• Title/Summary/Keyword: U-beam

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Measurement of EUV Emission and its Plasma Parameters Generated from the Coaxial Plasma Focus of Mather and Hypocycloidal Pinched Electrodes

  • Lee, Sung-Hee;Lee, Kyung-Ae;Hong, Young-June;Uhm, Han-Sup;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.332-332
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    • 2011
  • The extreme ultraviolet (EUV) radiation, whose wavelength is from 120 nm down to 10 nm, and the energy from 10 eV up to 124 eV, is widely utilized such as in photoelectron spectroscopy, solar imaging, especially in lithography and soft x-ray microscopy. In this study, we have investigated the plasma diagnostics as well as the debris characteristics between the two types of dense plasma focusing devices with coaxial electrodes of Mather and hypocycloidal pinch (HCP), respectively. The EUV emission intensity, electron temperature and plasma density have been investigated in these cylindrical focused plasma along with the debris characteristics. An input voltage of 5 kV has been applied to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas at pressure ranged from 1 mTorr and 180 mTorr. The inner surface of the cathode was covered by polyacetal insulator. The central anode electrode has been made of tin. The wavelength of the EUV emission has been measured to be in the range of 6~16 nm by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission has also been measured by the spectrometer with the wavelength range of 200~1,100 nm. The electron temperature and plasma density have been measured by the Boltzmann plot and Stark broadening methods, respectively, under the assumption of local thermodynamic equilibrium (LTE).

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Influences of the Irradiation of Intense Pulsed ion Beam (IPIB) on the Surface of Ni$_3$Al Base Alloy IC6

  • Le, X.Y.;Yan, S.;Zhao, W.J.;Han, B.H.;Wang, Y.G.;Xue, J.M.;Zhang, H.T.
    • Journal of Korean Vacuum Science & Technology
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    • v.6 no.2
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    • pp.92-96
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    • 2002
  • In this paper, we treated the Ni$_3$Al based alloy samples with intense pulsed ion beams (IPIB) at the beam parameters of 250KV acceleration voltage, 100 - 200 A/cm$^2$ current density and 60 u pulse duration. We simulated the thermal-mechanical process near the surface of Ni$_3$Al based alloy with our STEIPIB codes. The surface morphology and the cross-section microstructures of samples were observed with SEM, the composition of the sample surface layer was determined by X-ray Energy Dispersive Spectrometry (XEDS) and the microstructure on the surface was observed by Transmission Electron Microscope (TEM). The results show that heating rate increases with the current density of IPIB and cooling rate reached highest value less than 150 A/cm$^2$. The irradiation of IPIB induced the segregation of Mo and adequate beam parameter can improve anti-oxidation properly of IC6 alloy. Some craters come from extraneous debris and liquid droplets, and some maybe due to the melting of the intersection region of interphase. Increasing the pulse number enlarges average size of craters and decreases number density of craters.

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Pretreatment of Rice Straw for Efficient Enzyme Digestibility (효과적인 효소 소화율을 위한 볏짚 전처리)

  • Kim, Sung Bong;Kim, Jun Seok;Lee, Sang Jun;Lee, Ja Hyun;Gang, Seong-U;Kim, Seung Wook
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.253-253
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    • 2010
  • Rice straw was pretreated with aqueous ammonia in order to enhance enzyme digestibility. Soaking in ammonia aqueous (SAA) was conducted with 15% ammonia, at $60^{\circ}C$. for 24 h. Optimization of both saccharification conditions and enzyme loading of SAA rice straw was carried out. Especially enzyme loading test was performed using statistical method. Moreover proton beam irradiation (PBI) was also performed to overcome the problem which inhibit the enzyme digestibility at 1-25 kGy doses with 45 MeV of beam energy. Optimal condition for enzymatic saccharification was follows; pH 4.8, $50^{\circ}C$, 60 FPU of enzyme activity, 1:4 ratio of celluase and ${\beta}$-glucosidase. Also, optimal doses of PBI on rice straw and SAA-treated rice straw for efficient sugar recovery were found to be 3 kGy, respectively. When saccharification was performed with optimal condition, glucose conversion yield was 89% of theocratical maximum in 48 h, and 3 kGy of PBI was applied to SAA-treated rice straw, approximately 90% of the theoretical glucose yield was obtained in 12 h. The results of X-ray diffractometry (XRD) support the effect of both SAA and PBI on sugar recovery, and scanning electron microscopy (SEM) images unveiled the physical change of the rice straw surface since rugged rice straw surface was observed.

