• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.2
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• pp.1-7
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• 2005

In order to determine the wear Properties of PECVD ceramic coatings, wear process was evaluated using the coated pin of Falex Tribosystem. Coating materials deposited wear the TiC, TiN and Ti(CN). An experimental process was established to determine the tribological characteristics of friction and wear behavior under the variation of applied load, temperature and sliding distance by the Falex test machine. The experimental results indicate that TiN coating compared with TiC coating on e materials have e excellent friction and wear characteristics. However TiC coating compared i친 TiN coatings have a low friction coefficient with steel and good thermal stability, and Ti(CN) has the excellent anti-wear properly as well as the superiority of extreme pressure property. Compound coating compared wi simple coatings show improved tribological characteristics.

• Journal of the Korean institute of surface engineering
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• v.31 no.5
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• pp.278-285
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• 1998

Alloys of Ti-15Mo-5Zr-3Al(wt%) were oxidized in air between 700 and $900^{\circ}C$. It was found that the oxidation resistance is much better than that of either commercially available pure Ti-6Al-4V(wt%) alloys. The oxide scales were primarily composed of thick Ti-ox-ides which were formed by the inward diffusion of oxygen from the atmosphere. At higher temperatures a thin $\alpha$-$Al_2O_3$ layer was formed on Ti-oxides owing to the outward diffusion of Al from the base alloys. Molybdenum, the noblest metal among the alloy components, was predominantly present behind the oxide-substrate interface. Zirconium, an oxygen active metal, was present at both the oxide layer and the substrate.

• 대한공업교육학회지
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• v.31 no.1
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• pp.200-210
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• 2006

This C-ring test, normally employed for evaluating susceptibility to stress-corrosion cracking, was determined to be a suitable small scale test to evaluate PWHT(Post-Weld Heat Treatment) cracking susceptibility. This test is possible to incorporate an actual weld, to introduce a notch into the coarse grained HAZ(Heat Affected Zone), to load the coarse grained HAZ any level of stress ad, most importantly, since the C-ring is an approximately constant strain type test, the stress decreases with time at temperature in a manner similar to that of an actual steel weldment. The procedure employed in making the C-ring was presented in the experimental procedure section, however, several points deserve further discussion. The walls of the weld groove are made along radial lines form the center of th var in order to obtain an HAZ which is oriented perpendicular to the walls of the machined C-ring. Therefore, the plane of maximum stress will be aligned through the HAZ and, therefore, crack propagation will not be forced to deviate form the plane of maximum stress in order to remain in the coarse grained HAZ as is the case with the Y groove test.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.163-163
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• 1999

