• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.175-183
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• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1832-1835
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• 2003

This paper suggests the selective ultra precision polishing techniques for micro die and mold parts using magnetic-assisted machining. Fabrication of magnetic abrasive particle and their polishing performance are key technology at ultra precision polishing process of micro parts. Conventional magnetic abrasives have disadvantages. which are missing of abrasive particle and inequality between magnetic particle and abrasive particle. So, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Ferrite and carbonyl iron powder are used as magnetic particle where silicon carbide and Al$_2$O$_3$ are abrasive particle. Developed particles are analyzed using measurement device such as SEM. Possibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 2.927 $\mu\textrm{m}$ Rmax to 0.453 $\mu\textrm{m}$ Rmax.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.233-234
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• 2006

For the machining of freeform surface, fly cutting is one of the key technology to meet profile accuracy and surface roughness simultaneously. Fly cutting can be applied to manufacturing of optical components with complex profile. In this study aluminum alloy was machined in the process of ultra precision fly cutting and investigated optimum machining conditions in terms of feed-rate, pitch per cycle and depth of cut.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.315-322
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• 2011

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.117-124
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• 2004

Recently, nano-methodology is increasingly important as the ruler for measuring nano-technology, and we applied the linear encoder to nano-methodology. The quadrature output in the linear encoder has an effect on increasing the resolution in some techniques. Already, various interpolation techniques based on the quadrature signal have applied to the precision servo system. In this paper, we propose a new interpolation algorithm for ultra-precision positioning in the low speed with simulation by MATLAB SIMULINK. This method modified previous methods and was properly designed for some given control system. To verify, we first fulfilled the encoder signal test to find main parameters fer the signal transformation, then we proved the proposed interpolation algorithm by experiments, which show that the result of the interpolation algorithm corresponds with the measurement of the laser interferometer in 100 nm unit approximately. In addition, we can get more precise measurement by more accurate and noise-free signal. So we need to compensate imperfections in the encoder signal. After that, we will apply this algorithm to nano positioning system.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.6
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• pp.97-101
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• 1998

In this study, The ultra-precision finishing system is applicable to all kind of the cylnderical workpiece products fast and easy. This system was applied to chrome coated steel to investigate the characteristic of grinding; (1) 3$mu extrm{m}$ of abrasive film is not use for grinding performance. (2) Grinding condition of coated chrome steel would set up differently, in 30~12${\mu}{\textrm}{m}$, in 9~5${\mu}{\textrm}{m}$. (3) The surface roughness of chrome coated steel was about Ra 0.0009${\mu}{\textrm}{m}$ in abrasive grain size 5${\mu}{\textrm}{m}$.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.05a
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• pp.397-401
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• 2003

In this work, diamond turning process is used to produce mirror surface on a Al cone. The Al cone as used as a mirror which can reflect a laser beam without scattering and, hence, it is critical to minimize the surface roughness of a Al cone. During diamond turning, feedrate and tool nose radius are changed to investigate characteristics of the ultra precision machined surface of a Al cone. A laser beam of 633 nm is applied to examine the effect of surface roughness on the characteristics of reflectivity. It is found that surface roughness is not significantly affected by feedrate. The main factor influencing surface roughness is tool nose radius. The line patterns of reflected laser beams show that the minimum surface roughness of 0.08 $\mu\textrm{m}$ (Ra) is required to avoid scattering phenomena of reflectivity.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.5
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• pp.134-139
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• 1998

There have been so manu study in the ultra-precision mirror finishing. Already Using system of experiments extract factors effecting surface roughness and find optimal machining conditions in 40${\mu}{\textrm}{m}$, 30${\mu}{\textrm}{m}$, 15${\mu}{\textrm}{m}$ abrasive film. So in this study, Using Abrasive film of 12~3${\mu}{\textrm}{m}$ extract factors effecting surface roughness and results are follows; Factor A(film feed) in 12${\mu}{\textrm}{m}$ and 5${\mu}{\textrm}{m}$ abrasive film, Factor A(film feed) and B(applied force) in 9${\mu}{\textrm}{m}$ abrasive film, Factor C(grinding speed) in 3${\mu}{\textrm}{m}$ abrasive film are main factor effecting surface roughness.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.37-41
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• 2007

Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.? In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.