• Journal of the Korean institute of surface engineering
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• v.47 no.2
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• pp.68-74
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• 2014

The seed step-coverage enhancement process (SSEP) using Pd/Cu/PVP colloids was investigated for the filling of through silicon via (TSV) without void. TEM analysis showed that the Pd/Cu nano-particles were well dispersed in aqueous solution with the average diameter of 6.18 nm. This Pd/Cu nano-particles were uniformly deposited on the substrate of Si/$SiO_2$/Ti wafer using electrophoresis with the high frequency Alternating Current (AC). After electroless Cu deposition on the substrate treated with Pd/Cu/PVP colloids, the adhesive property between deposited Cu layer and substrate was evaluated. The Cu deposit obtained by SSEP with Pd/Cu/PVP colloids showed superior adhesion property to that on Pd ion catalyst-treated substrate. Finally, by implementing the SSEP using Pd/Cu/PVP colloids, we achieved 700% improvement of step coverage of Cu seed layer compared to PVD process, resulting in void-free filling in high aspect ratio TSV.

• Korean Journal of Environmental Agriculture
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• v.23 no.2
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• pp.85-91
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• 2004

The objective of this study is to determine the optimum conditions of operational parameters using factorial design for phenol degradation in photocatalytic oxidation reactors. Factorial design is widely used to select the dominant factors and their ranges in experiments involving several factors where it is necessary to study the effect of factors on a response. The effects of initial concentration of phenol, intensity of UV light and surface area of catalyst on phenol degradation were investigated. Two levels were considered in this study so that the experiment was a $2^3$ factorial design with three replicates. The experimental results show that an increase in initial concentration of phenol from 5 to 50 mg/L intensity of UV light from 5,000 to $20,000\;{\mu}W/cm^2$, and surface area of catalyst from 740 to $2,105\;cm^2$ enhanced the phenol degradation rate by an average of 1.86, 1.79, and 2.10 mg/L hr, respectively. Interaction effects do not appear to be as large on the phenol degradation rate as the main effects of single factors. The optimum working condition for photocatalytic oxidation reactors, despite the higher three factors the better removal rate, is the highest surface area or catalyst.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.12
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• pp.230-236
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• 2019

Recently, issues related to the quality of concrete have continuously resulted in surface quality problems, such as the exfoliation of concrete surfaces due to the cost reduction of cement and poor quality fine aggregate, scaling of surfaces caused by laitance, and plastic shrinkage cracks. Prompted by social issues, the application of a photo catalyst to road structures is being attempted to solve the environmental problems caused by fine dust and automobile exhaust. In this study, chemical admixtures were developed to improve the surface quality of concrete and to apply and distribute titanium dioxide in nanoscale sizes to provide basic data for the development of a photocatalyst-curing agent. As a result of the experiment, silicon and silane were reviewed as a raw material as a curing agent to develop a high performance curing agent with better film performance than conventional curing agents because they could form a film quickly on a fresh concrete surface. The distributed stability of the ultrasonic disperser showed the best performance through an outdoor test for four weeks to review the dispersion measures for the application of nanomaterials.