11
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• pp.1417-1427
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• 2000

A flow stabilizer, which is made of a honeycomb and three different mesh screens, is located downstream of a butterfly-type valve, for the reduction of flow disturbances behind the valve. Mean flow and turbulence measurements as well as flow visualizations are conducted in the downstream region of the deepens the non-uniformity of the streamwise velocity component and turbulence. The mesh screens considerably reduce the turbulence and enhance the uniformity of mean velocities. The combination of the honeycomb and the three mesh screens results in an efficient reduction in the flow disturbances. In addition, the flow stabilizer proves to have a good performance in the suppression of turbulence at a short distance.

• Journal of computational fluids engineering
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• v.9 no.4
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• pp.13-19
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• 2004

Flow distribution of a mid-size vehicle in engine room was investigated numerically to analyze the flow performance of given design cases in a front body of the mid-size vehicle. The data analyzed are the mass flow rate at the upper and lower openings, in the radiator, and the degree of non-uniformity of the velocity field at the inlet of the radiator. It is presented that the shape of the front end and the presence of the undercover greatly affect the flow fields, therefore, the flow performance.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.18 no.4
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• pp.328-334
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• 2006

Industrial electrostatic precipitators require a highly uniform velocity distribution in the collecting chamber. Increasing divergence angle of a diffuser makes a non-uniformity flow distribution characteristics on the diffuser exit. This paper provides CFD results of optimum positions and opening rates of perforated plates which were installed in the electrostatic precipitator. The considered divergence angels were 60 degree and 90 degree. In 90 degree diffuser, a blanking method was used.

• Transactions of the Korean Society of Automotive Engineers
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• v.4 no.4
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• pp.72-79
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• 1996

The recent trend of higher output engines with more auxiliary parts is resulting in greater heat generation in the engine compartment. In order to maximize the heat dissipation and eliminate the inefficient flow in the engine compartment, it is necessary to understand the flow field under the hood. In this respect, experimental study as well as numerical analysis should be conducted. The automated measuring system was constructed to obtain three dimensional mean flow data with high accuracy. The measurements have been made on a vehicle with a steady incoming air flow. The result shows that there exists a high degree of non-uniformity in the mean flow velocity at the front of radiator.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.311-318
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• 2001

A three-dimensional numerical analysis of the flow and heat transfer characteristic of wood-flour-filled polypropylene melt in an extrusion die was carried out Used for this analysis were Finite Concept Method based on FVM, unstructured grid and non-Newtonian fluid viscosity model. Temperature and flow fields are closely coupled through temperature dependent viscosity and viscous dissipation. With large Peclet, Nahme, Brinkman numbers, viscous heating caused high temperature belt near die housing, Changing taper plate thickness and examining some predefined parameters at die exit investigated the effect of taper plate on velocity and temperature uniformities. In the presence of taper plate, uniformity at die exit could be improved and there existed an optimum thickness to maximize it.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.359-364
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• 2000

The fluid flow, heat transfer and the local mass fi-action of chemical species in the chemical vapor deposition(CVD) manufacturing process are numerically studied. The deposition of silicon from dilute silane is hydrogen carrier gas in a horizontal CVD reactor is investigated. The effect of inlet carrier gas velocity, mass fraction of silane, susceptor angle on the deposition thickness and uniformity was represented.

• Applied Science and Convergence Technology
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• v.26 no.6
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• pp.189-194
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• 2017

Effects of gas injection scheme and rf driving current configuration in a dual turn inductively coupled plasma (ICP) system were analyzed by 3D numerical simulation using CFD-ACE+. Injected gases from a tunable gas nozzle system (TGN) having 12 horizontal and 12 vertical nozzles showed different paths to the pumping surface. The maximum velocity from the nozzle reached Mach 2.2 with 2.2 Pa of Ar. More than half of the injected gases from the right side of the TGN were found to go to the pump without touching the wafer surface by massless particle tracing method. Gases from the vertical nozzle with 45 degree slanted angle soared up to the hottest region beneath the ceramic lid between the inner and the outer rf turn of the antenna. Under reversed driving current configuration, the highest rf power absorption region were separated into the two inner islands and the four peaked donut region.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.11
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• pp.46-56
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• 1996

Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

• 한국연소학회:학술대회논문집
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• 2015.12a
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• pp.61-63
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• 2015

In the low pressure selective catalytic reduction (LP SCR) system, the uniformity of both ammonia concentration and exhaust gas flow at the SCR catalyst layer are important design factor for the efficient SCR-deNOx performance. According to the shape of the guide vane and static mixer, numerical simulations were conducted to analyze flow patterns and finally to find out the appropriate alternative for uniform flow at the front of catalyst in the real scale LP SCR reactor. The variations of gas velocity and ammonia concentration were quantitatively evaluated. Based on the present results, the shape was devised to satisfy the design criteria.