• Title/Summary/Keyword: Uniformity factor

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Statistical Design of Experiments and Analysis: Hierarchical Variance Components and Wafer-Level Uniformity on Gate Poly-Silicon Critical Dimension (통계적 실험계획 및 분석: Gate Poly-Silicon의 Critical Dimension에 대한 계층적 분산 구성요소 및 웨이퍼 수준 균일성)

  • Park, Sung-min;Kim, Byeong-yun;Lee, Jeong-in
    • Journal of Korean Institute of Industrial Engineers
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    • v.29 no.2
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    • pp.179-189
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    • 2003
  • Gate poly-silicon critical dimension is a prime characteristic of a metal-oxide-semiconductor field effect transistor. It is important to achieve the uniformity of gate poly-silicon critical dimension in order that a semiconductor device has acceptable electrical test characteristics as well as a semiconductor wafer fabrication process has a competitive net-die-per-wafer yield. However, on gate poly-silicon critical dimension, the complexity associated with a semiconductor wafer fabrication process entails hierarchical variance components according to run-to-run, wafer-to-wafer and even die-to-die production unit changes. Specifically, estimates of the hierarchical variance components are required not only for disclosing dominant sources of the variation but also for testing the wafer-level uniformity. In this paper, two experimental designs, a two-stage nested design and a randomized complete block design are considered in order to estimate the hierarchical variance components. Since gate poly-silicon critical dimensions are collected from fixed die positions within wafers, a factor representing die positions can be regarded as fixed in linear statistical models for the designs. In this context, the two-stage nested design also checks the wafer-level uniformity taking all sampled runs into account. In more detail, using variance estimates derived from randomized complete block designs, Duncan's multiple range test examines the wafer-level uniformity for each run. Consequently, a framework presented in this study could provide guidelines to practitioners on estimating the hierarchical variance components and testing the wafer-level uniformity in parallel for any characteristics concerned in semiconductor wafer fabrication processes. Statistical analysis is illustrated for an experimental dataset from a real pilot semiconductor wafer fabrication process.

Analysis of Temperature Distribution of the Glass Panel in the Infrared Heating Chamber (적외선 가열로에서 가열되는 유리 패널의 온도분포 해석)

  • Lee, Kong-Hoon;Kim, Ook-Joong;Ha, Su-Seok;Kang, Sae-Byul;Lee, Joon-Sik
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.278-283
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    • 2003
  • Analysis has been carried out to investigate the temperature variation and the uniformity of the temperature distribution of the glass panel by infrared radiant heating. Halogen lamps are used to heat the panel and located near the top and bottom of the rectangular chamber. The thermal energy is transfered only by radiation and the radiation exchange occurs only on the solid surfaces and is considered by using the view factor. The results show that the uniformity of the temperature distribution of the panel is improved but the time for heating increases as the wall reflectivity is large. The temperature difference reaches a maximum in the early stage of the heating process and then decreases until it reaches the uniform steady-state value.

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A study on a uniformity of flow field in a duct cooler of FGD system (배연탈황설비 덕트쿨러에서의 유동균일화에 관한 연구)

  • 배진효;김광추;박만흥;박경석;이종원
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.12 no.2
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    • pp.120-130
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    • 2000
  • A flow uniformity in a duct cooler of duct system of FGD(Flue Gas Desulfurization) linking a reheater and a absorber has been investigated in the present study. For this purpose, the flow characteristics according to the geometry of a vertical and horizontal vane in a curved duct of the duct system has been examined with the aid of a numerical simulation. The results indicate that the vertical vane with a little deflection toward a recirculation region makes the flow distribution in the duct cooler more uniform than that without deflection, and horizontal vane does not effect the change of the flow distribution for an angle of inclination. The mean flow uniform factor shows its maximum for duct system without the vane(case NP) and its minimum for the vertical vane with a little deflection(case P-0.8-0) .

