• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.9-19
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• 1997

The reaction mechanisms of dry cleaning with UV-excited chlorine radical for Zn, Fe and Ti trace contaminants on the Si wafer have been studied by SEM, AFM and XPS analyses in this work. The patterned Zn, Fe and Ti films were deposited on the Si wafer surface by thermal evaporation and changes in the surface morphology after dry cleaning with $Cl_2$and UV/$Cl_2$at $200^{\circ}C$ were studied by optical microscopy and SEM. In addition, changes in the surface roughness of Si wafer with the cleaning was observed by AFM. The chemical bonding states of the Zn, Fe and Ti deposited silicon surface were observed with in-line XPS analysis. Zn and Fe were easily cleaned in the form of volatile zinc-chloride and iron-chloride as verified by the surface morphology changes. Ti which forms involatile oxides was not easily removed at room temperature but was slightly removed by UV/$Cl_2$at elevated temperature of $200^{\circ}C$. It was also found that the surface roughness of the Si wafer increased after $Cl_2$and UV/$Cl_2$cleaning. Therefore, the metallic contaminants on the Si wafer can be easily removed at lower temperature without surface damage by a continuous process using wet cleaning followed by UV/$Cl_2$dry cleaning.

• Journal of Korean Society on Water Environment
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• v.21 no.2
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• pp.176-183
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• 2005

Chlorination of wastewater is recently practiced in Korea. While many researchers have studied the kinetics of aqueous chlorine(HOCl) with nitrogeneous compounds and other organic/inorganic contaminants in drinking water, the researches of wastewater chlorination are relatively few. The purpose of this study was to investigate the chlorine decay kinetics and parameters on wastewater chlorination. Chlorine decay rate increased with increasing initial chlorine concentration. The parameters affecting chlorine decay rate were different in each wastewater treatment plant. One of the most important parameters affecting chlorine decay was initial chlorine concentration, and other parameters such as $NH_3-N$, total coliform, $UV_{254}$ and Fe were also affected. The decay ratio of chlorine was decreased with increasing initial chlorine concentration, and the disinfection efficiency showed good correlation with the decay ratio.

• Membrane Journal
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• v.28 no.3
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• pp.169-179
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• 2018

The purposes of this paper were to improve both fouling and chlorine resistance by increasing the hydrophilicity of the reverse osmosis membrane. In order to improve chlorine resistance, the surface of RO membrane was activated by ultraviolet irradiation, and then it was modified by the sol-gel method using Octyltriethoxysilane (OcTES) such as the silane coupling agent to low sensitivity to chlorine, thereby the polyamide active layer was protected and chlorine resistance was improved. In addition, polyglycerol polyglycidyl ether (PGPE) and sorbitol polyglycidyl ether (SPE) coating with different number of epoxides, ring opening reaction of epoxide improved the anti-fouling resistance. The surface modification condition was optimized by FT-IR, XPS, and contact angle analysis. As a result, the permeability reduction rate of the silane-epoxy modified membrane after the fouling test was decreased about 1.5 times as compared with that of the commercial membrane. And the salt rejection was maintained over 90% at $20,000ppm{\times}hr$ even after chlorine resistance test.

• Journal of Environmental Science International
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• v.20 no.7
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• pp.891-898
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• 2011

The aim of this research was to evaluate the effect of combination of disinfection process (electrolysis, UV process) on Escherichia coli (E. coli) disinfection and oxidants (OH radical, $ClO_2$, HOCl, $H_2O_2$ and $O_3$) generation. The effect of electrolyte type (NaCl, KCl and $Na_2SO_4$) on the E. coli disinfection and oxidants generation were evaluated. The experimental results showed that performance of E. coli disinfection of electrolysis and UV single process was similar. Combination of electrolysis and UV process enhanced the E. coli disinfection and 4-carboxybenzaldehyde (4-CBA, indicator of the generation of OH radical) degradation. It is clearly showed synergy effect on disinfection and OH radical formation. However chlorine ($ClO_2$, HOCl) and oxygen type ($H_2O_2$, $O_3$) oxidants were decreased with the combination of two process. In electrolysis + UV complex process, electro-generated $H_2O_2$ and $O_3$ were reacted with UV light of UV-C lamp and increased 4-CBA degradation(increase OH radical). Disinfection of electrolyte of chlorine type was higher than that of the sulfate type electrolyte due to the higher generation of OH radical and oxidants.

• Journal of Korean Society of Water and Wastewater
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• v.19 no.5
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• pp.625-631
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• 2005

Disinfection characteristics of mixed oxidants produced by mean of electro-chemical method were evaluated. Inactivation rate of B. subtilis spore on the mixed oxidants were similar with that of chlorine. Based on the experimental results, activation energy of mixed oxidants and chlorine with B. subtilis spore at pH 8.3 were calculated as 30.8, $34.7kJ{\cdot}mol^{-1}$ respectively. UV absorption spectrum of both chlorine and mixed oxidants present similar. Molar extinction coefficients of chlorine and mixed oxidants at 292nm, which is maximum absorption wavelength of $OCl^-$ were 357, $377M^{-1}cm^{-1}$, respectively. Disinfectant decay rate and formation rate of THM in the S WTP filtrate also shows insignificant difference for both mixed oxidants and chlorine. In consequent, it was confirmed that high portion of chlorine presents in the mixed oxidants.

