• Title/Summary/Keyword: TiN Layer

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Flexible Piezoelectric Nanocomposite Generator Devices based on BaTiO3 Dendrite Nanostructure (티탄산바륨 덴드라이트 나노구조체 기반 플렉서블 압전 나노발전소자)

  • Bae, Soo Bin
    • Journal of the Korea Institute of Military Science and Technology
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    • v.18 no.2
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    • pp.139-145
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    • 2015
  • In this paper, the flexible piezoelectric nanocomposite generator(NCG) device based on $BaTiO_3$ nanostructures was fabricated via simple and low-cost spin coating method. The $BaTiO_3$ nanostructures synthesized by self-assembly reaction showed dendrite morphologies. To produce the piezoelectric nanocomposite(p-NC layer) which acts as an electric energy source in NCG device, the piezoelectric nanopowders($BaTiO_3$) were dispersed in polydimethylsiloxane(PDMS). Sequently, the p-NC layer was inserted in two dielectric layer of PDMS; these layers enabled the NCG device flexibility as well as durability prohibiting detachment(exfoliation) for significantly mechanical bending motions. The fabricated NCG device shows average maximum open circuit voltage of 6.2 V and average maximum current signals of 300 nA at 20 wt% composition of $BaTiO_3$ nanostructures in p-NC layer. Finally, the flexible energy harvester generates stable output signals at any rate of frequency which were used to operate LCD device without any external energy supply.

Mechanical Properties and Fatigue Characteristics of CrN Coated Ti-6Al-4V alloy (CrN 박막처리된 Ti-6Al-4V 합금의 기계적 성질과 피로특성)

  • Park, Yong-Gwon;Baeg, Chang-Hyung;Wey, Myeong-Yong
    • Korean Journal of Materials Research
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    • v.12 no.8
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    • pp.669-675
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    • 2002
  • CrN film coated by AIP method, improved the mechanical properties (Hardness, Roughness, wear and fatigue) of Ti-6Al-4V alloy. The properties were studied using GXRD, XPS, Hardness, Roughness, wear and fatigue testers. CrN thin film thickness was about 7.5$\mu\textrm{m}$ and grew with (111) orientation. Hardness of CrN thin film was very high (Hv 1390) and roughness of the surface layer was greatly improved (Ra=0.063$\mu\textrm{m}$) compared with matrix alloy (Ra=0.321$\mu\textrm{m}$). Such changes of hardness and roughness could be contributed to improving the wear resistance and fatigue life. Striation like pattern with dimples and voids, a typical fatigue fracture mode, was observed throughout the specimen.

Effect of Coating Time on the Property of TiN-Coated Layer of High Speed Steel by Arc Ion Plating (AIP 코팅법에서 코팅 시간이 고속도강의 TiN 코팅층 성질에 미치는 영향)

  • Kim, H.J.;Joun, M.S.
    • Transactions of Materials Processing
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    • v.15 no.5 s.86
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    • pp.366-372
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    • 2006
  • The effect of coating time in arc ion plating on surface properties of the TiN-coated high speed steel(SKH51) is presented in this paper. Surface roughness, micro-hardness, coated thickness, atomic distribution of TiN and adhesion strength are measured for various coating times. It has been shown that the coating time has a deep influence on the micro-hardness, the coated thickness, the atomic distribution of Ti and the adhesion strength of the SKH51 steels but that it has little influence on the surface roughness.

Effects of post-annealing on the characteristics of MOCVD-Cu/TiN/Si structures by the rapid thermal process (급속열처리에 의한 MOCVD-Cu/TiN/Si 구조의 후열처리 특성)

  • 김윤태;전치훈;백종태;김대룡;유형준
    • Journal of the Korean Vacuum Society
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    • v.6 no.1
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    • pp.28-35
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    • 1997
  • Effects of rapid thermal annealing on the characteristics of Cu films deposited from the (hfac)Cu(VTMS) precursor and on the barrier properties of TiN layers were studied. By the post-annealing, the electrical characteristics of Cu/TiN and the microstructures of Cu films were significantly changed. The properties of Cu films were more sensitive to the annealing temperature than the annealing time. Sheet resistance started to increase above $400^{\circ}C$, and the interreaction between Cu and Ti and the oxidation of Cu layer were observed above $600^{\circ}C$. The grain growth of Cu with the (111) preferred orientation was found to be most pronounced at $500^{\circ}C$. It revealed that the optimum annealing conditions for MOCVD-Cu/PVD-TiN structures to enhance the electrical characteristics without degradation of TiN barriers were in the range of $400^{\circ}C$.

