• 한국기계가공학회지
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• 제4권3호
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• pp.32-38
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• 2005

Electrical discharge machining is the method of using thermal energy by electrical discharge. Generally, if the material of workpiece has conductivity even though very hard materials and complicated shape which are difficult to cut such as quenching steel, cemented carbide, diamond and conductive ceramics, the EDM process is favorable one of possible machining processes. But, the process is necessarily required of finish cut and heat treatment because of slow cutting speed, no mirror surface, brittleness and crack due to the residual stress for manufactured goods. In this experimental thesis, the super EDM drilling was developed for high precision semiconductor die steel and for minimization of leadframe width. It was possible to development of EDM drilling machine for high precision semiconductor die with the electrode guide and its modelling and stress analysis. The development of electrode with the copper pipe type was conducted to drill the hole from the diameter of 0.1mm to 3.0mm with the error of from 0.02mm to 0.12mm. From the SEM and EDX analysis, the entrance of the EDM drill was found the resolidification of not only the component of tungsten but also the component of copper.

• 대한화학회지
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• 제38권2호
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• pp.146-150
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• 1994

1.000%(w/v)텅스텐 메트릭스 중에 미량불순물로 존재하는 아연, 카드뮴, 납 및 구리의 동시정량을 펄스차이 벗김전압전류법으로 검토하였다. 지지전해질로는 타르타르산(pH=5.00)을 사용하였다. 사전 농축은 -1.2 volt(vs. Ag/AgCl)에서 3분간이면 충분하였다. 1.000%(w/v)텅스텐 매트릭스 중에서 아연, 카드뮴, 납 및 구리 각 원소의 동시 정량이 가능한 직선 범위는 10 ~ 50 ppb였으며, 3${\sigma}$검출한계는 각각 1.25, 1.02, 1.69, 1.02ppb 로 나타났다. 이 결과는 텅스텐 매트릭스하에서 ICP-AES의 검출한계인 8.0, 5.0, 120, 5 ppb 결과와 비교하여 볼때, 본 방법이 보다 우수한 미량분석방법임을 알 수 있다.

• 한국자기학회지
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• 제18권1호
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• pp.32-35
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• 2008

차세대 반도체 산업의 발전을 위하여 반도체 소자의 구조는 DRAM, FRAM, MRAM 등 여러 분야에서 다양한 연구가 진행되고 있다. 특히 이런 차세대 반도체 소자에서 금속 배선으로는 Cu가 사용되며, Cu 금속 배선을 위한 확산방지막에 대한 연구는 반드시 필요하다[1-3]. Cu 금속 배선을 위한 확산방지막에 대한 현재까지의 연구에서는 Tungsten(W)을 기반으로 Nitride(N)를 불순물로 첨가한 확산방지막에 대하여 연구되었다[4-7]. 이러한 W-N를 기반으로 본 연구에서는 물리적 기상 증착법(PVD) 방법인 RF Magnetron Sputter 방법으로 W-N 이외에 Carbon(C) 과 Boron(B)을 첨가하여 확산방지막의 특성을 확인하였고, 특히 Boron Target의 power를 변화하여 W-B-C-N 확산방지막의 Boron에 의한 특성과 열적 안정성을 연구하였다[8-10]. 실험은 다양한 Boron의 조성을 가지는 확산방지막을 증착하여 $\beta$-ray와 4-point probe를 사용하여 확산방지막의 특성을 확인하였고, 고온($700^{\circ}C{\sim}1000^{\circ}C$) 열처리한 후 X-ray Diffraction 분석을 하여 열적 안정성을 확인하였다.

• 한국산업안전학회:학술대회논문집
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• 한국안전학회 2002년도 추계 학술논문발표회 논문집
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• pp.257-262
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• 2002

The object of this study is to investigate the effect of compounded welding through the AE (Acoustic Emission) characteristics for weld HAZ (Heat Affected Zone) on static tensile test. This study was carried out a SM 490A, high tension steel using the low hydrogen type E4316 of electronic shield metal arc welding, compound wire of $CO_2$ gas arc welding and tungsten electrode of TIG welding.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.997-1000
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• 2004

This paper introduces our basic research about a carbon nanotube(CNT) sample for the fabrication of nanotweezer. We have made the nanotweezer through the physical adhesion of multi-walled carbon nanotubes(MWCNTs) on two sharp tungsten tips. Thereby we needed the CNT sample which is proper to this fabrication process. And we applied the dielectrophoretic methods to the fabrication of the CNT sample. During the basic experiment, we used a sharp edged electrode and a flat electrode as electrodes for dielectrophoresis and just a function generator as a voltage source for the generation of electric field.

