• Title/Summary/Keyword: UV-visible spectrometer

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Electrical and optical properties of Indium Zinc Tin Oxide thin films deposited by RF magnetron sputtering (RF magnetron sputtering에 의해 증착된 Indium Zinc Tin Oxide 박막의 전기적, 광학적 특성.)

  • Nam, Tae-Bang;Choi, Byung-Hyun;Ji, Mi-Jung;Seo, Han;Won, Ju-Yeon;Ju, Byeong-Kwon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.96-96
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    • 2009
  • 투명전도막은 FPD의 전자부품에서 전극으로 널리 사용되고 있으며 현재 대부분의 투명전도막으로는 ITO가 사용되고 있다. 하지만, ITO에 사용되는 In은 희유금속으로 지속적인 사용량 증가로 가격의 급등과 더불어 수급 불안정으로 인해 In을 대체하고자 하는 연구가 집중적으로 이루어지고 있다. 그러나 $In_2O_3$를 대체한 ZnO계 등은 비저항이 높아 대체 적용이 가능하지 못하고 있다. 이에 In의 양을 줄이면서 상대적으로 저가이면서 광학적 특성이 우수한 ZnO을 첨가하여 기존의 ITO에 상응하는 전기전도도와 광투과율을 얻을 수 있는 새로운 3성분계 TCO 에 대한 연구가 활발히 이루어지고 있다. 따라서, 본 연구그룹은 $In_2O_3$을 기본 조성으로 하는 $In_2O_3-ZnO-SnO_2$계를 선정하여 IZTO target을 제조 후 RF magnetron sputtering 방법으로 투명전도막을 제작하였다. 본 연구에서는 RF 파워와 동작압력, 동작시간 그리고 열처리온도의 증착 조건에 따른 IZTO 박막의 특성을 평가하였다. 박막의 특성 및 표면 미세구조를 관찰하기 위해 AFM(Atomic Force Microscope)을 이용하였으며, XRD(X-ray diffraction)을 이용하여 결정성을 분석하였고, 4 point-prove, Hall effect measurement와 UV/Visible spectrometer를 통해 전기적, 광학적 특성을 평가하였다.

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Properties of Nano-sized Au Particle Doped ZrO2 Thin Film Prepared by the Sol-gel Method (졸-겔법에 의한 나노 사이즈 Au 미립자 분산 ZrO2 박막의 특성)

  • 이승민;문종수
    • Journal of the Korean Ceramic Society
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    • v.40 no.12
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    • pp.1197-1201
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    • 2003
  • Thin film on SiO$_2$ glass was synthesized by a dip-coating method from the ZrO$_2$ sol which had dispersed nanosize Au particle under ambient atmosphere. After heat treatment of the prepared thin film, the characteristics were investigated by X-ray diffraction, UV-VIS spectrometer, Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). It was found that ZrO$_2$ thin film with 100 nm thickness was crystallized to tetragonal phase at 50$0^{\circ}C$. The size of dispersed Au particle was 15∼40nm and the film had a smooth surface with a roughness of 0.84 nm. The film showed nonlinearity characteristics with absorption peaks at 630∼670nm visible region because of the plasma resonance of Au metallic particles.

