• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.56-56
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• 1999

For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

• Transactions of the Korean hydrogen and new energy society
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• v.16 no.2
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• pp.159-169
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• 2005

Cellulose, consisted of 45 wt% in wood, is usable as fuels and heavy oil additives if depolymerized to monomer unit, because the chemical structures are similar to high octane materials found in gasoline. In this study, thermochemical degradation by solvolysis reaction of cellulose such as the effect of reaction temperature, reaction time and type of solvent on conversion yield and degradation products were investigated. It was found that the effectiveness of the solvent on the sovolysis reaction was as follows; acetone>n-butanol>tetralin. When acetone was used as a solvent, the highest cellulose conversion was observed to be 91.8% at 500$^{\circ}C$, 40min. Combustion heating value of liquid products from thermochemical conversion processes was in the range of 7,330${\sim}$7,410cal/g. The energy yield and mass yield in acetone-solvolysis of cellulose was as high as 66.8% and 37.0 g oil/100g raw material after 40min of reaction at 400$^{\circ}C$. Various aliphatic and aromatic compounds were detected in the cellulose solvolysis products. The major components of the solvolysis products, that could be used as fuel, were mesityl oxide, mesitylene, isophorone.

• Transactions of the Korean hydrogen and new energy society
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• v.18 no.1
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• pp.85-94
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• 2007

Rice straw, produced as an agricultural by-product, is usable biomass as fuels if depolymerized to monomer unit, because the chemical structure are similar to high octane materials found in gasoline. In this study, parameters of thermochemical degradation by solvolysis reaction of rice straw such as the effect of reaction temperature, reaction time and type of solvent on conversion yield and degradation products were investigated. It was found that the effectiveness of the solvent on the solvolysis reaction was as follows; acetone>cresol>butanol. When acetone was used as a solvent, the highest rice straw conversion was observed to be 91.5% at $500^{\circ}C$, 40 min. Combustion heating value of liquid products from thermochemical conversion processes was in the range of 7,380 cal/g. The energy yield and mass yield in acetone-solvolysis of rice straw was as high as 69.0% and 38.2 g-oil/100g-raw material after 40 min of reaction at $350^{\circ}C$. Various aliphatic and aromatic compounds were detected in the rice straw solvolysis products. The major components of the solvolysis products, that could be used as fuel, were 4-methyl-2-pentanone, 3,5,5-trimethyl-2-cyclopentan-1-one as ketones.

• Journal of the Korean Vacuum Society
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• v.15 no.5
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• pp.534-540
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• 2006

Thin films of $V_2O_3$, $VO_2$, and $V_2O_5$ were obtained from a single precursor solution through post-annealing processes under different annealing conditions. As annealed in air, the deposited films became $V_2O_5$ with orthorhombic crystal structure, while they were $V_2O_3$ and $VO_2$ with rhombohedral and monoclinic crystal structure as annealed in vacuums with base pressure of $1{\times}10^{-6}$ Torr and with 10 mTorr $O_2$ pressure, respectively. Electrical and optical measurements indicated that the $V_2O_5$ and $VO_2$ films are semiconducting, while the $V_2O_3$ films are metallic at room temperature. Chromium doping in $VO_2$ resulted in a decrease of the resistivity and changed the conduction type from n-type to p-type. 10% Cr-doped $VO_2$ films were found to have orthorhombic crystal structure, which is different from that of the undoped $VO_2$. Spectral features in the optical absorption spectra of all the films were interpreted as the transitions involving O 2p and V 3d bands. The crystal-field splittings between $t_{2g}$ and $e_g$ states of the V 3d bands are estimated to be about 1.5 and 1.0 eV for $V_2O_5$ and $VO_2$, respectively.

• Korean Journal of Materials Research
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• v.14 no.8
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• pp.542-546
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• 2004

We report a new fabrication process for high performance triode type CNT field emitters and their superior electrical properties. The CNT-based triode-type field emitter structure was fabricated by the conventional semiconductor processes. The keys of the fabrication process are spin-on-glass coating and trim-and-leveling of the carbon nanotubes grown in trench structures by employing a chemical mechanical polishing process. They lead to strong adhesion and a uniform distance from the carbon nanotube tips to the electrode. The measured emission property of the arrays showed a remarkably uniform and high current density. The gate leakage current could be remarkably reduced by coating of thin $SiO_{2}$ insulating layer over the gate metal. The field enhancement factor(${\beta}$) and emission area(${\alpha}$) were calculated from the F-N plot. This process can be applicable to fabrication of high power CNT vacuum transistors with good electrical performance.

• Journal of Life Science
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• v.13 no.3
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• pp.241-247
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• 2003

While the DNA-protein kinase (DNA-PK) complex, comprised of DNA-PKcs and Ku80, is primary involved in the repair of DNA double-strand breaks, it is also believed to participate in additional cellular processes. Here, treatment of embryo fibroblasts (MEFs) derived from either wild-type (Wt) or DNA-PKcs-null (DNA-$PKcs^{-/-}$) mice with various stress inducing agents revealed that adriamycin was markedly more cytotoxic for $Ku80^{-/-}MEFs$ and led to their long-term accumulation in the $G_2$/M phase. This differential response was not due to differences in DNA repair, since adrimycin-triggered DNA damage was repaired with comparable efficiency in both Wt and $Ku80^{-/-}MEFs$, but was associated with differences in the expression of important cell cycle regulatory genes. Our results support the notion that Ku80-mediated cytoprotection and $G_2$/M-progression are not only dependent on the cell's DNA repair but also may reflect Ku80's influence on additional cellular processes such as gene expression.

