• Title/Summary/Keyword: UHV

Search Result 207, Processing Time 0.022 seconds

The Quantitative Analysis of STS Contamination Under the Condition of HV, UHV and Air (고진공, 초고진공, 대기 환경에서의 STS 표면의 오염 정량화)

  • 서지근;신용현;홍승수;정광화;이상길;이규장
    • Journal of the Korean Vacuum Society
    • /
    • v.4 no.3
    • /
    • pp.238-246
    • /
    • 1995
  • 대기, 고진공, 초고진공 등 다양한 압력 조건에서 STS 합금 표면의 오염상태를 AES 측정을 통해 살펴보았다. 모든 환경에서 노출 초기에 많은 오염이 이루어지며, 시간이 증가함에 따라 오염 속도는 감소하지만 지속적인 오염이 이루어지는 것을 볼 수 있었다. 오염층의 구조는 표면 위에 산소, 그 위에 Co,그리고 그 위에 탄소가 놓여 있는 층별 구조 형태로 나타났다.

  • PDF

Spectrometer for the Study of Angle-and Energy-Resolved Reactive Ion Scattering at Surfaces

  • S-J. Han;C.-W. Lee;C.-H. Hwang;K.-H. Lee;M. C. Yang;H. Kang
    • Bulletin of the Korean Chemical Society
    • /
    • v.22 no.8
    • /
    • pp.883-888
    • /
    • 2001
  • We describe an ion-surface scattering apparatus newly developed to investigate the reactive scattering process of low-energy alkali-metal ions at surfaces. The apparatus consists of an alkali-metal ion gun that is rotatable by 360°, a quadrupole mass spectrometer (QMS) with an ion energy analyzer, a sample manipulator with a heating-and-cooling stage, and an ultrahigh vacuum (UHV) chamber that houses these components. Preliminary experimental results obtained from the apparatus are presented on angular and energy distributions of the ions scattered from clean Pt(111) and water-adsorbed Pt surfaces.

In situ UHV TEM studies on nanobubbles in graphene liquid cells

  • Shin, Dongha;Park, Jong Bo;Kim, Yong-Jin;Kim, Sang Jin;Kang, Jin Hyoun;Lee, Bora;Cho, Sung-Pyo;Novoselov, Konstantin S.;Hong, Byung Hee
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2016.02a
    • /
    • pp.102-102
    • /
    • 2016
  • Water, which is most abundant in Earth surface and very closely related to all forms of living organisms, has a simple molecular structure but exhibits very unique physical and chemical properties. Even though tremendous effort has been paid to understand this nature's core substance, there amazingly still lefts much room for scientist to explore its novel behaviors. Especially, as the scale goes down to nano-regime, water shows extraordinary properties that are not observable in bulk state. One of such interesting features is the formation of nanoscale bubbles showing unusual long-term stability. Nanobubbles can be spontaneously formed in water on hydrophobic surface or by decompression of gas-saturated liquid. In addition, the nanobubbles can be generated during electrochemical reaction at normal hydrogen electrode (NHE), which possibly distorts the standard reduction potential at NHE as the surface nanobubble screens the reaction with electrolyte solution. However, the real-time evolution of these nanobubbles has been hardly studied owing to the lack of proper imaging tools in liquid phase at nanoscale. Here we demonstrate, for the first time, that the behaviors of nanobubbles can be visualized by in situ transmission electron microscope (TEM), utilizing graphene as liquid cell membrane. The results indicate that there is a critical radius that determines the long-term stability of nanobubbles. In addition, we find two different pathways of nanobubble growth: i) Ostwald ripening of large and small nanobubbles and ii) coalescence of similar-sized nanobubbles. We also observe that the nucleation and growth of nanoparticles and the self-assembly of biomolecules are catalyzed at the nanobubble interface. Our finding is expected to provide a deeper insight to understand unusual chemical, biological and environmental phenomena where nanoscale gas-state is involved.

  • PDF

Characteristics of perylene OTFT fabricated in UHV (초고진공환경에서 제작된 perylene 박막 트랜지스터의 특성)

  • 박대식;강성준;김희중;노명근;황정남
    • Journal of the Korean Vacuum Society
    • /
    • v.13 no.1
    • /
    • pp.9-13
    • /
    • 2004
  • Perylene is an interesting material known to have P-type and N-type characteristics at the same time. We prepared perylene thin-films in ultrahigh vacuum with two different deposition rates of 0.1 $\AA$/s and 1.0 $\AA$/s in order to study the dependence of film characteristics on the growth condition. The smaller average grain size with larger surface coverage as well as the better crystallinity were observed on the perylene film prepared under 1.0 $\AA$/s deposition rate in x-ray diffraction (XRD) and atomic force microscopy (AFM) study. For studying electrical property of the film, perylene organic thin-film transistor (OTFT) with gold contacts was fabricated on $SiO_2$/Si surface in UHV condition. The prepared perylene OTFT device shows P-type characteristic. The obtained hole mobility in the current-voltage characteristic curve was$2.23\times10^{-5}\textrm{cm}^2$/Vs.