졸겔 스핀코팅 방법으로 성장된 ZnO 박막에서 씨앗층이 구조적 및 광학적 특성에 미치는 영향

  • Kim, Yeong-Gyu;Park, Hyeong-Gil;Nam, Gi-Ung;Yun, Hyeon-Sik;Kim, Ik-Hyeon;Park, Yeong-Bin;Park, Seon-Hui;Mun, Ji-Yun;Kim, Dong-Wan;Kim, Jin-Su;Kim, Jong-Su;Im, Jae-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.291.2-291.2
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    • 2014
  • ZnO 박막(thin film)은 씨앗층(seed layer)의 종류, 두께, 증착 조건 등에 따라 그 특성이 달라지는 것으로 알려져 있다. 이에 본 연구에서는 씨앗층의 종류에 따른 박막의 특성변화를 알아 보기 위해, 졸겔 스핀코팅(sol-gel spin-coating) 방법으로 4가지 종류의 씨앗층(Al-ZnO, Co-ZnO, Cu-ZnO, In-ZnO) 위에 ZnO 박막을 성장 한 후 성장된 ZnO 박막의 구조적, 광학적 특성을 field emission scanning electron microscope, X-ray diffractometer, UV-visible spectrometer를 통해 조사하였다. ZnO 박막의 표면구조는 씨앗층의 종류에 따라 변하였으며, 씨앗층 위에 성장된 ZnO 박막들의 c축 배향성과 결정성이 씨앗층 없이 성장된 ZnO 박막보다 더 우수하게 나타났다. 투과도(transmittance) 측정값을 통해 계산된 광학적 밴드갭(optical bandgap)과 Urbach 에너지는 씨앗층에 따라 다른 값을 나타내었다. 광학적 밴드갭은 Al-ZnO 씨앗층 위에 성장된 ZnO 박막에서 가장 크게 나타났으며, Urbach 에너지는 Co-ZnO 씨앗층 위에 성장된 ZnO 박막에서 가장 낮았다. 따라서 ZnO박막 성장 시 용도에 맞게 적절한 씨앗층을 사용하는 것은 소자의 성능을 향상시키는데 매우 중요한 역할을 할 수 있다.

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Transparent Oxide Thin Film Transistors with Transparent ZTO Channel and ZTO/Ag/ZTO Source/Drain Electrodes

  • Choi, Yoon-Young;Choi, Kwang-Hyuk;Kim, Han-Ki
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.127-127
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    • 2011
  • We investigate the transparent TFTs using a transparent ZnSnO3 (ZTO)/Ag/ZTO multilayer electrode as S/D electrodes with low resistivity of $3.24{\times}10^{-5}$ ohm-cm, and high transparency of 86.29% in ZTO based TFTs. The Transparent TFTs (TTFTs) are prepared on glass substrate coated 100 nm of ITO thin film. On atomic layer deposited $Al_2\;O_3$, 50 nm ZTO layer is deposited by RF magnetron sputtering through a shadow mask for channel layer using ZTO target with 1 : 1 molar ratio of ZnO : $SnO_2$. The power of 100W, the working pressure of 2mTorr, and the gas flow of Ar 20 sccm during the ZTO deposition. After channel layer deposition, a ZTO (35 nm)/Ag (12 nm)/ZTO(35 nm) multilayer is deposited by DC/RF magnetron sputtering to form transparent S/D electrodes which are patterned through the shadow mask. Devices are annealed in air at 300$^{\circ}C$ for 30 min following ZTO deposition. Using UV/Visible spectrometer, the optical transmittances of the TTFT using ZTO/Ag/ ZTO multilayer electrodes are compared with TFT using Mo electrode. The structural properties of ZTO based TTFT with ZTO/Ag/ZTO multilayer electrodes are analyzed by high resolution transmission electron microscopy (HREM) and X-ray photoelectron spectroscopy (XPS). The transfer and output characterization of ZTO TTFTs are examined by a customized probe station with HP4145B system in are.

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Preparation and Characteristics of Te Fine Particles Doped SiO2 Glass Thin Films by Sol-gel Method (졸-겔법에 의한 Te 미립자 분산 SiO2 유리 박막의 제조와 특성)

  • Mun, Chong-Soo;Kang, Bong-Sang
    • Journal of the Korean Ceramic Society
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    • v.41 no.1
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    • pp.24-29
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    • 2004
  • Nanocomposite of Te doped $SiO_2$ films was prepared for the new functional materials like non-linear optic materials, selective absorption and transmission films. The effects of particle size and morphology with different hydrolysis conditions on the properties were examined with TGA/DTA. XRD. UV-spectrometer, SPM, SEM and EDS. It was found that Te/$SiO_2$ films showed high absorption peak at 550nm visible region by plasma resonance of Te fine particles. The Rm surface roughness of the films was about 2.5 nm and the size of Te particles was 5~10nm.