MOSFET, MESFET 그리고 MODFET는 Logic ULSIs, high speed ICs, RF MMICs 등에서 중요한 역할을 하고 있으며, 그것의 gate electrode, contact, interconnect 등의 물질로는 refractory metal을 이용한 CoSi2, MoSi2, TaSi2, PtSi2, TiSi2 등의 효과를 얻어내고 있다. 그중 TiSi2는 비저항이 가장 낮고, 열적 안정도가 좋으며 SAG process가 가능하므로 simpler alignment process, higher transconductance, lower source resistance 등의 장점을 동시에 만족시키고 있다. 최근 소자차원이 scale down 됨에 따라 TiSi2의 silicidation 과정에서 C49 TiSi2 phase(high resistivity, thermally unstable phase, larger grain size, base centered orthorhombic structure)의 출현과 그것을 제거하기 위한 노력이 큰 issue로 떠오르고 있다. 여러 연구 결과에 따르면 PAI(Pre-amorphization zimplantation), HTS(High Temperature Sputtering) process, Mo(Molybedenum) implasntation 등이 C49를 bypass시키고 C54 TiSi2 phase(lowest resistivity, thermally stable phase, smaller grain size, face centered orthorhombic structure)로의 transformation temperature를 줄일 수 있는 가장 효과적인 방법으로 제안되고 있지만, 아직 그 문제가 완전히 해결되지 않은 상태이며 C54 nucleation에 대한 physical mechanism을 밝히진 못하고 있다. 본 연구에서는 증착 시 기판온도의 변화(400~75$0^{\circ}C$)에 따라 silicon 위에 DC/RF magnetron sputtering 방식으로 Ti/Si film을 각각 제작하였다. 제작된 시료는 N2 분위기에서 30~120초 동안 500~85$0^{\circ}C$의 온도변화에 따라 RTA법으로 각각 one step annealing 하였다. 또한 Al을 cosputtering함으로써 Al impurity의 존재에 따른 영향을 동시에 고려해 보았다. 제작된 시료의 분석을 위해 phase transformation을 XRD로, microstructure를 TEM으로, surface topography는 SEM으로, surface microroughness는 AFM으로 측정하였으며 sheet resistance는 4-point probe로 측정하였다. 분석된 결과를 보면, 고온에서 제작된 박막에서의 C54 phase transformation temperature가 감소하는 것이 관측되었으며, Al impuritydmlwhswork 낮은온도에서의 C54 TiSi2 형성을 돕는다는 것을 알 수 있었다. 본 연구에서는 결론적으로, 고온에서 증착된 박막으로부터 열적으로 안정된 phase의 낮은 resistivity를 갖는 C54 TiSi2 형성을 보다 낮은 온도에서 one-step RTA를 통해 얻을 수 있다는 결과와 Al impurity가 존재함으로써 얻어지는 thermal budget의 효과, 그리고 그로부터 기대할 수 있는 여러 장점들을 보고하고자 한다.

• Journal of the Korean institute of surface engineering
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• v.37 no.1
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• pp.1-4
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• 2004

MoS$_2$-Ti films were deposited on SKD-11 tool steel substrate by a D.C. magnetron sputtering system. The influence of deposition parameters on the adhesion of the films was investigated by the scratch test. Crosssection morphology was evaluated using FE-SEM. The plasma etching played an important role on the adhesion of the films. The appropriate etching conditions roughened the surface, resulting In the improved adhesion of the film. The adhesion of the film increased with the interlayer thickness up to 110 nm and then decreased slightly with further increasing of interlayer thickness. The adhesion was highest at a bias voltage of -50 V. Further increase of the bias voltage decreased the film adhesion.

• Transactions of Materials Processing
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• v.18 no.7
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• pp.544-549
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• 2009

This study aimed to elucidate the deformation mechanism during low-temperature superplasticity of fine-grained Ti-6Al-2Sn-4Zr-2Mo-0.1Si alloy in the context of constitutive equation. For this purpose, initial coarse equiaxed microstructure was refined to $2.2{\mu}m$ via dynamic globularization. Globularized microstructure exhibited large superplastic elongations(434-826%) at temperatures of $650-750^{\circ}C$ and strain rate of $10^{-4}s^{-1}$. It was found that the main deformation mechanism of fine-grained material was grain boundary sliding accommodated by dislocation motion with both stress exponent (n) and grain size exponent (p) values of 2. When the alpha grain size, not sub-grain size, was considered to be an effective grain size, the apparent activation energy for low-temperature superplasticity of the present alloy(169kJ/mol) was closed to that of Ti-6Al-4V alloy(160kJ/mol).

