• 제목/요약/키워드: Transmission electronic microscope

검색결과 66건 처리시간 0.021초

탄소나노튜브를 이용한 전도성 페이스트 (Carbon Nanotube Incoporated Conductive Pastes)

  • 오영석;서대우;김영진;최재붕;백승현
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1908-1912
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    • 2008
  • Conductive polymers, prepared by mixing electrically conductive fillers with a suitable polymeric formulation, are widely used in applications such as interconnecting materials for high density electronic packaging. However, resins of conductive pastes used as binders and vehicles are generally nonconductive, so that they may prevent the electrical contact between conductive fillers and reduce electron transmission. In this study, we improved conductivity of silver paste by the incorporation of cabon nanotubes. It is important to achieve homogeneous dispersion of CNTs to act as reinforcements efficiently in matrix. We carried out acid treatment on nanotubes for their homogeneous dispersion in silver/conducting polymer matrix. The dispersion states of nanotubes were characterized by raman spectra and filed emission scanning electron microscope. The electrical resistivity of CNTs incorporated silver paste was also measured by 4-point probe method.

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Ga$_2$O$_3$ 나노물질 합성에 관한 연구 (The study on the synthesise of Ga$_2$O$_3$ nanomaterials)

  • 이종수;박광수;노태용;성만영;김상식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.13-17
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    • 2002
  • Ga$_2$O$_3$ nanomaterials were synthesized from mechanically ground GaN powders with thermal annealing Ga$_2$O$_3$ nanobelts were farmed in a nitrogen atmosphere, while Ga$_2$O$_3$ nanoparticles were formed inan oxygen atmosphere. The structural properties of the Ga$_2$O$_3$ nanomaterials were investigated by X-ray diffractometer (XRD) and high-resolution transmission eleotron microscope (HRTEM). The study of field emission scanning electron microscopy (FESEM) on the microstructures of nanomaterials revealed that the nanobelts are with the range of about 10∼200nm width and 10∼50nm thickness, and that nanoparticles are with the range of about 20∼50nm radius. On the basis of XRD and HRTEM data, we determined that the nanobelts grow toward a direction perpendicular to the (010) lattice plane and that they are enclosed by facets of the (10T) and (101) lattice planes. The formation of the nanobelts may be described by the vapor-solid(VS) mechanism, and the supersaturation device of gaseous phase may play an important role in the formation of Ga$_2$O$_3$ nanomaterials.

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Electrical Properties of Metal - Insulator- Metal Diode for AM-LCD Driving

  • Kim, Jang-Kwon;Lee, Myung-Jae;Kim, Dong-Sik;Chung, Kwan-Soo
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2002년도 ITC-CSCC -2
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    • pp.1125-1128
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    • 2002
  • Tantalum pentoxide (Ta$_2$O$\sub$5/) is a candidate for use in metal-insulator-metal diode in switching devices for active-matrix liquid-crystal displays. The MIM diode with very low threshold voltage and perfect symmetry was fabricated. High quality Ta$_2$O$\sub$5/ thin films were obtained by using an anodizing method. Rutherford backscattering spectroscopy, transmission electron microscope observations, auger electron spectroscopy, ellipsometry measurements, and electrical measurements, such as current - voltage(I-V) measurements were performed to investigate Ta$_2$O$\sub$5/ films and their reliability and indicated that the obtained TaOx thin films were reliable Ta$_2$O$\sub$5/ films for the applications. Furthermore, in this paper, we discuss the effects of top-electrode metals and annealing conditions. The conduction mechanism of the leakage current and the symmetry characteristics related to the Schottky emission and Poole-Frankel effect are also discussed using the results of electrical measurements and conduction barrier theory.

