• 제목/요약/키워드: UV resin

검색결과 229건 처리시간 0.033초

UV 나노임프린트 리소그래피의 Quartz 기판상의 Resin mold 제거를 위한 Hybrid 세정공정에 관한 연구

  • 조윤식;김민수;강봉균;김재관;이병규;박진구
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2012년도 춘계학술발표대회
    • /
    • pp.81.1-81.1
    • /
    • 2012
  • 나노임프린트 리소그라피(Nano-Imprint Lithography, NIL) 기술은 기판위의 resin을 나노구조물이 각인된 스탬프로 눌러서 나노구조물을 형성하는 기술로, 경제적이고 효과적으로 나노구조물을 제작할 수 있는 기술이다. 그중에서도 UV 기반의 나노임프린트(UV-NIL) 기술은 resin을 투명한 스탬프로 누른뒤 UV로 경화시켜 나노구조물을 형성하는 기술로써 고온, 고압($140{\sim}180^{\circ}C$, 10~30bar)이 필요한 가열식 나노임프린트 기술에 비해 상온, 상압($20^{\circ}C$, 1bar)에서도 구조물 형성이 가능하여 다층구조 형성에 적합하다. 연속적인 임프린팅 공정에 의해 resin이 quarz 스탬프에 잔류하여 패터닝에 결함을 유발하게 되므로 오염물을 제거하기 위한 세정공정이 필요하다. 하지만 UV에 의해 경화된 resin은 cross-linking을 형성하여 화학적인 내성이 증가하게 되므로 제거하기가 어렵다. 현재는 resin 제거를 위한 세정공정으로 SPM($H_2SO_4/H_2O_2$) 세정이 사용되고 있는데 세정시간이 길고 세정 후에 입자 또는 황 잔유물이 남으며 많은 유해용액 사용의 문제점이 있어 효과적으로 resin을 제거할 세정공정이 필요한 상황이다. 본 연구에서는 친환경적인 UV 세정 및 오존수 세정공정을 적용하여 경화된 resin을 제거하는 연구를 진행하였다. 실험샘플은 약 100nm 두께의 resin을 증착한 $1.5cm{\times}1.5cm$ $SiO_2$ 쿠폰 wafer를 사용하였으며, UV 및 오존수의 처리시간을 달리하여 resin 제거효율을 평가하였다. ATR-FTIR 장비를 사용하여 시간에 따른 resin의 두께를 측정한 결과, UV 세정으로 100nm 높이의 resin중에 80nm의 bulk resin이 단시간에 제거가 되었고 나머지 20nm의 resin thin film은 오존수 세정으로 쉽게 제거되는 것을 확인 하였다. 또한 표면에 남은 resin residue와 particle을 제거하기 위해서 SC-1 세정을 진행하였고 contact angle과 optical microscope 장비를 사용하여 resin이 모두 제거된 것을 확인하였다.

  • PDF

Improvement in Long-Term Stability and Photovoltaic Performance of UV Cured Resin Polymer Gel Electrolyte for Dye-Sensitized Solar Cell

  • Park, Geun Woo;Hwang, Chul Gyun;Jung, Jae Won;Jung, Young Mee
    • Bulletin of the Korean Chemical Society
    • /
    • 제33권12호
    • /
    • pp.4093-4097
    • /
    • 2012
  • We introduced a new UV-cured resin polymer gel as an electrolyte for dye-sensitized solar cells (DSSCs) that is cured with UV irradiation to form a thin film of UV-cured resin polymer gel in the cells. The gel film was characterized and its potential for use as an electrolyte in DSSCs was investigated. This new UV-cured resin polymer gel was successfully applied as a gel polymer electrolyte in DSSCs overcoming the problems associated with the liquid electrolytes in typical DSSCs. The effect of ${\gamma}$-butylrolactone (GBL) on the long-term stability and photovoltaic performance in DSSCs using this UV-cured resin polymer gel electrolyte was also investigated. The results of the energy conversion efficiency, ionic conductivity and Raman spectra of the UV-cured resin polymer gel electrolyte with the addition of 6 wt % GBL to the UV-cured resin polymer electrolyte showed good long-term stability and photovoltaic performance for the DSSCs with the UV-cured polymer gel electrolyte.