• Korean Journal of Materials Research
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• v.23 no.2
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• pp.135-142
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• 2013

The Ti-6Al-4V extra low interstitial (ELI) alloy has been widely used as an orthopedic implant material because of its excellent mechanical properties and biocompatibility. However, it still has many problems, including a high elastic modulus and toxicity of the Al and V elements. Therefore, non-toxic biomaterials with a low elastic modulus need to be developed. A high energy mechanical milling (HEMM) process is introduced to improve the effect of sintering. Rapid sintering of spark plasma sintering (SPS) under pressure was used to make an ultra fine grain of Ti-25 wt.%Nb-7 wt.%Zr-10 wt.%Mo-(10 wt.%CPP) composites with bio-attractive elements for increasing strength. These composites were fabricated by SPS at $1000^{\circ}C$ at 60 MPa using HEMM powders. During the sintering process, $CaTiO_3$, TixOy, and CaO were formed because of the reaction between Ti and CPP. The effects of CPP content on the physical and mechanical properties of the sintered Ti-Nb-Zr-Mo-CPP composites were investigated. The biocompatibility and corrosion resistance of the Ti-Nb-Zr-Mo alloys were improved by the addition of CPP.

• Journal of the Korean Ceramic Society
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• v.35 no.4
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• pp.333-338
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• 1998

Mechanical properties of polycrystalline{{{{ {Ti }_{3 }{SiC}_{2 } }} were investigated. Hertzian indentation test using a spher-ical indenter was used to study elastic and plastic behavior in{{{{ {Ti }_{3 }{SiC}_{2 } }} A high ratio of hardness to elastic mo-dulus indicated that mechanical properties of{{{{ {Ti }_{3 }{SiC}_{2 } }} are somehow similar to those of metals. Indentation stress-strain curve deviated from an ideal elastic limit indicating exceptional plasticity in this material. De-formation zones were formed below the contact as well as around the contact area. Intragrain slip would ac-count for high plasticity.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.10
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• pp.1674-1682
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• 1997

Fatigue tests were performed to investigate the effect of ceramic coatings as in TiN and TiCN on fatigue crack growth properties of ceramic coated 1Cr-1Mo-0.25V steel with different coating thickness in laboratory air conditions. The experimental results are described with respect to a Paris equation, da/dN=C(.DELTA.K)$^{m}$ , where the crack growth rate of coated specimens provided as similar growth rate as that of the uncoated specimen regardless of coating thickness. Furthermore, it was observed that the type of coating layer had virtually no effect on crack growth rate in the full region of stress intensity factor range. And it was also appeared that the final crack length of TiCN coated specimens was short compared to that of TiN coated, and the substrate specimens, in which it was inferred due to lowering the toughness of coated material from high hardness of TiCN coating layer itself.

• Transactions of the Korean hydrogen and new energy society
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• v.16 no.2
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• pp.122-129
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• 2005

The characteristics of hydrogen storage have been investigated in the Ti-Cr-Mo and Ti-Cr-V ternary alloys with bcc structure. The alloys were melted by arc furnace and remelted 4-5 times for homogeneity. The lattice parameters, microstructures and phases of the alloys were examined by SEM, EDX and XRD, and the Pressure-Composition isotherms of the alloys were measured. From these data the relationship of the maximum and effective hydrogen storage capacities vs. chemical composition, lattice parameter and the radius of tetrahedral site were analyzed and discussed. The results showed that all of these alloy, in the range of the this study, had mainly bcc solid solutions with small amount of Ti segregation due to a lower melting point of Ti compared with other elements. Lattice parameters of the alloys were very near to the atomic average values of lattice parameters of the constituent elements. It was also found that maximum hydrogen storage capacities of the Ti-Cr-Mo alloys increased with increasing Ti content and the radius of tetrahedral site but the effective hydrogen storage capacities decreased after showing the maximum. The hydrogen storage capacities of the Ti-Cr-V alloys were almost same even though the V contens were quite different from alloy to alloy and this could be attributed to the almost same Ti/Cr ratio of the alloys. The maximum effective hydrogen storage capacity of the Ti-Cr-Mo alloys was revealed at Ti content of about 40${\sim}$50 at% and radius of tetrahedral site of 0.43${\sim}$0.45 nm. The Ti-Cr-V alloys showed the hydrogen storage capacities of 3.0 wt% and effective hydrogen storage capacities of 1.5 wt%.