• 제목/요약/키워드: TiN/Ti Multilayer

검색결과 70건 처리시간 0.037초

Y 치환에 따른 Pb(Ni1/3Nb2/3)-PbZrO3-PbTiO3 세라믹의 압전특성 및 적층형 압전 액츄에이터 응용 (Piezoelectric Properties of Y-Substituted Pb(Ni1/3Nb2/3)-PbZrO3-PbTiO3 Ceramics and Their Application to Multilayer Piezoelectric Actuators)

  • 권정호;최문석;이대수;정연학;김일원;송재성;정순종;이재신
    • 한국전기전자재료학회논문지
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    • 제17권2호
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    • pp.184-189
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    • 2004
  • The effects of $Y_2$ $O_3$-substitution on the piezoelectric properties of Pb[(N $i_{1}$3/N $b_{2}$3/)$_{0.15}$(Z $r_{1}$2/ $Ti_{1}$2/)$_{0.85}$] $O_3$ceramics were investigated. It was found that $Y^{3+}$ ions incorporate into Pb-sites of the ceramics, resulting in a increased lattice anisotropy and formation of Pb-vacancies. As a result, an orthorhombic-tetragonal phase transition was induced when $\chi$>0.005. At the morphotropic phase boundary of x=0.005, piezoelectric constants( $k_{p}$, $k_{33}$, and $d_{33}$) showed maximum values of 0.53, 0.58, and 350pC/N, respectively. A 30-layer actuator fabricated with the above material showed a maximum strain of 0.12% under 100V DC bias.

초경엔드밀 적용 표면처리 조성별 마모특성 영향 평가 (The Evaluation of Wear Characteristics Depending on Components of Surface Treatment for Cemented Carbide Endmill)

  • 윤일채;김동배;윤국태;윤인준;이지형;고태조
    • 한국정밀공학회지
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    • 제31권6호
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    • pp.513-519
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    • 2014
  • For depth machining in die and mold, Electrical Discharge Machining (EDM) is used generally. To make deep hole and deep shape efficiently, cemented carbide endmill for depth machining is necessary. For this purpose, cemented carbide endmill was designed using design of experiment (DOE). To improve cutting performance, endmill was coated with multilayer surface treatment, TiAlCrSiN and TiAlCrN, for higher wear resistance. In order to evaluate the endmill, Transverse Rupture Strength (TRS) test was tried for investigating the relationship between surface treatment and strength in endmill body. Scratch test was also used for measuring adhesion force of each surface treatment. To evaluate hardness of surface treatment, Atomic Force Microscope (AFM) analysis was carried out. Wear test was executed for characteristics of each surface treatment in high temperature. Consequently, TiAlCrSiN was superior to the TiAlCrN coating in case of high temperature environment such as cutting.

Piezoelectric and Dielectric Properties of Low Temperature Sintering Pb(Zn1/2W1/2)O3-Pb(Mn1/3Nb2/3)O3-Pb(Zr,Ti)O3 Ceramics

  • Yoo, Ju-Hyun;Lee, Kab-Soo;Lee, Su-Ho
    • Transactions on Electrical and Electronic Materials
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    • 제9권3호
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    • pp.91-95
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    • 2008
  • In this study, in order to develop the composition ceramics for low loss multilayer piezoelectric actuator application, $Pb(Zn_{1/2}W_{1/2})O_3-Pb(Mn_{1/3}Nb_{2/3})O_3-Pb(Zr,Ti)O_3$ (abbreviated as PZW-PMN-PZT)ceramics according to the amount of $MnO_2$ addition were fabricated using two-stage calcinations method. And also, their dielectric and piezoelectric properties were investigated. At the 0.2 wt% $MnO_2$ added PZW-PMN-PZT ceramics sintered at $930^{\circ}C$, density, electromechanical coupling factor $k_p$, dielectric constant ${\varepsilon}_r$, piezoelectric $d_{33}$ constant and mechanical quality factor $Q_m$ showed the optimum value of $7.84g/cm^3$, 0.543, 1,392, 318.7 pC/N, 1,536, respectively for low loss multilayer ceramics actuator application.

화재감지센서 활용을 위한 BaT$iO_3$계 PTC 서미스터의 특성에 관한 연구 (A Study on the Characterstics of the BaT$iO_3$PTC Thermistor for Fire Detection Sensor)

  • 추순남;최명규;백동현;박정철
    • 한국화재소방학회논문지
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    • 제16권4호
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    • pp.15-19
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    • 2002
  • BaTiO$_3$계 PTC 서미스터의 조성개발을 위해 (Ba$_{0.95-x}$S $r_{0.05}$C $a_{x}$)$TiO_3$-$0.01TiO_2$-$0.01SiO_2$-$\alpha$MnCO_3$-$\beta$Nb_2$o_{5}$와 같은 실험조성식을 설정한 후 최적 조건하에서 적층형 PTC시편을 제작하여 실험하였다. 실험 결과, 시편제조시의 최적 소결온도와 냉각속도는 각각 $1350^{\circ}C$-2 hour및 $100^{\circ}C$/h였다. 또한 상온저항을 낮추는 효과가 있는 Dopant로서의 Ca와 Mn 그리고 피크(peak)저항값을 높일 수 있는 Nb를 Ca:5 mol%, Mn:0.08 mol%, Nb:0.18 mol%로 함으로써 비교적 낮은 상온저항과 높은 피크(peak)저항 및 양호한 온도계수 특성이 나타났으며, 화재감지센서로서의 활용 가능성을 확인하였다.다.다.

