• Title/Summary/Keyword: Triple Layer

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Thermal Compression of Copper-to-Copper Direct Bonding by Copper films Electrodeposited at Low Temperature and High Current Density (저온 및 고전류밀도 조건에서 전기도금된 구리 박막 간의 열-압착 직접 접합)

  • Lee, Chae-Rin;Lee, Jin-Hyeon;Park, Gi-Mun;Yu, Bong-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.102-102
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    • 2018
  • Electronic industry had required the finer size and the higher performance of the device. Therefore, 3-D die stacking technology such as TSV (through silicon via) and micro-bump had been used. Moreover, by the development of the 3-D die stacking technology, 3-D structure such as chip to chip (c2c) and chip to wafer (c2w) had become practicable. These technologies led to the appearance of HBM (high bandwidth memory). HBM was type of the memory, which is composed of several stacked layers of the memory chips. Each memory chips were connected by TSV and micro-bump. Thus, HBM had lower RC delay and higher performance of data processing than the conventional memory. Moreover, due to the development of the IT industry such as, AI (artificial intelligence), IOT (internet of things), and VR (virtual reality), the lower pitch size and the higher density were required to micro-electronics. Particularly, to obtain the fine pitch, some of the method such as copper pillar, nickel diffusion barrier, and tin-silver or tin-silver-copper based bump had been utillized. TCB (thermal compression bonding) and reflow process (thermal aging) were conventional method to bond between tin-silver or tin-silver-copper caps in the temperature range of 200 to 300 degrees. However, because of tin overflow which caused by higher operating temperature than melting point of Tin ($232^{\circ}C$), there would be the danger of bump bridge failure in fine-pitch bonding. Furthermore, regulating the phase of IMC (intermetallic compound) which was located between nickel diffusion barrier and bump, had a lot of problems. For example, an excess of kirkendall void which provides site of brittle fracture occurs at IMC layer after reflow process. The essential solution to reduce the difficulty of bump bonding process is copper to copper direct bonding below $300^{\circ}C$. In this study, in order to improve the problem of bump bonding process, copper to copper direct bonding was performed below $300^{\circ}C$. The driving force of bonding was the self-annealing properties of electrodeposited Cu with high defect density. The self-annealing property originated in high defect density and non-equilibrium grain boundaries at the triple junction. The electrodeposited Cu at high current density and low bath temperature was fabricated by electroplating on copper deposited silicon wafer. The copper-copper bonding experiments was conducted using thermal pressing machine. The condition of investigation such as thermal parameter and pressure parameter were varied to acquire proper bonded specimens. The bonded interface was characterized by SEM (scanning electron microscope) and OM (optical microscope). The density of grain boundary and defects were examined by TEM (transmission electron microscopy).

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The Effect of Coordinate Rotation on the Eddy Covariance Flux Estimation in a Hilly KoFlux Forest Catchment (경사진 KoFlux 산림유역에서 에디공분산 플럭스 산출에 미치는 좌표회전의 효과)

  • Yuan, Renmin;Kang, Min-Seok;Park, Sung-Bin;Hong, Jin-Kyu;Lee, Dong-Ho;Kim, Joon
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.9 no.2
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    • pp.100-108
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    • 2007
  • The Gwangneung KoFlux supersite, located in a rugged mountain region, is characterized by a low wind speed due to a mountain-valley circulation and rolling terrain. Therefore, it is essential to understand the effect of coordinate rotation on flux measurements by the eddy-covariance method. In this paper, we review the properties of three orthogonal coordinate frames (i.e., double, triple, and planar fit rotations) and apply to flux data observed at the Gwangneung supersite. The mean offset of vertical wind speed of sonic anemometer was inferred from the planar fit (PF) coordinate rotation, yielding the diurnal variation of about $\pm0.05ms^{-1}$. Double rotation $(\bar{v}=\bar{w}=0)$ produced virtually the same turbulent fluxes of heat, water, and $CO_2$ as those from the PF rotation under windy conditions. The former, however, resulted in large biases under calm conditions. The friction velocity, an important scaling parameter in the atmospheric surface layer, was more sensitive to the choice of coordinate rotation method.

Properties of Soil Suppressiveness to Cucumber Wilt, caused by Fusarium oxysporum f. sp. cucumerinum Owen (오이 덩굴쪼김병의 발병(發病)을 억제(抑制)하는 토양(土壤)의 특성(特性)에 관(關)하여)

  • Park, Chang-Seuk;Cho, Yong-Sup
    • Korean journal of applied entomology
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    • v.24 no.2 s.63
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    • pp.85-95
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    • 1985
  • It has been tried to find effective biological control measures involved in nature of soil suppressiveness to fusarium wilt of cncumber caused by Fusarium oxysporum f. sp. cucumerinum Owen. Total 28 soil samples were obtained from Jinju, Haman, Namji, Milyang and Suncheon vinyl house area. The disease response of test soil was quantified in terms of DI50 value which caculated from log-probit transformation of diseases response curves. Soils designated 5 from Jinju, 7 from Suncheon, 22 from Namji were recognized as suppressive to fusarium wilt of cucumber. This suppressiveness was completely nullified after autoclave. The disease suppressiveness of tested soil did not indicate any consistency according to either chemical property or texture of soil. Conidial germination, induction and germination of chlamydospore were markedly inhibited in supprerssive soil compared to those in intermediate or conducive soils, however, mycelial lysis did not appear to have direct relationship with disease suppressiveness of given soil. Population density of fluorescent Pseudomonads and Bacillus spp. in the soil originated from different degree of suppressiveness were not different significantly but the number of lytic bacterial plaques measured by triple layer agar method was remarkably higher in suppressive soil than that in intermediate or conducive soil.

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Efficacy of Antagonistic Bacteria for Biological Control of Rhizoctonia Blight (Large patch) on Zoysiagrass (잔디 갈색퍼짐병(Large patch)의 생물학적 방제를 위한 길항 미생물의 선발과 효력 검정)

  • Jung, Woo-Chul;Shin, Taek-Su;Kim, Bong-Su;Im, Jae-Seong;Lee, Jae-Ho;Kim, Jin-Won
    • Research in Plant Disease
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    • v.14 no.1
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    • pp.43-50
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    • 2008
  • Rhizoctonia blight (large patch) caused by Rhizoctonia solani AG2-2 is one of the major diseases on zoysiagrass in golf courses. In this study, anatgonistic bacteria to R. solani AG2-2 were selected in vitro tests using confrontation bioassay and triple layer agar diffusion method. The most active bacteria, Bacillus subtilis CJ-9 were tested for controlling large patch in pots. Relative Performance Indies (RPI) was used as a criterion for the selection of potential biocontrol agent. B. subtilis CJ-9 showed resistance to major synthetic agrochemicals used in golf course. In field tests at golf course, B. subtilis CJ-9 was more effective in suppression of large patch severity and population development of R. solani AG2-2 in soil than chemical fungicides. B. subtilis CJ-9 could be an alternative to chemical fungicides for eco-friendly management of large patch on zoysiagrass.

Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2013 (설비공학 분야의 최근 연구 동향 : 2013년 학회지 논문에 대한 종합적 고찰)

  • Lee, Dae-Young;Kim, Sa Ryang;Kim, Hyun-Jung;Kim, Dong-Seon;Park, Jun-Seok;Ihm, Pyeong Chan
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.26 no.12
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    • pp.605-619
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    • 2014
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.