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Wear properties of (Ti$_{1-x}$Cr$_{x}$)N coatings deposited by ion-plating method (이온 플레이팅법으로 제조한 (Ti$_{1-x}$Cr$_{x}$)N 박막의 마모특성에 관한 연구)

  • 이광희;박찬홍;이정중
    • Journal of Surface Science and Engineering
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    • v.34 no.2
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    • pp.125-134
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    • 2001
  • ($Ti_{1-x}$ $Cr_{x}$ )N coatings were deposited by an ion-plating method in a reactor with two separate metal sources, Ti and Cr. Ti was evaporated using an electron beam, while Cr evaporation was carried out by resistant heating. The Ti and Cr concentrations in the coatings were controlled by the Ti and Cr evaporation ratio. The coating hardness increased with increasing the Cr content(x) and showed a maximum value of 6,000 HK at around x=0.8. The critical load of the coatings, measured by the scratch test, was around 30 N. The wear resistance properties of the ($Ti_{1-x}$$Cr_{ x}$)N coatings were evaluated using a CSEM pin-on-disk type tribometer. A Cr-steel ball as well as a SiC ball, which had hardness values of 590 HK and 2,600 HK respectively, were used as the pin. After the wear test, the surface morphology, roughness and the concentration of the coatings were investigated, with the main focus being on the effect of wear debris and the transferred layer on the wear behavior.

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TiN Surface-Alloying of Ti-6Al-4V Alloy by CO2 Laser (CO2 레이저에 의한 Ti-6Al-4V 합금(合金)의 TiN 표면합금화(表面合金化))

  • Park, S.D.;Lee, O.Y.;Song, K.H.
    • Journal of the Korean Society for Heat Treatment
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    • v.8 no.1
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    • pp.32-43
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    • 1995
  • Ti-6Al-4V alloy are widely used in chemical and aircraft industries for their good corrosion resistance and high strength to weight ratio. Surface alloying of Ti alloy by $CO_2$ laser is able to produce few hundred micrometers thick TiN surface-alloyed layer with high hardness on the substrate very simplely by injecting reaction gas($N_2$) into a laser-generated melt pool and adjust the hardness to the specific requirements of the individual application by changing of laser processing parameters. This research has been investigated the effect of such parameters on TiN surface-alloying of Ti-6Al-4V alloy by $CO_2$ laser. The maximum hardness of TiN surface-alloyed zone waw obtained by injecting 100% $N_2$ gas and it was decreased as the amount of $N_2$ gas in Ar and $N_2$ gas mixture was decreased. As scanning speed was increased, the hardness and depth of TiN surface-alloyed zone was decreased at constant laser power. The surface hardness after double scanning laser treatment is higher than that of single scanning. At constant laser power, the surface roughness is increased after the surface alloying if laser scanning speed is decreased.

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Surface characteristics and biocompatibility of bioinert nitrides ion plated titanium implant (생불활성 질화물 이온도금된 티타늄 임프란트의 표면특성 및 생체적합성)