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Temperature Uniformity of the Glass Panel Heated in the Infrared Heating Chamber

  • Lee, Kong-Hoon;Kim, Ook-Joong
    • Journal of Mechanical Science and Technology
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    • v.19 no.10
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    • pp.1950-1956
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    • 2005
  • An analysis has been carried out to investigate the effect of the reflectivity on the temperature distribution of a glass panel by infrared radiant heating. Halogen lamps are used to heat the panel, located near the top and bottom of the rectangular chamber. The thermal energy is transferred from the lamps to the panel only by radiation and it is considered by using view factor. The conductive transfer is limited inside the panel. The results show that the uniformity of the temperature distribution of the panel is improved and, at the same time, the time for heating increases as the wall reflectivity increases. The temperature difference between the center and the corner reaches a maximum in the early stage of the heating process and then decreases until it reaches a uniform steady-state value.

Development of a Variable Rate Granule Applicator for Environment-Friendly Precision Agriculture (II) - Development of Pneumatic Fertilizer Blow Head and Its Application Uniformity - (친환경 정밀농업을 위한 입제 변량살포기 개발 (II) -송풍식 붐형 분두 개발과 살포균등도 -)

  • Kim, Y.J.;Kim, H.J.;Seo, M.;Rhee, J.Y.
    • Journal of Biosystems Engineering
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    • v.31 no.6 s.119
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    • pp.474-481
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    • 2006
  • In this paper, a new type blow head was developed and pneumatic application system was evaluated. The blow head had one operating factor, inserting length of collecting plate, that was directly related to discharge rate and application pattern. To determine Proper blow head arrangement and application height, a blow head set was tested. Three-way ANOVA was conducted to investigate relationships between CV value, the discharge rate and inserting length of collecting plate. The discharge rate and inserting length of collecting plate were statistically significant at p=0.01, affecting uniformity of application pattern. The best CV value among the application tests was 23.3% when the application rate and application height was 23.5 g/sec and 80 cm respectively. The worst CV value was 63.3% in 111.4 g/sec. Therefore, it is necessary to increase number of blow head in a section of the boom in improve application uniformity.

Light Factor Performance of a Room with Light Guide and Blind Systems by Mockup Experiments (혼합형 채광조절장치가 실내공간의 주광조도분포에 미치는 영향에 관한 Mockup 실험평가)

  • Shin, Hwa Young;Kim, Jeong Tai
    • KIEAE Journal
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    • v.7 no.1
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    • pp.23-31
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    • 2007
  • This study aims to evaluate the illuminance performance of sloped light guide with automated venetian blind systems. For the purpose, a mock-up model was constructed as a prototype of Korean office building with $12.0m{\times}7.3m{\times}3.7m$ ($w{\times}d{\times}h$) and south facing side-window mounted between the clerestory window($2.0m^2$) and the view window($5.6m^2$). The light guide of 1.28m deepth and $29^{\circ}$ tilted angle, is covered with 0.6mm galvanized steel sheet and 97% reflective film. To protect the room from low solar angle, a blind systems, 0.15m deepth and $30^{\circ}$ automated slat angle was installed. To assess illuminance performance, the totally 37 measuring points for illuminance were monitored. For the detailed analysis, photometric sensors were installed at work-plane (8 points), wall (7 points), ceiling (3points), and exterior horizontal illuminance (1 point) respectively. The performance was measured under clear sky and is monitored by Agilent data logger, photometric sensor Li-cor and the Radiant Imaging ProMetric 1400. Comparisons of light factor and uniformity are discussed.

Design and Implementation of MODA Allocation Scheme based on Analysis of Block Cleaning Cost (블록 클리닝 비용 분석에 기초한 MODA할당 정책 설계 및 구현)

  • Baek, Seung-Jae;Choi, Jong-Moo
    • Journal of KIISE:Computer Systems and Theory
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    • v.34 no.11
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    • pp.599-609
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    • 2007
  • Due to the restrictions of Flash memory such as overwrite limitation and write/erase operational unit differences, block cleaning is required in Flash memory based file systems and known as a key factor on the performance of file systems. In this paper, we identify three parameters, namely utilization, invalidity and uniformity, and analyze how the parameters affect the cost of block cleaning. The analysis show that as uniformity degrades, the cost of block cleaning increases drastically. To overcome this problem, we design a new modification-aware(MODA) page allocation scheme that strives to keep uniformity high by separating frequently-updating data from infrequently-updating data. Real implementation experiments conducted on an embedded system show that the MODA scheme can actually enhance uniformity of Flash memory, which consequently leads to reduce the cost of block cleaning with an average of 123%, compared to the traditional sequential allocation scheme that is used in YAFFS.

