• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1397-1399
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• 2002

Effects of bottom electrode materials (Al, Cu, Ti, and Mo), included in film bulk acoustic resonators (FBARs), on the orientation of piezoelectric AlN thin films and the frequency response characteristic of resonators were investigated. The texture coefficient (TC) for (002) orientation, crystallite size, full width half maximum (FWHM), and surface roughness of deposited AlN films were measured for the various bottom electrodes. The return tosses estimated from the frequency responses of fabricated resonators were also compared. Experimental results showed that the difference of lattice constant and thermal expansion coefficient between the bottom electrode and the AlN film were the most important factors for achieving a high performance resonator.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.70-70
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• 2017

TSV(through silicon via)는 긴 종횡비를 갖는 패턴에 Cu, Ta, Ti을 높은 conformality를 갖도록 증착하는 공정이다. Magnetron cathode의 자석 배열 설계는 target 물질 종류에 따라서 multitrack, water drop type등이 있으며 target과 substrate 사이의 공간에 플라즈마를 형성시켜서 기판에 이온 입사량을 늘린 후 기판 바이어스를 이용하여 이온 충돌, re-sputtering을 통한 재증착 과정을 통해 치밀한 금속 박막을 연속적으로 형성할 수 있도록 하는 것이 목적이다. 또한 sputter가 사용되고 있는 분야에 효율을 증대시키고, 증착되는 막의 품질향상을 위해 UBMS를 사용하고 있으며, 산업에 사용되어 지는 300 mm wafer용 시스템은 제작비가 약 10억 원 정도 소요되며 다양한 테스트를 진행하기 위해선 많은 비용이 소요된다. 따라서 비용과 소요시간을 줄여 다양한 테스트를 위해 소규모 플라즈마 시스템을 설계하게 되었다. 61 l/sec 터보 분자 펌프와 다이아프램 펌프를 기초로한 TMP station에 2.75 인치 CF flange가 장착된 6 way cross를 main 챔버로 활용하고, 작은 size의 unbalanced magnetron cathode를 제작, 장착한 다음 6 way cross 주변에 전자석을 적절히 배치하여 300 mm wafer system에서와 동일한 물리적 현상을 테스트 할 수 있도록 하였다. Fig1. (a) UBMS system의 사진을 나타내었고, (b)에는 6 way cross 내부에 발생된 플라즈마의 형상을 나타내었다. 전원 장치는 Advanced Energy사의 MDX-1.5K DC power supply를 사용하였고, 방전 전압 - 전류 관계의 가스 압력에 따른 plasma 현상과 magnetron 배율에 따른 plasma 현상 그리고 전자석에 의한 영향을 주로 관찰 하였다.

• Journal of the korean society of oceanography
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• v.32 no.3
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• pp.112-119
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• 1997

Coastal sediments collected near the Youngkwang Nuclear Power Plant were analysed for major(Al$_2$O$^_3$, Fe$^_2$O$^_3$, MgO, CaO, Na$^_2$O, K$^_2$O, TiO$^_2$, MnO), trace (Ba, Sr, V, Co, Cr, Cu, Ni, Zn, Pb) metal, and P$^_2$O$^_5$ contents. The composition of bulk metals from most stations fits within the range as those in the average crustal and sedimentary rocks, suggesting that the anthropogenic perturbation of these components is insignificant. The abundance and distribution of total contents for the majority of metals in the surface sediment could be explained by the grain size and were associated with mud (<63 ${\mu}$m) contents. However, distributions of Ca, K, Sr and Ba did not have any significant association with the sediment grain size. This may be due to the geochemical coherence among these metals in certain minerals abundant in coarse grained fractions. The distribution of Pb appears to be partly affected by the contribution from aerosol fallout. Using the R'-mode factor analysis, we show that the variance of the metal contents could be explained by four factors which account for 93.7% of the total variance. It appears that texturally controlled and/or sorting factors influenced by fine fraction are the most dominant factors which determine the relative abundance and distribution of metals in the study area.

