• Title/Summary/Keyword: Uniformity control

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The design and fabricationt for ion fraction measurement of plasma generator (플라즈마발생기의 이온분율 측정 장치 설계 및 제작)

  • Lee, Chan-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.368-368
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    • 2008
  • Ion implantation has been widely developed during the past decades to become a standard industrial tool. To comply with the growing needs in ion implantation, innovative technology for the control of ion beam parameters is required. Beam current, beam profile, ion fractions are of great interest when uniformity of the implant is an issue. Especially, it is important to measure the spatial distribution of beam power and also the energy distribution of accelerated ions. This energy distribution is influenced by the proportion of mass for ion in the plasma generator(ion source) and by charge exchange and dissociation within the accelerator structure and also by possible collective effects in the neutralizer which may affect the energy and divergence of ions. Hydrogen atom has been the object of a good study to investigate the energy distribution. Hydrogen ion sources typically produce multi-momentum beams consisting of atomic ion ($H^+$) and molecular ion ($H_2^+$ and $H_3^+$). In the beam injector, the molecular ions pass through a charge-exchanges gas cell and break up into atomic with one-half (from $H_2^+$) or one-third (from $H_3^+$) according to their accelerated energy. Burrell et al. have observed the Doppler shifted lines from incident $H^+$, $H_2^+$, and $H_3^+$ using a Doppler shift spectroscopy. Several authors have measured the proportion of mass for hydrogen ion and deuterium using an ion source equipped with a magnetic dipole filter. We developed an ion implanter with 50-KeV and 20-mA ion source and 100-keV accelerator tube, aiming at commercial uses. In order to measure the proportion of mass for ions, we designed a filter system which can be used to measure the ion fraction in any type of ion source. The hydrogen and helium ion species compositions are used a filter system with the two magnets configurations.

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System Design and Application of External Feature Extraction for Quality Maintenance of Yukwa (유과의 품질규격 유지를 위한 외형 정보 측정 시스템 설계 및 적용 연구)

  • Cho, Sung Ho;Kim, Tae Jung;Hwang, Heon
    • The Korean Journal of Community Living Science
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    • v.24 no.2
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    • pp.251-258
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    • 2013
  • Korean oil and honey Yukwa has been paid attention as formal cake for traditional national seasons' holiday and religious service. Quality of Yukwa, however, has been maintained arbitrarily by each Yukwa manufacturer. Since even same Yukwa had severe differences in size, weight, and pattern, it has given the negative effect to the consumer. Yukwa industries need to setup the quantitative quality specifications instead of qualitative ones to maintain the uniformity of Yukwa quality. Efficient and economical inspection and process control system should be developed. In developing quality standards of Yukwa, features which can measure quality quantitatively in real time should be properly chosen. Existing quality features such as acidity, oxidization, hardness, viscosity, and texture were measured by the chemical or physical base destructive methods. Many research and developments have been performed in investigating and analyzing chemical transition states of those quality features as environment or storage condition changes. Most methods, however, require either off-line or complex treatment or time consuming process of analysis in evaluating quality features. Consumer, however, selects products mostly based on the external features such as shape, size, and color. Therefore, critical visual quality features should be chosen and the efficient real time measurement system must be developed. In this paper, computer image acquisition and processing system were developed and software modules were developed to extract the quantitative data of those features in real-time. Computer image processing system will promote in maintaining uniform quality of Yukwa and establishing quality standards of Yukwa.

Theoretically Informed Correlates of Hepatitis B Knowledge among Four Asian Groups: The Health Behavior Framework

  • Maxwell, Annette E.;Stewart, Susan L.;Glenn, Beth A.;Wong, Weng Kee;Yasui, Yutaka;Chang, L. Cindy;Taylor, Victoria M.;Nguyen, Tung T.;Chen, Moon S.;Bastani, Roshan
    • Asian Pacific Journal of Cancer Prevention
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    • v.13 no.4
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    • pp.1687-1692
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    • 2012
  • Background: Few studies have examined theoretically informed constructs related to hepatitis B (HBV) testing, and comparisons across studies are challenging due to lack of uniformity in constructs assessed. The present analysis examined relationships among Health Behavior Framework factors across four Asian American groups to advance the development of theory-based interventions for HBV testing in at-risk populations. Methods: Data were collected from 2007-2010 as part of baseline surveys during four intervention trials promoting HBV testing among Vietnamese-, Hmong-, Korean- and Cambodian-Americans (n = 1,735). Health Behavior Framework constructs assessed included: awareness of HBV, knowledge of transmission routes, perceived susceptibility, perceived severity, doctor recommendation, stigma of HBV infection, and perceived efficacy of testing. Within each group we assessed associations between our intermediate outcome of knowledge of HBV transmission and other constructs, to assess the concurrent validity of our model and instruments. Results: While the absolute levels for Health Behavior Framework factors varied across groups, relationships between knowledge and other factors were generally consistent. This suggests similarities rather than differences with respect to posited drivers of HBV-related behavior. Discussion: Our findings indicate that Health Behavior Framework constructs are applicable to diverse ethnic groups and provide preliminary evidence for the construct validity of the Health Behavior Framework.