Effect of the hetero-epitaxial ZnO buffer layer for the formation of As-doped ZnO thin films (Hetero-epitaxial ZnO 버퍼층이 As-doped ZnO 박막의 증착조건에 미치는 영향)

  • Lee, Hong-Chan;Choi, Won-Kook;Shim, Kwang-Bo;Oh, Young-Jei
    • Journal of Sensor Science and Technology
    • /
    • v.15 no.3
    • /
    • pp.216-221
    • /
    • 2006
  • ZnO thin films prepared by PLD method exhibit an excellent optical property, but may have some problems such as incomplete surface roughness and crystallinity. In this study, undoped ZnO buffer layers were deposited on (0001) sapphire substrates by ultra high vacuum pulse laser deposition (UHV-PLD) and molecular beam epitaxy (MBE) methods, respectively. After post annealing of ZnO buffer layer, undoped ZnO thin films were deposited under different oxygen pressure ($35{\sim}350$ mtorr) conditions. The Arsenic-doped (1, 3 wt%) ZnO thin layers were deposited on the buffer layer of undoped ZnO by UHV-PLD method. The optical property of the ZnO thin films was analyzed by photoluminescence (PL) measurement. The ${\theta}-2{\theta}$ XRD analysis exhibited a strong (002)-peak, which indicates c-axis preferred orientation. Field emission-scanning electron microscope (FE-SEM) revealed that microstructures of the ZnO thin films were varied by oxygen partial pressure, Arsenic doping concentration, and deposition method of the undoped ZnO buffer layer. The denser and smoother films were obtained when employing MBE-buffer layer under lower oxygen partial pressure. It was also found that higher Arsenic concentration gave the enhanced growing of columnar structure of the ZnO thin films.

Investigation on manufacturing and electrical properties of$Ba_{0.5}Sr_{0.5}TiO_3$thin film capacitors using RE Magnetron Sputtering (RF Magnetron Sputtering을 이용한 $Ba_{0.5}Sr_{0.5}TiO_3$박막 커패시터의 제작과 전기적 특성에 관한 연구)

  • 이태일;박인철;김홍배
    • Journal of the Korean Vacuum Society
    • /
    • v.11 no.1
    • /
    • pp.1-7
    • /
    • 2002
  • We deposited $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thin-films on Pt/Ti/$SiO_2$/Si substrates using RF magnetron sputtering method. A Substrate temperature was fixed at room temperature, while working gas flow ratio and RF Power were changed from 90:10 to 60:40 and 50 W, 75 W respectively. Also after BST thin films were deposited, we performed annealing in oxygen atmosphere using Rapid Thermal Annealing. For capacitor application we deposited Pt using E-beam evaporator of UHV system. In a structural property study through XRD measurement we found that crystallization depends on annealing rather than working gas ratio or and RF Power. Electrical properties showed relatively superior characteristic on the annealed sample with 50 W of RF Power.

High Performance of SWIR HgCdTe Photovoltaic Detector Passivated by ZnS

  • Lanh, Ngoc-Tu;An, Se-Young;Suh, Sang-Hee;Kim, Jin-Sang
    • Journal of Sensor Science and Technology
    • /
    • v.13 no.2
    • /
    • pp.128-132
    • /
    • 2004
  • Short wave infrared (SWIR) photovoltaic devices have been fabricated from metal organic vapour phase epitaxy (MOVPE) grown n- on p- HgCdTe films on GaAs substrates. The MOVPE grown films were processed into mesa type discrete devices with wet chemical etching employed for meas delineation and ZnS surface passivatlon. ZnS was thermally evaporated from effusion cell in an ultra high vacuum (UHV) chamber. The main features of the ZnS deposited from effusion cell in UHV chamber are low fixed surface charge density, and small hysteresis. It was found that a negative flat band voltage with -0.6 V has been obtained for Metal Insulator Semiconductor (MIS) capacitor which was evaporated at $910^{\circ}C$ for 90 min. Current-Voltage (I-V) and temperature dependence of the I-V characteristics were measured in the temperature range 80 - 300 K. The Zero bias dynamic resistance-area product ($R_{0}A$) was about $7500{\Omega}-cm^{2}$ at room temperature. The physical mechanisms that dominate dark current properties in the HgCdTe photodiodes are examined by the dependence of the $R_{0}A$ product upon reciprocal temperature. From theoretical considerations and known current expressions for thermal and tunnelling process, the device is shown to be diffusion limited up to 180 K and g-r limited at temperature below this.