UV 나노임프린트를 위한 UV 경화성 수지 개발 및 경화 특성 평가 (Development of UV curable polymer and curing characteristics estimation for UV nanoimprint)

  • 이진우;이승재;이응숙;정준호;조동우
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2003년도 춘계학술대회 논문집
    • /
    • pp.1220-1223
    • /
    • 2003
  • The UV nanoimprint technology uses the UV light as the energy source. Because the imprint process is carried out in room temperature and low pressure, this technology has its own merits compared to the thermal nanoimprint. However, in UV nanoimprint technology, a resin which has low viscosity is essential for the improvement of accuracy. In this research, a resin (named as IMS01) which has relatively low viscosity was developed. And a measurement system was developed in order to measure the degree of cure of the resin. The measurement system which is composed of FT-IR, UV light source and optical guide can measure the degree of cure in real time. From the experimental results, it was found that the IMS01 is cured more rapidly than existing resin (PAK01).

  • PDF

광·열경화형 수지를 이용한 탄소섬유 프리프레그의 물리적 특성 (Mechanical Characteristics of CF Laminated Prepreg with UV-thermal Dual Curable Epoxy Resin)

  • 심지현;김지혜;박성민;구광회;장기욱;배진석
    • 한국염색가공학회지
    • /
    • 제29권1호
    • /
    • pp.37-44
    • /
    • 2017
  • An issue of major concern in the utilization of laminated composites based epoxy resin is associated with the occurrence of delaminations or interlaminar cracks, which may be related to manufacturing defects or are induced in service by low-velocity impacts. A strong interfacial filament/brittle epoxy resin bonding can, however, be combined with the high fracture toughness of weak interfacial bonding, when the filaments are arranged to have alternate sections of shear stress. To improve this drawback of the epoxy resin, UV-thermal dual curable resin were developed. This paper presents UV-thermal dual curable resin which were prepared using epoxy acrylate oligomer, photoinitiators, a thermal-curing agent and thermoset epoxy resin. The UV curing behaviors and characteristics of UV-thermal dual curable epoxy resin were investigated using Photo-DSC, DMA and FTIR-ATR spectroscopy. The mechanical properties of UV-thermal dual curable epoxy resin impregnated CF prepreg by UV curable resin content were measured with Tensile, Flextural, ILSS and Sharpy impact test. The obtained results showed that UV curable resin content improves the epoxy toughness.

UV-curable Acrylate/Alkyd Resin 혼합계의 경화특성 II (Curing Properties of UV-ccurable Acrylate/Alkyd Resin Blends II)

  • 남수용;이경옥;대평태문;구철회
    • 한국인쇄학회지
    • /
    • 제18권1호
    • /
    • pp.157-166
    • /
    • 2000
  • UV-curable resins have adventages of quick set, space saving, clean environment, and efficient use of energy. The polymerization induced phase separation has been studied to solve the problem in UV-curing of thick films and develop the new functional materials. On the exposure to UV irradiation, the dynamic elasticity properties were mesured for mixtures of alkyd resin and UV-cruable monomers which have different molecular structures and molecular weights. The curing rate increases with increasing temperature and UV intensity. In addition, The gel point is strongly influenced by temperature and UV intensity

  • PDF

수용성(水溶性) 아크릴 수지(樹脂)의 자외선(紫外線) 흡수제(吸收劑)와 HALS 첨가(添加)가 일본잎갈나무의 변색(變色)에 미치는 영향(影響) (Effects of UV Absorber and HALS(Hindered Amine Light Stabilizer) Addition in Water-soluble Acrylic Resin on Discoloration of Larix leptolepis (S. et Z.) Gordon)

  • 강경택;이필우
    • Journal of the Korean Wood Science and Technology
    • /
    • 제24권4호
    • /
    • pp.47-55
    • /
    • 1996
  • UV transmission spectra of water-soluble acrylic resin films containing hydroxybenzophenolic, hydroxyphenylbenzotriazolic UV absorber and HALS(hindered amine light stabilizer) were investigated by exposure time(before exposure weathered for 160 and 320hours) in QUV Weather-Ometer. Also the YID(yellowness index difference), LID(lightness index difference) and CD(color difference) of dried water-soluble acrylic resin films and the coated woods of Larix leptolepis were analyzed by addition level of UV absorber(0, 1, 2 and 3%) and HALS(0, 0.5, 1 and 1.5%) and by exposure time in QUV Weather-Ometer. They showed no significant effects on UV transmission spectra of dried water-soluble acrylic resin films in the range of 300 to 400nm irrespective of exposure time. However, UV transmission decreased as increase of exposure time. UV transmission spectra were lower in dried water-soluble acrylic resin films containing hydroxybenzophenolic UV absorber and HALS than in these containing hydroxyphenylbenzotriazolic UV absorber and HALS in the range of 350 to 400nm. The least YID, LID and CD in the coated woods of Larix leptolepis appeared at the addition level of 3%, based on non-volatile content, in hydroxybenzophenolic and hydroxyphenylbenzotriazolic UV absorber, and of 1.5% in HALS to water-soluble acrylic resin.