Study of micro flip-chip process using ABL bumps (ABL 범프를 이용한 마이크로 플립 칩 공정 연구)

  • Ma, Junsung;Kim, Sungdong;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.2
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    • pp.37-41
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    • 2014
  • One of the important developments in next generation electronic devices is the technology for power delivery and heat dissipation. In this study, the Cu-to-Cu flip chip bonding process was evaluated using the square ABL power bumps and circular I/O bumps. The difference in bump height after Cu electroplating followed by CMP process was about $0.3{\sim}0.5{\mu}m$ and the bump height after Cu electroplating only was about $1.1{\sim}1.4{\mu}m$. Also, the height of ABL bumps was higher than I/O bumps. The degree of Cu bump planarization and Cu bump height uniformity within a die affected significantly on the misalignment and bonding quality of Cu-to-Cu flip chip bonding process. To utilize Cu-to-Cu flip chip bonding with ABL bumps, both bump planarization and within-die bump height control are required.

A Study on the Prediction of Power Consumption in the Air-Conditioning System by Using the Gaussian Process (정규 확률과정을 사용한 공조 시스템의 전력 소모량 예측에 관한 연구)

  • Lee, Chang-Yong;Song, Gensoo;Kim, Jinho
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.39 no.1
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    • pp.64-72
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    • 2016
  • In this paper, we utilize a Gaussian process to predict the power consumption in the air-conditioning system. As the power consumption in the air-conditioning system takes a form of a time-series and the prediction of the power consumption becomes very important from the perspective of the efficient energy management, it is worth to investigate the time-series model for the prediction of the power consumption. To this end, we apply the Gaussian process to predict the power consumption, in which the Gaussian process provides a prior probability to every possible function and higher probabilities are given to functions that are more likely consistent with the empirical data. We also discuss how to estimate the hyper-parameters, which are parameters in the covariance function of the Gaussian process model. We estimated the hyper-parameters with two different methods (marginal likelihood and leave-one-out cross validation) and obtained a model that pertinently describes the data and the results are more or less independent of the estimation method of hyper-parameters. We validated the prediction results by the error analysis of the mean relative error and the mean absolute error. The mean relative error analysis showed that about 3.4% of the predicted value came from the error, and the mean absolute error analysis confirmed that the error in within the standard deviation of the predicted value. We also adopt the non-parametric Wilcoxon's sign-rank test to assess the fitness of the proposed model and found that the null hypothesis of uniformity was accepted under the significance level of 5%. These results can be applied to a more elaborate control of the power consumption in the air-conditioning system.

Development of High-Density Information Storage Media by Employing the Six Sigma Methodology (식스 시그마 기법을 활용한 고밀도 정보저장 매체 개발)

  • Lee, Myung-Bok
    • Journal of the Korea Convergence Society
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    • v.9 no.9
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    • pp.41-46
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    • 2018
  • Six sigma methodology is the management tools not only can cause productivity enhancement through the quality control and cost reduction of products and services but also can be applied to various activities of corporates such as research and development. Development of high-density information storage media and devices is indispensible to accomplish the information convergence era. In this paper, we report the case of applying six sigma methodology and tools to the development project of high-density information storage media. The standard DMAIC process was applied to the project and pursuing goals and tools and results in each stage were explained in detail. By adopting the methodology, we could establish fabrication methods of information storage media of recording density higher than $250Gb/in^2$ with high uniformity and reproducibility. The magnetic property and performance of fabricated media were confirmed through measurement of the magnetic hysteresis curve.

