• Title/Summary/Keyword: Two-Phase Flow Pattern

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Optimization of FPD Cleaning System and Processing by Using a Two-Phase Flow Nozzle (이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발)

  • Kim, Min-Su;Kim, Hyang-Ran;Kim, Hyun-Tae;Park, Jin-Goo
    • Korean Journal of Materials Research
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    • v.24 no.8
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    • pp.429-433
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    • 2014
  • As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing and the pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becoming more important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaning process using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes a two-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate the particle removal efficiency by means of two-phase flow cleaning, silica particles $1.5{\mu}m$ in size were contaminated onto a six-inch silicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water and nitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate. The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and the substrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained high efficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phase-flow cleaning and air-knife processes.

Effect of Inlet Geometries on the Two-Phase Flow Distribution at Header-Channel Junction (헤더-채널 분기관에서의 헤더 입구 형상이 2상 유동 분배에 미치는 영향에 대한 실험적 연구)

  • Lee, Jun Kyoung
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.25 no.6
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    • pp.324-330
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    • 2013
  • The main objective of this work is to experimentally investigate the effect of inlet geometries on the distribution of two-phase annular flow at header-channel junctions simulating the corresponding parts of compact heat exchangers. The cross-section of the header and the channels were fixed to $16mm{\times}16mm$ and $12mm{\times}1.8mm$, respectively. Experiments were performed for the mass flux and the mass quality ranges of $30{\sim}140kg/m^2s$ and 0.3~0.7, respectively. Air and water were used as the test fluids. Three different inlet geometries of the header were tested:no restriction (case A), a single 8 mm hole at the center (case B), and nine 2 mm holes around the center (case C) at the inlet, respectively. The tendencies of the two-phase flow distribution were different, in each case. For cases B and C (flow resistance exists), more uniform flow distribution results were seen, compared with case A(no flow resistance), due to the flow pattern change to mist flow from annular flow at the inlet, and the flow recirculation near the end plate of the header.

Flow Patterns of Gas-Liquid Two-phase Flow under Microgravity (미소중력하의 기액이상류의 유동양식)

  • 최부홍
    • Journal of Advanced Marine Engineering and Technology
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    • v.27 no.3
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    • pp.460-465
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    • 2003
  • Microgravity experiments were conducted to determine the effect of liquid and gas superficial velocities on flow behaviors. Flow behaviors observed under microgravity conditions can be classified into five flow patterns: bubble. Taylor bubble, slug, semi-annular and annular flows. Transition boundary between four flow patterns could be determined by drift-flux model. It was also found that the effect of gravity and pipe inclination on flow pattern transition was not significant in the inertia dominant region.

The Characteristics of Two Phase Flow by Non-Newtonian Fluid for Vertical Up-ward in a Tube (수직 상향유동 배관에서 비뉴톤유체에 의한 2상류의 유동특성)

  • Cha K.O.;Kim J. G.;Che K.S.
    • Journal of the Korean Institute of Gas
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    • v.2 no.4
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    • pp.53-59
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    • 1998
  • Flow pattern of air-water two phase flow depends on the conditions of pressure drop, void fraction, and channel geometry. Drag reduction in the two phase flow can be applied to the transport of crude oil, phase change systems such as chemical reactor, pool and boiling flow, and to present cavitation which occurs in pump impellers. But the research on drag reduction in two phase flow is not intensively investigated. Therefore, experimental investigations have been carried out to analyze the drag reduction produced and void fraction by Co-polymer(A611p) addition in the two phase flow system. We find that the maximum point position of local void friction moves from the wall of the pipe to the center of the pipe when polymer concentration increases. Also we find that the polymer solution changes the characteristics of the two phase flow. And then we predict that it is closely related with the drag reduction.

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Flow Measurement in Bubbly and Slug Flow Regimes Using The Electromagnetic Flowmeter Developed (전자기유량계를 이용한 기포 및 슬러그 유동 측정방법 연구)

  • Cha, Jae-Eun;Ahn, Yeh-Chan;Seo, Kyung-Woo;Kim, Moo-Hwan
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.11
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    • pp.1559-1569
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    • 2002
  • In order to investigate the characteristics of electromagnetic flowmeter in two -phase flow, an AC electromagnetic flowmeter was designed and manufactured. In various flow conditions, the signals and noises from the flowmeter were obtained and analyzed by comparison with the observed flow patterns with a high speed CCD camera. The experiment with the void simulators in which rod shaped non-conducting material was used was carried out to investigate the effect of the bubble position and the void fraction on the flowmeter. Based on the results from the void simulator, two -phase flow experiments encompassed from bubbly to slug flow regime were conducted. The simple relation $\Delta$ $U_{TP}$ = $\Delta$ $U_{SP}$ (l-$\alpha$) was verified with measurements of the potential difference and the void fraction. Due to the lack of homogeneity in a rent two -phase flow, the discrepancy between the relation and the present measurement was slightly increased with void fraction and also liquid volumetric flux jf. Whereas there is no difference in the shape of the raw signal between single-phase flow and bubbly flow, the signal amplitude for bubbly flow is higher than that for single -phase flow at the same water flow rate, since the passage area of the water flow is reduced. In the case of slug flow, the phase and the amplitude of the flowmeter output show dramatically the flow characteristics around each slug bubble and the position of a slug bubble itself. Therefore, the electromagnetic flowmeter shows a good possibility of being useful for identifying the flow regimes.ul for identifying the flow regimes.

