• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.195-198
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• 2004

ZnO films were Prepared by ultrasonic spray Pyrolysis on MgO substrates. The surface morphology and crystallinity were observed as a function of substrate temperature by SEM and XRD, respectively. PL properties of the ZnO films were studied by using Cd-He laser. UV light around 3.37 eV was pronounced in the PL spectra. The origin of the PL peak was discussed.

• Journal of Sensor Science and Technology
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• v.16 no.4
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• pp.307-312
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• 2007

The films of Er-doped ZnO (ZnO:Er) were prepared onto MgO wafers by ultrasonic spray pyrolysis at $550^{\circ}C$. The concentration of Er in the deposition source varied from 0.5 wt% to 3.0 wt%. The crystallographic properties and surface morphologies of the films were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. The properties of photoluminescence (PL) for the films were investigated by dependence of PL spectra on the Er concentration in the films. The films were grown as polycrystalline with a dominant direction of [002]. The grain size of the films were reduced by Er-doping. Er-doping enhanced the ultraviolet emission of ZnO:Er films. The ZnO:Er films prepared with the deposition source of 2.0 wt% Er showed the strongest ultraviolet light emission peak among the films in this study.

• Bulletin of the Korean Chemical Society
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• v.23 no.8
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• pp.1127-1134
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• 2002

Fine ceramic particles of zirconia toughened alumina (ZTA), titania toughened alumina (TTA), and zirconia-titania toughened alumina (ZTTA) have been synthesized by ultrasonic spray pyrolysis (USP) at various temperatures from starting salt solutio ns of various compositions aiming for the development of catalytic material. These particles were characterized for properties such as shape, size and size distribution, diffraction pattern, and chemical and phase composition of elements by scanning electron microscopy (SEM), particle size analyzer (PSA), x-ray diffraction (XRD), and inductively coupled plasma-atomic emission spectroscopy (ICP-AES). Chemical compositions and sizes of ceramic composites have been controled by the stoichiometry of salt solutions and the flow rate of spraying solutions. The optimum experimental conditions for the various composite particle syntheses have been proposed.

• Journal of the Korean Ceramic Society
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• v.32 no.5
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• pp.575-581
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• 1995

Zr0.94Y0.06O1.97 powder was synthesized by the ultrasonic spray pyrolysis with various concentrations of starting solution and the influence of powder characteristics on sintering behavior was investigated. Powders prepared at 75$0^{\circ}C$ were characterized as narrowly distributed submicron spherical particles, which were crystalline, nonagglomerated, and compositionally homogeneous. The changes in concentration from 0.01 to 01. mol/ι increased mean particle size from 0.24 to 0.38${\mu}{\textrm}{m}$ and decreased the specific surface area from 14.2 to 2.9$m^2$/g. The relative density of the specimen from the powders, prepared with the solution concentration of 0.01 mol/ι, was 98% after sintering for 2 hr at 1,45$0^{\circ}C$ and the monoclinic phase was observed after sintering at 1,55$0^{\circ}C$. As the concentration of starting solution was increased, the formation temperature of monoclinic phase was lowered.

• Journal of Sensor Science and Technology
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• v.13 no.1
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• pp.66-71
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• 2004

Pt-doped zinc oxide (ZnO:Pt) films were deposited by ultrasonic spray pyrolysis. Resistivity variation with Pt concentration was measured. The Pt distribution in ZnO:Pt films was studied through Auger Electron Spectroscopy (AES). The ZnO:Pt films were annealed in the ambient of air, water vapor and ozone, respectively. The variation in crystallographic properties and surface morphologies with respect to the annealing condition was observed by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The resistivity variation of the films with the annealing condition was measured. Finally, Atomic Force Microscopy (AFM) measurements were carried out to study the effects of the annealing on the roughness of ZnO:Pt films.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.4
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• pp.385-391
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• 2014

A control system for ultrasonic spray pyrolysis deposition was developed that can coat a large size glass panel with a transparent conductive oxide. It consists of several ultrasonic atomizer devices to cover a large area and a host computer for individually controlling the devices. The sub-controller in an ultrasonic atomizer device can adjust the flow rate of the atomized conductive oxide gas by setting the flow rate of the solution and regulating the level of the solution in the tank. To construct a feedback control loop for level regulation, a level sensor that utilized an infrared distance sensor and an electric circuit for adjusting the ultrasonic oscillator were developed. The host program was also developed, which can monitor and control the sub-controllers. A proportional-integral controller was developed for a simplified model, and its operation was verified through an experiment.

• Progress in Superconductivity
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• v.5 no.1
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• pp.65-69
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• 2003

Many researches on fabrication process for BSCCO precursor powders have been developed for high J$_{c}$ BSCCO-2223 tape. Spray pyrolysis method for fabrication of precursor powder has many advantages, such as high purity, fine particle size and low carbon content of BSCCO precursor powder. Fine, spherical powders were prepared by ultrasonic spray pyrolysis from the aqueous solution of metal nitrates. BSCCO precursor powders were synthesized with various solutes concentration and heat treatment conditions. Average particle size for spray pyrolysis powders was $1.5∼3\mu\textrm{m}$. Bi-2223/Ag tape was prepared by PIT method and followed by various sintering conditions. BSCCO precursor powders were characterized by XRD, SEM, EDS, Carbon content and particle size analysis.s.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.469-474
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• 2015

In ultrasonic spray pyrolysis deposition, a precursor solution is evaporated by an ultrasonic atomizer, then gas-carried into a furnace where the solute is separated from the water vapor. After condensation, polymerization, and nucleation, the solute oxide forms a thin film. To improve the deposition efficiency, the ultrasonic atomizer was studied to optimize the evaporated gas flow. The vat cover was redesigned, using three versions with different inlet factors being tested through a computational fluid dynamic analysis as well as a water evaporation experiment. The atomization rate with a hemispherical cover with a $30^{\circ}$ inlet was found to be 2.4 times higher than that with the original. This improvement was verified with fluorine-doped tin oxide spray pyrolysis deposition. The film obtained with the modified vat cover was 2.4 times thicker than that obtained with the original vat cover.

• Journal of the Korean Ceramic Society
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• v.41 no.11
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• pp.793-796
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• 2004

Process Parameters were studied in synthesis of LiCoO$_2$ Powder by ultrasonic spray Pyrolysis. Concentration of the mixed solution influenced the size, shape, and yield of the synthesized powder. The yield was affected primarily by the height of the solution, and then by the flow rate of a carrier gas. The temperature of the reactor governed the crystallinity and morphology of the powder. LiCoO$_2$ powders were synthesized as a layered high temperature phase above 800$^{\circ}C$. The synthesized powders were sphere and secondary Particles consisted of primary particles of 55-70 nm. The secondary Particles became bigger from 0.28 to 1.43 $\mu\textrm{m}$ as the concentration of the solution was increased from 0.05 to 2.0 M. The 2.0 M solution provided the highest production rate.

• Journal of the Korean Ceramic Society
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• v.28 no.10
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• pp.831-837
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• 1991

Spherical TiO2 particles are prepared from TiCl4 aqueous solution by the spray pyrolysis method using ultrasonic atomization technique. The formation mechanism of TiO2 particles from atomized droplets it studied by varying the concentration of the source solution, reaction temperature, and the solvent. spherical TiO2 powders with almost the same normalized particle size distribution can be made reproducibly by changing the concentration of the source solution, and their mean sizes are in the range of 0.2~1.4${\mu}{\textrm}{m}$.