• 대한전기학회논문지
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• 제45권2호
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• pp.235-241
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• 1996

In this paper dielectric and electrostrictive strain properties of (1-y-x)Pb(Mg$_{1/3}$Nb$_{2/3}$)O$_{3}$-PbTiO$_{3}$$-yPbTiO_{3}-xSrTiO_{3}[(1-y-x)PMN-yPT-xST]$ ceramics fabricated by using columbite precursor method have been investigated with the substitution of SrTiO$_{3}$(ST). Dielectric constant of the specimens increased with the increase of ST content up to 5[m/o] and decreased with further substitution of ST. And the pyrochlore phase decreased with the increase of ST content up to 5[m/o] in XRD analysis. The elimination of the pyrochlore phase improved dielectric constants. The electrostrictive strains generated by AC electric field have the highest value at 5[m/o] SrTiO$_{3}$ addition and the hysteresis of strain ranged from 12 to 20[%]. The electrostrictive strain at various temperature investigated in the temperature range of $-50[^{\circ}C]~74[^{\circ}C].$ In higher temperature than phase transition region, it showed paraelectric property which shows very small hystersis.

• 한국재료학회지
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• 제21권8호
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• pp.468-475
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• 2011

[ $LaMeO_3$ ](Me = Cr, Co) powders were prepared using the polymeric precursor method. The effects of the chelating agent and the polymeric additive on the synthesis of the $LaMeO_3$ perovskite were studied. The samples were synthesized using ethylene glycol (EG) as the solvent, acetyl acetone (AcAc) as the chelating agent, and polyvinylpyrrolidone (PVP) as the polymer additive. The thermal decomposition behavior of the precursor powder was characterized using a thermal analysis (TG-DTA). The crystallization and particle sizes of the $LaMeO_3$ powders were investigated via powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and particle size analyzer, respectively. The as-prepared precursor primarily has $LaMeO_3$ at the optimum condition, i.e. for a molar ratio of both metal-source (a : a) : EG (80a : 80a) : AcAc (8a) inclusive of 1 wt% PVP. When the as-prepared precursor was calcined at $700^{\circ}C$, only a single phase was observed to correspond with the orthorhombic structure of $LaCrO_3$ and the rhombohedral structure of $LaCoO_3$. A solid-electrolyte impedance-metric sensor device composed of $Li_{1.5}Al_{0.5}Ti_{1.5}(PO_4)_3$ as a transducer and $LaMeO_3$ as a receptor has been systematically investigated for the detection of NOx in the range of 20 to 250 ppm at $400^{\circ}C$. The sensor responses were able to divide the component between resistance and capacitance. The impedance-metric sensor for the NO showed higher sensitivity compared with $NO_2$. The responses of the impedance-metric sensor device showed dependence on each value of the NOx concentration.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.340-341
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• 2005

Lithium titanium oxide as anode material for energy storage prepared by novel synthesis method. $Li_4Ti_5O_{12}$ based spinel-framework structures are of great interest material for lithium-ion batteries. We describe here $Li_4Ti_5O_{12}$ a zero-strain insertion material was prepared by novel sol-gel method and by high energy ball milling (HEBM) of precursor to from nanocrystalline phases. According to the X-ray diffraction and scanning electron microscopy analysis, uniformly distributed $Li_4Ti_5O_{12}$ particles with grain sizes of 100nm were synthesized. Lithium cells, consisting of $Li_4Ti_5O_{12}$ anode and lithium cathode showed the 173 mAh/g in the range of 1.0 $\sim$ 3.0 V. Furthermore, the crystalline structure of $Li_4Ti_5O_{12}$ didn't transfer during the lithium intercalation and deintercalation process.

• 한국분말재료학회지
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• 제23권4호
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• pp.307-310
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• 2016

$TiOF_2$, which has remarkable electrochemical and optical properties, is used in various applications such as Li-ion batteries, electrochemical displays, and photocatalysts. In addition, it is possible to utilize the template which is allowed to synthesize fluorine doped $TiO_2$ powders with hollow or faceted structures. However, common synthesis methods of $TiOF_2$ powders have some disadvantages such as the use of expensive and harmful precursors and batchtype processes with a limited production scale. In this study, we report a synthetic route for preparing $TiOF_2$ powders by using an inexpensive and harmless precursor and a continuous ultrasonic spray pyrolysis process under a controlled atmosphere to address the aforementioned problems. The synthesized powder has an average size of $1{\mu}m$, a spherical shape, a pure $TiOF_2$ phase, and exhibits a band-gap energy of 3.2 eV.

• 한국세라믹학회지
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• 제39권7호
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• pp.642-648
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• 2002

본 연구에서는 TiCl$_4$를 가수분해 시켜 제조한 비정질의 titanium hydrous gel과 Ba(OH)$_2$.8$H_2O$를 출발물질로 사용하였으며, 반응용매로써 1,4-butanediol과 distilled water를 이용하여 나노 사이즈 BaTiO$_3$분말을 제조하였다. 용매로써 사용된 1,4-butanediol과 distilled water의 부피비에 따라 입자의 크기를 조절할 수 있으며, 습식화학법의 단점이었던 분말의 응집을 최소화 시킬 수 있다. 그리고 22$0^{\circ}C$의 비교적 낮은 반응온도에서 분산성이 우수하고, 입도분포가 좁은 약 50~200nm의 barium titanate 나노 분말을 제조하였다.