Pb(Ni1/3Nb2/3)O3 치환에 따른 저온소결 Pb(Mn1/3Nb2/3)O3-Pb(Ni1/3Nb2/3)O3-Pb(Zr1/2Ti1/2)O3 세라믹스의 압전 및 유전 특성 (Piezoelectric and Dielectric Characteristics of Low Temperature Sintering Pb(Mn1/3Nb2/3)O3-Pb(Ni1/3Nb2/3)O3-Pb(Zr1/2Ti1/2)O3 Ceramics according toPb(Ni1/3Nb2/3)O3 Substitution)

  • 류주현;이상호;백동수
    • 한국전기전자재료학회논문지
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    • 제19권1호
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    • pp.35-39
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    • 2006
  • In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by sintering with $Li_2CO_3-Na_2CO_3$ as sintering aids at $950^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of PNN substitution. With increasing PNN substitution, dielectric constant(${\epsilon}_r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased to $12 mol\%$ PNN substitution and then showed a tendency to decrease rapidly With increasing PNN substitution, crystal structure changed from tetragonal to rhombohedral at $12 mol\%$ PNN substitution and then secondary phase was appeared and its intensity was increased. At the $12 mol\%$ PNN substituted PMN-PZT composition ceramic sintered at $950^{\circ}C$, density, kp, $d_{33}$ and Qm showed the optimum value of $7.79 g/cm^3$, 0.599, 419 pC/N, and 894, respectively for multilayer piezoelectric actuator application.

소결조제 ZnO 첨가에 따른 저온소결 0.20Pb(Zn1/3Nb2/3)O3-0.80Pb(Zr0.48Ti0.52)O3 세라믹스의 유전 및 압전특성 (Dielectric and Piezoelectric Characteristics of Low Temperature Sintering 0.20Pb(Zn1/3Nb2/3)O3-0.80Pb(Zr0.48Ti0.52)O3 Ceramics with the Addition of Sintering Aid ZnO)

  • 류주현;이유형;김도형;이일하;권준식;백동수
    • 한국전기전자재료학회논문지
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    • 제21권2호
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    • pp.126-130
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    • 2008
  • In this study, in order to develop low loss multilayer piezoelectric actuator, PZN-PZT ceramics were fabricated using $Li_2CO_3,\;Bi_2O_3$, CuO and ZnO as sintering aids, their structural, piezoelectric and dielectric characteristics were investigated according to the amount of ZnO addition, At the sintering temperature of $870^{\circ}C$, the density, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\epsilon}_r$) and piezoelectric constant($d_{33}$) of 0.4 wt% ZnO added specimen (sintered at $870^{\circ}C$) showed the optimum value of $7.812g/cm^3$, 0.535, 916, 1399, 335 pC/N respectively. Taking into consideration above piezoelectric properties of the specimen sintered at low temperature, it was concluded that PZN-PZT ceramics using 0.4 wt% ZnO as additive showed the optimum characteristics as the composition ceramics for low loss multilayer piezoelectric actuator application.

Low-Firing Pb(Zr,Ti)O3-Based Multilayer Ceramic Actuators Using Ag Inner Electrode

  • Han, Hyoung-Su;Park, Eon-Cheol;Lee, Jae-Shin;Yoon, Jong-Il;Ahn, Kyoung-Kwan
    • Transactions on Electrical and Electronic Materials
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    • 제12권6호
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    • pp.249-252
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    • 2011
  • We investigated the low firing of $Li_2CO_3$ added $0.2Pb(Mg_{1/3}Nb_{2/3})O_3$ - 0.3Pb($Fe_{1/2}Nb_{1/2}$) - $0.5Pb(Zr_{0.475}Ti_{0.525})O_3$ (PMN-PFN-PZT) ceramics and multilayer actuators (MLAs) using Ag inner electrodes. It was found that 0.1 wt% $Li_2CO_3$ was quite effective in lowering the sintering temperature of PMN-PFN-PZT ceramics from $1,100^{\circ}C$ down to $900^{\circ}C$ without deteriorating their piezoelectric ceramics ($d_{33}$ = 425 pC/N and $k_p$ = 61.9%). However, excess $Li_2CO_3$ up to 0.3 wt% brings about unwanted problems such as the formation of a $LiPbO_2$ secondary phase and subsequent degradation in the piezoelectric properties. Using 0.1 wt% $Li_2CO_3$ added PMN-PFN-PZT ceramics, MLAs with Ag inner electrodes were successfully fabricated, resulting in a normalized strain of 580 pm/V at an electric field of 1.5 kV/mm.