• 한국안전학회지
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• 제14권3호
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• pp.93-100
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• 1999

Decomposition efficiency, power consumption, and applied voltage of CFC(Chlorofluorocatbon) were investigated by SPCP(surface induced discharge plasma chemical processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of CFC-12 with various electric frequencies(5~50kHz). flow rates (100~1,000mL/min), initial concentrations(100~1,000ppm), electrode materials(W, Cu, Al). electrode thickness(1, 2, 3mm) and reference gases($N_2$, $O_2$, air) were measured and the products were analyzed with FT-IR. Experimental results showed that at the frequency of 10kHz, the highest decomposition efficiency of 92.7% for CFC-12 were observed at the power consumptions of 29.6W. respectively, and that decomposition efficiency decreased with increasing frequency above 20kHz and decomposition efficiency per unit power were 3.13%/W for CFC-12. Decomposition efficiency was increased with increasing residence times and with decreasing initial concentration of pollutants. Decomposition efficiency was increased with increasing thickness of discharge electrode and the highest decomposition efficiency was obtained for the electrode diameter of 3m. As the electrode material, decomposition efficiency was in order that tungsten(W), copper(Cu), aluminum (Al). Decomposition of CFC-12 in the reference gas of $N_2$ showed the highest efficiency among three reference gases, and then the effect of reference gas on the decomposition efficiency decreased in order of air and $O_2$. The optimum power for the maximum decomposition efficiency was 25.3W for CFC.

• Journal of Welding and Joining
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• 제27권1호
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• pp.65-70
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• 2009

Ir-192 radiation sealed sources are widely employed to the therapeutic applications as well as the non-destructive testing. Production of Ir-192 sources requires a delicate but robust welding technique because it is employed in a high radioactive working environment. A GTA(Gas Tungsten Arc) welding technique is currently well established for this purpose. However, this welding method requires a frequent replacement of the electrode, which results in the delay of the production to take a preparatory action such as to isolate the radiation sources from the working place before getting access to the welding machine. Hence, a resistance welding technique is considered as an alternative method of the GTA welding technique. The advantages of resistance welding are high welding speed and high-rate production. Also it has very long life of electrode comparing to GTA welding. In this study, the resistance welding system and proper welding conditions were established for sealing Ir-192 source capsule. As a results of various experiments, it showed that electrode displacement can be employed as a indicator to predict welding quality. We proposed two mathematical models(linear and curvilinear) to estimate electrode displacement with process parameters such as applied force, welding current and welding time by using regression analysis method. Predicting results of both linear and curvilinear model were relatively good agreement with experiment.

• Journal of Welding and Joining
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• 제28권4호
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• pp.73-80
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• 2010

In this work, the effect of welding variables on weldability of gas tungsten arc(GTA) welding was investigated with experimental analysis for a commercial pure(CP) titanium (Grade.1). The GTA welding tests on sheet samples with 0.5mm in thick were carried out at different process variables such as arc length, welding speed and electrode shape. In order to search an optimum arc length with full penetration, bead- on-plate welding before butt-welding were performed with different arc length conditions. From the bead- on-plate welding results, the optimum condition considering arc stability and electrode loss was obtained in the arc length of 0.8mm. Butt-welding tests based on the arc length of 0.8mm were carried out to achieve the optimum conditions of welding speed and electrode shape. Optimum conditions of welding speed and electrode shape were suggested as 10 mm/s and truncated electrode shape, respectively. It was successfully validated by the microstructural observation, tensile tests, micro-hardness tests and formability tests.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.820-823
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• 2000

The characteristics of wire deflection, surface roughness and roundness were observed on changing discharge time for electrical discharge machining(EDM) of tungsten carbide in various conditions of thickness. The wire deflection was decreased as increasing discharge time and wire tension, the gap of deflection was decreased after thickness 60mm and discharge time of 6$\mu\textrm{s}$ due to the changing from fundamental mode to vibration mode. The deflection is the smallest at the water specific resistivity of 7.5 kΩ ㆍcm. The deflection is found to be decreased as increasing dwell time, and the result is due to the vibration of the pressure and the amount of the dielectric. The component of copper(Cu) and zinc(Zn), which is the main material of wire electrode, was observed for rough wire-cutting EDM of STD-11. This phenomena is found to be decreased as the number of EDM is increased. But it will be improved by changing the material and the shape of wire. The roundness of middle is found to be worse than that of upper and it is increased as the thickness of material is increased.

• 한국진공학회지
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• 제13권4호
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• pp.182-188
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• 2004

이전의 연구에서의 소스 형태는 전기화학적 방법으로 에칭된 텅스텐 선에 코일형태의 히터를 부착한 것으로 액체금속을 직접 가열하는 방법이었다. 이전의 모델에서는 액체금속을 가열하는 과정에서 코일형태의 히터에 대한 과다한 전력소모가 발생함으로써 본 연구에서는 코일형태의 히터를 대체할 수 있는 새로운 방법을 제시하고 그의 특성을 연구하였다. Pre-etching된 250$\mu\textrm{m}$의 텅스텐 선을 7mm 단위로 절단, 이를 갈륨저장소로 만든 형태이다. 가열방식은 직접방식으로 갈륨을 저장소에 적재(loading)하는 과정과 빔의 안정도가 이전의 방법보다 더욱 향상되었음을 본 연구의 결과를 통해 볼 수 있다.