• 열처리공학회지
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• 제18권5호
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• pp.281-287
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• 2005

Titanium aluminium nitride((TiAl)N) film is anticipated as an advanced coating film with wear resistance used for drills, bites etc. and with corrosion resistance at a high temperature. In this study, (TiAl)N thin films were deposited both at room temperature and at elevated substrate temperatures of 573 to 773 K by using a two-facing-targets type DC sputtering system in a mixture Ar and $N_2$ gases. Atomic compositions of the binary Ti-Al alloy target is Al-rich (25Ti-75Al (atm%)). Process parameters such as precursor volume %, substrate temperature and Ar/$N_2$ gas ratio were optimized. The crystallization processes and phase transformations of (TiAl)N thin films were investigated by X-ray diffraction, field-emission scanning electron microscopy. The microhardness of (TiAl)N thin films were measured by a dynamic hardness tester. The films obtained with Ar/$N_2$ gas ratio of 1:3 and at 673 K substrate temperature showed the highest microhardness of $H_v$ 810. The crystallized and phase transformations of (TiAl)N thin films were $Ti_2AlN+AlN{\rightarrow}TiN+AlN$ for Ar/$N_2$ gas ratio of 1:3, $Ti_2AlN+AlN{\rightarrow}TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 1:1 and $TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN{\rightarrow}Ti_2AlN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 3:1. The above results are discussed in terms of crystallized phases and microhardness.

• 한국재료학회지
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• 제7권10호
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• pp.884-890
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• 1997

Sputtering 방법을 통해 Si기판 위에 Ti와 TiN박막을 증착하고 저압 반응관내에서 Cu*hfac)(TMVS)를 precursor로 사용 MOCVD Cu박막을 증착하여 Cu/TiN/Ti/Si구조의 다층박막을 제조하였고 이에 대한 열처리 방식 및 분위기 변화 등을 통해 열처리 조건에 따른 Cu 박막의 특성 변화에 대해 조사하였다. 열처리 방식으로는 Cu박막을 형성한 후 공기 중에 노출이 없이 바로 열처리하여 Cu산화물 형성을 억제할 수 있는 in-situ열처리 방식이 유리하고, 열처리 분위기로는 Cu 박막의 표면이나 결정립계 내에 존재하는 Cu 산화물을 환원시켜 줄 수 있는 H$_{2}$(10%)/Ar분위기가 표면평탄화, 결정립 크기 증가 및 비저항 감소측면에서 우수한 특성의 Cu박막을 얻을 수 있음을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.663-663
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• 2013

We prepared Cu oxides, and Ni and Pd-TiO2@SiO2 core-shellnanostructures, and tested their CO oxidation performances by temperature-programmed mass spectrometry. We found the starting temperatures of CO oxidation are around $200^{\circ}C$ and $300^{\circ}C$ for Ni and Pd-TiO2@SiO2 nanostructures, respectively. Cu oxides are cubes with 50~200 nm with, prepared with different concentrations of NaOH and ascorbic acid. For the core-shell structures, we prepared 100 nm SiO2 spheres, first coated the surface with TiO2 precursor, and then coated with Ni and Pd. Their characteristics are further examined by scanning electron microscopy, optical microscope, FT-IR, and UV-Vis absorption spectroscopy.

• 한국분말재료학회지
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• 제6권3호
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• pp.238-245
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• 1999

The preparation of $n-TiO_2$ powder by the Chemical Vapor Synthesis process (CVS) was studied using the liquid metal organic precursor (TTIP). The residence time and the collection methods were considered as main processing variables through the experiments. The CVS equipment consisted of a micropump and a flashvaporizer, a tube furnace and a tubular collection device. The synthesis was performed at $1000^{\circ}C$ with various sets of collection zone. The residence time and the total system pressure were controlled in the range of 3~20 ms and 10 mbar, respectively. Nitrogen adsorption, X-ray diffraction and electron microscopy were used to determine particle size, specific surface area and crystallographic structure. The grain size of the as-prepared $n-TiO_2$ powder was in the range of 2~8 nm for all synthesis parameters and the powder exhibited only little agglomeration. The relationship between particle characteristics and the processing variables is reviewed based on simple growth model.

• 전자공학회논문지A
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• 제33A권10호
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• pp.98-106
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• 1996

A thin film of aluminum for ultra large scale integrated circuits metalization has been deposited on TiN and SiO$_{2}$ substrates by plasma assisted chemical vapor deposition using DMEAA (dimenthylethylamine alane) as a precursor. The effects of plasma on surface topology and growth characteristics were investigated. Thermal CVD Al could not be got continuous films on insulating subsrate such as SiO$_{2}$. However, it was found that Al films could be deposited on SiO$_{2}$ substate without any pretreatments by the hydrogen plasma for pyrolysis of DMEAA. Compared to the thermal CVD, PACVD films showed much better reflectance and resistance on TiN and SiO$_{2}$ substrate. We obtained mirror-like PACVD Al film of 90% reflectance and resistance on TiN and SiO$_{2}$ substrates. We obtained mirror-like PACVD Al film of 90% reflectance on TiN substrate. Excellent conformal step coverage was obtained on submicron contact holes ;by the PACVD blanket deposition.