An Experimental Study on the Flow Characteristics Inside an Open Two-Phase Natural Circulation Loop (개방된 2상 자연순환 회로내의 유동특성에 관한 실험적 연구)

  • 경익수;이상용
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.17 no.5
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    • pp.1313-1320
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    • 1993
  • Flow patterns inside the riser section and the effects of the heater inlet-and exit-restrictions, liquid charging level and the heater inlet subcooling on the flow characteristics inside an open two-phase natural circulation loop were studied experimentally. Three basic circulation modes were observed ; periodic circulation (A)(flow oscillations with incubation(no boiling) period), continuous circulations(stable operation mode with no flow oscillations), and periodic circulation (B) (flow oscillations with continuous boiling). The circulation rate increases and then decreases with the increase of the heating rate and the maximum circulation rate appears with the continuous circulation mode. The decrease of the inlet-restriction or the increase of the exitrestriction destabilizes the system. When the liquid charging level or the inlet subcooling decreases, the continuous circulation mode starts at the lower heating rate and the system is stabilized.

Visualization of cross-sectional two-phase flow structure during in-tube condensation (관내 응축 시 2상유동 단면구조의 가시화)

  • Pusey, Andree;Kim, Hyungdae
    • Journal of the Korean Society of Visualization
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    • v.14 no.2
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    • pp.18-24
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    • 2016
  • This paper presents an experimental investigation to visualize cross-sectional two-phase flow structure and identify liquid-gas interface for condensation of steam at a low mass flux in a slightly inclined tube using the axial-viewing technique, which permits to look directly into flow during condensation of steam. In this technique, two-phase flow is viewed along the axis of a pipe by locating a high-speed video camera in front of a viewer that is fitted at the outlet of the pipe. A short section of the pipe is illuminated and is recorded through the viewer, which is kept free of liquid by mildly introducing air. Experiments were conducted in a pipe of 19.05 mm in inner diameter at atmospheric pressure. Cross-sectional two-phase flow structure is obtained at a steam mass flux of $2.62kg/m^2s$ as a function of steam quality in the range from 0.5 to 0.9. The results show that stratified-wavy flow is a unique flow pattern observed in the scope of the present study. Condensate film thickness, stratification angle and void fraction were measured from the obtained flow structure images. Finally, heat transfer coefficient was calculated using the measurement data and discussed in comparison with existing correlations.

The Review of Studies on Pressure Drop and Heat Transfer In Microchannels

  • Hwang, Yun-Wook;Kim, Min-Soo
    • International Journal of Air-Conditioning and Refrigeration
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    • v.13 no.1
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    • pp.51-60
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    • 2005
  • This paper reviews the studies on the pressure drop and the heat transfer in microchannels. Although a lot of studies about the single-phase flow have been done until now, conflicting results are occasionally reported about flow transition from laminar flow to turbulent flow, friction factor, and Nusselt number. Some studies reported the early flow transition due to relatively greater wall effect like surface roughness, but the other studies showed that the flow transition occurred at the Reynolds number of about 2300 and the early flow transition might be due to less accurate measurement of the channel geometry. Also, there have been arguments whether the conventional relation based upon continuum theory can be applied to the fluid flow and the heat transfer in microchannels without modification or not. The studies about the two-phase flow in microchannels have been mostly about investigating the flow pattern and the pressure drop in rectangular channels using two-component, two-phase flow like air/water mixture. Some studies proposed correlations to predict two-phase flow pressure drop in microchannels. They were mostly based on Lockhart-Martinelli model with modification on C-coefficient, which was dependent on channel geometry, Reynolds number, surface tension, and so on. Others investigated the characteristics of flow boiling heat transfer in microchannels with respect to test parameters such as mass flux, heat flux, system pressure, and so on. The existing studies have not been fully satisfactory in providing consistent results about the pressure drop and the heat transfer in microchannels. Therefore, more in-depth studies should be done for understanding the fundamentals of the transport phenomena in the microchannels and giving the basic guidelines to design the micro devices.

Bubble Behavior in a Micro-Multi-Branched-Channel (마이크로 복수 분지관에서의 버블거동에 관한 연구)

  • Kim, Kyung-Chun;Ryu, Geon-Ho
    • Journal of the Korean Society of Visualization
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    • v.4 no.2
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    • pp.32-36
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    • 2006
  • Recently there are many researches about single flow and two-phase flow phenomena in the mini and microchannel. But from this result the principle in the microchannel was not explained clearly. In this paper two-phase flow pattern was visualized in the micro-multi-branched-channel using a high speed camera. Microchannel was fabricated with PDMS and glass slide. The velocity profile was obtained by a Micro PIV. Then flow boiling at the near inlet area was occurred and vapor was moved in the micro-multi-branched-channel.

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Identification of Internal Flow Pattern in Effervescent Atomizers (기체주입노즐의 내부유동양식의 구분)

  • Kim, Joo-Youn;Lee, Sang-Yong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.2
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    • pp.306-315
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    • 2000
  • An experimental study was conducted to examine the internal flow patterns inside the mixing chamber of effervescent atomizers. The mixing chamber has the rectangular cross section ($8mm{\times}2mm$) and made of transparent acrylic plate for flow visualization. The parameters tested were the air/liquid ratio (ALR), injection. pressure, and the nozzle orifice diameter. Three different flow regimes were observed; bubbly, annular, and intermittent flows. In the bubbly flow regime, the discharged mixture was disintegrated into drops through the bubble expansion and the ligament breakup. On the other hand, in the annular flow regime, the liquid annulus was disintegrated into small drops by the aerodynamic interaction between the phases due to the high relative velocities between the gas and the liquid. In the intermittent flow regime, the bubble-expansion/ligament-disintegration mode and the annulus-disintegration mode appeared alternatively. The correlations representing the transition criteria between the two-phase flow patterns within the mixing chamber were proposed based on the drift-flux models.