• Title/Summary/Keyword: Uniform flow distribution

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Characteristics of Ultrafine SiO$_2$Particle Synthesized by Electro-Hydrodynamic Spray Injection in a Furnace (반응로내 전기-수력학적 분사에 의한 비응집 초미세 SiO$_2$ 입자 합성과 특성)

  • Yun, Jin-Uk;Yang, Tae-Hun;An, Gang-Ho;Choe, Man-Su
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.5
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    • pp.660-665
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    • 2001
  • Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiO$_2$particles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm, the mean diameter of SiO$_2$particle decreases from 120 nm to 68 nm. The synthesized particle charging fractions are also investigated.

A Study on the Within Wafer Non-uniformity of Oxide Film in CMP (CMP 패드 강성에 따른 산화막 불균일성(WIWNU)에 관한 연구)

  • Park, Ki-Hyun;Jung, Jae-Woo;Park, Boum-Young;Seo, Heon-Deok;Lee, Hyun-Seop;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.6
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    • pp.521-526
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    • 2005
  • Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

Finite Element Analysis of Multi-Stage Deep Drawing Process for High Precision Rectangular Case with Extreme Aspect Ratio (세장비가 큰 사각컵 디프 드로잉의 유한요소 해석)

  • Ku T.W.;Ha B.K.;Song W.J.;Kang B.S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2002.02a
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    • pp.274-284
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    • 2002
  • Deep drawing process for rectangular drawn section is different with that for axisymmetric circular one. Therefore deep drawing process for rectangular drawn section requires several intermediate steps to generate the final configuration without any significant defect. In this study, finite element analysis for multi-stage deep drawing process for high precision rectangular cases is carried out especially for an extreme aspect ratio. The analysis is performed using rigid-plastic finite element method with an explicit time integration scheme of the commercial program, LS-DYNA3D. The sheet blank is modeled using eight-node continuum brick elements. The results of analysis show that the irregular contact condition between blank and die affects the occurrence of failure, and the difference of aspect ratio in the drawn section leads to non-uniform metal flow, which may cause failure. A series of experiments for multi-stage deep drawing process for the rectangular cases are conducted, and the deformation configuration and the thickness distribution of the drawn rectangular cases are investigated by comparing with the results of the numerical analysis. The numerical analysis with an explicit time integration scheme shows good agreement with the experimental observation.

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Three-Dimensional Finite Element Analysis for Hollow Section Extrusion of the Underframe of a Railroad Vehicle Using Mismatching Refinement with Domain Decomposition (영역분할에 의한 격자세분화기법을 사용한 철도차량 마루부재 압출공정의 3차원 유한요소해석)

  • Park, K.;Lee, Y.K.;Yang, D.Y.;Lee, D.H.
    • Transactions of Materials Processing
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    • v.9 no.4
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    • pp.362-371
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    • 2000
  • In order to reduce weight of a high-speed railroad vehicle, the main body has been manufactured by hollow section extrusion using aluminum alloys. A porthole die has utilized for the hollow section extrusion process, which causes complicated die geometry and flow characteristics. Design of porthole die is very difficult due to such a complexity. The three-dimensional finite element analysis for hollow section is also an arduous job from the viewpoint of appropriate mesh construction and tremendous computation time. In the present work, mismatching refinement, an efficient domain decomposition method with different mesh density for each subdomain, is implemented for the analysis of the hollow section extrusion process. In addition, a modified grid-based approach with the surface element layer is utilized lot three-dimensional mesh generation of a complicated shape with hexahedral elements. The effects of porthole design are discussed through the simulation for extrusion of an underframe part of a railroad vehicle. An experiment has also been carried out for the comparison. Comparing the velocity distribution at the outlet with the thickness variation of the extruded part, it is concluded that the analysis results can provide reliable measures whether the die design is acceptable to obtain uniform part thickness. The analysis results are then successfully reflected on the industrial porthole die design.