  • Chang, Kap-Sung;Kim, Heung-Joong;Park, Joo-Cheol;Kim, Byung-Ock;Han, Kyung-Yoon
    • Journal of Periodontal and Implant Science
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    • v.29 no.1
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    • pp.209-231
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    • 1999
  • Even though titanium(Ti) and its alloys are the most used dental implant materials, there are some problems that Ti wears easily and interferes normal osteogenesis due to the metal ions. Ti coated with bioactive ceramics such as hydroxyapatite has also such problems as the exfoliation or resorption of the coated layer, Recent studies on implant materials have been proceeding to improve physical properties of the implant substrate and biocompatibility of the implant surfaces. The purpose of the present study was to examine the physical property and bone tissue compatibility of bioinert nitrides ion plated Ti, Button type specimens(14mm in diameter, 2.32rrun in height) for the abrasion test and cytotoxicity test and thread type implants(3.75mm in diameter, 6mm in length) for the animal experiments were made from Ti(grade 2) and 316LVM stainless steel. Ti specimens were ion plated with TiN, ZrN by the low temperature arc vapor deposition, and the depth profile of the TiN/Ti, ZrN/Ti ion plated surface was examined by Auger Electron Spectroscopy. Three kind of button type specimens .of TiN/Ti, ZrN/Ti and Ti were used for abrasion test, and HEPAlClC7 cells and CCD cells were cultivated for 4 days with the specimens for cytotoxicity test. Thread type implants of TiN/Ti, ZrN/Ti, Ti, 316LVM were implanted on the femur of 6 adult dogs weighing 10kg-13kg. Two dogs were sacrified for histological examination after 45 days and 90 days, and four dogs were sacrified for the removal torque test of the implant') after 90 days. The removal torque force was measured by Autograph (Shimadzu Co., AGS-1000D series, Japan). Abrasion resistance of TiN/Ti was the highest, and that of ZrN/Ti and Ti were followed. The bioinert nitride ion plated Ti had much better abrasion resistance, compared with Ti, In the cytotoxicity test, the number of both cells were increased in all specimens, and there were no significant difference in cytotoxic reaction among all groups (p>0.1), In histological examination, 316LVM showed the soft tissue engagement in interface between the implant and bone, but the other materials after 45 days noted immature new bone formation in the medullary portion along the implant surface, and those after 90 days showed implant support by new bone formation in both the cortical and the medullary portion, The removal torque force of Tilv/Ti showed significantly higher than that of Ti(p(O,05). The difference in removal torque force between TiN/Ti and ZrN/Ti was not significant(p>0.05), and that of 316LVM was lowest among all groups(p<0.05). These results suggest that bioinert nitrides ion plated Ti can resolve the existing problems of Ti and bioactive ceramics, and it may be clinically applicable to human.

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Effect of Stuffing of TiN on the Diffusion Barrier Property (II) : Cu/TiN/Si Structure (TiN의 충진처리가 확산방지막 특성에 미치는 영향(II) : Cu/TiN/Si 구조)

  • Park, Gi-Cheol;Kim, Gi-Beom
    • Korean Journal of Materials Research
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    • v.5 no.2
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    • pp.169-177
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    • 1995
  • The diffusion barrier property of 100-nm-thick titanium nitride (TiN) film between Cu and Si was investigated using sheet resistance measurements, etch-pit observation, x-ray diffractometry, Auger electron spectroscopy, and transmission electron microscopy. The TiN barrier fails due to the formation of crystalline defects (dislocations) and precipitates (presumably Cu-silicides) in the Si substrate which result from the predominant in-diffusion of Cu through the TiN layer. In contrast with the case of Al, it is identified that the TiN barrier fails only the in-diffusion of Cu because there is no indication of Si pits in the Si substrate. In addition, it appears that the stuffing of TiN does not improve the diffusion barrier property in the Cu/TiN/Si structure. This indicates that in the case of Al, the chemical effect that impedes the diffusion of Al by the reaction of Al with $TiO_{2}$ which is present in the grain boundaries of TIN is very improtant. On the while, in the case of Cu, there is no chemical effect because Cu oxides, such as $Cu_{2}O$ or CuO, is thermodynamically unstable in comparison with $TiO_{2}$. For this reason, it is considered that the effect of stuffing of TiN on the diffusion barrier property is not significant in the Cu/ TiN/Si structure.

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Friction transition diagram considering the effects of oxide layer formed on contact parts of TiN coated steel ball

  • Cho, C.W.;Lim, J.S.;Lee, Y.Z.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.179-180
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    • 2002
  • In this study. the friction transition diagram based on the effect of oxide layer formation on contact surface between TiN coated steel ball and uncoated steel disk was constructed. From the diagram. it can be seen that as the contact load increases. the contact number of cycle at the beginning of oxide layer formation decreases linearly and as the coating thickness increases and the surface roughness of steel disk increases under same contact load. that increases. For the coated ball specimen, a AISI 52100 steel ball was used and AISI 1045 steel was used for the disk counter part.

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