• Title/Summary/Keyword: TiN Layer

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Bone remodeling effects of Korean Red Ginseng extracts for dental implant applications

  • Kang, Myong-Hun;Lee, Sook-Jeong;Lee, Min-Ho
    • Journal of Ginseng Research
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    • v.44 no.6
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    • pp.823-832
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    • 2020
  • Background: The formation of a nanotube layer on a titanium nanotube (N-Ti) plate facilitates an active reaction between bone cells and the material surface via efficient delivery of the surface materials of the dental implant into the tissues. Studies have reported that Korean Red Ginseng extracts (KRGEs) are involved in a variety of pharmacological activities: we investigated whether implantation with a KRGE-loaded N-Ti miniimplant affects osteogenesis and osseointegration. Methods: KRGE-loaded nanotubes were constructed by fabrication on pure Ti via anodization, and MC3T3-E1 cells were cultured on the N-Ti. N-Ti implants were subsequently placed on a rat's edentulous mandibular site. New bone formation and bone mineral density were measured to analyze osteogenesis and osseointegration. Results: KRGE-loaded N-Ti significantly increased the proliferation and differentiation of MC3T3-E1 cells compared with cells on pure Ti without any KRGE loading. After 1-4 weeks, the periimplant tissue in the edentulous mandibular of the healed rat showed a remarkable increase in new bone formation and bone mineral density. In addition, high levels of the bone morphogenesis protein-2 and bone morphogenesis protein-7, besides collagen, were expressed in the periimplant tissues. Conclusion: Our findings suggest that KRGE-induced osteogenesis and osseointegration around the miniimplant may facilitate the clinical application of dental implants.

Fabrication process of embedded passive components in MCM-D (MCM-D 기판 내장형 수동소자 제조공정)

  • 주철원;이영민;이상복;현석봉;박성수;송민규
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.4
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    • pp.1-7
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    • 1999
  • We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

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Improvement of the Low-Speed Friction Characteristics of a Hydraulic Piston Pump by PVD-Coating of TiN

  • Hong Yeh-Sun;Lee Sang-Yul;Kim Sung-Hun;Lim Hyun-Sik
    • Journal of Mechanical Science and Technology
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    • v.20 no.3
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    • pp.358-365
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    • 2006
  • The hydraulic pump of an Electro-hydrostatic Actuator should be able to quickly feed large volume of oil into hydraulic cylinder in order to reduce the response time. On the other hand, it should be also able to precisely dispense small amount of oil through low-speed operation so that the steady state position control error of the actuator can be accurately compensated. Within the scope of axial piston type hydraulic pumps, this paper is focused on the investigation how the surface treatment of their cylinder barrel with TiN plasma coating can contribute to the reduction of the friction and wear rate of valve plate in the low-speed range with mixed lubrication. The results showed that the friction torque of the valve plate mated with a TiN coated cylinder barrel could be reduced to 22% of that with an uncoated original one when load pressure was 300 bar and rotational speed 100 rpm. It means that the torque efficiency of the test pump was expected to increase more than 1.3% under the same working condition. At the same time, the wear rate of the valve plate could be reduced to $40\sim50%$.

Effects of TiN bufer on field emission properties of conical-type tungsten tips with carbon nanotubes coated (원뿔형 CNT-W 팁의 TiN 완충막 유무에 따른 전계방출 특성)

  • Kim, Young-Kwang;Yun, Sung-Jun;Kim, Won;Kim, Jong-Pil;Park, Chang-Kyun;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1271-1272
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    • 2007
  • Experimental results regarding to the structural properties of carbon nanotubes (CNTs) and the field-emission characteristics of CNT-coated tungsten (W) tips are presented. CNTs are successfully grown on conical-type W-tips by inductively coupled plasma-chemical vapor deposition (ICP-CVD) with or without inserting a TiN-buffer layer prior to the formation of Ni catalysts. For all the CNTs grown, their nanostructures, morphologies, and crystalline structures are analyzed by FESEM, HRTEM, and Raman spectroscopy. Furthermore, the emission properties of CNT-based field-emitters are characterized to estimate the maximum current density and the threshold voltage. The results obtained in this study indicate that the emission current level of the CNT-emitter without using a TiN buffer is desirable for the application of micro-focused x-ray systems.

