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Fabrication of Micro-channels for Wave-Micropump Using Stereolithography and UV Photolithography  

Loh, Byoung-Gook (한성대학교 기계시스템공하고가)
Kim, Woo-Sik (원광대학교 나노공학과 대학원)
Shim, Kwang-Bo (한양대학교 신소재공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.12, 2007 , pp. 128-135 More about this Journal
Abstract
Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.
Keywords
Micro-channel; Micropump; Stereolithography; UV Photolithography; SU-8 Photo Resist;
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