• 한국정밀공학회지
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• 제31권3호
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• pp.189-197
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• 2014

Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

• 한국기계가공학회지
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• 제17권1호
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• pp.63-68
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• 2018

At present, ultra-precision cutting technology has been studied in Korean research institutes, focusing on development of ultra-precision cutting tool technology and ultra-precision control engineering. However, the developed technologies are still far behind advanced countries. It focuses on metals including aluminum, copper and nickel, and nonmetals including plastics, silicone and germanium which require high precision while using a lathe. It is hard to implement high precision by grinding the aforementioned materials. To address the issue, the ultra-precision cutting technology has been developing by using ultra-precision machine tools very accurate and strong, and diamond tools highly abrasion-resistant. To address this issue, this study aims to conduct ultra-precision cutting by using ECTS (Error Compensation Tool Servo) to improve motion precision of elements and components, and compensate for motion errors in real time. An IR camera is used for analyzing cutting accuracy differences depending on the heat generated in diamond tools in cutting to examine the heat generated in cutting to study cutting accuracy depending on generated heat.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1996년도 추계학술대회 논문
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• pp.28-33
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• 1996

This paper presents a position control of ultra-precision machine tool post using piezoelectric material. A stack-type piezoelectric actuator is employed in a hinge-type tool holder. An assumed linear transfer function of the practical nonlinear plant is established through the comparison of transfer functions and step responses in the experiments and the simulations. Several types of feedforward/feedback controllers are designed via computer simulations using the assumed linear transfer function, The position tracking control experiments are undertaken to show the control efficiency of each controller.

• 한국공작기계학회논문집
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• 제15권3호
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.54-59
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• 2005

Recently, the ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be controlled in 5 nm resolution by PID controller.

• 한국공작기계학회논문집
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• 제18권2호
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.34-41
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• 2004

The purpose of this paper is to look at the characteristics of surface finishing which is one of the form accuracies and to obtain the fundamental technical data from the process of machining with diamond tool through experiment and theoretical analysis. The experiments were conducted with domestic made ultra-precision machine and MCD.PCD tool, with aluminum alloyed material and brass being used for the work pieces. The goal of the size accuracy was set to 100nm. The most suitable tool nose radius and machining conditions were selected, and the variations of the surface roughness were observed using SEM method while machining the distance of up to 500km. These data were evaluated and they examined the variation of the machined surfaces while cutting up to 500km of machining distance. At the same time, the state for the wear of diamond tool nose was analyzed and carefully examined through the newest measuring device. Additionally, the characteristics of ultra-precision machining technology were studied through visual analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.858-861
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• 2001

As the application fields of micro parts that are micro endo-scope, PDA, and tele-communication had been extended, there are required the micro machine tools and MEMS in order to machining for those parts. In order to machining of the micro parts, the micro machining center is very effective. The micro machining center had some advantages that are lower cost, higher accuracy, and lower required powers than existing machine tools for machining of micro parts. In this study, in order to analyze the machining characteristics and its application possibility of the developing micro machining center with 60,000rpm rotations, 0.1$\mu\textrm{m}$ resolutions, and 80 50 50mm sliding unit, the machining experiment had been executed. In this experimental machining, 0.1~ 0.5mm endmills are used to machining the micro cap and tele-communication's parts. In the future, experimental results will be adapted to the micro-machining center.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.48-53
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• 2005

The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, nano-technology and biotechnology. In particular, the nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

• 한국정밀공학회지
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• 제28권3호
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• pp.275-284
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• 2011

The accuracy simulation technology of linear motion system is introduced in this paper. Motion errors and positioning errors are simulated using informations on the design parameters of elements of linear motion system. 5 Degree-of-freedom motion error analysis algorithm utilizing the transfer function method and positioning error analysis algorithm which are main frame of accuracy simulation are introduced. Simulated motion errors are compared with experimental results for verifying the effectiveness. Then, using the proposed algorithms, simulation is performed to investigate the effects of ballscrew and linear motor on the motion errors. Finally, the influence of feedback sensor position on the positioning error is also discussed.