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Chemical vapor deposition of copper thin films for ultra large scale integration (초고집적회로를 위한 구리박막의 화학적 형성기술)

  • 박동일;조남인
    • Journal of the Korean Vacuum Society
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    • v.6 no.1
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    • pp.20-27
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    • 1997
  • We have investigated the formation techniques of copper thin films which would be useful for sub-quarter-micron integrated circuits. A chemical vapor deposition technology has been tried for the better side wall formation of the thin films, and a metal organic compound, named (hface)Cu(VTMS) (hexafluoroacetylacetonate vinyltrimethylsilane copper(I)) was used as the precursors. We have deposited the copper thin films on TiN and $SiO_2$substrates. The film resistivity and deposition selectivity have been measured as functions of substrate temperature and chamber pressure. Best electrical properties were obtained at $180^{\circ}C$ of substrate temperature and 0.6 Torr of chamber pressure. Under the optimum deposition conditions, polycrystalline copper structures were observed to be grown, and the deposition rate of 120 nm/min was measured. The electrical resistivity as low as 0.25$mu \Omega$.cm, and the surface roughness of 15.5 nm were also measured. These are the suitable electrical and material properties required in the sub-quarter-micron device fabrication. Also, in the substrate temperature range of 140-$250^{\circ}C$, high deposition selectivity was observed between TiN and $SiO_2$.

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Numerical Analysis of Welding Residual Stresses for Ultra-thick Plate of EH40 TM and API 2W Gr.50 Steel Joined by Flux Core Arc Welding (EH40과 API2W강재의 극 후판재 다층 FCAW 버트 접합부 잔류응력해석)

  • Hwang, Se-Yun;Lee, Jang-Hyun;Yang, Young-Sik;Lee, Sung-Je;Kim, Byung-Jong
    • Journal of Welding and Joining
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    • v.28 no.3
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    • pp.65-72
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    • 2010
  • Some structural members of large-scale marine vessels such as large-scale offshore structures and very large container ships are assembled by very thick plates of which thickness exceeds 60mm. Also, high-tensile steels have been selected to meet the required structural strength and fatigue strength. Generally, multi-pass welding method such as FCA(Flux-Core Arc) welding has been used to join the thick plates. Considering the welding residual stresses, fatigue strength of the welded joints of thick plates should be assured since the residual stress influences the fatigue strength. This paper presents a numerical procedure to investigate the residual stress of structure joined by multi-pass FCA welding so that it can be incorporated into the fatigue strength assessment considering the effect of welding residual stress. The residual stress distribution is also measured by X-Ray diffraction method. The residual stress obtained by the computational model also has been compared with that of experiment. The results of FEA are in very good agreement with the experimental measurements.

Analysis of bee venom residues in milks of dairy cattle using UHPLC with newly developed pre-processing method (봉독 분석을 위한 전처리 방법 개발 및 이를 이용한 젖소 원유 중의 봉독 잔류물질 조사)

  • Han, Sang-Mi;Hong, In-Pyo;Woo, Soon-Ok;Kim, Se-Gun;Jang, Hye-Ri
    • Korean Journal of Veterinary Service
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    • v.38 no.1
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    • pp.25-30
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    • 2015
  • Bee venom has been used as to prevent and treat bovine mastitis as natural antimicrobial compounds in some dairy cattle farms in Korea. It is needed to determine the residual of bee venom in milks of dairy cattle treated with bee venom. Since bee venom is not approved as a raw material for animal drugs, the preprocessing method to detect bee venom residual in milk and the tolerance limit for its residue has not been established yet in Korea. Therefore, the purpose of this study was to develop pre-processing method not affecting major component of bee venom for detection of its residue in milks using ultra-high performance liauid chromatography (UHPLC). In addition, bee venom residue was also analyzed in milk samples of dairy cattle treated for mastitis with bee venom using UHPLC with the developed pre-processing method in this study. As a result, melittin, histamin and phospolipase A2, the major components of bee venom, were all detected by UHPLC with the pre-processing method developed in this study. The results of this study suggest that the pre-processing method developed in this study can be useful to detect bee venom residue in dairy cattle milk. We also found that no bee venom residues were detected in milk samples collected from dairy cattle treated with bee venom after 1 and 3 days, respectively.

