• 대한기계학회논문집A
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• 제31권10호
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• pp.1039-1045
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• 2007

Ultrasonic machining (USM) is suitable for machining hard, brittle and non-conductive materials such as silicon, glass and ceramics. Usually, when micro holes are machined on glass by USM, roundness of hole entrance is poor and cracks appear around the hole exit. In this paper the machining characteristics were studied for roundness improvement and exit crack prevention. From experiments, the tool bending and the shape of tool tip affect hole roundness. When the tool tip is hemispherical, good roundness of holes was obtained. The feedrate and the rotational speed of the tool affect the exit crack. With the machining conditions of 150 rpm in spindle speed and $0.5\;{\mu}m/s$ in feedrate, micro holes with less than $100\;{\mu}m$ in diameter were machined without an exit crack.

• 대한기계학회논문집A
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• 제37권2호
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• pp.213-218
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• 2013

초음파 가공(Ultrasonic Machining:USM)은 새로운 기계가공기술 분야 중의 하나이다. 초음파 가공 과정은 비열, 비화학, 그리고 비전도의 방법이기 때문에 공작물 재료의 물리적, 화학적 변화가 없다. 이러한 특성으로 인해 초음파 가공기술은 유리, 세라믹 등과 같은 취성재료의 가공에 적합하다. 그러나 단점으로는 초음파 진동을 이용하여 취성재료를 가공하는 경우 크랙이 빈번하게 발생한다. 본 논문에서는 유리와 세라믹의 미세 구멍가공에서 다구찌 방법을 이용하여 크랙발생을 최소화하는 최적의 가공조건을 얻고자 하였다. 이를 통해 공작물의 입구 및 출구에서 발생하는 크랙 현상을 감소시켰다.

• 한국기계가공학회지
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• 제14권4호
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• pp.160-166
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• 2015

Ultrasonic machining (USM) has been considered a new, cutting-edge technology that presents no heating or electrochemical effects, with low surface damage and small residual stresses on brittle workpieces. However, nowadays, many researchers are paying careful attention to the disadvantages of USM, such as low productivity and tool wear. On the other hand, in this study, a high-performance rotary ultrasonic drilling (RUD) spindle is designed and assembled. In this system, the core technology is the design of an ultrasonic vibration horn for the spindle using finite element analysis (FEA). The maximum spindle speed of RUM is 9,600 rpm, and the highest harmonic displacement is $5.4{\mu}m$ noted at the frequency of 40 kHz. Through various drilling experiments on glass workpieces using a CVD diamond-coated drill, the cutting force and cracking of the hole entrance and exit side in the glass have been greatly reduced by this system.

• 한국정밀공학회지
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• 제22권4호
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• pp.52-59
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• 2005

When a micro hole is machined by EDM with a cylindrical electrode, the hole diameter is different at the inlet and the outlet of the micro hole. The taper shape of the micro hole is caused by not only wear of the electrode but the eroded particles. The eroded particles cause secondary discharge during machining the micro hole. As a result, the diameter of the inlet becomes larger than that of the outlet. In this paper, a new method is proposed to reduce the difference in diameter between the inlet and the outlet of the hole. Observed was that the feed depth and machining time affect the formation of taper shape On this experimental basis, ultrasonic vibration was applied to reduce machining time, and capacitance was changed during machining to use the difference in discharging energy of different capacitances. Using the proposed method, a straight micro-hole was fabricated.