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Ultrafiltration Characteristics of Hot-Water Extracts from Siberian Larch Barks for Tannin-based Adhesives (타닌접착제를 위한 시베리아산 낙엽송 수피 온수추출물의 한외여과 특성)

  • Cho, Nam-Seok
    • Journal of the Korean Wood Science and Technology
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    • v.25 no.1
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    • pp.37-41
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    • 1997
  • Hot-water soluble extracts were prepared from medium-sized barks of Siberian larch (Larix gmelineii). The extracts were fractionated by ultrafiltration method for producing uniform quality of adhesives. Molecular weight distribution of the extracts was ranged of 100 to 300.000. pH of the extracts affected amounts of flux, and the range of pH 6~pH 8 was proper for wood adhesives, because of easy concentration and fast gelation time. Removal of particles greater than $0.45{\mu}m$ from the extracts increased both filtration speed (flux) and yields of solids in the filtrates. In ultrafiltration process. operating pressure, filtrate temperature, and flow rate significantly increased with the increase of individual condition. Ultrafiltration using PM10 membrane was very effective to fractionate and concentrate the extracts. Removal of large particles greater than 0.45 m from the extracts increased filtration speed(flux) and yields of solids in the filtrates. A gelation time was accelerated with the increasing pH of the extracts and its concentration. The Stiasny precipitate(26%) from the filtrate obtained by PM 10 membrane was very lower than that(78%) of the retentates. This ultrafiltration method was efficient for obtaining high yield purified phenolic compounds.

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A Study on Electro-deposited Multi-layered Diamond Tool for Grinding Sapphire Wafers (사파이어 절삭용 다층 전착 다이아몬드 공구에 대한 연구)

  • Lim, Goun;Song, William;Hong, Joo Wha
    • Journal of the Korean Society for Heat Treatment
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    • v.30 no.5
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    • pp.222-226
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    • 2017
  • Recently sapphire wafer has expected as smart phone cover material, however, brittle nature of sapphire needed edge grinding processes to prevent early initiation of cracks. Electro-deposited multi-layered groove tools with $35{\mu}m$ diamond particles were studied for sapphire wafer grinding. Solid particle flow behaviors in agitated electrolyte was studied using PIV(Particle Image Velocimetry), and uniform particle distribution in Ni bond were obtained when agitating impeller was located lower part of electrolyte. Hardness values of $400{\pm}50Hv$ were maintained for retention of diamond particles in electro-deposited bond layer. Sapphire wafer edge grinding test was carried out and multi-layered $160{\mu}m$ thick diamond tool showed much greater grinding capabilities up to 2000 sapphire wafers than single-layered $50{\mu}m$ thick diamond electro-deposited tools of 420 wafers. The reason why 3 times thicker multi-layered tools than single-layered tools showed 5 times longer tool lives in grinding processes was attributed to self-dressed new diamond particles in multi-layered tools, and multi-layered diamond tools could be promising for sapphire grinding.

Cu Electroplating on Patterned Substrate and Etching Properties of Cu-Cr Film for Manufacturing TAB Tape (TAB 테이프 제조를 위한 구리 도금 및 에칭에 관한 연구)

  • Kim, N. S.;Kang, T.;Yun, I. P.;Park, Y. S.
    • Journal of the Korean institute of surface engineering
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    • v.27 no.3
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    • pp.158-165
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    • 1994
  • Cu-Cr alloy thin film requires good quality of etching be used for TAB technology. The etched cross sec-tion was clean enough when the etching was performed in 0.1M $FeCl_3$ solution at $50^{\circ}C$. The etching rate was increased with the amount of $KMnO_4$. For enhanced profile of cross section and rate, the spray etchning was found to be superior compared to the immersion etching. A series of experiments were performed to improve the uniformity of the current distribution in electrodeposition onto the substrate with lithographic patterns. Copper was electrodeposited from quiescent-solution, paddle-agitated-solution, and air-bubbled-solution to in-vestigate the effect of the fluid flow. The thickness profile of the specimen measured by profilmetry has the non uniformity at feature scale in quiescent-solution, because of the longitudinal vortex roll caused by the natural convection. However, uniform thickness profile was achieved in paddle-agitated or air bubbled solu-tion.