Fast and Accurate Determination of Algal Toxins in Water using Online Preconcentration and UPLC-Orbitrap Mass Spectrometry (온라인 시료주입과 UPLC-Orbitrap 질량분석법을 이용한 수질 조류독소의 고속분석방법 개발 및 환경시료적용)

  • Jang, Je-Heon;Kim, Yun-Seok;Choi, Jae-Won
    • Journal of Korean Society on Water Environment
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    • v.28 no.6
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    • pp.843-850
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    • 2012
  • Due to the fast response to algae bloom issue in drinking water treatment plant, very fast determination methodology for algal toxin is required. In this study, column switching technique based online preconcentration method was combined with high resolution full scan mass spectrometer to save sample preparation time and to obtain fast and accurate result. After parameter optimization of online preconcentration, 1mL filtered sample was directly injected to trap column with switching valve system. Next, target toxins are eluted by 98% acetonitrile and analysed with 150 - 1,100 amu scan range at 50,000 resolving power. Method detection limit (MDL) for microcystin-LR, the most toxic isomer, was 0.1 ng/mL and others such as microcystin-YR, microcystin-RR and nodularin were 0.08, 0.03 and 0.04 ng/mL, respectively. This is the best improved sensitivities with 1mL volume in the literature. Furthermore, due to the use of ultra pressure HPLC (UPLC), the whole method run was completed in 4 min. Real sample applications for 173 sample including 55 surface water and 118 treatment plant samples for raw and treated water could be done within 16 hours. In our calculation, this methodology is roughly 80% faster than the previous manual solid-phase extraction with LC-MS/MS method.

The Effects of Sulfur on the Catalytic Reaction between Carbon Monoxide and Nitric Oxide on Polycrystalline Platinum Surface (다결정 백금표면에서의 일산화탄소와 일산화질소의 촉매반응에 미치는 황의 영향)

  • Park, Youn-Seok;Kim, Young-Ho;Lee, Ho-In
    • Applied Chemistry for Engineering
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    • v.1 no.2
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    • pp.215-223
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    • 1990
  • The effects of sulfur on the catalytic reaction between CO and NO on polycrystalline Pt surface, which is very important in the development of catalyst for automobile exhaust gas control, have been studied using thermal desorption spectrometry(TDS) under ultra-high vacuum(UHV) conditions. Sulfur weakened both the adsorptions of CO and NO by direct site blocking and indirect electronic effect. S(a) desorbing below 800 K gave little effect on reaction activity whereas S(a) desorbing above 800 K, which adsorbs as an atomic state, gave much effect on it. The adsorbed sulfur existed on the surface of platinum in the form of islands, and also reduced the adsorption energies of adsorbates by the long-ranged electronic effect. The platinum catalyst in the reaction between CO and NO was poisoned selectively by S(a), poisoning firstly the active sites of this reaction.

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A Study on the Reaction between Carbon Monoxide and Nitric Oxide on Platinum Catalyst (백금촉매상에서 일산화탄소와 일산화질소의 반응에 관한 연구)

  • Park, Youn-Seok;Kim, Young-Ho;Lee, Ho-In
    • Applied Chemistry for Engineering
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    • v.1 no.2
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    • pp.207-214
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    • 1990
  • The catalytic reaction between CO and NO on polycrystalline Pt surface, which is very important in the development of catalyst for automobile exhaust gas control, has been studied using thermal desorption spectrometry(TDS) and steady-state experiment under ultra-high vacuum(UHV) conditions. With the pressures of CO and NO of each $1{\times}10^{-7}Torr$, the $CO_2$ formation rate showed a maximum at 560K. At the reaction temperature of 560K and the NO pressure of $1{\times}10^{-7}Torr$, the production of $CO_2$ was first order in $CO_2$ was first order in CO pressure below $1.35{\times}10^{-7}Torr$ of CO pressure whereas at higher CO pressures the rate became minus 0.3 order in CO. But the efforts of reactant pressure on the reaction was understood in consideration of the surface concentrations of adsorbates. With the results, we proposed a new reaction mechanism for this reaction.