DESIGN OF CAMERA CONTROLLER FOR HIGH RESOLUTION SPACE-BORN CAMERA SYSTEM

  • Heo, Haeng-Pal;Kong, Jong-Pil;Kim, Young-Sun;Park, Jong-Euk;Yong, Sang-Soon
    • Proceedings of the KSRS Conference
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    • 2007.10a
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    • pp.130-133
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    • 2007
  • In order to get high quality and high resolution image data from the space-borne camera system, the image chain from the sensor to the user in the ground-station need to be designed and controlled with extreme care. The behavior of the camera system needs to be controlled by ground commands to support on-orbit calibration and to adjust imaging parameters and to perform early stage on-orbit image correction, like gain and offset control, non-uniformity correction, etc. The operation status including the temperature of the sensor needs to be transferred to the ground-station. The preparation time of the camera system for imaging with specific parameters should be minimized. The camera controller needs to synchronize the operation of cameras for every channel and for every spectral band. Detail timing information of the image data needs to be provided for image data correction at ground-station. In this paper, the design of the camera controller for the AEISS on KOMPSAT-3 will be introduced. It will be described how the image chain is controlled and which imaging parameters are to be adjusted The camera controller will have software for the flexible operation of the camera by the ground-station operators and it can be reconfigured by ground commands. A simple concept of the camera operations and the design of the camera controller, not only with hardware but also with controller software are to be introduced in this paper.

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MWCNT thin film based supercapictor using spray deposition and gel electrolytes

  • Han, Song-Yi;Park, Sung-Hwak;Kim, Sung-Hyun;Kim, Sun-Min;Han, Joung-Hoon;Bae, Joon-Ho;Lee, Churl-Seung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.465-465
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    • 2011
  • In recent years, electrochemical supercapacitors have attracted much attention due to their high power density, long life cycles, and high efficiency. Some supercapacitors using CNTs have been reported, but there are several issues to be resolved for further development of CNT based supercapacitors. One issue is time consuming procedures to prepare CNT films, which may provide poor control of CNT uniformity over the large area of the substrates. Another is new electrolytes replacing the conventional liquid electrolytes in supercapacitors. In this work, We have successfully demonstrated that spray deposition method of multiwalled CNT films using gel electroytes could be promising for CNT-based supercapacitors on ITO substrates. Specific capacitances using gel electrolyte reached up to 1.5 F/g and 9 mF/$cm^2$, and internal resistance was 28 ${\Omega}$. Specific capacitances and internal resistance of supercapacitors with gel electrolyte were better than or comparable to those with liquid electrolytes($KNO_3$, $Na_2SO_4$), indicating that gel electrolytes could replace liquid counterparts in CNT-based supercapacitors. Combined with gel electrolyte, spray deposition method could provide low cost and easily scalable process for high performance supercapacitors using CNT films on ITO for applications in display devices.

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Understanding Phytosanitary Irradiation Treatment of Pineapple Using Monte Carlo Simulation

  • Kim, Jongsoon;Kwon, Soon-Hong;Chung, Sung-Won;Kwon, Soon-Goo;Park, Jong-Min;Choi, Won-Sik
    • Journal of Biosystems Engineering
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    • v.38 no.2
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    • pp.87-94
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    • 2013
  • Purpose: Pineapple is now the third most important tropical fruit in world production after banana and citrus. Phytosanitary irradiation is recognized as a promising alternative treatment to chemical fumigation. However, most of the phytosanitary irradiation studies have dealt with physiochemical properties and its efficacy. Accurate dose calculation is crucial for ensuring proper process control in phytosanitary irradiation. The objective of this study was to optimize phytosanitary irradiation treatment of pineapple in various radiation sources using Monte Carlo simulation. Methods: 3-D geometry and component densities of the pineapple, extracted from CT scan data, were entered into a radiation transport Monte Carlo code (MCNP5) to obtain simulated dose distribution. Radiation energy used for simulation were 2 MeV (low-energy) and 10 MeV (high-energy) for electron beams, 1.25 MeV for gamma-rays, and 5 MeV for X-rays. Results: For low-energy electron beam simulation, electrons penetrated up to 0.75 cm from the pineapple skin, which is good for controlling insect eggs laid just below the fruit surface. For high-energy electron beam simulation, electrons penetrated up to 4.5 cm and the irradiation area occupied 60.2% of the whole area at single-side irradiation and 90.6% at double-side irradiation. For a single-side only gamma- and X-ray source simulation, the entire pineapple was irradiated and dose uniformity ratios (Dmax/Dmin) were 2.23 and 2.19, respectively. Even though both sources had all greater penetrating capability, the X-ray treatment is safer and the gamma-ray treatment is more widely used due to their availability. Conclusions: These results are invaluable for optimizing phytosanitary irradiation treatment planning of pineapple.

Etch Characteristics of $SiO_2$ by using Pulse-Time Modulation in the Dual-Frequency Capacitive Coupled Plasma

  • Jeon, Min-Hwan;Gang, Se-Gu;Park, Jong-Yun;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.472-472
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    • 2011
  • The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

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