Physical Properties of E-glass Fiber According to Fiberizing Temperature (섬유화 온도 변화에 따른 E-glass fiber의 물리적 특성)

  • Lee, Ji-Sun;Lee, MiJai;Lim, Tae-Young;Lee, Youngjin;Jeon, Dae-Woo;Hyun, Soong-Keun;Kim, Jin-Ho
    • Korean Journal of Materials Research
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    • v.27 no.1
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    • pp.43-47
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    • 2017
  • E (Electric) -glass fibers are the most widely used glass fibers, taking up 90 % of the long glass fiber market. However, very few papers have appeared on the physical characteristics of E-glass fibers and how they depend on the fiberizing temperature of fiber spinning. Glass fiber was fabricated via continuous spinning process using bulk E-glass. In order to fabricate the E-glass specimen, raw materials were put into a Pt crucible and melted at $1550^{\circ}C$ for 2hrs; mixture was then annealed at $621{\pm}10^{\circ}C$ for 2hrs. The transmittance and adaptable temperature for spinning of the bulk marble glass were characterized using a UV-visible spectrometer and a viscometer. Continuous spinning was carried out using direct melting spinning equipment as a function of the fiberizing temperature in the range of $1175{\sim}1250^{\circ}C$, while the winder speed was fixed at 500 rpm. Subsequently we investigated the physical properties of the E-glass fiber. The average diameter of the synthesized glass fiber was measured by optical microscope. The mechanical properties of the fiber were confirmed using a UTM (universal materials testing machine); the maximum tensile strength was measured and found to be $1843{\pm}449MPa$ at $1225^{\circ}C$.

Preparation and Characterization of High-performance Photocatalyst for Photoelectrocatalytic System (PECS) (광전자촉매시스템(PECS) 적용을 위한 고효율 광촉매의 제조와 특성)

  • Park, Seong-Ae;Yu, Dong-Sik;Lee, Ji-Ho;Do, Young-Woong;Ha, Jin-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.6
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    • pp.1302-1307
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    • 2006
  • This study describes the preparation of high-performance photocatalyst and its environmental applications. We prepared visible-light response nano-particle photocatalyst exhibiting the similar photocatalytic activity with $TiO_2$, dispersed $TiO_2$ on $SiO_2$ with an active rutile type titanium oxide prepared at low temperature. The binder and stable photocatalytic $TiO_2$ sol for photocatalytic system were also prepared. Such products were evaluated by UV/Vis spectrometer, X-ray diffraction analysis, SEM, measurement of photocatalytic activities and surface area, mechanical properties of $TiO_2$-coated surfaces. The results obtained can be applied in efficient photocatalytic systems using POF and metal plate for the purification of air.

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CMP Properties of ITO with the deposition temperature (기판온도에 따른 ITO박막의 CMP특성)

  • Choi, Gwon-Woo;Lee, Young-Kyun;Lee, Woo-Sun;Jun, Young-Kil;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.165-165
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    • 2007
  • 투명전도박막은 ITO, $SnO_2$, ZnO, 등이 있으나 $SnO_2$는 자외선 영역까지 투과시키는 우수한 광학적 특성을 나타내지만, 상당히 큰 전기저항으로 인해 현재는 현재 ITO가 널리 이용되고 있다. ITO(Indium Tin Oxide)박막은 자외선 영역에서 반사율이 높으며 가시광선영역에서는 80%이상의 뛰어난 투과율을 가지고 있다. 또한 낮은 전기저항과 넓은 광학적 밴드갭 때문에 가장 유용한 투과전도성 재료 중에 하나이다. 이러한 특성 때문에 여러 가지 문자 표시소자의 투명전극, 태양전지의 창재료, 정전차폐를 위한 반도체 포장재료, 열반사막, 면발열체, 광전변환 소자에 응용되고 있다. 일반적으로 박막의 제작에는 저항가열법과 전자선가열법, 스퍼터링법의 물리적 증착과 화학적 증착으로 나뉜다. 본 논문에서는 증착온도를 달리 하여 RF-sputtering에 의해 ITO박막을 증착한 후 온도증가에 따른 박막의 특성을 연구하였으며 또한 광역평탄화를 위한 CMP공정을 적용하여 증착온도가 연마에 미치는 영향을 연구하였다. 본 실험에서 사용된 ITO박막은 $2{\times}2Cm$의 Corning glass위에 증착되었으며 타겟은 $In_2O_3$$SnO_2$가 9:1로 혼합된 Purity 99.99%이상의 직경 2 inch인 ITO타겟을 사용하였다. 박막 증착시 기판온도는 상온에M $200^{\circ}C$까지 변화시켰으며 RF power는 100W로 일정하게 하였으며 증착압력은 $8{\times}10^{-2}$Torr이였다. CMP공정조건은 헤드속도 60rpm, 플레이튼 속도 60rpm, 슬러리 주입 유량 60mml/min, 압력 $300g/cm^2$이였다. 전기적 특성은 four point probe를 이용하여 측정하였으며 광학적 특성은 UV-Visible Spectrometer를 이용하여 200~900nm의 파장범위에서 광투과도를 측정하였다.

