• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1527-1530
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• 2005

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.364-369
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• 2005

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

• 한국분무공학회지
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• 제18권3호
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• pp.126-131
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• 2013

This paper describes the effect of ultrasonic frequency(f) on the atomization and deformation characteristics of single water droplet in an acoustic levitation field. To achieve this, the ultrasonic levitator that can control sound pressure and velocity amplitude by changing frequency was installed, and visualization of single water droplet was conducted with high resolution ICCD and CCD camera. At the same time, atomization and deformation characteristics of single water droplet was studied in terms of normalized droplet diameter($d/d_0$), droplet diameter(d) variation and droplet volume(V) variation under different ultrasonic frequency(f) conditions. It was revealed that increase of ultrasonic frequency reduces the droplet diameter. Therefore, it is able to levitate with low sound pressure level. It also induces the wide oscillation range, large diameter and volume variation of water droplet. In conclusion, the increase of ultrasonic frequency(f) can enhance the atomization performance of single water droplet.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 춘계학술대회논문집
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• pp.264-268
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• 2005

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitating various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system and the amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.959-962
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• 2005

In the semiconductor and optical industry. a new transport system which can replace the conventional transport system is required. The Transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required for reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system for levitation object are proposed. The 3D vibration profiles of the beam are measured by Laser Scanning Vibrometer for verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured fore evaluating the performance.

• Journal of Advanced Marine Engineering and Technology
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• 제27권5호
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• pp.590-599
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• 2003

In this study. object transport method based on ultrasonic flexural vibration is presented. Ultrasonic vibration generates ultrasonic traveling waves on the surface of elastic medium. Objects are transported through the interaction with traveling waves propagating in medium. Two types of transport methods are studied： frictional drive and acoustic levitation. With frictional drive, objects are transported in contact with the beam in the opposite direction of wave propagation whereas with acoustic levitation, objects are acoustically levitated above the beam surface and transported in the wave propagation direction. Transport characteristics are experimentally investigated using objects of different shapes and sizes. The transition from acoustic levitation mode to frictional drive mode is also examined. and it is found to occur when the ratio of mass to area of an object exceeds the threshold ratio of mass to area. It is envisaged that this feasibility study will serve as a stepping-stone for ultrasonic vibration to become an effective industrial material handling device in the future.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.415-418
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• 2005

In the semiconductor and optical industry, a new transport system which can replace the conventional transport systems is required. The transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required fur reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system fur levitating object are proposed. The 3D vibration profiles of the beam are measured by Laser scanning Vibrometer fur verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured for evaluating the performance.

• 한국음향학회지
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• 제37권6호
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• pp.422-427
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• 2018

본 연구에서는 소형 물체가 음파 정상파의 압력 마디 부근에 소형 물체가 부양하는 정상파 음파 공중부양(standing wave acoustic levitation) 현상에 대해 베르누이 원리를 이용하여 부양의 원인이 되는 음향 방사힘(acoustic radiation force)의 근원과 개형을 기존에 알려진 진동자에서 떨어진 거리에 따른 음향 방사힘의 그래프와 비교함을 통해 개념적으로 설명했다. 이러한 설명을 뒷받침하는 일련의 실험들을 BLT(Bolt-clamped Langevin Type) 초음파 진동자를 이용해서 수행하여, 물체들이 공기의 압력 마디 부근에 부양하고 있음을 확인했고, 물체가 부양하고 있는 상태에서 정상파가 형성되는 조건임을 확인했다. 더불어, 정상파 음파 공중부양 현상에서 부양하는 물체들이 수직하게 일렬로 정렬하는 현상 역시 설명할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.331-332
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• 2006

Transport systems which are the important part of the factory automation have much influence on improving productivity. Object transport systems are driven typically by the magnetic field and conveyer belt. In recent years, as the transmission and processing of information is required more quickly, demands of optical elements and semiconductors increase. However, conventional transport systems are not adequate for transportation of those. The reason is that conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. Vibration modes of each flexural beam are verified by using Laser Scanning Vibrometer.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.1241-1246
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• 2007

In recent years, the semiconductor industry and the optical industry are developed rapidly. The recent demands have expanded for optical components such as the optical lens, the optical semiconductor and the measuring instrument. Object transport systems are driven typically by the magnetic field and the conveyer belt. Recent industry requires more faster and efficient transport system. However, conventional transport systems are not adequate for transportation of optical elements and semiconductors. The conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. The steady state flexural vibration of the beam is expressed using Euler-Bernoulli beam theory. The transport direction of an object is examined according to phase difference and frequency. The theoretical results are verified by experiments.