• Transactions of Materials Processing
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• v.18 no.6
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• pp.500-507
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• 2009

Tensile deformation behavior with different strain rate was investigated. $Zr_{56.2}Ti_{13.8}Nb_{5.0}Cu_{6.9}Ni_{5.6}Be_{12.5}$(bulk metallic glass alloy possessed crystal phase which was called $\beta$-phase of dendrite shape, mean size of $20{\sim}30{\mu}m$ and occupied 25% of the total volume) was used in this study. Maximum tensile strength was obtained as 1.74GPa at strain rate $10^2s^{-1}$ and minimum strength was found to be 1.6GPa at $10^{-1}s^{-1}$. And then, maximum plastic deformation occurred at the strain rate of $5{\times}10^{-2}s^{-1}$ and represented 1.75%, though minimum plastic deformation showed 0%. In the specific range of strain rate, relatively higher plastic deformation and lower ultimate tensile strength were found with lots of shear bands. The fractographical observation after tensile test indicated that vein like pattern on the fracture surface was well developed especially in the above range of strain rate.

• Journal of the Mineralogical Society of Korea
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• v.24 no.3
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• pp.245-252
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• 2011

콜롬비아는 안데스 산맥의 북단에 위치하며 NS 방향의 단층대를 기준으로 지질 환경의 차이가 크다. 단층대를 기준으로 동부지역은 원생대 변성암류와 이를 피복하는 고생대 변성퇴적암류가 주로 분포하며, 서부 지역은 고생대 퇴적암류, 중생대 화성암류, 제 3 기 화산양류 및 퇴적암류가 주로 분포한다. 지화학이상대는 6개 그룹으로 분류되며, 철 (Fe), 귀금속(Au, Ag, Pt), 기초금속(Cu, Pb, Zn), 희유금속(Sn, Cr, Co, Mn, Mo, Ni, Nb, W, V, Mg, Ti, Be, REE, Ga, Zr, Hf, Se, Te, Ta, Cd, In, Li 등) 빛 핵원료자원인 U 이상대로 구성된다. 콜롬비아의 주요 부존자원은 석탄, 니켈, 금 및 에메랄드이다. 에메랄드, 석탄 및 니켈은 세계적인 매장규모와 생산량을 보인다. 콜롬비아는 탐사가 거의 수행되지 않은 지역이 전 국토의 49%에 달해 광물부존 잠재성은 현재보다 크게 높을 것으로 보인다. 따라서 최근 콜롬비아와의 광물자원 협력이 강화되고 있는 시점에서 미탐사 지역을 대상한 공동탐사를 지화학 이상대가 확인된 지역을 중심으로 수행하여 신규광체를 확보하고, 광물자원 협력을 강화함으로써 공동개발 여건을 마련할 필요가 있다고 판단된다.

• Journal of Technologic Dentistry
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• v.28 no.2
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• pp.321-329
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• 2006

The popularity of Ni-Cr-Mo based metal alloys for metal-ceramic crown have increased recently because of low price, superior yield strength and rigidity. the use of these alloys give them the potential advantage of thinner copping with the required rigidity for long span bridges. The purpose of this study was to assess the microstructures and mechanical properties of Ni-Cr-Mo-(Si,Al,Nb,Zr,Ti.Cu,Mm) based Alloys not containing beryllium(Be) related toxic effects. The abtained results indicated that as-cast these specimen alloys showed compositional and microstructural differences, and mechanical properties values of Ni69Cr20Mo5Si2Al4 alloy among these specimen alloys was found to be superior to those of commercial Ni-Cr based alloy using in market place today.

• Journal of Electrochemical Science and Technology
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• v.8 no.2
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• pp.124-132
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• 2017

The performance of electrolytic processes using copper and catalyzed electrodes for enhanced nutrient removal with various catalyzers and combinations of electrodes was evaluated. The catalyzed electrodes removed more ammonia nitrogen than the copper electrode, but higher ammonia removal was achieved using a Pt/Ti anode. On the other hand, electrolysis using the Pt/Cu anode consumed less energy and cost less. During electroreduction, nitrate was better removed by a pair of copper electrodes than by the catalyzed electrodes. During electrolysis of synthetic wastewater, ammonia removal not only increased owing to direct oxidation at the anode, but was also influenced by indirect oxidation at the cathode. Platinum-coated copper and titanium cathodes actively produced oxidizers and thus removed more ammonia than a pure metal cathode. Although phosphorus was removable irrespective of the type of catalyzer, electrocoagulation using the copper electrode achieved complete removal of phosphorus in a period of less than 10 min.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.353-354
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• 2009