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Preparation of Silver/Polystyrene Beads via in Sito Reduction of Silver Alkylcarbamate Complex (은 알킬카바메이트 복합체의 환원에 의한 은/폴리스티렌 비드의 제조)

  • Lim, Tae-Ho;Jeon, Young-Min;Gong, Myoung-Seon
    • Polymer(Korea)
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    • v.33 no.1
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    • pp.33-38
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    • 2009
  • Monodisperse polystyrene and its copolymer beads containing amine function were prepared for the electroless silver plating using reduction of silver alkylcarbamate complex in organic solvent. Soap-free emulsion polymerization was adopted for the polymerization of styrene, divinylbenzene (DVB), and 2-(N,N-dimethylamino) ethyl methacrylate (DAEMA) in the presence of poly (vinyl alcohol) in a water/methanol solvent. The resulting poly (styrene/DVB/DAEMA), containing 30/0$\sim$1.5/0$\sim$3 wt% in monomer composition, were found to be a sphere-type particle with diameter of 1 ${\mu}m$. Silver Ag-coated polystyrene beads were prepared by in sito reduction of a silver 2-ethylhexylcarbamate (Ag-EHCB) complex solution with hydrazine without pretreatment of polystyrene beads. Robust Ag/polystyrene beads were analyzed by SEM, UV -visible spectrometer and XRD.

The Effect of Natural Mordants on the Silk Fabrics Dyed with Green Tea Extracts(I) - Analysis of Natural Mordants and the Effect on Color Changes - (녹차 추출액 염색 견포의 천연 매염제 처리 효과(I)-천연 매염제 분석 및 색상 변화를 중심으로-)

  • 최석철;정진순;천태일
    • Textile Coloration and Finishing
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    • v.11 no.3
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    • pp.15-22
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    • 1999
  • This study investigated the mordanting effect of natural mordants such as camellia ash, bean chaff ash and pyrolignite of iron(Iron(II) Acetate) on silk fabrics dyed with green tea extracts. Experimental variables include the conditions of extraction and dyeing, and types of natural mordants. Inorganic ion contents In natural mordants were analysed by Induced Coupled Plasma Atomic Emission Spectrometer. In the ash Al, Fe, Si and Mn were in % unit, Cr and Ni were detected in ppm unit, and in the aqueous extracts of the ash all the metal ions were in ppm unit. On the other hand, fairly high content of Al(2.13% ) in camellia ash extract and Fe(7.91% ) in the aqueous extracts of pyrolignite iron were detected. The absorbance intensity of green tea extracts in UV-Visible spectrum increased with the temperature and time of extraction. The maximum absorption wavelength of the extracts appeared at 272.5nm and 210.5nm. The US values of silk fabrics dyed with green tea extracts were increased with temperature and time of dyeing. Surface color of silk fabric dyed with green tea extracts was 9.1YR, but it was changed from 7.9YR to 7.5YR by camellia ash extract and 7.4YR to 6.4YR by bean chaff ash extract with increase in mordant concentration. Pre-mordanted and post-mordanted fabrics with pyrolignite of iron were changed from 1.4YR to 1.1R and 7.2P to 4.2P, respectively.

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