Chemisorption of CO on ultrathin epitaxial Ni films n Cu(001) surface

  • E.K. Hwang;J.J. Oh;Lee, J.S.;Kim, S.K.;Kim, J.S.;Kim, J.S.
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1999.07a
    • /
    • pp.182-182
    • /
    • 1999
  • The chemisorption effect of CO on the Ni/Cu(001) surface was investigated using LEED(Low Energy Electron Diffraction) and EELS(Electron Energy Loss Spectrscopy0 under the UHV conditions. after mounting the Cu(001) single crystal in the UHV chamber (base pressure 1$\times$10-10Torr), a clean surface was obtained after a few cycles of repeated Ar+ ion sputtering and annealing at about 40$0^{\circ}C$. The epitaxial thin Ni films were formed on the Cu(001) by evaporation from 99.999% Ni block. The pseudomorphic growth and the orderness of the thin Ni films were monitored by c(2$^{\circ}C$2) LEED pattern. CO adlayers on Ni epitaxial thin films were prepared by dosing pure CO has through a leak valve. After CO adsorpton at room temperature, two pairs of peaks were observed by EELS, whose relative intensities are changed as the film thickness is varied and time is elapsed. These two pair of peaks are likely related to different bonding sites (-top and bridge sites) of C-Ni as well as C-O vibration. Experimental results and qualitative interpretation of the spectra wille be discussed. The possibility of using EELS in combination with probe species (CO) to investigate the nature of thin film growth is mentioned. We will report the experimental result of O2 dosage on Ni film and interaction of CO and O2.

  • PDF

Ultrathin Metal Films on Single Crystal Electrodes : Electrochemical & UHV Studies

  • ;A.Wieckowski
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1999.07a
    • /
    • pp.141-141
    • /
    • 1999
  • 전기화학과 초고진공(ultra-high vacuum, UHV) 분광법을 이용하여 고체/액체의 계면에서 일어나는 현상을 분자단위에서 이해하고 조절하기 위한 연구를 수행하였다. 이들 중 전기화학으로 형성된 구리 및 은 금속(sub)monlayer 박막을 그 예로 선택하여 소개한다. 초박막 금속의 흡착량은 cyclic voltammogram과 새로 개발된 Auger electron spectroscopy (AES) 정량법을 통해 얻어졌고, 이 값들은 low energy electron diffraction (LEED) 및 in-situ atomic force microscopy (AFM)법을 이용한 구조 분석결과와 비교되어졌다. 또한 화학상태를 확인하기 위하여 core-level electron energyy loss spectroscopy (CEELS)를 사용하였다. 먼저 황산 전해질에서 금(111) 단결정 전극상에 전기화학적으로 형성된 굴의 계면특성을 조사하였다. 특정 전위값에서 2/3 ML의 구리와 1/3 ML의 음이온이 상호 흡착하여 ({{{{ SQRT { 3} }}$\times${{{{ SQRT { 3} }}) 격자 구조를 보였고, 전위값이 커지거나 줄어들면, 이 구조가 사라지는 현상이 관찰되었다. 즉 이 ({{{{ SQRT { 3} }}}}$\times${{{{ SQRT { 3} }}}}) 흡착구조는 첫 번째 UPD underpotential deposition) 피크에 특이하게 관련되어 있음을 알 수 있었다. 금속 초박막 형성에 미치는 음이온의 영향을 좀 더 확인하기 위해 초박막 은이 증착된 금 단결정 전극상의 황산 음이온에 관하여 연구하였다. 은의 증착이 일어날 수 없는 양전위값 영역에서 ({{{{ SQRT { 3} }}}}$\times${{{{ SQRT { 3} }}}})의 규칙적인 음이온의 구조를 보였다. 그리고 은의 장착은 세척 과정과 용액의 농도에 따라 p(3$\times$3)과 p(5$\times$5)의 규칙적인 두가지 구조를 가졌다. in-situ AFM에서는 p(3$\times$3)의 은 증착 구조만 나타났고, 음 전위값으로 옮겨가면 p(1$\times$1) 구조로 바뀌었다. ex-situ 초고진공 결과와 이 AFM의 in-situ 결과를 상호 비교 논의할 것이다. 음이온의 흡착이 없는 묽은 플로르산(HF) 전해질에서 은은 전위값을 음전위 쪽으로 이동해 감에 따라 p(3$\times$3), p(5$\times$5), (5$\times$5), (6$\times$6), 그리고 (1$\times$1)의 연속적 구조 변화를 보였다. 이 다양한 구조들을 AES로부터 얻어진 표면 흡착량과 연결시켰더니 정량적으로 잘 일치되는 결과를 보였다. 전기화학적인 증착에서는 기존의 진공 증착과 비교할 때 음이온의 공흡착이 금속 초박막 형성 메카니즘에 큰 영향을 미침을 알 수 있었다. 또한 은의 전기화학적 다층박막 성장은 MSM (monolayer-simultaneous-multilayer) 메카니즘을 따름을 확인하였다. 마지막으로 구조 및 양이 규칙적으로 조절되는 전극의 응용가능성이 간단히 논의될 것이다.