Effect of a Suspended Overhead Sprayer with Sector Formed Injection Nozzles on Spraying Uniformity (두상관수장치의 부채꼴분사노즐 설치위치가 살수균일성에 미치는 영향)

  • 김명규;정태상;민영봉
    • Journal of Bio-Environment Control
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    • v.8 no.4
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    • pp.223-231
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    • 1999
  • The one of basic functional conditions of suspended overhead sprayer, which is openly made use of irrigating on bedding plants in greenhouse, is to be kept the growing uniformity of bedding plants by making uniformly the spraying irrigation depending on the distribution of sprayed water. This study was performed to find out the optimum position of sector formed injection nozzle which is placed from the top of plant 0 the tip of the nozzle to keep spraying uniformity. The test of spraying distribution using a overhead sprayer, which was installed in a row of sector formed injection nozzles, was performed The measuring factor to represent spraying distribution was the water weight filled in each cup when the overhead sprayer was moving across the upside of the cups which were placed directly under the nozzles on keeping the distance from nozzle tip. The test results were as following , The standard mr of weights of each cup filled with spraying water was lower values at Position far from more than 60cm under nozzle tip. The driving speed variation of sprayer was not effected on spraying uniformity but the spraying water weight was inversely proportioned to the speed. To make best spraying uniformity, it was represented that the tip of the nozzle is positioned to keep the distance which the top of plants is placed at the second cross point of each injection sector of nozzles.

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A Study on the Characteristic and Droplet Uniformity of Spray Injection to Exhaust Gas Flow from Urea Solution Injector (Urea 수용액의 배기가스 유동장내 분무 특성과 분무 균일도에 관한 연구)

  • Oh, Jung-Mo;Cha, Won-Sim;Kim, Ki-Bum;Lee, Jin-Ha;Lee, Ki-Hyung
    • Transactions of the Korean Society of Automotive Engineers
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    • v.19 no.3
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    • pp.83-89
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    • 2011
  • Diesel engines can produce higher fuel efficiency and lower $CO_2$ emission, they are subject to ever more stringent emission regulation. However, there are two major emission concerns fo diesel engines like such as particulate matter (PM) and nitrogen oxides (NOx). Moreover, it is not easy to satisfy the regulations on the emission of NOx and PM, which are getting more strengthened. One of the solutions is to apply the new combustion concept using multistage injection such as HCCI and PCCI. The other solution is to apply after-treatment systems. For example, lean NOx trap catalyst, Urea-SCR and others have various advantages and disadvantages Especially, Urea-SCR system have advantages such as a high conversion efficiency and a wide operation conditions. Hence the key factor to implementation of Urea-SCR technology, good mixing of urea(Ammonia) and gas, reducing Ammonia slip. Urea mixer components are required to facilitate evaporation and mixing because the liquid state of urea poses significant barriers for evaporation, and the distance to mixer is the most critical that affect mixer performance. In this study, to find out the distance from injector to mixer and simulation factor, a laser diagnostics and high speed camera are used to analyze urea injector spray characteristics and to present a distribution of urea solution in transparent manifold In addition, Droplet Uniformity Index is calculated from the acquired images by using image processing method to clarify the distribution of spray.

The Development of a High Efficiency Luminaires Reflector for Tunnel Lighting (터널용 고효율 조명기구 반사판의 개발)

  • Kim, Gi-Hoon;Hwang, Jae-San;Yun, Mee-Rim;Kim, Hoon
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.15 no.2
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    • pp.1-6
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    • 2001
  • Tunnel lighting in Korea has the problems of unsatisfactory illuminance uniformity which obstructs driver's vision, a flicker phenomenon on wall of tunnel, a heavy glare, low efficiency of luminaires, low utilization factor, and high energy consumption. We developed a high efficiency luminaire reflector for tunnel lighting which removes these problems. Developed luminaire saves energy and improves lighting environment by increasing 10% of luminaire efficiency. It can reduce installation cost by decreasing the number of luminaires, while average illuminance of 200[lx], overall uniformity of 0.4, longitudinal uniformity of 0.7, and electric power consumptions per unit area of 3.7[W/m$^2$] are accomplished.

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