• Journal of Sensor Science and Technology
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• v.22 no.5
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• pp.357-363
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• 2013

An ultraviolet pulsed laser ablation of polyimide film coated with platinum has been used to enhance the sensitivity for the application as an electrochemical biosensor. Densely packed cones are formed on polyimide surface after UV irradiation which results in increase of surface area. In order to apply the sensitivity improvement of laser ablated polyimide film electrodes, the glucose oxidase modified biosensor was fabricated by using an encapsulation in the gel matrix through sol-gel transition of tetraethoxysliane on the surface of laser ablated polyimide film. The optimum conditions for glucose determination have been characterized with respect to the applied potential and pH. The linear range and detection limit of glucose detection were from 2.0 mM to 18.0 mM and 0.18 mM, respectively. The sensitivity of glucose biosensors fabricated with laser ablated polyimide film is about three times higher than that of plain polyimide film due to increase in surface area by laser ablation.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.325-325
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• 2010

최근 결정질 실리콘 태양전지 분야에서는 태양전지의 Voc와 Isc의 증가를 통한 효율 향상을 목적으로 후면 passivation에 대한 연구가 활발하게 진행되고 있다. Local-Back Contact은 최적화된 후면 passivation 박막을 이용한 태양전지 제조방법이다. 고효율 태양전지 개발을 위해 최적의 laser 가공 조건이 확립되어야 한다. 본 연구에서는 고효율의 LBC 태양전지 개발을 위해 ONO 구조의 후면 passivation 박막에 laser ablation 조건을 가변하여 LBC 태양전지를 제작하고 그 특성을 분석하였다. 본 연구에 사용된 laser는 355nm 파장을 갖는 UV laser를 사용하였다. laser 파워는 5W, 주파수는 30kHz로 하였을 때 폭 20um, 깊이 5um의 홀을 형성시킬 수 있었다. 후면 접촉 면적의 영향을 확인하기 위하여 laser ablation 간격을 300um, 500um, 700um으로 가변하여 공정을 진행하였다. 태양전지 제조 결과 spacing 300um일 경우 효율이 높게 측정되었으며, laser ablation의 데미지를 줄이기 위한 FGA 처리시 웨이퍼 표면의 데미지를 줄여 carrier lifetime 향상에 기여하는 것을 확인할 수 있었다. 본 연구의 결과를 이용하여 향후 후면 passivation 극대화 및 접촉면적 가변을 통한 고효율 LBC 태양전지 개발이 가능할 것으로 판단된다.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1523-1525
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• 1999

ZnO is a wide-bandgap II-VI semiconductor and has a variety of potential application. ZnO exhibits good piezoelectric, photoelectric and optic properties, and is good for a electroluminescence device. ZnO films have been deposited at (0001) shappire by PLD technique. Chamber was evacuated by turbomolecular pump to a base pressure of $1{\times}10^{-6}$ Torr Nd:YAG pulsed laser was operated at ${\lambda}=355nm$. The ZnO films were deposited at oxygen pressures from base to 500 mTorr. The substrate temperatures was increased from $200^{\circ}C$ to $700^{\circ}C$. At aleady works, UV emission and green-yellow PL was observed. In this work, ZnO films showed UV, violet, green and yellow emissions. UV emission was enhanced by increasing partial oxygen pressure. We investigated relationship between partial oxygen pressure and UV emission.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.128-135
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• 2007

Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.

• Korean Journal of Optics and Photonics
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• v.11 no.1
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• pp.33-36
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• 2000

KrF excimer laser, which is useful for fabrication of fiber gratings, was irradiated on the PLC-type WDM directional coupler and the transmission wavelength shift was observed as a function of UV exposure time. The effective refractive index change of rectangular silica waveguide was calculated from the wavelength shift measurement and the coupled mode theory. heory.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.211.1-211.1
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• 2013

We fabricate the conductive zinc oxide(ZnO) thin film using UV-enhanced atomic layer deposition. ZnO is semiconductor with a wide band gap(3.37eV) and transparent in the visible region. ZnO can be deposited with various method, such as metal organic chemical vapour deposition, magnetron sputtering and pulsed laser ablation deposition. In this experiment, ZnO thin films was deposited by atomic layer deposition using diethylzinc (DEZ) and D.I water as precursors with UV irradiation during water dosing. As a function of UV exposure time, the resistivity of ZnO thin films decreased dramatically. We were able to confirm that UV irradiation is one of the effective way to improve conductivity of ZnO thin film. The resistivity was investigated by 4 point probe. Additionally, we confirm the thin film composition is ZnO by X-ray photoelectron spectroscopy. We anticipate that this UV-enhanced ZnO thin film can be applied to electronics or photonic devices as transparent electrode.

• Proceedings of the Optical Society of Korea Conference
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• 1998.08a
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• pp.212-213
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• 1998

• Journal of the Microelectronics and Packaging Society
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• v.23 no.4
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• pp.101-105
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• 2016

Recently, the hydrophobic surface has been attracted because of the excellent opto-physical properties. Various processing methods such as chemical, mechanical, photolithographic and laser processing are competitively introduced for fabrication of hydrophobic surface of polymer, metal and ceramics. In this paper, we fabricated the hydrophobic surface of copper metal by simple method which irradiated 355 nm UV-pulsed laser in order to shape microgrooves and increased surface roughness through oxidation process at room temperature. Finally the contact angle is dramatically increased by maximum $45^{\circ}$, as a result of oxidation which simply created nanostructures on the microstructures without expensive chemical process.

• Transactions of the Korean Society of Automotive Engineers
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• v.5 no.2
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• pp.60-68
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• 1997

Rayleigh Scattering Cross Sections($\sigma$i) of various gases and the temperature distributions of premixes C3H8/O2 flame are measured by high power KrF(248nm) Exci- mer laser and ICCD camera. Results show that $\sigma$i of O2 and Propane(C3H8) gases agree well in the 5% error range, but of H2 has the more or less difference from the calcul- ated value by other groups. This is attributed to the low RS signal of H2 to Nosie level(S/N ratio). The temperature distributions of flame range out between 300K in the air and about 2000K in the burned area. In this temperature range, out system has the about 250K temperature resolution. Because low RS signals in the reaction area with high temperature are affected highly by noises, temperature uncertainty of this area is relatively high to another part of flame. Experimental results show that UV Rayleigh Scattering can be used for the measurement of mixing ratio of mixed gases and the temperature distributions of flame. Especially, this technique can be applied for the measurement of the mixing ratio of air/fuel before the ignition and the flame structure after the ignition inside the Engine.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.319-321
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• 2004

We report on progress in developing high-power excimer lasers as well as UV-optics for creating low-temperature poly silicon (LTPS). A new high-power excimer laser offers 315 Watts with high pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for line beam excimer laser annealing.