• Applied Chemistry for Engineering
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• v.26 no.1
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• pp.1-16
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• 2015

In this review, we summarized some of membrane processes using the ion exchange membrane typically used in energy applications. Ion exchange membranes are classified according to their functions, formations (e.g. heterogeneous, homogeneous), and polymer type. Furthermore, various methods to prepare cation exchange membranes and anion exchange membranes were discussed in detail and also illustrated through a thorough review of the literature works. There are numerous reports highlighting recent research trends in the ion exchange membrane fabrication, however, in this review we will focus more on discussing the development made in ion exchange membranes and their potential usages in future technologies.

• Carbon letters
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• v.2 no.3_4
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• pp.176-181
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• 2001

A series of activated carbons were prepared from coconut shells and coal-tar pitch binder by physical activation with steam in this study. The effect of variable processes such as activation temperature, activation time and ratio of mixing was investigated for optimizing those preparation parameters. The activation processes were carried out continuously. The nitrogen adsorption isotherms at 77 K on pellet-shaped activated carbons show the same trend of Type I by IUPAC classification. The average pore sizes were about 19-21${\AA}$. The specific surface areas ($S_{BET}$) of pellet typed ACs increased with increasing the activation temperature and time. Specific surface area of AC treated for 90 min at temperature $900^{\circ}C$ was 1082 $m^2/g$. The methylene blue numbers continuously increased with increasing the activation temperature and time. On the other hand, iodine numbers highly increased till activation time of 60 min, but the rate of increase of iodine numbers decreased after that time. This indicates that new micropores were created and the existing micropores turned into mesopores and macropores because of increased reactivity of carbon surface and $H_2O$.

• Preventive Nutrition and Food Science
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• v.9 no.2
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• pp.138-143
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• 2004

Soybean curd residues (SCR) obtained from hot and cold manufacturing processes were fermented by indigenous microorganisms, Lactobacillus rhamnosus LS and Bacillus firmus NA-l for 15 h at 37$^{\circ}C$. The pH, acidity, viable cell counts, and tyrosine content were evaluated in samples with variations in sugar, starter and type of SCR. The raw Doowon SCR (D-SCR, cold-processed) fermented by indigenous microorganism had a 0.9% acidity and 6.7 ${\times}$ 10$^{7}$ CFU/g viable cell counts, compared with the 0.11 % acidity and 6.7 ${\times}$ 10$^{6}$ CFU/g viable cell counts of raw fermented Pulmuwon SCR (P-SCR, hot-processed). After fermentation of raw P-SCR with 1 % glucose and 1 % L. rhamnosus LS starter, the viable cell counts, tyrosine content and acidity were 4.7 ${\times}$ 10$^{8}$ CFU/g, 16.3 mg% and 0.9%, respectively. In addition, the raw P-SCR fermented with Bacillus firmus NA-l as co-starter had a 0.45% acidity, 2.4 ${\times}$ 10$^{8}$ CFU/g lactic acid bacteria, and 3.3 ${\times}$ 10$^{6}$ CFU/g Bacillus sp. In particular, the tyrosine content was increased 5 fold. The drying of fermented SCR was completed by hot-air drying (5$0^{\circ}C$) within 12 h; the dried P-SCR and D-SCR had 1.8 ${\times}$ 10$^{7}$ CFU/g and 5.3 ${\times}$ 10$^{6}$ CFU/g viable cell counts, respectively. The concentrate of methanol extract from fermented D-SCR inhibited the initial cell growth of E. coli, Staphylococcus aureus and Pseudomonas aeruginosa in liquid culture.

• Journal of Environmental Science International
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• v.25 no.11
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• pp.1563-1573
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• 2016

The aim of this study was to evaluate the occurrence of vanadium in Jeju Island groundwater, focusing on the spatio-temporal patterns and geochemical controlling factors of vanadium. For this, we collected two sets of groundwater data: 1) concentrations of major constituents of 2,595 groundwater samples between 2008 and 2014 and 2) 258 groundwater samples between December 2006 and June 2008. The concentrations of groundwater vanadium were in the range of $0.2{\sim}71.0{\mu}g/L$ (average, $12.0{\mu}g/L$) and showed local enrichments without temporal/seasonal variation. This indicated that vanadium distribution was controlled by 1) the geochemical/mineralogical composition and dissolution processes of original materials (i.e., volcanic rock) and 2) the flow and chemical properties of groundwater. Vanadium concentration was significantly positively correlated with that of major ions ($Cl^-$, $Na^+$, and $K^+$) and trace metals (As, Cr, and Al), and with pH, but was negatively correlated with $NO_3-N$ concentration. The high concentrations of vanadium (>$15{\mu}g/L$) occurred in typically alkaline groundwater with high pH (${\geq}8.0$), indicating that a higher degree of water-rock interaction resulted in vanadium enrichment. Thus, higher concentrations of vanadium occurred in groundwater of $Na-Ca-HCO_3$, $Na-Mg-HCO_3$ and $Na-HCO_3$ types and were remarkably lower in groundwater of $Na-Ca-NO_3$(Cl) type that represented the influences from anthropogenic pollution.