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Measurement of EUV (Extreme Ultraviolet) and electron temperature in a hypocycloidal pinch device for EUV lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.108-108
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    • 2010
  • We have generated Ne-Xe plasma in dense plasma focus device with hypocycloidal pinch for extreme ultraviolet (EUV) lithography and investigated an electron temperature. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ne-Xe(30%) gas in accordance with pressure. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature of the hypocycloidal pinch plasma focus could be obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by Boltzmann plot. The light intensity is proportion to the Bolzman factor. We have been measured the electron temperature by observation of relative Ne-Xe intensity. The EUV emission signal whose wavelength is about 6~16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD) and the line intensity has been detected by using a HR4000CG Composite-grating Spectrometer.

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Direct Synthesis of Width-tailored Graphene Nanoribbon on Insulating Substrate

  • Song, U-Seok;Kim, Su-Yeon;Kim, Yu-Seok;Kim, Seong-Hwan;Lee, Su-Il;Jeon, Cheol-Ho;Park, Jong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.564-564
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    • 2012
  • Graphene has been emerged as a fascinating material for future nanoelectronic applications due to its extraordinally electronic properties. However, their zero-bandgap semimetallic nature is a major problem for applications in high performance field-effect transistors (FETs). Graphene nanoribbons (GNRs) with narrow widths (${\geq}10nm$) exhibit semiconducting behavior, which can be used to overcome this problem. In previous reports, GNRs were produced by several approaches, such as electron beam lithography patterning, chemically derived GNRs, longitudinal unzipping of carbon nanotubes, and inorganic nanowire template. Using these methods, however, the width distribution of GNRs was a quiet broad and substantial defects were inevitably occurred. Here, we report a novel approach for fabricating width-tailored GNRs by focused ion beam-assisted chemical vapor deposition (FIB-CVD). Width-tailored phenanthrene ($C_{14}H_{10}$) templates for direct growth of GNRs were prepared on $SiO_2$/Si substrate by FIB-CVD. The GNRs on the templates were synthesized at $900-1,050^{\circ}C$ with introducing $CH_4$ $(20sccm)/H_2$ (10 sccm) mixture gas for 10-300 min. Structural characterizations of the GNRs were carried out using Raman spectroscopy, scanning electron microscopy, and atomic force microscopy.

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물리적 기상증착법을 이용한 내지문(Anti-Finger Print) 코팅 최적 공정 및 박막특성분석

  • Kim, Wang-Ryeol;Kim, Hyeon-Seung;Jeong, U-Chang;Gwon, Min-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.489-489
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    • 2013
  • AF 코팅은 유리나 플라스틱과 같은 기재 표면을 특수 처리하여 지문과 같은 오염물질의 부착방지와 오염물질이 부착되더라도 쉽게 제거 가능하도록 하는 기술이다. 전자, 자동차, 건축, 섬유, 철강분야 등에 활용 가능한 중요기술로 박막의 발수 발유 기능을 부여하는 표면처리 기술이고, 코팅방법에는 진공증착, 스핀코팅, 딥코팅, 플로우 코팅, 스프레이 코팅 등이 있으며, 경화 방법이나 접촉각 등의 특성이 반영된다. 터치패널 등의 지문부착방지 기술은 불소계와 비불소계 재료로 구분할 수 있지만 지문을 쉽게 지울 수 있고, 오염 방지 기능과 내구성이 있으며, 우수한 광학특성을 유지하는 것이 과제라 할 수 있다. 그리고 항균성을 부여하는 기술도 개발되고 있다. 이런 터치패널의 강화유리에 AF 코팅한 제품은 핸드폰 글래스에 처음 적용하면서부터 실생활에 도입이 시작되고 있다. 이러한 AF 코팅을 스퍼터링 법을 이용하여 증착 시켰다. 기존에는 E-beam을 이용한 증착 방식이 주를 이루었지만, 스퍼터링 법을 이용함으로써 박막의 균일화 및 대량생산이 가능해졌다. 따라서 이 연구에서는 기존의 E-beam 방식과 sputtering 공정 중 ion source에 의한 전처리의 유무에 따른 박막의 특성을 비교하였다. 내부식성, 내마모성 시험을 거친 후, 접촉각을 측정하여 알아보았으며, 박막의 건전성 및 균일성은 FE-SEM을 이용하여 관찰하였다. 실험용 장비가 아닌 실제 생산장비인 직경 1,400 파이의 장비를 이용하여 증착하였으며 염수분무 및 내마모 시험 후, 기존 접촉각의 ${\pm}5^{\circ}$ 내외임을 확인 할 수 있었고, 박막의 건전성 또한 뛰어남을 알 수 있었다.