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Current Application of Embryo Cryopreservation for Farm Animals (가축 수정란 동결보존의 최근 이용방법)

  • 석호봉
    • Journal of Embryo Transfer
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    • v.4 no.1
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    • pp.1-13
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    • 1989
  • This paper reviews the most important steps that have generated consistent progress in principles and developmental progress of embryo cryopreservation, and also study on freezing procedure and its application by conventional method and current improved method for freezing procedure and its appilcation of embryo cryopreservation in farm animals. Four were of particular interest: 1.The transport of water across the ccli membrane (zona pellucida) during freezing and thawing accordinglyplays a role in determing whether the celi survives. This movement of water is controlied mainly by extracellular phase changes and by the nature and concentration of any cryoprotective agent present. Therates of cooling, freezing and warming, and the intervals over which they are applied are further decisi've factors in determining whether a cryopreservation procedure allows survival after thawing. 2.The first successful deep freezing experiments with sheep morula and blastocysts during the seventies were based on the early procedures used for mouse embryos.Current research during the eighties is developed with the aim of simplifying and improving current procedures such as one-step dilution and rapid or ultra-rapid cooling by using the model of laboratory animals. 3.The conventional method for the embryo cryopreservation is described. An alternative to this method which may result in high survival and also in reducing of the freezing and thawing time is done by combing a permeable cryoprotectant such as glycerol, DMSO or propanediol and a non-permeable compound such as sucrose, trehalose, raffinose or lactose. 4.Finally a different approach to the preservation of embryos, named vitrification, is introduced. This procedure depends upon the ability of concentrated solutions of cryoprotective agents such as glycerol and propanediol to supercool to very low temperature (-196$^{\circ}C$) during rapid cooling before solidifying without formation of ice. However, more complete data are necessary for successful vitrification of blastocysts.

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A Pilot-Scale Microfiltration/Ultrafiltration system for Drinking Water Treatment (상수처리를 위한 파일롯 규모의 정밀여과/한외여과 시스템)

  • Kim, Hanseung;Oh, Jeongik;Kim, Chunghwan
    • Journal of Korean Society of Water and Wastewater
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    • v.18 no.6
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    • pp.770-777
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    • 2004
  • Three pilot-scale membrane systems were operated using lake water as influent in this study. Microfiltration (MF) membrane with pore size of 0.01 m was used in Systen I of which filtration mode was set at constant pressure of $1kgf/cm^2$. Ultrafiltration (UF) membranes with molecular cutoff (MWCO) of 80,000 and 13,000 were used in System II-1 and II-2, respectively. Constant flow mode was applied at the range between 0.7 and $1.5m^3/m^2{\cdot}d$ (average of $1.1m^3/m^2${\cdot}d) for System II-1 and between 0.37 and $1.65m^3/m^2{\cdot}d$ (average of $1.18m^3/m^2{\cdot}d$) for System II-2. In System I, the flux changed from $1m^3/m^2{\cdot}d$ to $0.2m^3/m^2{\cdot}d$ during the operation time of 5 months. System II showed recovery of 94% under the allowable maximum pressure of $3kgf/cm^2$ during the same operation period. From these results, the efficient operation was observed in constant flow mode with respect to filtration time and recovery. Average filtrate turbidity showed 0.0071 NTU in System I and 0.0054 NTU in System II, which implied that high turbidity removal was obtained in both MF and UF systems with no significant difference between MF and UF. From the fact that membrane flux depends largely on membrane type and operation mode, a guideline of optimum design and operation should be suggested for application of membrane systems to full scale water treatment.

Metal-induced Crystallization of Amorphous Semiconductor on Glass Synthesized by Combination of PIII&D and HiPIMS Process