• 한국정밀공학회지
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• 제31권1호
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• pp.75-81
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• 2014

Laser beam machining has been known as efficient for glass micromachining. It is usually used the ultra-short pulsed laser which is time-consuming and uneconomic process. In order to use economic and powerful long pulsed laser, indirect processing called laser-induced backside wet etching (LIBWE) is good alternative method. In this paper, micromachining of glass using Nd:YAG laser with nanosecond pulsed beam has been attempted. In order to improve shape accuracy, combined processing with magnetic stirrer has been widely used. Magnetic stirrer acts to circulate the solution and remove the bubble but it is not suitable for deep hole machining. To get better effect, ultrasonic vibration was applied for improving shape accuracy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.930-933
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• 2000

In this report experimental ultrasonic machine system has been fabricated and experimental machining has been performed using glass as a workpiece material. As grit size increases, material removal rate(MRR) was observed to be increased at decreased applied tool pressure on the workpiece, however at the higher applied pressure above $2-4\;kg/cm^2$ for smaller grit size, the MRR was not increased. Also better surface roughness was obtained for smaller grit size. Microchipping was observed from the microscopic examination and the pattern is similar to the iso-stress field where cracking is considered to be initiated near the surface.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 추계학술대회 논문집
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• pp.115-120
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• 1992

Mirror-surface machining is very important machining technology to manufacture optical parts. especially brittle materials. In case of optical plastics, it is produced through both grinding and polishing till now. New machining method which is more efficient and contributed to the protection of the environmental pollution is, therefore, studied. In this , experimental results and an analysis of surface roughness in ultrasonic vibration cutting of optical plastic (CR-39) which is used for optical lens is presented. In results, a comparison of the micro-structure of machined surfaces produced by cutting with ultrasonic vibration and conventional turning is presented by analyzing S.E.M. photograph. Also, wavelength spectrum analysis is performed to investigate the surface-characteristics machined by ultrasonic vibration cutting.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.167-172
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• 2002

Recent years, optical components'are widely used in optical communication industry for high speed and mass storage data processing. Micro grooving of planar lightwave circuit and glass, those are widely used in optical component, are realized by polycrystalline diamond tool with ultrasonic vibration. To know the characteristics of brittle materials cutting, ultrasonic vibration cutting tool and machining system are built for the experiment. Grooving on planar lightwave circuit and glass experiments are performed and their shape are measured by photograph with microscope. It reveals that better groove shape with low chipping of planar lightwave circuit and glass are obtained by micro grooving machining with ultrasonic vibration. These experiments are considered as a possibility to the micro grooving of optical communication components.

• 대한기계학회논문집A
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• 제39권8호
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• pp.759-763
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• 2015

레이저 가공 공정은 마스크 없이 전극을 가공할 수 있다는 장점 때문에 우수한 공정들 중의 하나로 제안되고 있다. 본 논문에서는, 서로 다른 열적 물성을 가지는 금속들에 레이저 가공을 수행하였다. 이 금속들은 서로 다른 표면형상, 열영향부, 그리고 재융착층을 나타내었고 이는 열전도도, 끓는점, 그리고 열확산계수에 의존하였다. 또한 재융착층을 제거하기 위하여 초음파 원용 레이저 가공을 적용, 높은 열확산계수를 가지는 재료에서 그 초음파 가진에 의한 표면 품질의 향상을 발견하였다.

• Advances in materials Research
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• 제1권2호
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• pp.129-146
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• 2012

Polycrystalline diamond is an ideal material for parts with micro-holes and has been widely used as dies and cutting tools in automotive, aerospace and woodworking industries due to its superior wear and corrosion resistance. In this research paper, the modeling and simultaneous optimization of multiple performance characteristics such as material removal rate and surface roughness of polycrystalline diamond (PCD) with ultrasonic machining process has been presented. The fuzzy logic and taguchi's quality loss function has been used. In recent years, fuzzy logic has been used in manufacturing engineering for modeling and monitoring. Also the effect of controllable machining parameters like type of abrasive slurry, their size and concentration, nature of tool material and the power rating of the machine has been determined by applying the single objective and multi-objective optimization techniques. The analysis of results has been done using the MATLAB 7.5 software and results obtained are validated by conducting the confirmation experiments. The results show the considerable improvement in S/N ratio as compared to initial cutting conditions. The surface roughness of machined surface has been measured by using the Perthometer (M4Pi, Mahr Germany).