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Effect of Electron Beam and ${\gamma}$-Ray Irradiation on the Curing of Epoxy Resin

  • Kang, Phil-Hyun;Park, Jong-Seok;Nho, Young-Chang
    • Macromolecular Research
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    • v.10 no.6
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    • pp.332-338
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    • 2002
  • The effect of an electron beam and ${\gamma}$-ray irradiation on the curing of epoxy resins was investigated. Diglycidyl ether of bisphenol A (DGEBA) and diglycidyl ether of bisphenol F (DGEBF) as epoxy resin were used. The epoxy resins containing 1.0-3.() wt% of triarylsulphonium hexafluoroantimonate(TASHFA) and triarylsulphonium hexafluorophosphate(TASHFP) as initiator were irradiated under nitrogen at room temperature with different dosage of EB and ${\gamma}$-rays from a Co$^{60}$ u source. The chemical and mechanical characteristics of irradiated epoxy resins were compared after curing of EB and ${\gamma}$-ray irradiation. The thermal properties of cured epoxy were investigated using dynamic mechanical thermal analysis. The chemical structures of cured epoxy were characterized using near infrared spectroscopy. Mechanical properties such as flexural strength, modulus were measured. The gel fraction of DGEBA with ${\gamma}$-ray was higher than that of the epoxy with EB at the same dose. Young's modulus of the sample irradiated by ${\gamma}$-ray is higher than that of sample cured by EB. From the result of strain at yield, it was found that the epoxy cured by ${\gamma}$-ray had a higher stiff property compared with the irradiated by EB.

Static analysis of rubber components with piezoelectric patches using nonlinear finite element

  • Manna, M.C.;Sheikh, A.H.;Bhattacharyya, R.
    • Smart Structures and Systems
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    • v.5 no.1
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    • pp.23-42
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    • 2009
  • In order to reduce vibration or to control shape of structures made of metal or composites, piezoelectric materials have been extensively used since their discovery in 1880's. A recent trend is also seen to apply piezoelectric materials to flexible structures made of rubber-like materials. In this paper a non-linear finite element model using updated Lagrangian (UL) approach has been developed for static analysis of rubber-elastic material with surface-bonded piezoelectric patches. A compressible stain energy function has been used for modeling the rubber as hyperelastic material. For formulation of the nonlinear finite element model a twenty-node brick element is used. Four degrees of freedom u, v and w and electrical potential ${\varphi}$ per node are considered as the field variables. PVDF (polyvinylidene fluoride) patches are applied as sensors/actuators or sensors and actuators. The present model has been applied to bimorph PVDF cantilever beam to validate the formulation. It is then applied to study the smart rubber components under different boundary and loading conditions. The results predicted by the present formulation are compared with the analytical solutions as well as the available published results. Some results are given as new ones as no published solutions available in the literatures to the best of the authors' knowledge.

Wave Characteristics in the PZT-bonded Composite Beams (PZT층을 갖는 복합재 보의 파동 특성)

  • Kim, Dae-Hwan;Lee, U-Sik
    • Proceedings of the KSR Conference
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    • 2011.10a
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    • pp.2632-2634
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    • 2011
  • In the Structural Health Monitoring field, the piezoelectric elements are bonded the surface of the structures for generating the guided wave. For this reason, the structures become two-layer beam. It is very important to know precisely the dynamic characteristic of structures and also predict precisely the wave propagation in structures. Because wave propagation is very useful to analysis the dynamic characteristic of structures. In this paper, the governing equations of motion are derived from Hamilton's principle by applying the Timoshenko beam theory and Mindlin-Herrmann rod theory at the first. and then the wave propagations in a composite beams with a surface-bonded piezoelectric are examined.

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Recent Vacuum Technology for Superconducting Heavy-ion Accelerator (초전도 중이온가속기 진공시스템의 최신 기술동향)

  • Kim, Jaehong;Son, Hyungjoo;Cho, Youngbum
    • Vacuum Magazine
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    • v.4 no.1
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    • pp.4-11
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    • 2017
  • The Rare Isotope Science Project (RISP) has been launched for developing a superconducting heavy-ion linear accelerator, which produces various rare isotopes for low energy nuclear science and applied sciences. This superconducting linac is designed to achieve a very high beam current (200Mev/u with 400 kW beam power) of heavy ions including Uranium. For the high current accelerator, the requirement of ultra high-vacuum level is considered as one of the of important factors. Vacuum calculations have been carried out to verify the vacuum system design satisfied the requirements. In this paper, an overview of RISP and vacuum calculation methods for several interesting sections of the superconducting linear accelerator.