  • Jeon, Jun-Hong;Choi, Jin-Young;Park, Won-Woong;Moon, Sun-Woo;Lim, Sang-Ho;Han, Seung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.286-286
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    • 2011
  • 최근 폴리머를 기판으로 하는 Flexible TFT (thin film transistor)나 3D-ULSI (three dimensional ultra large-scale integrated circuit)에서 높은 에너지 소비효율과, 빠른 반응 속도를 실현 시키기 위해 낮은 비저항(resistivity)을 가지며, 높은 홀 속도(carrier hall mobility)를 가지는 다결정 반도체 박막(poly-crystalline thin film)을 만들고자 하고 있다. 이를 실현 시키기 위해서는 높은 온도에서 장시간의 열처리가 필요하며, 이는 폴리머 기판의 문제점을 야기시킬 뿐 아니라 공정시간이 길다는 단점이 있었다. 이에 반도체 박막의 재결정화 온도를 낮춰주는 metal (Al, Ni, Co, Cu, Ag, Pd etc.,)을 이용하여 결정화 시키는 방법이 많이 연구 되어지고 있지만, 이 또한 재결정화가 이루어진 반도체 박막 안에 잔여 금속(residual metal)이 존재하게 되어 비저항을 높이고, 홀 속도를 감소시키는 단점이 있다. 이에 본 실험은 HiPIMS (High power impulse magnetron sputtering)와 PIII and D (plasma immersion ion implantation and deposition) 공정을 복합시킨 프로세스로 적은양의 금속이온주입을 통하여 재결정화 온도를 낮췄을 뿐 아니라, 잔여 하는 금속의 양도 매우 적은 다결정 반도체 박막을 만들 수 있었다. 분석 장비로는 박막의 결정화도를 측정하기 위해 GAXRD (glancing angle X-ray diffractometer)를 사용하였고, 잔여 하는 금속의 양과 화학적 결합 상태를 알아보기 위해 XPS를 통해 분석을 하였다. 마지막으로 홀 속도와 비저항을 측정하기 위해 Hall measurement와 Four-point prove를 사용하였다.

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인공관절의 수명 향상을 위해 PIII&D (Plasma Immersion Ion Implantation & Deposition) 기술로 제조된 인공관절용 NbN 박막의 마모 특성 평가

  • Park, Won-Ung;Jeon, Jun-Hong;Mun, Seon-U;Choe, Jin-Yeong;Im, Sang-Ho;Han, Seung-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.189-189
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    • 2011
  • 인공관절은 노인성 질환이나 자가 면역질환, 신체적인 외상 등으로 인하여 발생하는 관절의 손상 부위를 대체하기 위해 고안된 관절의 인공 대용물이다. 인공 관절 중 인공 고관절의 경우 관절 운동을 하는 라이너(Liner)와 헤드(Head) 부분이 인공관절의 수명을 결정하게 되는데, 헤드 부분에 메탈소재와 라이너 부분에 고분자 소재를 사용하는 MOP (metal on polymer) 구조의 인공관절은 충격흡수의 장점이 있는 반면 wear debris에 의한 골용해로 인하여 관절이 느슨해지는 문제점이 발생하여 재 시술의 주요 원인이 되고 있다. 또한 메탈 헤드의 마모로 인한 금속이온의 용출은 세포 독성의 문제를 야기하여 인공관절의 수명을 낮추는 또 하나의 요인이 되고 있다. 따라서 인공관절의 수명을 늘리기 위해 DLC, ZrO, TiN 등의 높은 경도 값을 갖는 박막을 금속 헤드 위에 증착하여 상대재인 인공관절용 고분자 소재의 마모량을 줄이고자 하는 연구가 활발하게 진행 되고 있다. 본 연구에서는 PIII&D (Plasma Immersion Ion Implantation & Deposition)공정을 이용하여 Co-Cr-Mo 합금 소재 niobium nitride (NbN) 박막을 증착하여 상대제인 UHMWPE (ultra high molecular polyethylene)의 마모를 줄이고자 하는 연구를 진행하였다. 마모량을 감소시키기 위하여, 박막 증착전에 질소를 이온주입하는 pre-ion implantation 공정을 도입하였으며, 또한 Co-Cr 합금과 NbN박막 사이의 접착력을 증가시키기 위하여 박막의 증착 초기에 이온주입과 증착을 동시에 수행하는 dynamic ion mixing공정을 수행하였다. NbN 박막의 특성을 평가하기 위해 XRD, XPS, AFM 등의 분석을 수행하였으며, 상대재인 초고분자량 폴리에틸렌의 마모량을 측정하기 위해 Pin-on-disk tester를 이용하여 마모 실험을 진행하였다. 마모 실험 결과, pre-ion implantation 공정을 도입한 경우 현재 상용화 되어있는 Co-Cr 합금에 비하여 마모량을 2배 이상 감소시키는 것을 확인 할 수 있었으며, dynamic ion mixing 공정을 도입한 경우 장시간의 마모 시험에 대한 마모 특성이 향상 되는 것을 확인 할 수 있었다.

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