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중성자를 이용한 GaN박막과 GaN 나노와이어의 핵전환 도핑 (A study on GaN thin film and GaN nanowire doped with neutron-transmuted isotopes)

  • 강명일;김현석;이종수;김상식;한현수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.41-45
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    • 2003
  • Impurities transmuted in GaN thin film and GaN nanowires after neutron irradiation are studied in this work. The structural properties of GaN nanowires were shown using by Transmission Electron Microscope(TEM). Transmuted impurities that are expected to be doped into GaN thin film and GaN nanowires are then confirmed by photoluminescence(PL). Transmuted atom in GaN materials is Ge atom, Ge-related peaks in GaN thin film lead to emit at 2.9eV, 2.25eV. But emission bands at 2.9eV, 2.25eV are not shown in PL spectra of GaN nanowires. Our experimental results are expected to give deep impact on nano-material doping technology for the achievement of the fabrication of nano-devices.

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기계적으로 연마한 GaN 분말로부터 열처리 분위기를 달리한 $\beta$-$Ga_2$$O_3 나노벨트 및 나노입자의 합성 (Synthesis of $\beta$-$Ga_2$$O_3 Nanobelts and Nanoparticles from Mechanically Ground GaN Powders with Different Thermal Annealing Atmospheres)

  • 김병철;선규태;박광수;임기주;노태용;남산;성만영;김상식
    • 한국전기전자재료학회논문지
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    • 제14권12호
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    • pp.965-971
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    • 2001
  • $\beta$-Ga$_2$O$_3$ nanobelts and nanoparticles were synthesized from mechanically ground GaN powders with thermal annealing in a nitrogen atmosphere and an oxygen atmosphere, respectively. The study of field emission scanning electron microscopy (FESEM) on the microstructures of nanomaterials revealed that the nanobelts synthesized in the nitrogen atmosphere are with the range of 20~1000nm width and 10 ~100nm thickness, and that nanomaterials are nanoparticles with 20~50nm radius obtained by thermal annealing in an oxygen atmosphere. The crystal structure of the $\beta$-Ga$_2$O$_3$ nanobelts and nanoparticles was in this study investigated by X-ray diffractometer (XRD) and high-resolution transmission electron microscope (HRTEM). The formation processes of the nanobelts and nanoparticles will be discussed in this paper.

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TeOx(x=1.42)/SiO2로 구성된 광가변적인 1차원 광자결정 연구 (A Study on the Photo Reversible One-dimensional Photonic Crystals Composed of TeOx(x=1.42)/SiO2)

  • 공헌;여종빈;이현용
    • 한국전기전자재료학회논문지
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    • 제28권2호
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    • pp.99-103
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    • 2015
  • One-dimensional photonic crystals (1D PCs) were fabricated by RF sputtering technique on p-Si (100), and fused quartz substrates. The 1D PCs structures consisted of $TeO_x$ (x=1.42), and $SiO_2$ with the difference refractive index. In order to estimate the effect on a defect level within 1D PCs structures, samples were prepared with both normal, and defect mode. The structural and optical properties were confirmed by Scanning electron microscope (SEM), and Ultraviolet visible near-infrared spectrophotometer (UV-VIS-NIR) respectively. In the case of a 1D PC normal mode without defect layer, it had a photonic band gap (PBG) in the near infrared (NIR) region. In the case of a 1D PC defect mode with defect layer, it had a sharp transmission band owing to a defect level, and moved towards the longer wavelength after exposing He-Cd laser with a wavelength of 325 nm.

Analysis of Surface Tracking of Micro and Nano Size Alumina Filled Silicone Rubber for High Voltage AC Transmission

  • Loganathan, N.;Chandrasekar, S.
    • Journal of Electrical Engineering and Technology
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    • 제8권2호
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    • pp.345-353
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    • 2013
  • This paper discusses the experimental results in an effort to understand the tracking and erosion resistance of the micro and nano size $Al_2O_3$ filled silicone rubber (SIR) material which has been studied under the AC voltages, with ammonium chloride as a contaminant, as per IEC 60587 test procedures. The characteristic changes in the tracking resistance of the micro and nano size filled specimens were analyzed through leakage current measurement and the eroded masses were used to evaluate the relative erosion and tracking resistance of the composites. The fundamental, third and fifth harmonic of the leakage current during the tracking study were analyzed using moving average current technique. It was observed that the harmonic components of leakage current show good correlation with the tracking and erosion resistance of the material. The thermogravimetry-derivative thermo gravimetric (TG-DTG) studies were performed to understand the thermal degradation of the composites. The physical and chemical studies were carried out by using scanning electron microscope (SEM), Energy Dispersive X-ray analysis (EDAX) and Fourier Transform Infra-red (FTIR) Spectroscopy. The obtained result indicated that the performance of nano filled SIR was better than the micro filled SIR material when the % wt. of filler increased.