  • PDF

고 진공 (UHV) 조건을 이용하여 구리 나노 분말에 도포한 1-octanethiol 기상 자기조립박막(SAMs)의 두께 조절에 관한 연구

  • Gwon, Jin-Hyeong;Kim, Dong-Gwon;No, Ji-Yeong;Park, Sin-Yeong;Lee, Tae-Hun;Yang, Jun-Mo;Lee, Seon-Yeong
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2010.05a
    • /
    • pp.23.1-23.1
    • /
    • 2010
  • Alkanethiol (CH3(CH2)nSH) 자기 조립 박막은 금, 은, 팔라듐 그리고 구리와 같은 금속 물질과 결합하여 산화 방지 보호막, 생화학적 멤브레인 그리고 케미컬 센서로 널리 이용되었다. 전도성을 가진 많은 금속 분말 중에서, 구리는 뛰어난 열, 전기 전도성과 풍부한 양으로 다른 귀금속에 비교하여 경제성까지 갖춘 물질이다. 그러나 이러한 구리 나노 분말은 대기에 노출된 구리 분말이 쉽게 산화된다는 결정적인 단점 때문에 그동안 널리 이용되지 못하였다. 이러한 구리의 단점을 극복하고 뛰어난 전도성의 특징을 이용하고자, Langmuir-Blodgett (LB), layer by layer (LbL), electrophoretic deposition (EPD), self-assembled monolayer (SAM)과 같은 구리 나노 분말 위에 유기 박막을 형성하고자 하는 많은 방법이 시도되어왔다. 이러한 방법들 대부분은 습식 방법으로 진행되었으며, 약 2-nm 두께의 SAM 구조를 형성할 수 있음이 많은 연구를 통하여 확인되었다. 그러나 습식 기반의 SAM 구조는 단지 수일 동안만 유효하며, 이는 코팅을 수행하면서 점차 떨어지는 source solvent의 순도와 적합하지 않은 코팅 조건, 그리고 이러한 원인으로 형성된 부실한 막질 구조 때문으로 추측된다. 게다가 이러한 습식 기반 공정은 코팅 막의 두께 조절과 코팅 시 solvent의 순도를 일정하게 유지하는 것이 매우 복잡하고 어려운 작업으로 알려져 왔다. 본 실험에서는 고 진공 챔버 (< $4.0{\times}10-6$ torr) 시스템을 이용하여 습식 기반 공정의 문제점을 극복하고 구리 나노 분말의 산화를 막기 위한 실험을 진행하였다. 1-octanethiol (CH3(CH2)7SH)은 중간 길이의 hydrocarbon (n=7) 구조를 가진 특징 때문에 코팅 물질로 사용되었다. 게다가, alkanethiol 족 특유의 물질인 황(sulfur)은 구리와 결합하여 산화방지 보호막의 역할을 수행할 수 있다. 저 진공 조건에서는 10-nm의 multilayer가 일괄적으로 코팅됨을 확인할 수 있었다. 본 실험에서는 약 10-nm 두께의 자기 조립 박막(self assembled monolayers: SAMs)이 고 진공 조건에서 구리 나노 분말 표면 위에 코팅 조건의 변경을 통해서 5-nm에서 10-nm 두께의 1-octanethiol SAMs 구조를 얻어낼 수 있었다. 이는 고 진공 조건에서 1-octanethiol SAMs의 코팅 두께를 조절함으로 다양한 크기의 분말에 코팅 물질로 쓰일 수 있음을 알 수 있다.

  • PDF