  • PDF

UV경화성 수지를 이용한 미세패턴 형성에 관한 연구 (A Study on Micro-patterning used the UV-Curable Resin)

  • 남수용
    • 한국인쇄학회지
    • /
    • 제19권2호
    • /
    • pp.68-78
    • /
    • 2001
  • UV-curable resin has the properties of quick-drying, thigh productivity at low temperature, energy savint, space saving, solventless, non-polluting and low-stinking, and thus, UV-curing system has been widely used in the fields of printing inks, adhesives, paints and coating agents. This study has been executed to micro-patterning used UV-curable resin, The micro-patterning properties of this photoresist were investigated under irradiation of UV light low pressure mercury lamp. When the exposed photoresist film was developed by pure water developer, the resolution of this photoresist was about 50$\mu\textrm{m}$.

  • PDF

유리제 문화재 복원용 광경화성 수지의 물성 연구 및 적용 (The Physical Properties of UV-curable Resin for the Restoration of Glass Cultural Properties and Its Application in Conservation Treatment)

  • 이해순;나아영
    • 박물관보존과학
    • /
    • 제21권
    • /
    • pp.1-16
    • /
    • 2019
  • 본 논문은 유리제 문화재 복원에 안정한 물성을 지닌 복원재료를 선정하기 위한 연구이다. 아크릴계 광경화성수지(FLGPCL04 Clear®)를 기준으로 우레탄계 광경화성수지(SECURE CP-7321®)를 10%씩 가감한 혼합 시편 11종을 제작하고 6종의 물성실험을 실시하였다. 실험결과 굴절률, 비중, 접착력, 황변도의 측정값에 대해서는 11종 혼합재료 모두에 대하여 유사하였으나 표면경도 및 압축강도 측정값에서는 우레탄계 광경화성 수지의 혼합 비율이 10~20% 범위일 때 가장 적합하였다. 즉, 유리제 유물을 복원한 이후의 상태 유지에 가장 효과적이다. 이와 같은 연구결과를 바탕으로 아크릴계와 우레탄계 광경화성 수지를 9:1로 혼합한 재료(AU9010)를 경주 황남대총 북분에서 출토된 유리잔 (황북519)의 보존 처리에 적용하였다.

3D 프린팅용 UV 경화 수지의 조사량 및 항온수조 침적에 따른 수축률의 차이 (Difference between shrinkage rate of irradiation amount of 3D printing UV curable resin and shrinkage rate according to a constant temperature water bath)

  • 김동연
    • 대한치과기공학회지
    • /
    • 제42권2호
    • /
    • pp.113-120
    • /
    • 2020
  • Purpose: This study is to compare and analyze the shrinkage of the specimen after UV irradiation of UV cured resin at 5, 15, and 30 minutes. Methods: A cylindrical UV cured specimen was produced using a stainless steel mold. UV cured resin specimens were prepared in three groups: 5 minutes cured (5M), 15 minutes cured (15M), and 30 minutes cured (30M). The measurement was made in total 3rd. The measurement was made in total 3rd. The primary measurement was made after 24 hours using a digital measuring instrument. The 2nd and 3rd measurements were deposited in a constant temperature water bath and the shrinkage was measured. The measured data was calculated by referring to the ASTM C326 linear measurement calculation method. T-test and One-way ANOVA were performed to test the significance between groups. The post-test was conducted with Tukey (α=0.05). Results: When the inner diameter and the outer diameter of the three groups not placed in the water bath were compared and analyzed, the contraction was the smallest at 6.8% in the 5M group, and the contraction was the largest at 7.3% in the 30M group. In the outer diameter, the contraction of the 5M group was the smallest at 3.5%, and the contraction of the 30M group was the largest at 4.5%. Shrinkage decreased in all three groups immersed in a water bath for 3-7 days. Conclusion: In the UV cured resin specimen, the shrinkage increased as the amount of UV irradiation increased.

망점 형태에 따른 망점 특성에 관한 연구 (A Study of Dot Characteristics in Dot Patterns)

  • 차재영
    • 한국인쇄학회지
    • /
    • 제15권2호
    • /
    • pp.107-115
    • /
    • 1997
  • The ultraviolet(UV)-curable materials are widely used in inks and coatings. In this paper is designed to develop materials having flexibility and functionality with UV-curable acrylate monomer and alkyd resin. At first, phase diagram is prepared for miscibility of UV -curable acrylate monomer with alkyd resin. Also the gel fraction and dynamic viscosity are measured to curing speed of mixing system. In results, it has been demonstrated that miscibility and curing speed are greatly influenced by alkyd resin content.

  • PDF