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Activity and Characteristics of Cu-Mn Oxide Catalyst Prepared by the Deposition-Precipitation Method (침적침전법에 의해 제조된 Cu-Mn 촉매의 활성 및 특성)

  • Kim, Hye-Jin;Choi, Sung-Woo;Lee, Chang-Seop
    • Journal of Korean Society for Atmospheric Environment
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    • v.22 no.3
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    • pp.373-381
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    • 2006
  • The catalytic combustion of toluene was investigated on the Cu-Mn oxide catalysts prepared by the deposition-precipitation method. Experiment of toluene combustion was performed with a fixed bed flow reactor in the temperature range of $100{\sim}280^{\circ}C$. Among the catalysts, 1.29Cu/Mn showed the most activity at $260^{\circ}C$. The deposition-precipitation method may be showed the potential to enhance the activity of catalysts. The catalysts were characterized by BET, scanning electron microscopy (SEM), temperature-programmed reduction (TPR), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) techniques. On the basis of catalyst characterization data, the results showed that the surface of catalysts by deposition-precipitation method had uniform distribution and smaller particle size, which enhanced the reduction capability of catalysts. The XRD results showed that $Cu_{1.5}Mn_{1.5}O_{4}$ spinel phase was made by deposition-precipitation method, and increased catalyst activity and redox characteristic. It was assumed that the reduction step of $Cu_{1.5}Mn_{1.5}O_{4}$ spinel phase progressed $Cu_{1.5}Mn_{1.5}O_{4}\;to\;CuMnO_{2},\;and\;Cu_{2}O\;to\;CuMn_{2}O_{4}\;and\;Cu$.

An Experimental Study on the Effect of Electrohydrodynamic Monodisperse Atomization According to Nozzle Characteristics (노즐 특성에 따른 전기수력학적 단분산 미립화 효과에 관한 실험적 연구)

  • Sung, K.A.;Lee, C.S.
    • Journal of ILASS-Korea
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    • v.10 no.2
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    • pp.18-31
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    • 2005
  • This study was performed to explore the liquid breakup and atomization characteristics for the classification of drop formation mode and background of uniform droplets generation in electrohydrodynmaic atomization according to the change of experimental parameters such as nozzle material (stainless steel. teflon). fluid flow rate, applied electrical field and intensity, and frequency. In results, from the classification map of drop formation modes according to the variation of applied AC voltage and frequency at a stainless nozzle, the droplet size was smaller than the outer diameter of the nozzle tip relatively in the spindle mode. The transition points became clearly to be moved toward the high applied voltage by rising the applied AC frequency beyond 450Hz. Also the droplet radius can be observed quite small in the frequency bandwidth of $350{\sim}450Hz$. The droplet radiuses decrease as the applied voltage increases for a fixed applied AC frequency within the range from 50Hz to 400Hz Over 400Hz, the relation between the power intensity and the droplet size was not consistent with a continuous mechanism of liquid breakup. Thus, it is showed that the droplet size distribution using the teflon nozzle was analogous to the results of stainless steel, but the droplet size was bigger than that of stainless steel relatively in case of a teflon nozzle.

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The Characteristics of Wear Resistance of Cu-TiB2 Composites Reinforced by TiB2 Powders (TiB2 분말로 강화된 Cu-TiB2 복합재료의 내마모특성)

  • Lee Tae-Woo;Choi Jong-Un;Kang Kae-Myung
    • Korean Journal of Materials Research
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    • v.15 no.12
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    • pp.824-828
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    • 2005
  • In this study the effect of the content of $TiB_2$ on wear properties was investigated. $Cu-TiB_2$ composites have been fabricated by hot extrusion. Sliding wear tests were peformed by a pin-on-disk type wear test machine under dry condition and loads varied with from 20N to 80N at sliding speed 3.5Hz. The test results showed that the wear losses and the friction coefficients decreased with increasing $Cu-TiB_2$ volume fraction and increasing the size of $Cu-TiB_2$ particle. Wear property of $10{\mu}m,\;5 vol\%\; TiB_2$ specimen was excellent all of the wear specimens. It is thought that the increase of plastic flow resistivity due to uniform distribution of $10{\mu}m,\;5 vol\%\; TiB_2$ wear specimen would improve wear property. The worn surface and wear debris were examined by optical microscope and scanning electron microscope.