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Microstructure and Dielectric Properties of (Sr.Ca)$TiO_3$-based Ceramics Exhibiting nonlinear Characteristics (비선형 특성을 갖는 (Sr.Ca)$TiO_3$계 세라믹의 미세구조 및 유전특성)

  • 최운식;강재훈;김진사;김충혁;조춘남
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.406-409
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    • 2001
  • In this paper, the microstructure and the dielectric properties of the Sr$_{1-x}$ Ca$_{x}$TiO$_3$(0$\leq$$\chi$$\leq$0.2) -based grain boundary layer ceramics were investigated. The specimens were sintered from 142$0^{\circ}C$ to 152$0^{\circ}C$ for 4hr. in $N_2$ gas. The 2nd phase formed by thermal diffusing from the surface lead to a very high apparent dielectric constant, $\varepsilon$$_{r}$>50000. The structural properties of the specimens were studied by X-ray diffraction and SEM, EDX. All specimens exhibited cubic structure. Increasing content of Ca, the peak intensity were decreased.ed.d.

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Study on the Dielectric and Voltage-Current Properties of $(Sr{\cdot}Ca)TiO_3$-based Ceramics ($(Sr{\cdot}Ca)TiO_3$계 세라믹의 유전 및 V-I 특성에 관한 연구)

  • Kang, Jae-Hun;Choi, Woon-Shik;Kim, Tae-Wan;Song, Min-Jong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.09a
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    • pp.72-75
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    • 2001
  • In this paper, the $Sr_{1-x}Ca_{x}TiO_{3}(0{\leq}x{\leq}0.2)$ 2)-based grain boundary layer ceramics were fabricated to measured dielectric properties and voltage-current properties. The sintering temperature and time were $1420\sim1520^{\circ}C$, 4hours, in $N_{2}$ gas, respectively. The structural and the dielectric properties were investigated by SEM, X-ray, HP4194A and K6517. The 2nd phase formed by thermal diffusion from the surface lead to a very high apparent dielectric constant, $\varepsilon_r$ > 50000. X-ray diffraction patterns exhibited cubic structure for all specimens. Increasing content of Ca, the peak intensity were decreased.ﱇﶖ⨀ਆᘍ܀㘱㔮㠹㬅K䍄乍

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Improvement of Thermal Stability of Nickel Silicide Using Co-sputtering of Ni and Ti for Nano-Scale CMOS Technology

  • Li, Meng;Oh, Sung-Kwen;Shin, Hong-Sik;Lee, Hi-Deok
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.13 no.3
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    • pp.252-258
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    • 2013
  • In this paper, a thermally stable nickel silicide technology using the co-sputtering of nickel and titanium atoms capped with TiN layer is proposed for nano-scale metal oxide semiconductor field effect transistor (MOSFET) applications. The effects of the incorporation of titanium ingredient in the co-sputtered Ni layer are characterized as a function of Ti sputtering power. The difference between the one-step rapid thermal process (RTP) and two-step RTP for the silicidation process has also been studied. It is shown that a certain proportion of titanium incorporation with two-step RTP has the best thermal stability for this structure.

High-Temperature Oxidation of Ti Containing Stainless Steel in O2-N2 Atmosphere

  • Onishi, Hidenori;Saeki, Isao;Furuichi, Ryusaburo;Okayama, Toru;Hanamatsu, Kenko;Shibayama, Tamaki;Takahashi, Heishichiro;Kikkawa, Shinichi
    • Corrosion Science and Technology
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    • v.3 no.4
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    • pp.140-147
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    • 2004
  • High temperature oxidation of Fe-19Cr and Fe-19Cr-0.2Ti alloys is studied at 1173-1373 K in 16.5 kPa $O_2$ - balances $N_2$ atmosphere aimed at clarifying the effect of titanium addition. Oxidation rate of Fe-19Cr alloy was accelerated with titanium. For both alloys chromium rich $(Fe,\;Cr)_2O_3$ was formed as a major oxidation product. On Fe-19Cr-0.2Ti alloy, a thin layer composed of spinel type oxide and titanium oxide was also formed and an internal oxidation of titanium was observed. Titanium was concentrated at the oxide surface and internal oxidation zone but a small amount of titanium was also found in the intermediate corundum type $(Fe,\;Cr)_2O_3$ layer. Crystals of corundum type $(Fe,\;Cr)_2O_3$ formed on Fe-19Cr alloy are coarse but that formed on Fe-19Cr -0.2Ti alloys were fine and columnar. Reason for the difference in oxidation kinetics and crystal structure will be discussed relating to the distribution of aliovalent titanium in corundum type $(Fe,\;Cr)_2O_3$ oxide layer.