• 한국산업보건학회지
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• 제25권3호
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• Fisheries and Aquatic Sciences
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• 제9권4호
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• pp.135-139
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• 2006

We optimized the biological and physical parameters for DNA delivery into thalli of the red alga Porphyra yezoensis using a particle bombardment device. The efficiency of transformation was determined using the ${\beta}-glucuronidase$ (GUS) assay. The optimal helium pressure, distance of tungsten particle flight, and ratio of DNA to tungsten particles were $23kgf/cm^2$, 8 cm, and $5{\mu}g/mg$ tungsten, respectively. During bombardment, osmotic treatment with a mixture of 0.6 M mannitol and sorbitol increased the efficiency of GUS transformation. After 2 days, the blue color indicating GUS activity was observed using a histochemical assay.

• Nuclear Engineering and Technology
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• 제56권10호
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• pp.4103-4114
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• 2024

This research aimed to develop lead-free polymer composites based on poly-methyl methacrylate (PMMA) and embedded with tungsten carbide (WC) micro and nanoparticles for use in radiation protection applications. PMMA was filled with 20 %, 40 %, and 60 % by weight of WC micro- and nanoparticles. The shielding features of the proposed polymer mixtures were evaluated at different radioactive sources of different energies using the HPGe detector. The results revealed that the investigated composites containing micro and nano-structured WC particles showed superior radiation shielding at 81 keV due to the K-edge of the W element occurring at 69.5 keV. The findings also demonstrated that composites loaded with WC nanoparticles were more effective in shielding gamma radiation than those loaded with WC microparticles, even at the same filler wt.%. Furthermore, the sample containing 60 % by weight of nano-WC, coded as P-60nWC, had superior shielding performance than other polymer-based composites reported in the literature. Thus, the proposed nano-WC/PMMA composites can be effectively employed in radiation facilities as alternative environmentally and lead-free radiation shielding materials to protect people and the environment from the harmful risks of gamma radiation.

• 한국정밀공학회지
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• 제22권8호
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• pp.165-173
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• 2005

This paper presents the results for deposition of micrometer-scale metal lines on glass for the development of TFT-LCD circuit repair-system. Although there had been a few studies in the late 1980's for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and W(CO)s was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 m depending on laser power and scan speed while the width was controlled between 50um using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below $1{\Omega}{\cdotu}um$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

• Nuclear Engineering and Technology
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• 제54권6호
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• pp.1947-1953
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• 2022

As the plasma facing material in the nuclear fusion reactor, tungsten has to bear the irradiation impact of high energy particles. The surface quality of tungsten may affect its irradiation resistance, and even affect the service life of fusion reactor. In this paper, tungsten samples with different surface quality were polished by mechanical processing, subsequently conducted by D₂⁺ implantation and thermal desorption. D₂⁺ implantation was performed at room temperature (RT) with the irradiation dose of 1 × 10²¹ D₂⁺/m² by 5 keV D₂⁺ ions, and thermal desorption spectroscopy measurements were done from RT to 900 K. In addition, He irradiation was also performed by 50 eV He⁺ ions energy with the fluxes of 5.5 × 10²¹ m^-2s^-1 and 1.5 × 10²² m^-2s^-1, respectively. Results reveal that the hydrogen/helium irradiation behavior are both related to surface quality. Samples with high surface quality has superior D₂⁺ retention behavior with less D₂ retained after implantation. However, such samples are more likely to generate fuzzes on the surface after helium irradiation. Different morphologies (smooth, wavy, pyramids) after helium irradiation also demonstrates that the surface morphology is related to tungsten crystallographic orientation.

• 공업화학
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• 제24권1호
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• pp.44-48
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• 2013

본 연구에서는 낮은 열전이 온도를 가지는 텅스텐이 도핑된 이산화바나듐$(W-VO_2)$을 제조하였다. 텅스텐이 도핑된 이산화바나듐은 바나딜설페이트$(VOSO_4)$와 중탄산암모늄($(NH_4)$ $HCO_3$)을 전구체로 열분해 과정을 통해 제조하였다. 이에 대한 입자의 구조 및 열전이 특성을 FE-SEM, EDS, XRD, XPS, DSC 분석을 통해 조사하였다. 그 결과 텅스텐이 도핑된 이산화바나듐 입자의 형상은 판상형태로 텅스텐이 이산화바나듐 결정에 잘 도핑 되어 있음을 확인 하였다. 텅스텐이 도핑된 이산화바나듐의 결정 구조는 단사정으로 60 nm의 크기를 가지고 있었으며, 화학적인 조성 및 표면 상태는 이산화바나듐과 유사하였다. 또한, 텅스텐이 도핑된 이산화바나듐의 상전이 온도는 $38.5^{\circ}C$로 순수한 이산화바나듐의 상전이 온도인 $67.7^{\circ}C$에 비해 $29.2^{\circ}C$ 낮게 나타났으며, 가역 상전이 안정성이 우수하였다.

• Nuclear Engineering and Technology
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• 제53권12호
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• pp.4142-4149
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• 2021

In the radiation protection application, the metal-polymer composites have been developed for their radiation shielding properties. In this research, the elastomer composites doped by 10 ㎛ and 100nm size of lead, bismuth and tungsten particles as filler with 30 and 60 wt percentages were prepared. To survey the shielding properties of the polymer composites using gamma-ray emitted from 152Eu and 137Cs sources, the gamma flux was measured by using NaI(Tl) detector, then the linear attenuation coefficient was calculated. Also, the Monte Carlo simulation (MCs) method was used. The results showed a direct relationship between the linear attenuation coefficients of the absorbent and filler ratio. Also, the decrease in the particle size of the shielding material in each weight percentage improved the radiation shielding features. When the dimension of the particles was in the order of nano-size, more attenuation was achieved. At low energies used for medical diagnostic X-ray applications due to the predominance of the photoelectric effect, bismuth and lead were suitable selection as filler.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• Nuclear Engineering and Technology
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• 제56권6호
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• pp.2153-2162
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• 2024

The purpose of this study is to develop a high-energy neutron shielding material applied in proton therapy environment. Composite shielding material consisting of 10.00 wt% boron carbide particles (B₄C), 13.64 wt% surface-modified cross-linked polyethylene (PE), and 76.36 wt% tungsten particles were fabricated by hot-pressure sintering method, where the optimal ratio of the composite is determined by the shielding effect under the neutron field generated in typical proton therapy environment. The results of Differential Scanning Calorimetry measurements (DSC) and tensile experiment show that the composite has good thermal and mechanical properties. In addition, the high energy-neutron shielding performance of the developed material was evaluated using cyclotron proton accelerator with 100 MeV proton. The simulation shows a 99.99% decrease in fast neutron injection after 44 cm shielding, and the experiment result show a 99.70% decrease. Finally, the shielding effect of replacing part of the shielding material of the proton therapy hall with the developed material was simulated, and the results showed that the total neutron injection decreased to 0.99‰ and the neutron dose reduced to 1.10‰ before the enhanced shielding. In summary, the developed material is expected to serve as a shielding enhancement material in the proton therapy environment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.657-662
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• 2005

In this study, the deposition of micrometer-scale metallic interconnects on LCD glass for the repair of open-circuit type defects is investigated. Although there had been a few studies Since 1980 s for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and $W(CO)_6$ was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 nm depending on laser power and scan speed while the width was controlled between $3\~50{\mu}$ using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below 1 $O\cdot{\mu}m$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.