Tensile deformation behavior with different strain rate was investigated. $Zr_{56.2}Ti_{13.8}Nb_{5.0}Cu_{6.9}Ni_{5.6}Be_{12.5}$ (bulk metallic glass alloy possessed crystal phase which was called $\beta$-phase of dendrite shape, mean size of $20{\sim}30{\mu}m$ and occupied 25% of the total volume) was used in this study. Maximum tensile strength was obtained as 1.74Gpa at strain rate of $10^2/s$ and minimum strength was found to be 1.6GPa at $10^{-1}/s$. And then, maximum plastic deformation occurred at the strain rate of $5{\times}10^{-2}/s$ and represented 1.75%, though minimum plastic deformation showed 0%. In the specific range of strain rate, relatively higher plastic deformation and lower ultimate tensile strength were found with lots of shear bands. The fractographical observation after tensile test indicated that vein like pattern on the fracture surface was well developed especially in the above range of strain rate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.407-407
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• 2008

무기EL 디스플레이는 고체재료에 전계를 가했을 때 발광하는 현상을 이용한소자로서, 급속도로 발전을 거듭하고 있으나, 유전체층에 강한전계를 가하여 발광하여야 하므로 낮은 Breakdown voltage와 효율의 한계로 인하여 휘도가 낮고 풀 컬러화 디스플레이 등 의 응용에는 적용되고 있지 못하는 실정이다. 본 연구에서는 강유전체 Perovskite 구조를 가지는 ABO3 물질 중 PMN(Lead Magnesium niobate) 과 PZT (Lead Zirconate titanate) 후막을 제조하여 Inorganic EL(Electro Luminance)에 적용하고 소자의 광전특성을 평가하였다. 소자에 사용된 기판은 고온소성에 알맞은 알루미나(Al2O3)기판을 채택 하였으며, 그 위 하부전극으로는 고온소성에 따른 화학적 안정성이 우수한 Au전극을 Screen Printing 하였다. 제조 되어진 PMN후막 페이스트는 PMN(Pb(Mg1/2 Nb2/3)O3) + Glass Frit(Pb-Zn-B) + BaTiO3(99.99%) 로 합성되었으며 하부전극위에 인쇄하였다. 그 다음 PZT sol-gel을 Spin coating으로 도포 하였다. 형광체로 ZnS:Cu.Cl 을 Screen Printing을로 형성하였으며, 평탄화를 위하여 유기물 충을 Screen Printing 공정으로 성막 하였다. 상부전극으로는 DC sputter로 ITO를 증착하여 EL소자 완성 후 Spectro - Chroma meter로 소자특성을 측정하였다. 평탄화를 통한 유기물층에 변화되는 Capacitance를 Oscilloscope로 전압 전류 pulse의 변화에 따른 opto-electronic 특성을 평가하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.4
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• pp.218-222
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• 2017

In this paper, in order to develop excellent composition ceramics for a piezoelectric energy- harvesting device, we synthesized $0.99(Na_{0.52}\;K_{0.443}\;Li_{0.037})(Nb_{0.883}\;Sb_{0.08}\;Ta_{0.037})O_3$ + $0.01(Sr_{0.95}Ca_{0.05})TiO_3$ + $0.3\;wt%\;Bi_2O_3\;+\;0.3\;wt%\;Fe_2O_3\;+\;0.3\;wt%\;CuO$ (abbreviated as NKN-SCT) ceramics with different sintering times, using the ordinary solid-state reaction method. The effect of sintering time on the microstructure and piezoelectric properties was investigated. The ceramics with the sintering time of 7 h have the optimum values of the piezoelectric constant ($d_{33}$), piezoelectric voltage constant ($g_{33}$), planar piezoelectric coupling coefficient (kp), mechanical quality factor (Qm), and dielectric constant (${\varepsilon}r$): $d_{33}=314[pC/N]$, $g_{33}=20.07[10^{-3}mV/N]$, kp = 0.442, Qm = 93, ${\varepsilon}r=1,768$, all being suitable for a piezoelectric energy-harvesting device.