• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2008.05a
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• pp.23-29
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• 2008

- High Density Plasma Source-CCP-Dual/Triple, RF Frequency Control - Radical/Flux Analysis - Low Pressure Process - Chamber Design (Process gap/Wall gap) - Chamber Temp. Control. - ESC Dielectric Materials - Uniform Gas Injection

• 한국전산유체공학회:학술대회논문집
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• 2003.10a
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• pp.135-136
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• 2003

• Bulletin of the Korean Chemical Society
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• v.31 no.12
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• pp.3818-3821
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• 2010

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.71-74
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• 1996

The concept of uniformity in control implementation is exploded for improving efficiency of design procedure. A controller area operating system which includes real time kernel and control specific shell are developed. Three examples are discussed for the validation of tile system.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 1998.06a
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• pp.731-739
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• 1998

The probabilistic relaxation(PR) scheme based on the conditional probability and probability space partition has the important property that when its compatibility coefficient matrix (CCM) has uniform components it can classify m-dimensional probabilistic distribution vectors into different classes. When consistency or inconsistency measures have been defined, the properties of PRs are completely determined by the compatibility coefficients among labels of labeled objects and influence weight among labeled objects. In this paper we study the properties of PR in which both compatibility coefficients and influence weights are uniform, and then a learning rule for such PR system is derived. Experiments have been performed to verify the effectiveness of the learning rule.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.678-681
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• 1991

In this paper, we propose a robust linear time-invariant feedback compensator design methodology for multivariable system which have both matched and mismatched uncertainties. In order to attack the problem of designing robust compensators guaranteeing uniform ultimate boundedness of every closed-loop system response within an arbitrarily small ball centered at the zero state based solely on the knowledge of the upper norm-bounds of uncertainties, we use an approach based upon the comparison theorem which is an effective approach in studying augmented feedback control systems with both mismatched and matched uncertainties. Through the approach, we draw some sufficient conditions for robust stability, and we give a simple example.

• International Journal of Safety
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• v.4 no.2
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• pp.30-35
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• 2005

In case of tunnel fire, one of the most effective facilities to save lives is the smoke control system. In this study, two different smoke extraction schemes of transversely ventilated tunnel were compared. One is the smoke extraction using the fixed exhaust ports on the false ceiling to achieve the uniform and distributed smoke extraction (uniform exhaust). The other is that using the remote controlled smoke extraction where only vents close to the fire is opened whereas the others are closed to enhance the limitation of the smoke spread (localized exhaust). A number of numerical simulations were performed to find out the optimal smoke extraction rate at each smoke extraction scheme to allow the tunnel users to escape to the safe area without endangering their lives by smoke.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.20 no.2
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• pp.641-648
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• 1996

Thermophoretic particle deposition on a circular cylinder in a uniform laminar air flow was numerically investigated using a control volume method based on the generalized non-orthogonal coordinate system. Variation of air properties due to the change of temperature was taken into account. Effects of variable property on the distribution of heat transfer and deposition rates of particle were discussed. A new correlation of thermophoretic particle deposition on a circular cylinder was proposed in the present study.

• Tribology and Lubricants
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• v.24 no.6
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• pp.326-331
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• 2008

The contact surfaces between mold and target should be in parallel for a proper imprinting process. However, large size of contacting area makes it difficult for both mating surfaces (mold and target planes) to be in all uniform contact with the expected precision level in terms of thickness and position. This is caused by the waviness of mold and target although it is very small relative to the area scale. The gripping force for both mold and target by the vacuum chuck is other major effect to interrupt the uniform contact, which must be avoided in imprinting mechanism. In this study, the cause of non-conformal contact mechanism between mold and target is investigated with the consideration of deformation due to the vacuum gripping for the size $470{\times}370\;mm^2$ LCD panel.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.51-56
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• 2008

Thermoforming is one of the most versatile and economical processes available for shaping polymer products, but obtaining a uniform thickness of the final product using this method is difficult. Heater power adjustment is very important because the thickness distribution depends strongly on the distribution of the sheet temperature. In this paper, the steady-state optimum distribution of heater power is first ascertained by a numerical optimization to obtain a uniform sheet temperature. The time-dependent optimal heater input is then determined to decrease the temperature difference through the direction of the thickness using the response surface method and the D-optimal method. The optimal results show that the time-dependent optimum heater power distribution gives an acceptable uniform sheet temperature in the forming temperature range by the end of the heating process.