• Journal of Digital Convergence
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• v.19 no.12
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• pp.145-150
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• 2021

In order to continuously perform quarantine in public places, it is not easy to secure manpower, but using self-driving-based robots can solve problems caused by manpower. Self-driving-based quarantine robots can continuously prevent the spread of harmful viruses and diseases in public institutions and hospitals without additional manpower. The location of the autonomous driving function was estimated by applying the Pinnacle filter algorithm, and the UV sterilization system and chlorine dioxide injection system were applied for quarantine. The driving time is more than 3 hours and the position error is 0.5m.Soon, the stop-avoidance function was operated at 95% and the obstacle detection distance was 1.5 m, and the automatic charge recovery was charged by moving to the charging cradle at the remaining 10% of the battery capacity. As a result of quarantine with an unmanned quarantine system, UV sterilization is 99% and chlorine dioxide is sterilized more than 95%, which can contribute to reducing enormous social costs.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.3
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• pp.505-510
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• 2000

In this study the effects of pre-chlorination on the coagulation of water which contain Microcystis aeruginosa. were investigated on the laboratory scale. We prepared the sample of $10^5cell/mL$ Microcystis aeruginosa and then applied 0.2, 1.0, 10 mg-Cl/L chlorine on the sample After reaction period(1 minute and 1 hour), each sample was coagulated. As a result, after 0.4 mg-Al/L coagulant dose, turbidities of all samples were below 2 mg-Kaolin/L. Turbidity was not affected by chlorine dose. As the dose of chlorine was increased, the residual aluminum was decreased, but result of $UV_{254}$ was adverse.

• Journal of the Korean Chemical Society
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• v.43 no.4
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• pp.430-437
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• 1999

The determination of total chlorine residuals in drinking water by flow injection analysis(FIA) with iodometric UV detection was investigated. The pH of the acid stream, the concentration of the iodide ion,the length of the mixing and reaction coils, the injection sample size, and flowrate were optimized as parameters for determining total chlorine residuals by FIA method. lodide was selectively oxidized to iodine by hypochlorite at pH 8.3 Ethylenediamine as masking agent for masking interference ions from the sample was given the best efficency. Calibration curve presented linear range of 0.03-3 mg/L for hypochlorite ion with a correlation coefficient of 0.999 or better. The detection limit was found to be 0.007 mg/L for hypochlorite ion. Under these analytical conditions, total chlorine residuals in several tap water sampled in the city of Jeonju were analyzed.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.4
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• pp.419-424
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• 2007

According to increase of consumer's desire for clean tap water, advanced treatment processes include with membrane, ozone, and granular activated carbon(GAC) were introduced. In order to evaluate the effect of advanced treatment processes for residual chlorine decay and trihalomethane(THM) formation in water distribution system, dissolved organic matter(DOC) removal of each advanced treatment process was investigated. The residual chlorine decay and THM formation using bottle tests were also evaluated. $UV_{254}$ removal in all advanced treatment was better than DOC removal. Especially, DOC by ozone treated was removed as 4% in contrast with sand filtered water, but $UV_{254}$ was removed about 17%. This result might be due to convert from hydrophobic DOC to hydrophilic DOC by ozonation. Ozone/GAC process was most effective process for DOC removal. The residual chlorine decay constants in treated water by sand filtration, ozonation, GAC adsorption, and ozone/GAC processes were 0.0230, 0.0307, 0.0117 and 0.0098 $hr^{-1}$, respectively. The sand filtered water was produced 81.8 ${\mu}g/L$ of THM after 190 hours of reaction time, as the treated water by ozone, GAC, and Ozone/GAC was less produced 6.0, 26.2, 30.3% in contrast with sand filtered water, respectively. Consequently, the durability of residual chlorine and reduction of THM formation were improved by advanced treatment processes.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.5
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• pp.533-539
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• 2007

Cell culture infectivity assay using HCT-8 cell was combined with most-probable-number technique to evaluate the inactivation of Cryptosporidium parvum by various disinfectants, including chlorine, ozone, and UV light. The assay was demonstrated to be as sensitive as animal infectivity assay, which has been considered the "gold standard" for assessing Cryptosporidium oocyst infectivity, and a valuable tool to evaluate inactivation of C. parvum by disinfectants. Bench-scale inactivation study showed that at the condition of $5^{\circ}C$ and pH 7.0, CT value of $1,250mg{\cdot}min/L$ by chlorine and $16mg{\cdot}min/L$ by ozone were required to achieve approximately 1.0 log inactivation of C. parvum, suggesting that even ozone could not be sufficient to inactivate C, parvum at low. temperature. Unlike chlorine and ozone, UV light is very effective to inactivate C. parvum, regardless of temperature. A UV light dose of 2 $mJ/cm^2$ provided at least 3 log inactivation of C. parvum.