• 제목/요약/키워드: Ultra High Accurate 3D Profilometer

검색결과 4건 처리시간 0.014초

우주관측용 광학계의 적외선 초자 초정밀 가공 기술개발 (Development of the Ultra Precision Machining of IR Material for Space Observation Optical System)

  • 양순철;원종호
    • 한국정밀공학회지
    • /
    • 제27권12호
    • /
    • pp.9-14
    • /
    • 2010
  • Using an IR (infrared) optical system of observation and research were performed long before. Nowadays satellites equipped with IR optical system observe the earth and universe. In this paper, we developed the IR optical system for main payload of the STSAT-3 (Science and Technology Satellite -3). We studied the ultra precision machining technique to fabricate FPL-53 lenses which is the IR optical material for space observation camera of the STSAT-3. DOE (Design of Experiment) was used to find best machining characteristic for FPL-53. Finally we fabricated FPL-53 aspheric lens with the form accuracy of P-V $0.36\;{\mu}m$.

초정밀 열 영상 현미경 광학계 개발 (Development of the Ultra Precision Thermal Imaging Optical System)

  • 양순철;원종호
    • 한국정밀공학회지
    • /
    • 제27권12호
    • /
    • pp.15-21
    • /
    • 2010
  • Recently, there is a demand for a thermal imaging microscope in the medical field as well as the semi-conductor industry Although the demand of the advanced thermal imaging microscope has been increased, it is very difficult to obtain the technology of developing a thermal camera, because it is used for defense industry. We developed the ${\times}5$ zoom microscope which has $3\;{\mu}m$ spatial resolution to research the design and fabrication of the IR (Infrared) optical system. The optical system of the IR microscope consists of four spherical lenses and four aspheric lenses. We verified individual sensitivity of each optical parameter as the first order approach to the analysis. And we also performed structure and vibration analysis. The optical elements are fabricated using Freeform 700A. The measurement results of surface roughness and form accuracy using NT 2000 and UA3P are Ra 2.36 nm and P-V $0.13\;{\mu}m$. Finally we ascertained resolution power of $3\;{\mu}m$ using USAF (United State Air Force) 1951 IR resolution test chart.

Removal of mid-frequency error from the off-axis mirror

  • Kim, Sanghyuk;Pak, Soojong;Jeong, Byeongjoon;Shin, Sangkyo;Kim, Geon Hee;Lee, Gil Jae;Chang, Seunghyuk;Yoo, Song Min;Lee, Kwang Jo;Lee, Hyuckee
    • 천문학회보
    • /
    • 제39권2호
    • /
    • pp.103-103
    • /
    • 2014
  • Manufacturing of lens and mirror using Diamond Turning Machine (DTM) offers distinct advantages including short fabrication time and low cost as compared to grinding or polishing process. However, the DTM process can leave mid-frequency error in the optical surface which generates an undesirable diffraction effect and stray light. The mid-frequency error is expected to be eliminated by mechanical polishing after the DTM process, but polishing of soft surface of ductile aluminum is extremely difficult because the polishing process inevitably degrades the surface form accuracy. In order to increase its surface hardness, we performed electroless nickel plating on the surface of diamond-turned aluminum (Al-6061T6) off-axis mirrors, which was followed by the 6-hour-long baking process at $200^{\circ}C$ for improving its hardness. Then we polished the nickel plated off-axis mirrors to remove the mid-frequency error and measured polished mirror surfaces using the optical surface profilometer (NT 2000, Wyko Inc.). Finally, we ascertained that the mid-frequency error on the mirror surface was successfully removed. During the whole processes of nickel plating and polishing, we monitored the form accuracy using the ultra-high accurate 3-D profilometer (UA3P, Panasonic Corp.) to maintain it within the allowable tolerance range (< tens of nm). The polished off-axis mirror was optically tested using a visible laser source and a pinhole, and the airy pattern obtained from the polished mirror was compared with the unpolished case to check the influence of mid-frequency error on optical images.

  • PDF

Error Compensation Algorithm for Higher Surface Accuracy of Freeform Mirrors Based On the Method of Least Squares

  • Jeong, Byeongjoon;Pak, Soojong;Kim, Sanghyuk;Lee, Kwang Jo;Chang, Seunghyuk;Kim, Geon Hee;Hyun, Sangwon;Jeon, Min Woo
    • 천문학회보
    • /
    • 제40권2호
    • /
    • pp.40.1-40.1
    • /
    • 2015
  • Off-axis reflective optical systems have attractive advantages relative to their on-axis or refractive counterparts, for example, zero chromatic aberration, no obstruction, and a wide field of view. For the efficient operation of off-axis reflective system, the surface accuracy of freeform mirrors should be higher than the order of wavelengths at which the reflective optical systems operate. Especially for applications in shorter wavelength regions, such as visible and ultraviolet, higher surface accuracy of freeform mirrors is required to minimize the light scattering. In this work, we propose the error compensation algorithm (ECA) for the correction of wavefront errors on freeform mirrors. The ECA converts a form error pattern into polynomial expression by fitting a least square method. The error pattern is measured by using an ultra-high accurate 3-D profilometer (UA3P, Panasonic Corp.). The measured data are fitted by two fitting models: Sag (Delta Z) data model and form (Z) data model. To evaluate fitting accuracy of these models, we compared the fitted error patterns with the measured error pattern.

  • PDF