Electron Microscope Analyses of Self-aligned HgTe Nanocrystallites Induced by Controlled Precipitation Technique

  • Lee, Man-Jong
    • Transactions on Electrical and Electronic Materials
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    • 제3권3호
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    • pp.8-13
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    • 2002
  • Controlled precipitation of quasi-binary semiconductor system is newly proposed as an effective and reliable technique for the formation of well-defined and crystallographically aligned semiconductor nanostructures. Using HgTe-PbTe quasi-binary semiconductor system, self-aligned HgTe nanocrystallites distributed three dimensionally within PbTe matrix were successfully formed by the simple three step heat treatment process routinely found in age hardening process of metallic alloys. Examination of the resulting nano precipitates using conventional transmission electron microscopy (CTEM) and high resolution TEM (HRTEM) reveals that the coherent HgTe precipitates form as thin discs along the (100) habit planes making a crystallographic relation of {100}$\_$HgTe///{100}$\_$PbTe/ and [100]$\_$HgTe///[100]$\_$PbTe/. It is also found that the precipitate undergoes a gradual thickening and a faceting under isothermal aging up to 500 hours without any noticeable coarsening. These results, combined with the extreme dimension of the precipitates (4-5 nm in length and sub-nanometer in thickness) and the simplicity of the formation process, leads to the conclusion that controlled precipitation is an effective method for preparing desirable quantum-dot nanostructures.

코발트 오믹층의 적용에 의한 콘택저항 변화 (Effects of Cobalt Ohmic Layer on Contact Resistance)

  • 정성희;송오성
    • 한국전기전자재료학회논문지
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    • 제16권5호
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    • pp.390-396
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    • 2003
  • As the design rule of device continued to shrink, the contact resistance in small contact size became important. Although the conventional TiN/Ti structure as a ohmic layer has been widely used, we propose a new TiN/Co film structure. We characterized a contact resistance by using a chain pattern and a KELVIN pattern, and a leakage current determined by current-voltage measurements. Moreover, the microstructure of TiN/ Ti/ silicide/n$\^$+/ contact was investigated by a cross-sectional transmission electron microscope (TEM). The contact resistance by the Co ohmic layer showed the decrease of 26 % compared to that of a Ti ohmic layer in the chain resistance, and 50 % in KELYIN resistance, respectively. A Co ohmic layer shows enough ohmic behaviors comparable to the Ti ohmic layer, while higher leakage currents in wide area pattern than Ti ohmic layer. We confirmed that an uniform silicide thickness and a good interface roughness were able to be achieved in a CoSi$_2$ Process formed on a n$\^$+/ silicon junction from TEM images.

Hf metal layer의 두께에 따른 $HfO_2$/Hf/Si MOS 커패시터의 전기적 특성 (Electrical Characterization of $HfO_2$/Hf/Si MOS Capacitor with Thickness of Hf Metal Layer)

  • 배군호;도승우;이재성;이용현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.9-10
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    • 2007
  • In this paper, Thin films of $HfO_2$/Hf were deposited on p-type wafer by Atomic Layer Deposition(ALD). And we studied the electrical characterization of $HfO_2$/Hf/Si MOS capacitor depending on thickness of Hf metal layer. $HfO_2$ films were deposited using TEMAH and $O_3\;at\;350^{\circ}C$. Samples were then annealed using furnace heating to $500^{\circ}C$. The MOS capacitor of round-type was fabricated on Si substrates. Through TEM(Transmission Electron Microscope), XRD(X-ray Diffraction), capacitance-voltage(C-V) and current-voltage(I-V) analysis, the role of thin Hf metal layer for the better $HfO_2$/Si interface property was investigated.

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